JPH03283415A - Differential transformer - Google Patents
Differential transformerInfo
- Publication number
- JPH03283415A JPH03283415A JP2080931A JP8093190A JPH03283415A JP H03283415 A JPH03283415 A JP H03283415A JP 2080931 A JP2080931 A JP 2080931A JP 8093190 A JP8093190 A JP 8093190A JP H03283415 A JPH03283415 A JP H03283415A
- Authority
- JP
- Japan
- Prior art keywords
- wound
- coils
- winding
- differential transformer
- soft magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 8
- 238000004804 winding Methods 0.000 abstract description 36
- 238000006073 displacement reaction Methods 0.000 abstract description 8
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 239000000758 substrate Substances 0.000 abstract description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 2
- 239000011889 copper foil Substances 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract description 2
- 238000004544 sputter deposition Methods 0.000 abstract description 2
- 238000005530 etching Methods 0.000 abstract 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 230000005284 excitation Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Landscapes
- Coils Or Transformers For Communication (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は、変位を検出する差動トランスの構造に関する
。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to the structure of a differential transformer for detecting displacement.
〈従来の技術〉
一般に機械などの直線変位の検出には、差動トランス（
例えば電気計測便覧、オーム社、 Ｐ、７７９参照）が
用いられている。差動トランスは第４図に示すように、
−次巻線１１と二つの巻線１２ａ、１２ｂを逆相に接続
した二次巻線１２と上下に変位する鉄心１３を有してい
る。平衡状態では、−次巻線１１を交流電圧ｅ、で励磁
した場合−次巻線１１と第１の二次巻線１２ａ、第２の
二次巻線１２ｂとの間の電磁結合の結合率が等しく、第
１の二次巻線１２ａに発生した電圧ｅｘｔと第２の二次
巻線１２ｂに発生した電圧ｅ。とは値が同じで極性が逆
になるから、二次巻ｖＡ２全体に誘起される電圧ｅｔは
、相殺されてゼロとなる。また、鉄心１３が移動すると
、その変位に応して一次巻線１１と第１の二次巻線１２
ａ、第２の二次巻線１２ｂの間の１を磁結合の結合率が
変化して、その差が二次Ｓ線１２全体の出力電圧ｅ！（
”ｅｘｔ ｅｇｇ）となって検出される。<Conventional technology> Generally, a differential transformer (
For example, see Electrical Measurement Handbook, Ohmsha, p. 779). As shown in Figure 4, the differential transformer is
- It has a secondary winding 11, a secondary winding 12 in which two windings 12a and 12b are connected in opposite phases, and an iron core 13 that is vertically displaced. In a balanced state, when the -order winding 11 is excited with an alternating current voltage e, the coupling rate of electromagnetic coupling between the -order winding 11, the first secondary winding 12a, and the second secondary winding 12b is are equal, and the voltage ext generated in the first secondary winding 12a and the voltage e generated in the second secondary winding 12b. Since the values are the same and the polarities are opposite, the voltage et induced across the secondary winding vA2 is canceled out and becomes zero. Furthermore, when the iron core 13 moves, the primary winding 11 and the first secondary winding 12
a, the coupling rate of the magnetic coupling between the second secondary windings 12b changes, and the difference is the output voltage e! of the entire secondary S wire 12! (
"ext egg)" is detected.
〈発明が解決しようとする課題〉
しかしながら、このような従来の差動トランスでは、感
度を大きくするために巻線の巻数を大きくするのが一般
的であるが、そうするとインダクタンスが大きくなるた
め励磁周波数が制限されて応答性が悪くなるという欠点
があった。<Problems to be Solved by the Invention> However, in such conventional differential transformers, it is common to increase the number of turns of the winding in order to increase the sensitivity, but this increases the inductance and reduces the excitation frequency. This has the disadvantage that the response is poor due to the limited
また、トランス構造が大きくなるため漏洩磁束の問題が
あり、大きな鉄心を動かすため可動系の慣性が大きくな
って応答性が悪くなり、測定系に可動系の慣性力によっ
て悪影響を及ぼすという欠点があった。In addition, the large transformer structure causes problems with leakage magnetic flux, and moving a large iron core increases the inertia of the movable system, resulting in poor response, and the measurement system is adversely affected by the inertia of the movable system. Ta.
本発明は、上記したような課題を解決した差動トランス
を提供することを目的とする。An object of the present invention is to provide a differential transformer that solves the above problems.
＜３１題を解決するための手段〉
本発明は、薄板状の基体の一部に切り込みを設けて可動
部とし、該可動部の一方の面または両方の面に軟磁性Ｆ
Ｎ膜を形成し、前記可動部の周囲で基体の両面に２組の
コイルをそれぞれ巻回して形成し、両面の１組のコイル
は同方向に巻回する直列接続とし、両面の他の１組のコ
イルは異なる方向に巻回する直列接続としたことを特徴
とする差動トランスである。<Means for Solving Problem 31> The present invention provides a movable part by providing a notch in a part of a thin plate-like base body, and a soft magnetic F on one or both surfaces of the movable part.
N film is formed, and two sets of coils are wound on both sides of the base body around the movable part, one set of coils on both sides are connected in series and wound in the same direction, and the other set of coils on both sides are connected in series. This is a differential transformer characterized in that the coils of the set are connected in series and wound in different directions.
〈作用〉
本発明によれば、差動トランスの一次巻線、二次巻線間
１を磁結合を変化させる鉄心が軟ｆ（ｉ性′ｉｉＪ膜で
構成され、その膜厚方向の変位を検出するようにしたの
で、巻線に対する鉄心の相対的な変位を大きくすること
ができ、これによって微小な変位に対して十分な感度を
持たせることができる。したがって、従来例のように感
度を上げるために巻線の巻数を増す必要がないので、巻
線のインダクタンスが小さく励磁周波数を高くすること
が可能であり、応答性が向上する。また、可動部の質量
が小さく、慣性による応答性の劣化も大幅に改善するこ
とができる。<Function> According to the present invention, the iron core that changes the magnetic coupling between the primary winding and the secondary winding 1 of the differential transformer is composed of a soft f(i-character) film, and the displacement in the film thickness direction is By detecting this, it is possible to increase the relative displacement of the iron core with respect to the winding, and this makes it possible to have sufficient sensitivity to minute displacements. Since there is no need to increase the number of turns of the winding to increase deterioration can also be significantly improved.
〈実施例〉
以下に、本発明の実施例について、図面を参照して具体
的に説明する。<Examples> Examples of the present invention will be specifically described below with reference to the drawings.
第１図は、本発明の実施例を模式的に示す斜視図であり
、１は例えば厚さ５０μｍのポリイミドフィルムなどの
基体、２は一次巻線、３は二次巻線、４は軟磁性薄膜で
ある。FIG. 1 is a perspective view schematically showing an embodiment of the present invention, in which 1 is a base such as a polyimide film with a thickness of 50 μm, 2 is a primary winding, 3 is a secondary winding, and 4 is a soft magnetic material. It is a thin film.
つぎに、差動トランスの組み立て手順について第２図を
用いて説明する。Next, the assembly procedure of the differential transformer will be explained using FIG. 2.
■ まず、基体１の表面にポンチで幅３ＩＩ１ｍのコの
字状の切り込み部５と径０ 、４ ｍｍφの４個のスル
ーホール６ａ、６ｂ、６ｃ、６ｄを設ける。(1) First, a U-shaped notch 5 with a width of 3II1 m and four through holes 6a, 6b, 6c, and 6d with diameters of 0 and 4 mm are formed on the surface of the base 1 using a punch.
■ 基体１の両面に接着した銅箔を工・ノチングしてそ
れぞれに一次巻線２ａ、２ｂ、二次巻線３ａ、３ｂを形
成する。(2) Cut and notch the copper foil adhered to both sides of the base 1 to form primary windings 2a, 2b and secondary windings 3a, 3b, respectively.
■ 両面の一次巻線２ａ、２ｂはスルーホール６ａ、６
ｂを介して同じ方向に巻回するように接続する。■ The primary windings 2a and 2b on both sides are through-holes 6a and 6.
Connect so that they wind in the same direction via b.
■ 両面の二次巻線３ａ、３ｂはスルーホール６ｃ、６
ｄを介して逆方向に巻回するように接続する。■ Secondary windings 3a and 3b on both sides are through holes 6c and 6
Connect so as to wind in the opposite direction via d.
■ さらに、切り込み部５の内側に軟磁性薄膜４をスパ
ッタリング法で形成する。この軟磁性薄膜４は１０−’
ＬｏｒｒのＡｒガス雰囲気中でφ３インチのパーヤロイ
合金ターゲットを投入電力３００ＷでＲＦマグネトロン
スパッタして、膜厚１μ−の軟磁性ｉＮ膜４を基体１上
に形成した。また軟磁性ｙ１１１９４の整形は、厚さ３
０μｍのステンレス箔に一辺２．５胴の開口を設けたメ
タルマスクを、開口部が切込み部５の内側に位置するよ
うに基体ｌと重ね合わ一部て軟磁性薄膜４の形成を行う
ことで、軟磁性薄膜４が切込み部５の内側にのみ形成さ
れるようにして行った。(2) Furthermore, a soft magnetic thin film 4 is formed inside the notch 5 by sputtering. This soft magnetic thin film 4 is 10-'
A soft magnetic iN film 4 having a thickness of 1 .mu.m was formed on the substrate 1 by RF magnetron sputtering using a 3-inch Puralloy alloy target at an input power of 300 W in a Lorr Ar gas atmosphere. In addition, the shaping of soft magnetic Y11194 has a thickness of 3
A metal mask with an opening of 2.5 mm on a side made of 0 μm stainless steel foil is overlapped with the base 1 so that the opening is located inside the notch 5, and a soft magnetic thin film 4 is partially formed. The soft magnetic thin film 4 was formed only on the inside of the notch 5.
上記の方法で組み立てた差動トランスの一次巻線２に端
子２１．２２を介して２Ｍ１ｌｚ励磁し、切り込み部５
中央部にマイクロメータで変位を与えて、二次巻線３例
の出力電圧を端子３］、 ３２を介して測定した結果を
第３図に示す。従来の差動トランスが数１００ターンの
コイルを用い数１００〜数１０００１１ｚの励磁周波数
で感度が１〜ＩＯＶ／ｍｍであるのに対し、本発明例で
はＩクーンのコイルを２ＭＨｚで励磁し４０Ｖ／ｗの感
度を得ており、感度で４〜４０倍、励磁周波数で制限さ
れる応答性については数１０００倍の改善がなされてい
る。なお、本実施例の差動トランスの可動部の重量は約
５００μｇであり、従来の差動トランスの約１０００分
の１に軽量化されており、慣性力による測定系への影響
が極めて少ない。The primary winding 2 of the differential transformer assembled in the above manner is excited with 2M1lz via the terminals 21 and 22, and the notch 5 is
Figure 3 shows the results of measuring the output voltages of the three secondary windings via terminals 3 and 32 by applying displacement to the center with a micrometer. While a conventional differential transformer uses a coil with several hundred turns and has a sensitivity of 1 to IOV/mm at an excitation frequency of several 100 to several 100011 z, in the example of the present invention, an I Coon coil is excited at 2 MHz and has a sensitivity of 40 V/mm. The sensitivity has been improved by a factor of 4 to 40, and the response, which is limited by the excitation frequency, has been improved by several thousand times. The weight of the movable part of the differential transformer of this embodiment is about 500 μg, which is about 1000 times lighter than that of a conventional differential transformer, and the influence of inertial force on the measurement system is extremely small.
また、全体の体積が小さく磁気遮蔽も容易である。In addition, the overall volume is small and magnetic shielding is easy.
〈発明の効果〉
以上説明したように、本発明によれば、差動トランスを
薄膜化することにより、少ない巻線数で微小変位に対し
て十分な感度を持ち、巻線のインダクタンスが小さくす
ることができるので、励磁周波数を高め、かつ可動部の
重量を軽減することができ、応答性の改善を図ることが
可能である。<Effects of the Invention> As explained above, according to the present invention, by making the differential transformer a thin film, sufficient sensitivity to minute displacements can be achieved with a small number of windings, and the inductance of the windings can be reduced. Therefore, it is possible to increase the excitation frequency, reduce the weight of the movable part, and improve responsiveness.
第１図は本発明の実施例を模式的に示す斜視図、第２図
は本発明の差動トランスの組み立てを示す斜視図、第３
図は本発明の差動トランスの変位と出力の関係を示す特
性図、第４図は従来例を示す模式図である。
１・・・基体、 ２・・・−次巻線、３・・・
二次巻線、 ４・・・軟磁性薄膜、５・・・切り
込み部、 ６・・・スルーホール。FIG. 1 is a perspective view schematically showing an embodiment of the present invention, FIG. 2 is a perspective view showing the assembly of a differential transformer of the present invention, and FIG.
The figure is a characteristic diagram showing the relationship between displacement and output of the differential transformer of the present invention, and FIG. 4 is a schematic diagram showing a conventional example. 1...Base body, 2...-secondary winding, 3...
Secondary winding, 4... Soft magnetic thin film, 5... Notch, 6... Through hole.
Claims (1)
該可動部の一方の面または両方の面に軟磁性薄膜を形成
し、前記可動部の周囲で基体の両面に２組のコイルをそ
れぞれ巻回して形成し、両面の１組のコイルは同方向に
巻回する直列接続とし、両面の他の１組のコイルは異な
る方向に巻回する直列接続としたことを特徴とする差動
トランス。A notch is made in a part of the thin plate-like base to make it a movable part,
A soft magnetic thin film is formed on one or both surfaces of the movable part, and two sets of coils are wound on both sides of the base body around the movable part, and one set of coils on both sides are wound in the same direction. A differential transformer characterized in that the coils are connected in series so that the coils are wound in different directions, and the other set of coils on both sides are connected in series so that they are wound in different directions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2080931A JPH03283415A (en) | 1990-03-30 | 1990-03-30 | Differential transformer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2080931A JPH03283415A (en) | 1990-03-30 | 1990-03-30 | Differential transformer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03283415A true JPH03283415A (en) | 1991-12-13 |
Family
ID=13732192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2080931A Pending JPH03283415A (en) | 1990-03-30 | 1990-03-30 | Differential transformer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03283415A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5463365A (en) * | 1992-11-02 | 1995-10-31 | Murata Mfg. Co., Ltd. | Coil |
| JP2008060425A (en) * | 2006-08-31 | 2008-03-13 | Tamagawa Seiki Co Ltd | Linear differential transformer |
-
1990
- 1990-03-30 JP JP2080931A patent/JPH03283415A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5463365A (en) * | 1992-11-02 | 1995-10-31 | Murata Mfg. Co., Ltd. | Coil |
| JP2008060425A (en) * | 2006-08-31 | 2008-03-13 | Tamagawa Seiki Co Ltd | Linear differential transformer |
| JP4654365B2 (en) * | 2006-08-31 | 2011-03-16 | 多摩川精機株式会社 | Linear differential transformer |
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