JPH0327964B2 - - Google Patents
Info
- Publication number
- JPH0327964B2 JPH0327964B2 JP56204083A JP20408381A JPH0327964B2 JP H0327964 B2 JPH0327964 B2 JP H0327964B2 JP 56204083 A JP56204083 A JP 56204083A JP 20408381 A JP20408381 A JP 20408381A JP H0327964 B2 JPH0327964 B2 JP H0327964B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- recording
- substrate
- magnetic
- soft magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 16
- 239000000853 adhesive Substances 0.000 claims description 9
- 230000001070 adhesive effect Effects 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims 1
- 229910000889 permalloy Inorganic materials 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】
本発明は常時記録媒体に接して記録再生を行な
う少なくともコアの一部に薄膜軟磁性体を使用し
た磁気記録再生ヘツドの製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a magnetic recording/reproducing head that uses a thin film soft magnetic material for at least a portion of the core, which performs recording and reproduction while being in constant contact with a recording medium.
本発明の目的は上記記録再生ヘツドの耐久性の
向上にある。 An object of the present invention is to improve the durability of the recording/reproducing head.
薄膜のコアを使用した記録再生ヘツドを常時記
録媒体に接触させて使用する場合、薄膜コア先端
が弱いため、コア先端が短時間で破壊されて実用
にならない。そのため現在は記録媒体よりある一
定高さに浮上して使用されるタイプの薄膜ヘツド
が実用化されている。しかし新しい記録再生方式
あるいは装置の提案等により薄膜コアを使用する
ヘツドを記録媒体に接しさせて記録再生すること
が要求されてきている。 When a recording/reproducing head using a thin film core is used in constant contact with a recording medium, the tip of the thin film core is weak and is destroyed in a short period of time, making it impractical. For this reason, thin film heads of the type that are used while floating at a certain height above the recording medium are currently in practical use. However, with the proposal of new recording/reproducing methods or devices, there is a growing demand for recording/reproducing by bringing a head using a thin film core into contact with a recording medium.
本発明はこの点に留意して薄膜コア先端を保護
する構造の記録再生ヘツドを製造する方法を提案
するものである。 The present invention takes this point into consideration and proposes a method for manufacturing a recording/reproducing head having a structure that protects the tip of the thin film core.
以下、実施例に基いて詳細に説明する。 Hereinafter, a detailed explanation will be given based on examples.
実施例 １
第１図に示すのは垂直磁気記録方式における主
磁極補助磁極タイプの記録再生ヘツドである。こ
のヘツドは軟磁性薄膜からなる主磁極１が記録媒
体２に接しており、記録媒体２の反対側にコイル
３が巻かれたフエライトからなる補助磁極４の２
つに分れた構造となつている。従来の主磁極の構
造を第２図に断面で示すが、パーマロイ薄膜７が
ガラスあるいはセラミツクの基板５上に形成され
ており、相対する基板５と同じ材料からなる基板
６で合せて接着され、記録媒体２に接する面は平
面あるいは曲面形状に加工される。接合面には接
着剤８が充てんされている。この構造のヘツドを
実際に使うと、まず先端の接着剤８が削られ、次
いで接着剤の接しているパーマロイ薄膜７、及び
基板５及び６の接している側の角が損傷を受け性
能が大幅に低下して短時間で使用不可能になる。
この大きな理由としヘツドの磁気特性に大きく影
警を与えるパーマロイ薄膜の先端を耐摩耗性耐衝
撃性のない樹脂接着剤を使つて保護する点にあ
り、先端の接着剤の層が数千オングストローム〜
数ミクロンと厚いことも問題のある点である。Embodiment 1 FIG. 1 shows a main pole/auxiliary pole type recording/reproducing head in the perpendicular magnetic recording system. This head has a main magnetic pole 1 made of a soft magnetic thin film in contact with a recording medium 2, and an auxiliary magnetic pole 4 made of ferrite with a coil 3 wound on the opposite side of the recording medium 2.
It has a divided structure. The structure of a conventional main magnetic pole is shown in cross section in FIG. 2, in which a permalloy thin film 7 is formed on a glass or ceramic substrate 5, and is bonded together with a substrate 6 made of the same material as the opposing substrate 5. The surface in contact with the recording medium 2 is processed into a flat or curved shape. The bonding surface is filled with adhesive 8. When a head with this structure is actually used, first the adhesive 8 at the tip is scraped, and then the permalloy thin film 7 that is in contact with the adhesive and the corners where the substrates 5 and 6 are in contact are damaged, resulting in a significant drop in performance. and becomes unusable in a short period of time.
The main reason for this is that the tip of the permalloy thin film, which greatly affects the magnetic properties of the head, is protected using a resin adhesive that is not wear-resistant or impact resistant, and the adhesive layer at the tip is several thousand angstroms thick.
Another problem is that it is several microns thick.
第３図に本発明による主磁極の製造方法の例を
示す。第３図ａは絶縁性の基板５上にパーマロイ
センダストなどの軟磁性薄膜７を形成しパターニ
ングした後、その上にSiO2，Al2O3，Ta2O5，
Si3N4等の硬くて耐摩耗性のある誘電体薄膜９を
真空蒸着あるいはスパツタリング等によりパーマ
ロイ薄膜７の厚みより厚く形成した状態を示す。
次に第３図ｂに示すように誘電体膜９の表面を研
摩により膜９の表面の凹凸をなくす、この時完全
鏡面に仕上げる必要は必ずしもなく適度に荒れた
面でよい。その後第３図ｃに示すように基板６を
基板５と接着剤８を塗布して貼り合わせて接合す
る。接着剤としては樹脂系で良いが低融点ガラス
で接合しても問題ない。本発明では軟磁性薄膜の
ヘツド先端部はセラミツクあるいはガラスの基板
と耐摩耗性のある誘電体薄膜で保持保護されてお
り耐摩耗性のない接着部は軟磁性薄膜とは分離さ
れているのでヘツド先端の軟磁性薄膜の耐久性を
飛躍的に向上でき、かつ接着層の厚みも薄くでき
るため接合部でのやられも最小にできる。 FIG. 3 shows an example of the method for manufacturing the main magnetic pole according to the present invention. In FIG. 3a, after forming and patterning a soft magnetic thin film 7 such as permalleussen dust on an insulating substrate 5, SiO 2 , Al 2 O 3 , Ta 2 O 5 ,
This shows a state in which a hard and wear-resistant dielectric thin film 9 made of Si 3 N 4 or the like is formed to be thicker than the permalloy thin film 7 by vacuum evaporation or sputtering.
Next, as shown in FIG. 3b, the surface of the dielectric film 9 is polished to eliminate unevenness on the surface of the film 9. At this time, it is not necessarily necessary to finish it to a perfect mirror surface, and a moderately rough surface is sufficient. Thereafter, as shown in FIG. 3c, the substrate 6 and the substrate 5 are bonded together by applying an adhesive 8. As the adhesive, a resin-based adhesive may be used, but there is no problem in bonding with low-melting glass. In the present invention, the tip of the head of the soft magnetic thin film is held and protected by a ceramic or glass substrate and a wear-resistant dielectric thin film, and the non-wear resistant bonded part is separated from the soft magnetic thin film. The durability of the soft magnetic thin film at the tip can be dramatically improved, and the thickness of the adhesive layer can also be made thinner, so damage at the joint can be minimized.
本例では主磁極補助磁極タイプの記録再生ヘツ
ドについて述べたが、一般のリングタイプの薄膜
ヘツドにおいても常時記録媒体に接触させて使用
する場合本発明は有効であるのは明らかである。 In this example, a main magnetic pole auxiliary magnetic pole type recording/reproducing head has been described, but it is clear that the present invention is also effective when a general ring type thin film head is used in constant contact with a recording medium.
以上述べてきたように、本発明によつて弱い薄
膜ヘツド先端の耐久性を向上させることができ、
薄膜ヘツドの媒体常時接触での使用の実用化に大
きく奇与することができる点、本発明の効果は大
なるものがある。 As described above, the present invention makes it possible to improve the durability of the weak thin film head tip.
The present invention has a great effect in that it can greatly contribute to the practical use of a thin film head in constant contact with a medium.
第１図は垂直磁気記録用の主磁極補助磁極タイ
プの記録再生ヘツドの概略図。第２図は第１図に
示す主磁極の従来品の断面図第３図は第１図に示
す主磁極の本発明に従がう製造法を示す。
１……主磁極を構成する軟磁性薄膜、２……記
録媒体、３……コイル、４……フエライト、５…
…ガラスあるいはセラミツク基板、６……５と同
じ材質の基板、７……パーマロイ薄膜、８……接
着剤、９……誘電体薄膜。
FIG. 1 is a schematic diagram of a main magnetic pole auxiliary magnetic pole type recording/reproducing head for perpendicular magnetic recording. FIG. 2 is a cross-sectional view of the conventional main pole shown in FIG. 1, and FIG. 3 shows a method of manufacturing the main pole shown in FIG. 1 according to the present invention. DESCRIPTION OF SYMBOLS 1... Soft magnetic thin film constituting the main magnetic pole, 2... Recording medium, 3... Coil, 4... Ferrite, 5...
...Glass or ceramic substrate, 6...Substrate made of the same material as 5, 7...Permalloy thin film, 8...Adhesive, 9...Dielectric thin film.
Claims (1)
する磁気記録再生ヘツドの製造方法において、第
１の基板上に磁極を形成する軟磁性薄膜を磁極の
形状に形成する工程と、 前記軟磁性薄膜磁極が形成された基板上に前記
軟磁性薄膜を覆うように誘電体薄膜を形成する工
程と、 前記誘電体薄膜表面を研磨して前記誘電体薄膜
に生じた凹凸を平坦化する工程と、 前記平坦化された誘電体薄膜表面に接着剤を塗
布して、第２の基板を貼り合わせる工程からな
り、前記第１と第２の基板及び前記誘電体薄膜は
前記軟磁性薄膜より硬質な材料により形成され、
且つ前記磁気記録再生ヘツドの端面が前記第１の
基板、前記軟磁性薄膜磁極、前記誘電体薄膜及び
前記第２の基板の各端面により形成されることを
特徴とする磁気記録再生ヘツドの製造方法。[Claims] 1. A method for manufacturing a magnetic recording/reproducing head for recording on or reproducing from a recording medium, comprising: forming a soft magnetic thin film in the shape of a magnetic pole on a first substrate to form a magnetic pole; forming a dielectric thin film on the substrate on which the soft magnetic thin film magnetic pole is formed so as to cover the soft magnetic thin film; and polishing the surface of the dielectric thin film to flatten unevenness that has occurred on the dielectric thin film. and a step of applying an adhesive to the surface of the flattened dielectric thin film and bonding a second substrate, wherein the first and second substrates and the dielectric thin film are bonded to each other from the soft magnetic thin film. Made of hard material,
A method of manufacturing a magnetic recording/reproducing head, wherein the end face of the magnetic recording/reproducing head is formed by each end face of the first substrate, the soft magnetic thin film pole, the dielectric thin film, and the second substrate. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20408381A JPS58105419A (en) | 1981-12-17 | 1981-12-17 | Production of magnetic recording and reproducing head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20408381A JPS58105419A (en) | 1981-12-17 | 1981-12-17 | Production of magnetic recording and reproducing head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58105419A JPS58105419A (en) | 1983-06-23 |
| JPH0327964B2 true JPH0327964B2 (en) | 1991-04-17 |
Family
ID=16484495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20408381A Granted JPS58105419A (en) | 1981-12-17 | 1981-12-17 | Production of magnetic recording and reproducing head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58105419A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6134710A (en) * | 1984-07-26 | 1986-02-19 | Akai Electric Co Ltd | Magnetic head |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6341609Y2 (en) * | 1980-04-23 | 1988-11-01 |
-
1981
- 1981-12-17 JP JP20408381A patent/JPS58105419A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58105419A (en) | 1983-06-23 |
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