JPH05347008A - Magnetic head for perpendicular recording and reproducing and its production - Google Patents

Abstract

PURPOSE:To eliminate such spherical working that the top end of the main magnetic pole is made to project downward, and to prevent such problems as adhesion strength due to an adhesive on the main magnetic pole or bad contact stability of the sliding surface when the adhesive is exposed on the contact surface between the main magnetic pole and a magnetic recording medium. CONSTITUTION:A thin film of a single-pole type main magnetic pole 3 facing perpendicularly to a magnetic recording medium is formed on the side of a soft magnetic projection part 2 having a nonmagnetic member 1 on the facing surface to the magnetic recording medium. A soft magnetic return york 5 is formed adjacent to the soft magnetic projected part 2 and between the york and projected part, a recessed groove 4 is formed. Then a recording and reproducing coil 6 is wound on the soft magnetic projected part 2 and the main magnetic pole 3 in one body.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium such as a magnetic disk or floppy in a magnetic recording / reproducing apparatus such as a magnetic disk device or a magnetic flexible disk (floppy) device used as an external storage device of a computer. On the other hand, the present invention relates to a perpendicular recording / reproducing magnetic head for recording / reproducing information and a method for manufacturing the same.

[0002]

2. Description of the Related Art In recent years, in magnetic recording / reproducing devices, with the spread of computers, remarkable progress has been made in improving performance such as high density / large capacity and high density / miniaturization. In the conventional general magnetic recording, a horizontal recording method is generally used in which the magnetic recording medium is magnetized in parallel to its plane. Recording methods have been proposed.

A typical structural example of the perpendicular recording / reproducing magnetic head of this perpendicular recording system will be described with reference to the drawings.
10A is a vertical sectional view of a contact type perpendicular recording / reproducing magnetic head, and FIG. 10B is a bottom view of the same. In these figures, 12 is a magnetic block, and this magnetic block 1
The recessed groove 12a is formed leaving the bottom center portion of
2b is formed, and the recording / reproducing coil 13 is formed on the exciting magnetic pole 12b.
To wind.

Reference numerals 14a and 14b are main magnetic pole supporting members formed of a non-magnetic material such as ceramics. The main magnetic pole supporting member 14a has a main magnetic pole supporting member at a central portion of a joint surface with the other main magnetic pole supporting member 14b. The magnetic pole 14c is formed, and the main magnetic pole 14 is formed.
A main magnetic pole block 14 is formed by joining the main magnetic pole support member 14a and the main magnetic pole support member 14b having c formed thereon with an adhesive 14d, and the main magnetic pole block 14 is formed on the bottom surface of the magnetic block 12. The main magnetic pole block 14 is joined with an adhesive 15 so that the main magnetic pole 14c of the main magnetic pole block 14 contacts the exciting magnetic pole 12b of the magnetic body block 12, and the main magnetic pole block 14 is joined.
The magnetic head element H is formed by polishing the periphery of the main magnetic pole block 14 so that the apex of the main magnetic pole 14c protrudes downward. Although not shown, this magnetic head element H
Is joined to a supporting member to form a contact type perpendicular recording / reproducing magnetic head.

[0005]

The contact type perpendicular recording / reproducing magnetic head as described above is manufactured by making the winding process, which is complicated in the thin film forming technique, a manual winding coil. Is the main pole 14c of the main pole block 14.
There is a problem that the spherical surface processing in which the apex of the is protruded downward is complicated.

The magnetic block 12 and the main magnetic pole block 14 are extremely small. Therefore, the adhesive strength of the main magnetic pole supporting members 14a and 14b with the adhesive 14d and the magnetic block 12 and the main magnetic pole block 14 are large. Adhesive strength of the adhesive 15 is not sufficiently obtained, and the adhesive 14 is applied to the contact surface with the magnetic recording medium.
There is a problem that d is exposed and contact stability during sliding is deteriorated.

Further, since the thickness of the main magnetic pole block 14 has a great influence on the magnetic recording / reproducing characteristics, it is important to reduce the thickness. However, in the bonding method of the magnetic block 12 and the main magnetic pole block 14, the main magnetic pole block 14
Has insufficient strength, its thickness is 50 to 100 μm.
It is difficult to reduce the thickness below a certain level, which is an obstacle to improving the magnetic recording / reproducing characteristics.

The present invention eliminates spherical surface processing in which the apex of the main magnetic pole 14c of the main magnetic pole block 14 projects to the lowermost side, and the adhesive 14 for the main magnetic pole supporting members 14a and 14b is used.
By eliminating the adhesion due to d and the adhesion between the magnetic block 12 and the main magnetic pole block 14 with the adhesive 15, the problem of the adhesive strength is eliminated, and the adhesive 15 is exposed and slid on the contact surface with the magnetic recording medium. The problem is that the contact stability during movement is not deteriorated, and the thickness of the main magnetic pole block 14 cannot be made too thin due to the strength, which hinders the improvement of the magnetic recording / reproducing characteristics. The purpose is to eliminate.

[0009]

In order to achieve the above-mentioned object, the perpendicular recording / reproducing magnetic head of the present invention comprises a soft magnetic convex portion 2 having a non-magnetic member 1 facing the magnetic recording medium. A single magnetic pole type main magnetic pole 3 facing perpendicularly to the surface of the magnetic recording medium is formed into a thin film, and a soft magnetic return yoke 5 is formed adjacent to the soft magnetic convex portion 2 via a groove 4, and is integrated as described above. The recording / reproducing coil 6 is formed on the soft magnetic convex portion 2 and the main magnetic pole 3.
It is configured by winding.

[0010]

Since the perpendicular recording / reproducing magnetic head of the present invention is constructed as described above, it is easy to manufacture since there is no spherical surface processing in which the apex of the main magnetic pole of the main magnetic pole block projects downward as in the conventional case. Further, there is no problem that the main magnetic pole block cannot be made so thin due to the strength as in the conventional case, which becomes an obstacle to the improvement of the magnetic recording / reproducing characteristics.

Further, according to the present invention, a thin film is formed on the side surface of the soft magnetic convex portion 2 having the non-magnetic member 1 facing the magnetic recording medium without using an adhesive so as to face the magnetic recording medium surface perpendicularly. Since the single magnetic pole type main magnetic pole 3 is formed, there is no problem of adhesive strength or the problem that the adhesive is exposed on the contact surface with the magnetic recording medium and contact stability during sliding is deteriorated.

[0012]

Embodiments of the perpendicular recording / reproducing magnetic head of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a first embodiment of a perpendicular recording / reproducing magnetic head of the present invention, in which FIG. 1A is a sectional view, FIG. 1B is a bottom view, and 2 is a non-contact portion with a magnetic recording medium. In the soft magnetic convex portion having the magnetic member 1, the soft magnetic convex portion 2 is formed by forming the concave groove 4 at the end of the ferrite block which is the soft magnetic body, and is adjacent to the concave groove 4. As a result, the soft magnetic return yoke 5 is formed.

On the side surface of the soft magnetic convex portion 2, a single magnetic pole type main magnetic pole 3 of a magnetic material such as CoZrNb, which faces perpendicularly to the surface of the magnetic recording medium, is formed into a thin film by a method described later to form the soft magnetic material. The convex portion 2 and the main magnetic pole 3 are integrated, and the recording / reproducing coil 6 is wound around the integrated soft magnetic convex portion 2 and the main magnetic pole 3 to form a perpendicular recording / reproducing magnetic head. In addition,
Although not shown, in order to reduce the edge noise of the soft magnetic return yoke 5, glass may be embedded in the front surface of the surface of the soft magnetic return yoke facing the magnetic recording medium.

FIG. 2 shows a second embodiment of the perpendicular recording / reproducing magnetic head according to the present invention, in which (A) is a sectional view, (B) is a bottom view, and this embodiment is (B). As shown in
The slider surface (floating surface) 7 is machined on the bottom surface using a well-known technique such as machining or ion milling, and a taper 7a is formed at the air inflow end of the slider surface 7, whereby the slider surface 7 and the main magnetic pole are formed. It is possible that the magnetic pole 3 slightly floats above the surface of the magnetic recording medium, or only the main magnetic pole 3 contacts the magnetic recording medium surface.

Further, the slider surface (floating surface) is not processed as described above, and the perpendicular recording / reproducing magnetic head is tilted by setting the mounting angle of the supporting spring member (not shown) to the perpendicular recording / reproducing magnetic head. It is possible to make only the main magnetic pole 3 contact the surface of the magnetic recording medium.

Next, a method of manufacturing the perpendicular recording / reproducing magnetic head of the present invention will be described in detail with reference to FIG. First,
As shown in the plan view of FIG. 3A and the side sectional view of FIG. 3B, a concave groove 9 for forming the non-magnetic member 1 is formed in a ferrite wafer substrate 8 which is a soft magnetic material. There are various methods for forming the groove 9.

An example of the method of forming the concave groove 9 is formed by well-known machining. Another method for forming the groove 9 is to form a resist film while leaving the portion where the groove 9 is to be formed, and then to etch the portion where the groove 9 is formed using a well-known technique such as an ion mill. The resist film is removed with an organic solvent or the like to form the groove 9.

Next, as shown in the plan view of FIG. 4A and the side sectional view of FIG. 4B, a glass melt, an alumina film, a diamond-like carbon film, etc. are formed in the groove 9 formed as described above. A thin film is formed, the non-magnetic member 1'is embedded, and after planarizing the non-magnetic member 1 ', a magnetic film 3'of CoZrNb or the like which becomes the main pole 3 is formed by a well-known technique such as sputtering.

Next, as shown in the plan view of FIG. 5A and the side sectional view of FIG. 5B, a resist film is formed in the shape of the main pole 3, and the magnetic film other than this resist film is chemically etched. The main pole 3 is etched by using a well-known technique such as an ion mill or an ion mill, and the resist film is removed by using an organic solvent or the like.
To form.

As another method of forming the main magnetic pole 3, although not shown, a resist film is formed on the wafer substrate 8 in which the non-magnetic member 1'is embedded and the upper surface of which is flattened while leaving the shape of the main magnetic pole 3. CoZrNb that is formed and becomes the main magnetic pole 3 on it
The magnetic pole 3'is formed by using a known technique such as sputtering, and the resist film is removed together with the magnetic film formed thereon using an organic solvent or the like to form the main magnetic pole 3. It After forming the main pole 3, an insulating protective film such as SiO ₂ or alumina is formed, and the wafer process is completed.

Next, as shown in the plan view of FIG. 6A and the side sectional view of FIG. 6B, the wafer substrate 8 is taken along the line L in FIG.
The magnetic head core group 10 in which a plurality of magnetic head cores are connected in a row is cut out by cutting the above, and then a plan view of (A) of FIG. 7, a front view of (B), and a side sectional view of (C). As shown in FIG. 5, a concave groove 4 is formed along the main magnetic pole 3 while leaving the non-magnetic member 1 '.

Next, as shown in the plan view of FIG. 8A, the front view of FIG. 8B, and the side sectional view of FIG. 8C, a plurality of magnetic head core groups 10 having the grooves 4 are formed. (3 pieces in the embodiment shown in the drawing) are connected to each other, and a groove 11 is collectively formed between the main magnetic poles 3 and then cut out along a line L,
As shown in FIG. 1, a thin film of a single magnetic pole type main magnetic pole 3 facing perpendicularly to the surface of the magnetic recording medium is formed on the side surface of the soft magnetic convex portion 2 having the non-magnetic member 1 facing the magnetic recording medium. A magnetic head core having a soft magnetic return yoke 5 formed adjacent to the soft magnetic convex portion 2 via a concave groove 4 is formed.

Next, as shown in the plan view of FIG. 9A and the side sectional view of FIG. 9B, the recording / reproducing coil 6 is wound around the integrated soft magnetic convex portion 2 and the main magnetic pole 3. Thus, a perpendicular recording / reproducing magnetic head can be constructed.

[0024]

As described above, in the perpendicular recording / reproducing magnetic head of the present invention, the side surface of the soft magnetic convex portion having the non-magnetic member on the surface facing the magnetic recording medium is perpendicular to the surface of the magnetic recording medium. A single-pole type main magnetic pole is formed as a thin film, and a soft magnetic return yoke is formed adjacent to the soft magnetic convex portion via a groove. The integrated soft magnetic convex portion and the main magnetic pole are provided with a recording / reproducing coil. Since it was configured by winding,
There is no spherical surface processing in which the apex of the main magnetic pole of the main magnetic pole block projects to the lowermost side, and the manufacturing is simplified, and the main magnetic pole block cannot be made too thin because of its strength as in the past.
There is no problem that it becomes an obstacle to the improvement of the magnetic recording / reproducing characteristics.

Further, according to the present invention, a single magnetic pole facing perpendicularly to the surface of the magnetic recording medium is formed by forming a thin film on the side surface of the soft magnetic convex portion having a nonmagnetic member facing the magnetic recording medium without using an adhesive. Since the main magnetic pole of the mold is formed, the problem of adhesive strength and the problem that the adhesive is exposed on the contact surface with the magnetic recording medium and the contact stability during sliding deteriorates are eliminated. It is possible to provide a perpendicular recording / reproducing magnetic head having

[Brief description of drawings]

FIG. 1 is a diagram showing a first embodiment of a perpendicular recording / reproducing magnetic head of the present invention.

FIG. 2 is a diagram showing a second embodiment of the perpendicular recording / reproducing magnetic head of the present invention.

FIG. 3 is a diagram showing a step of forming a concave groove for forming a non-magnetic member on a wafer substrate.

FIG. 4 is a diagram showing a step of forming a non-magnetic member in a groove formed in a wafer substrate and forming a soft magnetic film on the non-magnetic member.

FIG. 5 is a diagram showing a step of forming a main magnetic pole by etching a soft magnetic film formed on a wafer substrate.

FIG. 6 is a diagram showing a process of cutting a wafer substrate to cut out a magnetic head core group in which a plurality of magnetic head cores are connected in a row.

FIG. 7 is a diagram showing a step of forming a concave groove along a main magnetic pole formed in the magnetic head core group to form a soft magnetic convex portion.

FIG. 8 is a diagram showing a step of cutting out individual magnetic head cores.

FIG. 9 is a diagram showing a step of winding a recording / reproducing coil around a main magnetic pole attached to a soft magnetic convex portion formed on a magnetic head core.

FIG. 10 is a diagram showing a conventional perpendicular recording / reproducing magnetic head.

[Explanation of symbols]

 1 non-magnetic member 1'non-magnetic member 2 soft magnetic convex portion 3 main magnetic pole 3'magnetic film 4 concave groove 5 soft magnetic return yoke 6 recording / reproducing coil 7 slider surface 7a taper 8 wafer substrate 9 concave groove 10 magnetic head core group 11 concave Groove 12 Magnetic block 12a Groove 12b Excitation pole 13 Recording / reproducing coil 14 Main pole block 14a Main pole support member 14b Main pole support member 14c Main pole 14d Adhesive 15 Adhesive

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Hiroaki Wakamatsu 1015 Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa Fujitsu Limited

Claims (2)

[Claims] 1. A single magnetic pole type main pole (3) facing perpendicularly to the surface of a magnetic recording medium on a side surface of a soft magnetic convex portion (2) having a non-magnetic member (1) facing the magnetic recording medium. Is formed as a thin film, and a soft magnetic return yoke (5) is formed adjacent to the soft magnetic convex portion (2) through a groove (4), and the soft magnetic convex portion (2) and the integrated soft magnetic convex portion (2) are mainly formed. A perpendicular recording / reproducing magnetic head comprising a recording / reproducing coil (6) wound around a magnetic pole (3). 2. A step of forming, on a wafer substrate of a soft magnetic material, a non-magnetic member having a tip of a soft magnetic convex portion provided with a main magnetic pole of the magnetic head according to the number of magnetic heads formed, The step of forming the main pole so that the tip of the main pole is located on the non-magnetic member, the wafer substrate is cut, and a magnetic head core group in which a plurality of magnetic head cores are connected in a row is cut out, A step of forming a groove along the main magnetic pole while leaving the non-magnetic member; a step of cutting the magnetic head core group into individual magnetic head cores; and an integrated soft magnetic convex portion of the magnetic head core and the main magnetic core. And a step of winding a recording / reproducing coil around a magnetic pole.