JPH09212825A - Floating magnetic head and its production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a production method for a compact composite type floating magnetic head in which a magnetic head chip and a slider can be bonded together into a single body with sufficient bond strength and also can deal with the demand for increasing the recording density. SOLUTION: A magnetic head chip 1 is put into a recess part 5 formed on an end face of a slider 2 and then bonded to the part 5 by glass molding on the apex side and its opposite side. At the same time, the softening point of the glass Mb that is used for the glass molding on the side opposite to the apex of the chip 1 is set lower than the softening point of the glass Ma that is used for the glass molding on the apex side of the chip 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a floating magnetic head used in a magnetic disk device, and more particularly, to a composite floating magnetic head using a thin film laminated core as a magnetic head chip and a floating magnetic head thereof. The present invention relates to a manufacturing method.

[0002]

2. Description of the Related Art In recent years, thin film laminated cores used in VTRs, capable of achieving high density recording and narrowing track, that is, Fe--Si--Al alloy (sendust), amorphous magnetic material, iron nitride, etc. Attention has been focused on a thin-film laminated composite type floating magnetic head using a thin-film laminated core produced by laminating the magnetic thin film formed on a substrate as a magnetic head chip.

A thin film laminated composite type flying magnetic head is disclosed in Japanese Patent Application Laid-Open No. 3-2783 filed by the present applicant.
No. 06, and as shown in FIG. 6 attached to the present application, the magnetic head chip 1 is incorporated in a predetermined groove-shaped recess 5 of a ceramic slider 2 formed by, for example, cutting and grinding a single ceramic. It is made by fixing with mold glass.

In such a thin-film laminated composite type flying magnetic head, the slider has been downsized in recent years due to the demand for increased recording density. In other words, the size of the slider used to be 3.2 × 4.0 × 0.8 mm in the past, but nowadays 50% is 1.6 × 2.0 ×.
It is becoming 0.4 mm in size. Accordingly, the magnetic head chip attached to the slider is 0.5
It is as small as × 0.5 × 0.135 mm.

[0005]

The slider is 3.2 ×.
If the size is 4.0 × 0.8 mm, the magnetic head chip is fixed to the slider only by the glass mold from the upper side of the magnetic head chip, that is, the gap forming surface side of the magnetic head chip. Good adhesive strength, but the slider is 1.6 × 2.0 × 0.4m
m, magnetic head chip is 0.5 × 0.5 × 0.135m
When it becomes as small as about m, the adhesive strength between the magnetic head chip and the slider becomes insufficient, and therefore, a method of adhering from below the magnetic head chip with a resin adhesive such as epoxy resin has been used. .

However, this method has a problem in that the resin swells in a step such as lapping after the resin is adhered, the adhesive strength between the magnetic head chip and the slider is lowered, and the yield is lowered.

In order to solve this problem, the present inventors tried to perform heat treatment (cure) for 20 minutes at 120 ° C. after bonding with a resin adhesive, but the effect was slight. there were.

The inventors of the present invention have conducted a lot of research and experiments to solve such problems, and as a result, have a softening point lower than the softening point of the glass used for the glass mold from the upper side of the magnetic head chip. It has been found that if glass is used, the magnetic head chip and the slider can be effectively adhered from the lower side of the magnetic head chip by glass molding. The present invention has been made based on such novel findings.

Therefore, an object of the present invention is to make it possible to integrally bond a magnetic head chip and a slider with sufficient adhesive strength, and to meet a demand for increased recording density. It is to provide the manufacturing method.

Another object of the present invention is to provide a composite type flying magnetic head using a thin film laminated core as a magnetic head chip and a method of manufacturing the same, which can prevent the yield from decreasing and can be manufactured efficiently. That is.

[0011]

The above-mentioned various objects are achieved by the flying type magnetic head according to the present invention. In summary, the present invention provides a magnetic head chip that is composed of a pair of core half blocks formed by laminating magnetic thin films on a substrate and that is inserted into a recess formed in one end surface of a slider. Glass that is integrally bonded to the recess by a glass mold on the gap forming surface side of the magnetic head chip and on the opposite side of the gap forming surface, and is used for glass molding from the opposite side of the gap forming surface of the magnetic head chip The softening point of is
The floating magnetic head is characterized in that it is made lower than the softening point of the glass used for glass molding from the gap forming surface side of the magnetic head chip.

According to another aspect of the present invention, a magnetic head chip composed of a pair of core half blocks formed by laminating magnetic thin films on a substrate is formed on one end surface of a slider. In a method for manufacturing a floating magnetic head, which is inserted into a recess and integrally joined, after inserting the magnetic head chip into the recess of the slider, glass molding from the gap forming surface side of the magnetic head chip, Further, there is provided a method of manufacturing a floating magnetic head, characterized in that glass molding is performed from the side opposite to the gap forming surface of the magnetic head chip. Preferably, the softening point of the glass used for the glass mold from the side opposite to the gap forming surface of the magnetic head chip is lower than the softening point of the glass used for the glass mold from the gap forming surface side of the magnetic head chip. .

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, a flying type magnetic head and a method of manufacturing the same according to the present invention will be described in more detail with reference to the drawings.

Referring to FIG. 1, one embodiment of a composite type flying magnetic head constructed in accordance with the present invention is illustrated. FIG. 1 shows a slider 2 and the slider 2.
The magnetic head chip 1 integrally bonded to the above is shown, but the floating magnetic head of the present embodiment also has the same structure as the conventional one.
It is connected to an actuator (not shown) of the magnetic disk device body via a leaf spring support mechanism (not shown).

To further explain, the floating magnetic head in this embodiment is composed of a pair of core half blocks 18 and 19 formed by laminating magnetic thin films on a non-magnetic substrate, for example. The chip 1 is integrally joined to a recess 5 formed on one end surface of the slider 2. or,
The magnetic thin film 14 of the magnetic head chip 1 is AB of the slider 2.
It is formed so as to coincide with the S surface 4.

According to the present invention, the magnetic head chip is from above the magnetic head chip, that is, the magnetic head chip 1.
Of the magnetic head chip is integrally glass-molded from the side where the gap 21 is formed, and also from the lower side of the magnetic head chip, that is, the side opposite to the gap-formed surface. It At this time, the softening point of the glass Mb used for the glass mold from the lower side of the magnetic head chip 1 is made lower than the softening point of the glass Ma used for the glass mold from the upper side of the magnetic head chip 1.

Next, a method of manufacturing the magnetic head having the above structure will be described.

First, with reference to FIG. 5, an embodiment of a method of manufacturing a thin film laminated magnetic head chip 1 used as the magnetic head chip 1 and constituted by laminating magnetic thin films on a substrate will be described. Fe-Si-Al as the magnetic thin film 14
Although an alloy magnetic material, an amorphous magnetic material, iron nitride, etc. are used, in this embodiment, an Fe-Si-Al alloy magnetic material is used.

First, in this embodiment, a non-magnetic substrate 11 such as ceramics is prepared (FIG. 5 (A)), and the substrate 11 is prepared.
An Fe—Si—Al alloy film 12 is formed thereon by sputtering to have a film thickness of 1 to 20 μm. Then, the F
The non-magnetic insulating film 13 is formed on the e-Si-Al alloy film 12 with a film thickness of 0.03 to 0.5 μm by a sputtering method (FIG. 5B). SiO as the non-magnetic insulating film 13
₂ , Al ₂ O ₃ or the like is used.

By repeating the above steps, the Fe--Si--Al alloy film 12 and the non-magnetic insulating film 13 are laminated as many times as necessary, and the process shown in FIG.
As shown in (C), the alloy magnetic thin film 14 is formed on the substrate 11.
It is deposited on top.

Next, a laminated glass 15 is formed on the alloy magnetic thin film 14 with a film thickness of 0.05 to 1.0 μm by a sputtering method or the like (FIG. 5D), and the laminated glass 15 is further formed.
The other non-magnetic substrate 16 made of the same material as the previous substrate 11 is bonded onto the above to produce the magnetic core block 17 (FIG. 5 (E)). SiO as the laminated glass 15
_2- Al ₂ O ₃ -Na ₂ O based glass or SiO ₂ -B
₂ O ₃ —Na ₂ O based glass is suitable.

The magnetic core block 17 manufactured in this manner is cut in the laminated thickness direction (the direction perpendicular to the alloy magnetic thin film) as shown in FIG. Body blocks 18, 19 are formed.

Next, as best shown in FIG.
According to conventional methods, at least one core half block,
In this embodiment, after forming the winding window groove 20 in both core half blocks 18 and 19, the abutting surfaces 18a and 19a of both core half blocks 18 and 19 are ground, and the surfaces are made of non-magnetic material such as SiO _2. The gap spacer 21 and the bonding glass m are formed by a method such as a sputtering method (FIG. 5 (F)), and then both core half blocks 18 and 19 are bonded to each other on the bonding surface 18.
The magnetic head chip 1 composed of a thin film laminated core is obtained by bonding with the bonding glass m at the portions a and 19a. Further, apex glass m _a (1, 2) in order to prevent chipping in the machining after the apex portions of the core half blocks 18 and 19 are filled.

On the other hand, as shown in FIG. 2, the slider 2 is made of a non-magnetic material such as ceramics, which is the same material as the substrates 11 and 16 of the magnetic head chip 1, and has a substantially rectangular cross section. , And front end 2b
At at least one corner of the tilt angle θ, for example 45 °
Grooving is performed to form the inclined window groove 22. As will be understood with reference to FIG. 1, the inclined window groove 22 is for facilitating the winding 200 on the magnetic head chip 1. Therefore, the width H ′ of the inclined window groove 22 is The width H of the winding window groove 20 of the magnetic head chip 1 is approximately the same (H′≈H).

Next, the inclined window groove 22 of the slider 2
The magnetic head chip 1 is provided adjacent to the corner where the
A groove-like recess 5 for inserting the groove is formed with a predetermined width T '. The groove width T'is larger than the thickness T of the magnetic head chip (T '> T).

Next, the magnetic head chip 1 is inserted into the groove-shaped recess 5 of the slider 2, as shown in FIG. 3 in which the joining mode between the magnetic head chip 1 and the slider 2 is enlarged.
The magnetic head chip 1 is brought closer to one side in the recess 5 by using an elastic shim and is held in the recess 5. Then, glass molding is performed according to the present invention.

In this embodiment, the slider 2 has a size of 1.6 × 2.0 × 0.4 mm, and the magnetic head chip 1 has a size of 0.4 × 0.4 × 0.135 mm in terms of the final finish dimension. .
The width H ′ of the inclined window groove 22 of the slider 2 and the width H of the winding window groove 20 of the magnetic head chip 1 are substantially the same, and in this embodiment, H′≈H = 0.2 mm. Width T'of groove-like recess 5
Is 0.05 to 0.1 from the thickness T of the magnetic head chip 1.
It is increased by 5 mm, and T '= 0.2 mm in this embodiment. The length of the recess 5 is the length of the inserted magnetic head chip 1
0.1 to 0.5 mm longer, and in this embodiment, ΔL =
It was lengthened by 0.3 mm.

According to the present invention, first, from the upper side of the magnetic head chip 1, that is, the gap 2 of the magnetic head chip 1.
Glass molding is performed from the surface side where 1 is formed. The glass Ma used for this glass mold is the glass m used for forming the gap 21 of the magnetic head chip 1.
It has a softening point lower than that of. Generally, it is 100 to 100 from the softening point of the bonding glass m for forming a gap.
It is preferably 200 ° C lower. In this embodiment, since the PbO—SiO ₂ glass whose softening point is 600 ° C. is used as the bonding glass m for forming the gap, the glass mold (upper glass mold) from the upper side of the magnetic head chip 1 is used. Is PbO-B whose softening point is 450 ℃
₂ O ₃ based glass was used.

Next, in the present invention, the magnetic head chip 1
Glass molding (lower glass molding) is performed from the lower side, that is, from the side opposite to the surface on which the gap 21 of the magnetic head chip is formed. Of course, this lower glass mold is preferably performed by reversing the slider 2 and the magnetic head chip 1 so that the gap forming surface of the magnetic head chip 1 is the lower surface. The glass Mb used for the glass mold at this time has a softening point lower than that of the glass Ma used for the upper glass mold previously performed. Generally, it is preferably 50 to 150 ° C. lower than the softening point of the upper glass molding glass Ma. In this embodiment, the lower glass mold Mb was used PbO-B ₂ O ₃ -based glass softening point is a 350 ° C..

In this way, the magnetic head chip 1 is
It is possible to obtain a flying type magnetic head integrally bonded to the recess of the slider with glass Ma and Mb by glass molding on the upper side and the lower side of the magnetic head chip 1.

At this time, preferably, as understood from FIG. 4, the winding window groove 20 of the magnetic head chip 1 is bonded so as to coincide with the inclined window groove 22 of the slider 2.
In this embodiment, both the width H ′ of the inclined window groove 22 and the width H of the winding window groove 20 of the magnetic head chip 1 are H′≈H = 0.2.
mm.

Thereafter, as shown in FIG. 3, according to a usual method, for example, a polishing process is performed up to the line XX on the side surface 2c of the slider 2, and further, as shown in FIG. 4, a line on the lower surface 2d of the slider is used. Grinding process up to ZZ, line Y on the upper surface of the slider
The outer surface of the slider 2 and the magnetic head chip 1 is polished, such as grinding up to -Y, and the ABS surface 4 is further processed to produce a flying magnetic head.

The flying type magnetic head manufactured according to the above manufacturing method of the present invention is as follows: (1) The upper side of the magnetic head chip inserted in the recess of the slider is glass-bonded by the glass mold, and the lower side is bonded by the resin adhesive. (2) The upper side of the magnetic head chip inserted into the recess of the slider is glass-bonded by glass molding, the lower side is resin-bonded, and further resin-bonded.
As compared with a conventional magnetic head manufactured by heat treatment at 120 ° C. for 20 minutes, the adhesive strength was improved and the yield was improved.

That is, the magnetic head chip 1 and the slider 2
The defective rate due to the adhesive strength with was 40% in the case of the above (1), 30% in the case of the above (2), and was 10% according to the present invention.

[0035]

As described above, in the flying magnetic head according to the present invention, a magnetic head chip composed of a pair of core half blocks formed by laminating magnetic thin films on a substrate is used as a slider. Of a flying type magnetic head constituted by integrally bonding to a recess formed on one end surface of the slider via a glass layer, and after inserting the magnetic head chip into the recess of the slider, Since it is configured to be glass-molded from the magnetic head chip as well as from the lower side of the magnetic head chip, the magnetic head chip and the slider can be integrally bonded with a sufficient adhesive strength, and it is required to increase the recording density. It is possible to provide a small composite type floating magnetic head that can meet the above requirements. Further, according to the manufacturing method of the present invention, it is possible to efficiently manufacture such a magnetic head while preventing a decrease in yield.

[Brief description of drawings]

FIG. 1 is a perspective view of an embodiment of a composite type flying magnetic head according to the present invention.

FIG. 2 is a perspective view showing a relationship between a slider and a magnetic head chip for explaining a method of manufacturing the magnetic head of FIG.

FIG. 3 is an enlarged plan view showing a bonded state of the slider and the magnetic head chip.

FIG. 4 is an enlarged side view showing a bonded state of the bonded slider and the magnetic head chip.

FIG. 5 is a process drawing showing the method of manufacturing the laminated thin film magnetic head chip.

FIG. 6 is a perspective view illustrating a conventional thin-film laminated composite type flying magnetic head.

[Explanation of symbols]

 1 Magnetic Head Chip 2 Slider 4 ABS Surface 5 Groove Recess 14 Laminated Magnetic Thin Film 18, 19 Core Half Block 21 Gap 22 Sloped Window Groove

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[Procedure amendment]

[Submission date] August 22, 1996

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claims

[Correction method] Change

[Correction contents]

[Claims]

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0005

[Correction method] Change

[Correction contents]

[0005]

The slider is 3.2 ×.
When the size is 4.0 × 0.8 mm, the magnetic head chip is fixed to the slider only by the glass mold from the upper side of the magnetic head chip, that is, the apex side of the magnetic head chip. Although the strength was able to be obtained, when the slider was reduced to about 1.6 × 2.0 × 0.4 mm and the magnetic head chip was reduced to about 0.5 × 0.5 × 0.135 mm, the magnetic head chip The adhesive strength between the slider and the slider becomes insufficient, and therefore, a method of adhering from below the magnetic head chip with a resin adhesive such as epoxy resin has been used.

[Procedure 3]

[Document name to be amended] Statement

[Correction target item name] 0011

[Correction method] Change

[Correction contents]

[0011]

The above-mentioned various objects are achieved by the flying type magnetic head according to the present invention. In summary, the present invention provides a magnetic head chip that is composed of a pair of core half blocks formed by laminating magnetic thin films on a substrate and that is inserted into a recess formed in one end surface of a slider. , Is integrally joined to the recess by a glass mold on the apex side of the magnetic head chip and on the opposite side of the apex ,
The softening point of the glass used for the glass mold from the opposite side of the apex of the magnetic head chip is lower than the softening point of the glass used for the glass mold from the apex side of the magnetic head chip. It is a magnetic head.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0012

[Correction method] Change

[Correction contents]

According to another aspect of the present invention, a magnetic head chip composed of a pair of core half blocks formed by laminating magnetic thin films on a substrate is formed on one end surface of a slider. In a method of manufacturing a floating magnetic head, which is inserted into a recess and integrally joined, after inserting the magnetic head chip into the recess of the slider, glass molding from the apex side of the magnetic head chip, and further, There is provided a method of manufacturing a floating magnetic head, characterized in that glass molding is performed from the side opposite to the apex of the magnetic head chip. Preferably, the softening point of the glass used for the glass mold from the opposite side of the apex of the magnetic head chip is lower than the softening point of the glass used for the glass mold from the gap forming surface side of the magnetic head chip.

[Procedure Amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0016

[Correction method] Change

[Correction contents]

According to the present invention, the magnetic head chip is arranged from above the magnetic head chip, that is, the magnetic head chip 1.
The glass molding is performed from the apex side, and the lower side of the magnetic head chip, that is, the side opposite to the apex is also glass-molded to be integrally joined to the recess 5 of the slider 2. At this time, the softening point of the glass Mb used for the glass mold from the lower side of the magnetic head chip 1 is made lower than the softening point of the glass Ma used for the glass mold from the upper side of the magnetic head chip 1.

[Procedure correction 6]

[Document name to be amended] Statement

[Correction target item name] 0028

[Correction method] Change

[Correction contents]

According to the present invention, first, glass molding is performed from the upper side of the magnetic head chip 1, that is, from the apex side of the magnetic head chip 1. The glass Ma used for this glass mold has a softening point lower than that of the glass m used for forming the gap 21 of the magnetic head chip 1. Generally, it is preferably 100 to 200 ° C. lower than the softening point of the bonding glass m for forming a gap. In this embodiment, PbO—SiO ₂ having a softening point of 600 ° C. is used as the bonding glass m for forming the gap.
Since a system glass was used, a PbO—B ₂ O ₃ system glass having a softening point of 450 ° C. was used for the glass mold (upper side glass mold) from the upper side of the magnetic head chip 1.

[Procedure amendment 7]

[Document name to be amended] Statement

[Name of item to be corrected] 0029

[Correction method] Change

[Correction contents]

Next, in the present invention, the magnetic head chip 1
Glass molding (lower glass molding) is performed from the lower side, that is, from the side opposite to the apex of the magnetic head chip. Of course, this lower glass molding is preferably performed by reversing the slider 2 and the magnetic head chip 1 so that the apex of the magnetic head chip 1 is on the lower side .
The glass Mb used for the glass mold at this time has a softening point lower than that of the glass Ma used for the upper glass mold previously performed. Generally, it is 50 to 15 from the softening point of the upper glass molding glass Ma.
It is preferably 0 ° C. lower. In this embodiment, _PbO-B 2 O having a softening point below the glass mold Mb is a 350 ° C.
₃ type glass was used.

[Procedure amendment 8]

[Document name to be amended] Statement

[Name of item to be corrected] 0032

[Correction method] Change

[Correction contents]

After that, as shown in FIG. 3, according to a usual method, for example, polishing processing is performed up to the line XX on the side surface 2c of the slider 2, and further, as shown in FIG. Grinding process up to ZZ, line Y on the upper surface of the slider
The outer surface of the slider 2 and the magnetic head chip 1 is polished , such as grinding up to -Y, and the ABS 4 is further processed to produce a flying magnetic head.

[Procedure amendment 9]

[Document name to be amended] Drawing

[Correction target item name] Fig. 4

[Correction method] Change

[Correction contents]

FIG. 4

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Nobuyoshi Komachi 14-39 Higashidai, Ichinoseki, Iwate Prefecture Nikko Magnetics Co., Ltd.

Claims (3)

[Claims] 1. A magnetic head chip, which is composed of a pair of core half blocks formed by laminating magnetic thin films on a substrate, and is inserted into a recess formed in one end face of a slider, The softening point of the glass used for the glass mold from the side opposite to the gap forming surface of the magnetic head chip is integrally joined to the recess by the glass mold on the side of the gap forming surface of the head chip and the opposite side thereof, A levitation type magnetic head characterized by being made lower than the softening point of glass used for glass molding from the side of a gap forming surface of a magnetic head chip. 2. A magnetic head chip composed of a pair of core half blocks formed by laminating magnetic thin films on a substrate is inserted into a recess formed in one end surface of a slider, and integrally formed. In a method of manufacturing a floating magnetic head configured to be bonded, after the magnetic head chip is inserted into a recess of a slider, glass molding is performed from the gap forming surface side of the magnetic head chip, and the gap of the magnetic head chip is further formed. A method of manufacturing a floating magnetic head, characterized in that glass molding is performed from the side opposite to the formation surface. 3. The softening point of the glass used for the glass mold from the side opposite to the gap forming surface of the magnetic head chip is greater than the softening point of the glass used for the glass mold from the gap forming surface side of the magnetic head chip. 3. The method for manufacturing a floating magnetic head according to claim 2, wherein the height is lowered.