JPH03277488A - Hand unit for part, part assembling device using such hand unit and method of testing part jointed state using such hand unit - Google Patents

Abstract

PURPOSE:To grip even extremely small parts with appropriate gripping force and enable highly accurate positioning by providing jogging mechanism for performing the jogging control of both position and gripping force of a hand part on the basis of the detection value from a position sensor and a gripping force sensor fitted at the hand part. CONSTITUTION:Gripping force control is performed by comparing the command value supplied to jogging mechanism 16, 17 respectively provided at hand parts 8, 9 to the detection value from gripping force sensors respectively fitted at the hand parts 8, 9 and feedback-controlling the jogging mechanisms 16, 17 to regulate force applied to the gripping force control parts 13 of the hand parts 8, 9. Position control is performed by comparing the command value supplied to the jogging mechanisms 16, 17 respectively provided at the band parts 8, 9 to the detection value from position sensors 14 respectively provided at the hand parts 8, 9 and feedback-controlling the jogging mechanisms 16, 17 to regulate force applied to the position control parts 12 of the respective hand parts 8, 9 while holding the gripping force of the hand parts 8, 9 to the set value.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a one-part hand unit, a part assembly device using the hand unit, and a method for testing the joint state of parts using the hand unit. , a hand unit that is a part suitable for gripping, positioning and assembling minute parts such as semiconductors and optical elements, or testing the quality of the joint between the parts and other members, and this hand unit. The present invention relates to a parts assembly device used and a method for testing the joint state of parts using a hand unit.

[Prior Art] A conventional device that performs a series of operations of gripping, positioning, and assembling a component is an integral type device using a parallel plate spring after gripping the component, as described in Japanese Patent Laid-Open No. 61-87110. The structure is such that an actuator is driven with respect to a structural member, and minute positioning of the part is performed using deformation of a leaf spring member.

[Problems to be Solved by the Invention] The above-mentioned prior art is capable of fine movement according to the gripping force on the gripped part!
! There is no adjustment mechanism, and there is a problem that it is not possible to detect the gripping force during fine movement, making it impossible to perform fine adjustment with high precision. There were problems such as difficulty in maintaining power.

The first object of the present invention is to provide a highly versatile component hand unit that can simultaneously grip a component with an appropriate gripping force and position it with high precision, can be configured with a small number of components, and is highly versatile. I beg you to do it.

A second object of the present invention is to provide a parts assembly device that can efficiently assemble parts using the hand unit.

Furthermore, a third object of the present invention is to provide a parts assembly device that can efficiently and accurately assemble parts using the hand unit.

A fourth object of the present invention is to provide a method for testing the joint state of parts, which allows the joint state of parts and other members to be accurately tested using the hand unit.

[Means for Solving the Problems] In order to achieve the first object, the present invention provides a method in which a pair of at least two hand parts for gripping a part to be gripped are arranged facing each other, and each hand a position control unit and a gripping force control unit, a position sensor is attached to the position control unit, a gripping force sensor is attached to the gripping force control unit,
Each hand is provided with a fine movement mechanism that finely controls the position and gripping force of the hand based on detected values from a position sensor and a gripping force sensor attached to the hand.

Further, in order to achieve the first object, the present invention provides a position control section and a gripping force control section of each hand section, such as between a notch and a leaf spring, between a leaf spring and a notch, between two notches, and between a leaf spring and a leaf spring. Furthermore, the fine movement mechanism of each hand part includes a piezoelectric element, a magnetostrictive element, an element whose volume changes in response to chemical changes and whose force changes, and a physical This uses any element whose volume changes and force changes in response to change.

Furthermore, in order to achieve the first object, the present invention provides a hand portion made of a material whose volume changes in response to a chemical change and whose force changes, and a material whose volume changes in response to a physical change. and is made of any material whose force changes, and at least two of the hand portions are arranged facing each other to grip the gripped part, and a position sensor and a gripping force sensor are attached to each hand portion, The position and gripping force of each hand part can be controlled based on the detected values of the position sensor and gripping force sensor attached to each hand part.

Further, in order to achieve the second object, the present invention is such that the hand unit is attached to a coarse movement mechanism capable of coarse rpm in at least two dimensions in the gripping direction of the gripped part.

Furthermore, in order to achieve the third object, the present invention is equipped with an optical system that irradiates the observation illumination light to the center of the hand unit, and also provides an optical system that irradiates observation illumination light to the center of the hand unit. It is equipped with an image processing device that images the relative position and processes one image, and is also equipped with an optical system that irradiates the center of the hand unit with observation illumination light, and a system that connects each hand of the hand unit and the part to be gripped. This system is equipped with an image processing device that captures images of the relative positions of the objects and performs image processing.

In order to achieve the fourth object, the present invention uses the hand unit, brings at least one of the plurality of hand parts constituting the hand unit into contact with the part to be tested, and The tester applies a pressure applied to the test piece to check the quality of the joint between the part to be tested and other members.

[Operation] In the hand unit of the present invention, the plurality of hand parts are placed in a mutually open state at a position for gripping a part to be gripped.

Next, a command is given to drive the fine movement mechanism provided in each hand section, and force is applied to the position control section and gripping force control section provided on each hand section, and at the same time, a command is given to the position control section of each hand section. The position and gripping force of each hand part are detected by the attached position sensor and the gripping force sensor attached to one gripping force control part.

Then, gripping force control is performed by comparing the command value given to the fine movement mechanism provided in each hand with the detection value from the gripping force sensor attached to each hand, and performing feedback control on the fine movement mechanism. This is done by adjusting the force applied to the gripping force control section of the hand section.

In addition, position control compares the command value given to the fine movement mechanism provided in each hand with the detection value from the position sensor attached to each hand, and performs feedback control of the fine movement mechanism, and This is done by adjusting the force applied to the position control section of the hand section while maintaining the gripping force of the hand section at a set value.

Furthermore, by simultaneously performing the gripping force control and position control, the gripping force and position of the component can be adjusted at the same time.

In this way, in the hand unit of the present invention, each of the plurality of hand sections is provided with a fine movement mechanism, and one fine movement mechanism directly controls both the position of the hand section and the gripping force. Even if the parts to be gripped are minute ones,
The parts can be gripped with appropriate gripping force and positioned with high precision, and these parts can be gripped and positioned at the same time. Furthermore, since one fine movement mechanism is commonly used to control the position and gripping force of each hand, it is possible to control the position and gripping force of each hand at the same time with a small number of members. Furthermore, since each hand can be driven independently by a fine movement mechanism, it can be operated in a variety of ways depending on the shape of the other component to which the parts are assembled, resulting in improved versatility. be.

Further, in the hand unit of the present invention, the position control section and the gripping force control section of each hand section are configured by combining a notch and a leaf spring part, a leaf spring part and a notch, two notches, or two leaf springs. In either case, the position control and gripping force control of each hand part can be performed accurately.

Furthermore, in the hand unit of the present invention, the fine movement mechanism of each hand part is composed of a piezoelectric element, a magnetostrictive element, an element whose volume changes and force changes in response to chemical changes such as temperature, and the amount of light and wavelength of light. The device is composed of elements that change volume and force in response to physical changes such as .

In addition, other hand units of the present invention include materials whose volume changes and force changes in response to chemical changes such as temperature;
Alternatively, a plurality of hands made of a material whose volume and force change in response to physical changes such as the amount of light or wavelength of light are installed in positions where they are open to each other and grip the part to be gripped. .

Next, chemical commands such as temperature, and physical commands such as light intensity and wavelength are given to each hand part to change the volume of each hand part and generate force, gripping the part to be gripped and adjusting the position. At the same time, the position is detected by a position sensor attached to each hand, and the gripping force is detected by a gripping force sensor attached to each hand.

In this hand unit as well, gripping force control is performed by comparing the command value given to the fine movement mechanism provided in each hand with the detection value from the gripping force sensor attached to each hand, and This is done by performing feedback control and adjusting the force applied to the gripping force control section of the hand section.

In addition, position control compares the command value given to the fine movement mechanism provided in each hand with the detection value from the position sensor attached to each hand, and performs feedback control of the fine movement mechanism, and This is done by adjusting the force applied to the position control section of the hand section while maintaining the gripping force of the hand section at a set value.

Furthermore, by simultaneously performing the gripping force control and position control, the gripping force and position of the component can be adjusted at the same time.

Therefore, in this hand unit, each of the plurality of hand parts is provided with a fine movement mechanism, and one fine movement mechanism directly controls both the position and gripping force of the hand part, so that the gripped part Even minute parts can be gripped with appropriate gripping force and positioned with high precision.
Gripping and positioning of these parts can be performed simultaneously. Furthermore, since one fine movement mechanism is commonly used to control the position and gripping force of each hand, it is possible to control the position and gripping force of each hand at the same time with a small number of members.

Next, in the parts assembly apparatus of the present invention, the hand unit is attached to a coarse movement mechanism. The coarse movement mechanism is configured to be movable in at least two dimensions in the gripping direction of the gripped component.

Therefore, in this part assembly device, when gripping a part to be gripped, first drive the coarse movement mechanism with each hand part of the hand unit open, and move the hand part to the position where it grips the part to be gripped. let

Next, each hand part is driven by a fine movement mechanism to grip the part to be gripped, and the part gripped by the fine movement mechanism is
Position it relative to the other member to be assembled. Grip force control and position control of such parts are performed based on detection values of a grip force sensor and a position sensor attached to each hand section.

After positioning the parts, the parts are assembled to the other member. Then, the fine movement mechanism of at least one of the opposing hands among the plurality of hands is driven to operate the hand in a direction to open the hand, thereby releasing the component.

Subsequently, the coarse movement mechanism is driven to return the hand unit to the original position and return each hand section to the original position.

Therefore, in this parts assembly apparatus, parts can be assembled efficiently using the hand unit.

Another apparatus for assembling parts according to the present invention is equipped with an optical system. This optical system is designed to irradiate observation illumination light onto the center of the hand unit.

Therefore, according to this parts assembly apparatus, the optical system irradiates the part to be gripped with observation illumination light, and the gripping 2 positioning can be performed without observing the part to be gripped, making the work more efficient and possible. Can be carried out accurately.

Furthermore, another apparatus for assembling parts according to the present invention is equipped with an image processing apparatus. This image processing device.

The relative position of each hand part of the hand unit and the gripped part is imaged and the image processing is performed.

Therefore, in this parts assembly apparatus, the part to be gripped is gripped based on the relative position information of each hand section and the part to be gripped obtained by the image processing device.

Since positioning can be performed, work can be performed efficiently and accurately.

Furthermore, another assembly device for parts according to the present invention is equipped with both the optical system and one image processing device.

As a result, in this parts assembly apparatus, the grip 9 positioning of the gripped part can be performed more efficiently and accurately.

In the method for testing the joint state of parts according to the present invention,
(a) At least one of the plurality of throat portions constituting the hand unit is brought into contact with the part to be tested. Furthermore, a predetermined pressing force is applied to the component to be tested by the hand section.

Is the pressure at a predetermined value?
This is confirmed by the gripping force sensor attached to the hand.

Next, the quality of the joint between the component under test and other components is inspected by soldering or the like.

As described above, in the method for testing the joint state of parts according to the present invention, the joint state of the part and other members can be accurately tested by using the hand unit for gripping and positioning the part.

[Example code] Embodiments of the present invention will be described below with reference to the drawings.

1 to 10 (A) and (B) show an embodiment of the present invention, in which FIG. 1 is a perspective view of an assembly device for micro parts, FIG. 2 is a conceptual diagram of the same assembly device, Fig. 3 is an enlarged perspective view of one hand part constituting the hand unit, and Fig. 4 shows the supply, gripping, and positioning of the target component, which is a micro component.
Flowchart showing the process leading to assembly, Figure 5 (A
), (B) are schematic diagrams showing the deformed state of the position detection section provided in the hand section, and FIGS. 5(C) and (D) show the deformed state of the gripping force control section provided in the same hand section. Schematic diagram, No. 6
Figures (A) to (D) are diagrams showing the relationships between load-strain amount, voltage-displacement, voltage-strain amount, and voltage-load applied to the hand unit when a piezoelectric element is used as the fine movement mechanism of the hand unit, 7(A) to (C) are explanatory diagrams of the hand unit position control 9 gripping force control 1 position and gripping force control, and FIG. 8(A)
, (B) is an explanatory diagram when gripping force control and position control of the hand unit are performed at the same time, and Figures 9 (A) to (E) and Figures 10 (A) and (B) are parts of various shapes. FIG. 4 is an explanatory diagram of the positioning of the microcomponents to be assembled thereto, and the direction in which the hand portion of the hand unit is released.

The assembly apparatus of the embodiment shown in these figures is shown in FIG.

As shown in FIG. 2, there is a support stand 1 having an arm 2 for supporting various members, a parts supply stand 3, and this parts supply stand 3.
a transport mechanism 4, a hand unit 7 that grips and positions a minute component 6, and a coarse movement mechanism 2 of this hand unit 7.
0, an optical system 38 for observation illumination light, and a control device 3 for each part.
9.

In this embodiment, as shown in FIG. 2, the component to which the component is assembled is a component 5, and the target component to be positioned and assembled thereon is a micro component 6.

The component supply table 3 is mounted on a transport mechanism 4 that is movable in the X and Y directions. This component supply table 3 is configured to transport components 5 and microcomponents 6 to predetermined positions via a transport mechanism 4.

As shown in FIG. 1 and FIG.
It is composed of a pair of individual hand parts 8 and 9 and piezoelectric elements 16 and 17 which are fine movement mechanisms provided in each hand part 8 and 9.

In this embodiment, the hand parts 8 and 9 are made of a rigid and elastically deformable material such as iron.

Further, each hand section 8, 9 is formed by combining a frame section 10 and a chuck section 11 into a key shape, as shown in FIG. As shown in FIG. 3, the chuck section 11 of each hand section 8, 9 is provided with a position control section 12 and a gripping force control section 13 at intervals in the length direction. As shown in FIG. 3, the position control section 12 includes a cutout section 12a provided facing the chuck section 11 in the radial direction;
12b, and a strain gauge 14, which is a position sensor, is attached to the outside of the notches 12a and 12b. As shown in FIG. 3, the gripping force control section 13 is formed of plate springs 13a and 13b provided parallel to each other in the width direction of the chuck section 11, that is, a parallel plate spring. A strain gauge 15, which is a gripping force sensor, is attached to the outside of 3a and 1.3b. The strain gauges 14 and 15 are controlled by a control device 39 for each part shown in FIG.
The detected value is sent to the

The piezoelectric element 16 is connected to the frame portion 1 of one hand portion 8.
0 and the chuck part 11, and applies a voltage to the piezoelectric element 16 through the amplifier 18, and the piezoelectric element 16 controls the position control part 12 and the gripping force control part 13 provided in the chuck part 11 of the hand part 8. It is designed to give power in common. The piezoelectric element 17 is provided between the frame part 10 and the chuck part 11 of the other hand part 9,
A voltage is applied to the piezoelectric element 17 through the amplifier 19, and the piezoelectric element 17 applies a force in common to the position control section 12 and the gripping force control section 13 provided on the chuck section 11 of the hand section 9. . In addition, the amplifier 18.19
are connected to a control device 39 of each section shown in FIG.

The coarse movement mechanism 20 of the hand unit 7 is shown in FIG.

As shown in Figure 2, the X-direction coarse movement part of the rectangular coordinate system,
In addition to the directional coarse movement section and the two-direction coarse movement section, it is configured to include an attitude control section around the Y axis and an attitude control section around the two axes.

As shown in FIG. 2, the X-direction coarse movement section of the hand unit 7 includes a ball screw 21 and a guide 22. which is fixed to the hand sections 8, 9 of the hand unit 7 and screwed into the ball screw 21. 23, a motor 28 for driving the ball screw 21, and an amplifier 33 for the motor 28.

The YZ direction coarse movement section, as shown in FIGS. 1 and 2,
A YZ direction linear stage 25, an actuator 30 for moving this, and an amplifier 3 for this actuator 30.
5.

As shown in FIGS. 1 and 2, the posture control unit around the Y-axis includes a rotation stage 26 around the Y-axis (in the η direction), a motor 31 that rotates the stage 26, and an amplifier 3 for the motor 31.
6.

As shown in FIGS. 1 and 2, the attitude control unit around the two axes includes a rotation stage 27 around the two axes (in the θ direction), a motor 32 that rotates the stage 27, and an amplifier 3 for the motor 32.
7.

As can be seen from FIG. 2, the hand unit 7 and its coarse movement mechanism 20 are supported by the arm 2 of the support base 1 via a YZ direction linear stage 25. Also,
The amplifiers 33 to 37 of the coarse movement mechanism 20 are also connected to a control device 39 shown in FIG.

The optical system 38 irradiates the center of the hand unit 7 with illumination light and captures the reflected light so that the relative positions of the microcomponents 6 and the hand parts 8 and 9 of the hand unit 7 can be observed. It has become.

The hand unit and micro component assembly apparatus of the embodiment shown in FIGS. 1 to 10 (A) and (B) operate as follows.

Now, referring mainly to FIGS. 1 to 4, a series of operations including transporting, gripping, positioning, and assembling of minute parts will be described.

First, at the component supply position, place the microcomponent 6 on the component supply table 3 shown in FIG. Part positioning 9 Supply to assembly position. Although the orientation of the minute component 6 at this time is not adjusted, the minute component 6 is within the field of view of the optical system 38 provided at the center of the hand unit 7.

After supplying the microcomponents 6, while observing the microcomponents 6 with the optical system 38, move the YZ direction linear stage 25 of the coarse movement mechanism 20,
X-direction linear stage 24. Rotation stage 2 around two axes
7. Move the rotation stage 26 around the Y axis to remove the micro parts 6.
The positions and postures of the hand sections 8 and 9 of the hand unit 7 are adjusted relative to the above.

Next, the ball screw 21 of the X-direction coarse movement section is rotated in the direction in which the hand sections 8 and 9 of the hand unit 7 grip the microcomponent 6, and the guide 22.
The hand parts 8 and 9 are sent in a direction approaching each other via 23, and the chuck parts 11 of the hand parts 8 and 9 are brought into contact with the microcomponent 6. The contact force at this time is set to be less than or equal to a set value A, which is set to a magnitude that does not impair the quality of the microcomponent 6.

Determination as to whether the contact force is less than or equal to the set value A is made using the strain gauge 1 attached to the chuck part 11 of each hand part 8.9.
This is done by taking in the force signal from 5. Further, the optical system 38 confirms the state of the microcomponent 6 when the hands 8 and 9 contact the microcomponent 6, and takes into consideration the influence on quality.

If the contact force between the hands 8 and 9 is greater than the set value A, and it is determined that there is a risk of adversely affecting the quality of the microcomponent 6, the coarse movement section in the X direction moves the microcomponent 6 to the hand 8°. Once the tip of the chuck part 11 of 9 is released, the X-direction linear stage 24, the rotation stage 26 around the Y-axis, and the rotation stage 27 around the Z-axis are moved again. position.

After adjusting the posture, move the hand part 8 of the hand unit 7.
, 9 are brought into contact with the microcomponent 6 with a contact force that is less than the set value A and greater than O.

Note that the contact force of the tips of the chuck portions 11 of the hand parts 8 and 9 of the hand unit 7 to the micro component 6 by moving the coarse movement mechanism 2o is not able to grip the micro component 6. It has become.

After bringing the tips of the chuck parts 11 of the hand parts 8 and 9 of the hand unit 7 into contact with the micro parts 6 with an appropriate contact force that does not impair the quality of the parts, the hand parts 8 and 9 of the hand unit 7 are brought into contact with each other.
An amplifier 18.
19 applies a voltage, and the piezoelectric elements 16 and 17 move the chuck portions 11 of the hands 8 and 9 in a direction to sandwich the microcomponent 6, thereby pressurizing the microcomponent 6. The pressing force at this time is set to a value B that is necessary to grip the microcomponent 6 and does not impair the quality of the microcomponent 6.

After the microcomponent 6 is gripped by the hand section 8.9 of the hand unit 7 with a pressure of a set value B, the YZ direction linear stage 25 is moved in a direction away from the component supply table 3. As a result, the microcomponent 6 held by the hand parts 8 and 9 of the hand unit 7 is once lifted.

In this state, the transport mechanism 4 moves the component supply table 3 to the component supply position and places the component 5 on the component supply table 3. Then,
The transport mechanism 4 moves the component supply table 3 to the component positioning 9 assembly position, and the component 5 to which the microcomponent 6 is to be assembled is positioned at the positioning 9 assembly position.

Next, the X-direction linear stage 24 of the coarse movement mechanism 20 of the hand unit 7 is moved. The rotation stage 26 around the Y axis and the rotation stage 27 around the Z axis are moved to position the microcomponent 6 with respect to the component 5 and adjust its posture at the same time. Furthermore, a piezoelectric element 16 which is a fine movement mechanism of the hand unit 7.
17, the hand parts 8 and 9 are moved, and the microcomponent 6 is positioned at a predetermined position with high accuracy with respect to the component 5.

After positioning the minute component 6 with respect to the component 5 with high precision, the YZ direction linear stage 25 is moved in a direction to bring the hand sections 8 and 9 closer to the component 5.
The microcomponent 6 held by the microcomponent 6 is assembled to the predetermined position of the component 5.

After assembling the micro component 6 to the component 5, the piezoelectric element 16.
17, and also remove the ball screw 21 of the coarse movement mechanism 20 of the hand unit 7 from the hand unit 8,
9 is rotated in the direction of separation, and the hand portions 8 and 9 are separated from the microcomponent 6 via the guides 22 and 23, thereby completing the work.

These series of sequential operations are simply shown in the flowchart of FIG.

In addition, after the positioning and assembling of the microcomponents 6 to the component 5 is completed, the transport mechanism 4 is activated and the component supply table 3 is moved.
The part 5 with the minute parts 6 assembled thereto is sent to the next process.

Next, FIGS. 5(A) to (D) and FIGS. 8(A) and (B)
), the operation of the hand unit will be explained in detail.

The position control section 12 of the hand sections 8 and 9 of the hand unit 7 is formed by notches 12a and 12b, and the gripping force control section 13 is formed by a parallel leaf spring formed by leaf springs 13a and 13b, and position control is performed as a position 9 gripping force sensor. In this embodiment, strain gauges 14 and 15 are attached to the portion 12 and the gripping force control portion I3, and piezoelectric elements 16 and 17 are used as the fine movement mechanism.

When force is applied to the chuck parts 11 of the hand parts 8 and 9 by the piezoelectric elements 16 and 17, the position control part 12 and the strain gauge 14 are deformed as shown in FIG. 5(A) → (B), and the gripping force is controlled. The portion 13 and the strain gauge I5 are deformed as shown in FIG. 5(C)→(D). At this time, the position control section 12 and the gripping force control section 1
By varying the force applied to strain gauge 14.
15 expands and contracts, and the resistance value to electric charge changes, so the applied force signal, that is, the voltage value changes.

Therefore, one gripping force control is (i) As shown by reference numeral 41 in FIG. 6(A), the load applied to the chuck part 11 of the hand part and the gripping force control part 13
The results of pre-measurement of the relationship between the amount of distortion and (il)
As shown in FIG. 6(C), based on the results of pre-measurement of the relationship between the voltage applied to the piezoelectric element and the strain amount of the gripping force control unit 13, (iii) As shown in FIG. 6(D), This can be done by deriving the relationship between the command value of the voltage applied to the piezoelectric element and the load.

Furthermore, 1-position control is based on (i) the result of previously measuring the relationship between the load applied to the chuck part 11 and the amount of strain in the position control part 12, as shown by reference numeral 40 in FIG. 6(A), and (ii) As shown in FIG. 6(B), based on the results of measuring the relationship between the voltage applied to the piezoelectric element and the amount of displacement of the tip of the chuck portion 11 in advance.

(■) As shown in FIG. 6(D), this can be done by deriving the relationship between the command value of the voltage applied to the piezoelectric element and the load.

In the case of gripping force control, as shown in FIG. 7(B), a force signal from the strain gauge 15 is detected, and the hand portion 8,
A voltage is applied to the piezoelectric elements 16 and 17 of No. 9 as a command value.

In addition, in the case of position control, as shown in Fig. 7 (A),
The piezoelectric elements 16 of the hand parts 8 and 9 detect the force signal from the strain gauge 14, and move the hand parts 8 and 9 by the same amount of movement toward the target position according to the detected force signal.
．． A voltage is applied to 17 as a command value.

Furthermore, when performing position control and grip force control at the same time,
As shown in FIG. 7(C), while detecting the force signal from the strain gauge 15 and the force signal from the strain gauge 14, a command is given so that both the gripping force and the amount of movement satisfy the target values. Apply voltage as a value. The command value at this time is different between the piezoelectric element 16 of the hand section 8 and the piezoelectric element 17 of the hand section 9.

In this embodiment, the hands 8 and 9 are slightly moved by independently controllable piezoelectric elements 16 and 17, so that it is possible to give commands as described above. Now, for example, as shown in FIGS. 8(A) and 8(B), the microcomponent 6 held by the hands 8 and 9 is moved from the current position X to Xl.
While positioning the current gripping force f1 to f2 (however,
Suppose we want to change it to L>fl).

In this case, the movement command value DR of the hand section 9 is.

DR= (xi xo)+ΔR (however, ΔR≧0)
The movement command value DL of the hand section 8 is DL= (X Knee X O) - ΔL (However, Δ, ≧0)
It is sufficient to give ΔR9ΔL.

The ΔR9ΔL is a value determined from the detection signals from the strain gauge 14.15 attached to the hand portion 8 and the strain gauge 14.15 attached to the hand portion 9, and Δf. However, Δf=ft fl .

According to this embodiment, as described above, the position.

Simultaneous control of gripping force is possible.

Further, in this embodiment, the hand portion 8 of the hand unit 7,
Since the hand parts 9 are configured to be able to be independently and finely controlled, the hand parts 8 and 9 can be controlled as follows.

That is, as shown in FIGS. 9(A) to 9(D), when the surface of the component 5 to which the microcomponent 6 is assembled is flat, the component 5
After positioning and assembling the microcomponent 6, the piezoelectric elements move the hand parts 8, 9 the same distance in the direction away from each other, as shown in FIG. 9(E).
Control can be performed to release the microcomponent 6 from the microcomponent 9.

Furthermore, as shown in FIGS. 10(A) and 10(B), if there is a protrusion 5' on the surface of the component 5 to which the microcomponent 6 is to be assembled, for example, on the negative side, the microcomponent After positioning and assembling the small parts 6, the hand part 9 on the convex part 5' side is not moved, and only the hand part 8 is moved by the piezoelectric element, and the micro parts 6 are controlled to be released from the hand parts 8, 9. You can also do it.

In addition, in FIGS. 9(A) to 10(D) and FIG. 10(A), the portions surrounded by broken lines indicate the assembly positions of the microcomponents 6.

Furthermore, an image processing device (not shown) may be provided in place of the optical system 38 in the parts assembly apparatus shown in FIGS. 1 and 2.

Then, an image processing device 1 images the relative position of each hand part 8, 9 of the hand unit 7 and the micro component 6, processes the image, and calculates the relative position of each hand part 8.9 and the micro component 6. By creating information and moving each hand section 8, 9 based on the position information, work can be performed more efficiently and accurately.

Furthermore, both the optical system 38 and the image processing device may be provided. In this way, work can be performed more efficiently and accurately.

Next, FIGS. 11 to 14 each show various embodiments of the hand portion of the hand unit, and are perspective views of only one hand portion.

In the hand parts 8 and 9 shown in FIG. 11, the chuck part 11 is provided with a position control part 42 and a gripping force control part 43. The position control section 42 is formed of parallel leaf springs consisting of leaf springs 42a and 42b provided parallel to each other in the width direction of the chuck section 11. The gripping force control section 43
are formed by notches 43a and 43b provided oppositely in the width direction of the chuck portion 11. A strain cage 14 is attached to the outside of the leaf springs 42a and 42b of the position control section 42, and the notch 4 of the gripping force control section 43
A strain gauge 15 is attached to the outside of 3a and 43b.

Further, in the hand parts 8 and 9 shown in FIG. 12, a position control part 44 and a gripping force control part 45 are provided in the chuck part 11. The position control section 44 is a cutout section 44a that is provided to face the chuck section 11 in the width direction.

44b. The gripping force control section 45 is formed by notches 45a and 45b provided oppositely in the width direction of the chuck section 11. A strain gauge 14 is pasted on the outside of the notches 44a and 44b of the position control section 44, and the notch 4 of the gripping force control section 45
A strain gauge 15 is attached to the outside of 5a and 45b.

Furthermore, the hand parts 8 and 9 of the embodiment shown in FIG.
A position control section 46 and a gripping force control section 47 are provided in the chuck section 11.
and is provided. The position control section 46 includes leaf springs 46a provided parallel to each other in the width direction of the chuck section 11.
, 46b. The gripping force control section 47 is formed of parallel plate springs including plate springs 47a and 47b provided in the width direction of the chuck section 11 in parallel to the ears. A strain gauge 14 is attached to the outside of the leaf springs 46a, 46b of the position control section 46, and a strain gauge 15 is attached to the outside of the leaf springs 47a, 47b of the gripping force control section 47. .

In the hand portions 8 and 9 of the embodiment shown in FIG.
A position control section 48 and a gripping force control section 49 are provided in the chuck section 11.
and is provided. The position control section 48 includes cutout sections 48a provided oppositely in the width direction of the chuck section 11;
48b. The gripping force control section 49
is formed of an inclined leaf spring consisting of leaf springs 49a and 49b whose spacing gradually decreases toward the tip of the chuck portion 11. Notch portion 48 of the position control section 48
A strain gauge 14 is pasted on the outside of a and 48b,
A leaf spring 49a of the gripping force control section 49.

A strain gauge 15 is attached to the outside of 49b.

Hand portion 8°9 of the embodiment shown in FIGS. 11 to 14
The action is similar to that shown in FIG. 3 above.

Furthermore, the hand parts 8 and 9 may be constructed by an integral notch mechanism (not shown) other than those shown in FIGS. Since it deforms and rotates, it is possible to reduce the displacement of the tip of the chuck part 11 when gripping the component 6, and it is also possible to reduce displacement errors.

Furthermore, the fine movement mechanism of the hand parts 8 and 9 is not limited to a piezoelectric element, but may also use a magnetostrictive element or the like.

Furthermore, the chuck portions 11 of the hand portions 8 and 9 are not limited to one degree of freedom in the X direction shown in the drawings, but have two degrees of freedom in the Y or Z direction in addition to the X direction, and x, y, and z. direction 3
It may be a degree of freedom, and when it is made into multiple degrees of freedom, it becomes possible to grip the minute component 6 even more accurately.

Furthermore, the hand parts 8 and 9 are not limited to being made of a rigid and elastically deformable material such as iron.

It may be made of a material having high toughness, such as hard rubber or plastic, and the chuck portions 11 of the hand portions 8 and 9 may be provided with a position control portion and a gripping force control portion as described above.

When the hand parts 8 and 9 are made of hard rubber or plastic, as a fine movement mechanism of the hand unit 7,
A device made of a material whose volume and force change in response to chemical changes such as temperature.

It is also possible to use a material made of a material whose volume and force change in response to physical changes such as the amount of light and wavelength of light.

Next, FIGS. 15, 16, and 17 (A) to (
D) shows another embodiment of the hand unit of the present invention, FIG. 15 is a conceptual diagram of the hand unit, FIG. 16 is a conceptual diagram showing the operating state, and FIGS. FIG. 7 is a diagram showing the relationship between the material forming the hand portion and the amount of light in the example.

The hand unit 50 of the embodiment shown in these figures includes a pair of hand parts 51.52, an optical sensor 53 which is a position sensor and an optical sensor 54 which is a grip force sensor provided on each hand part 51.52. , a light 55 which is a fine movement driving source for the hand parts 51 and 52, and a light amount control device 5 for this light 55.
6.

The hand portions 51 and 52 are made of a material that is transparent and whose size, that is, volume, changes in response to changes in the amount of light. The characteristics of the material forming the hand portions 51, 52 are shown in FIGS. 17(A) and (C) or FIG. 17(
Shown in B) and (D).

Optical fibers, light receiving elements, and the like are used for the optical sensor 53, which is the position sensor, and the optical sensor 54, which is the gripping force sensor. These optical sensors 53 and 54 detect the amount of light transmitted through the hand portions 51 and 52, and send the detected values to the light amount control device 56.

The light amount control device i56 gives light 55 as a command value to the hand portion 51.52, and compares the amount of light sent to the hand portion 51.52 with the amount of light taken in from the optical sensor 53.54, and calculates the amount of light as shown in FIG. A) and (C) or Figure 17 (B)
Based on the relationship between and (D), the hand sections 51 and 52 are feedback-controlled.

In the hand unit 50 of this embodiment, when gripping and positioning the microcomponent 6, the light amount control device 56 sends light 55 to the hand portions 51 and 52 as a fine movement driving force.

When light 55 is applied to the hand portion 51.52, the volume of the hand portion 51.52 changes as shown in FIG. 17 (A) or (B) depending on the amount of light, and the force of the hand portion 51. It changes as shown in Figure 17 (C) or (D). This makes it possible to finely adjust the gripping force of the hand parts 51 and 52 on the microcomponent 6, and also to finely adjust the position of the microcomponent 6 by moving the hand parts 51 and 52.

At the same time that light 55 is applied to the hand portion 51.52, the amount of light transmitted through the hand portion 51.52 is measured by an optical sensor 53.54.
and sends the inspection value to the light amount control device 56.

The light amount control device 56 compares the amount of light given as a command value to the hand portion 51.52 and the amount of light taken in from the optical sensor 53.54, and compares the amount of light given as a command value to the hand portion 51.52 and the amount of light taken in from the optical sensor 53.54. Based on the relationship between (B) and (D), the hand portion 5
1. Finely adjust the gripping force and position of the micro component 6 according to 52, and position it.

The other functions of the second structure of this embodiment are the same as those described for the embodiment shown in FIGS. 1 to 3 above.

Next, FIGS. 18(A) to 18(D) show another embodiment of the hand unit of the present invention, and are diagrams showing the relationship between the material constituting the hand portion and the wavelength of light.

In this embodiment, a fine movement drive source for finely adjusting the gripping force and position of the hand section is used in FIGS. 15 to 17 (A) to (
A light wavelength is used instead of the light in the example shown in D).

The material constituting the hand part has the relationship between light wavelength and volume, light wavelength and force as shown in Figure 18 (A) and (C), or Figure 18.
The relationships shown in Figures (B) and (D) are used.

Further, an optical sensor is used as a position sensor and a grip force sensor of the hand portion, and a light-sensitive filter or the like is used for the optical sensor.

The optical wavelength is controlled by an optical wavelength control device capable of feedback control based on the relationships shown in FIGS. 18(A) and (C) or 18(B) and (D). There is.

The other structure and operation of this embodiment are the same as those of the embodiment shown in FIGS. 15 to 17(A) to 17(D).

Furthermore, in the hand unit of the present invention, the hand section itself may be formed of a material whose volume changes and force changes in response to physical changes such as sound waves, and furthermore, the hand section itself may be formed of a material that changes in volume and force in response to physical changes such as sound waves. It may be made of a material whose volume and force change in response to the change in volume.

Next, FIGS. 19(A), (B), and 20 show a method for testing the joining state of parts using a hand unit, and FIGS. 19(A), (B) show the joining state of parts. FIG. 20 is a flowchart showing the process of testing the joint state of parts.

In the method of testing the joint state of parts in this embodiment, a hand unit 7 according to the present invention shown in FIGS. 1 to 3, for example, is used. In addition, the method for testing the joint state of parts in this embodiment shows a case in which a minute part 6 is soldered to a part 5, and the soldering part 57 is tested to see whether or not it has a predetermined joint strength. .

In carrying out this test method for the joint state of parts, the part 5 to which the micro parts 6 are soldered is shown in FIG. 19 (A
), a fixing means (not shown) is mounted on the fixing base 58.
Fix it by.

Next, one hand portion of the hand unit 7, that is, the hand portion 9 in the embodiment shown in FIGS. 19(A) and 19(B), is brought into contact with the microcomponent 6.

Next, when the hand unit 7 shown in FIGS. 1 to 3 is used, the piezoelectric element 17, which is a fine movement mechanism, is driven, and the hand part 9 is moved as shown by arrows in FIGS. direction, applying a predetermined pressing force C to the microcomponent 6, and checking whether the solder is in a good state of adhesion.

The judgment as to whether or not the pressing force applied to the microcomponent 6 has reached the prescribed pressing force C is made by the plate of the gripping force control section 13 of the chuck section 11 shown in FIGS. 1 and 3. Spring 13a
Alternatively, it can be performed using a force signal from the strain gauge 15 attached to the outside of the strain gauge 13b.

A predetermined pressure C is applied to one of the microcomponents 6, and when the solder adhesion force is greater than the pressure C, it is determined that the soldering condition is good, and the soldering of the microcomponent 6 to one component 5 is performed. Attached is the end of assembly. If the solder adhesion force is smaller than the pressing force C, the 19th
As shown in Figure (B), part 57 is broken during soldering.

In that case, the hand portion 8°9 of the hand unit 7 grasps the minute component 6, and the hand portion 8 of the hand unit 7
, 9, the piezoelectric elements 16 and 17 shown in FIG.
After driving the microcomponent 6 and repositioning the microcomponent 6 with respect to the component 5, the soldering is corrected. Then, after assimilating the soldered parts again, the hand unit 7 is used again to test the joint state of the parts.

Incidentally, these series of processes are simply shown in the flowchart of FIG.

As can be seen from the above explanation, the hand unit of the present invention is used to position the microcomponent 6 with respect to the component 5, and after assembling the component 5 and the microcomponent 6 by soldering, etc., Soldering using the unit is part 57
It is also possible to conduct tests on the bonded state such as.

Note that this testing method for the joint state of parts is not limited to the hand unit 7 shown in FIGS.
The hand unit 50 shown in FIGS. 17(A) to (D),
A hand unit or the like having the characteristics shown in FIGS. 18(A) to 18(D) may be used.

[Effects of the Invention] According to the invention described in claim 1 described above, at least two hand parts forming a pair for gripping a part to be gripped are arranged to face each other, and each hand part is provided with position control. and a gripping force control unit, a position sensor is attached to the position control unit, a gripping force sensor is attached to the gripping force control unit,
Based on the detected values from the position sensor and gripping force sensor attached to each hand part, one piece is attached to the corresponding A
A fine movement mechanism is provided to finely control the position and gripping force of the throat part, and each of the plurality of hand parts is provided with a fine movement mechanism.
The fine movement mechanism directly controls both the position and gripping force of the hand, so even if the part to be gripped is minute, it can be gripped with appropriate gripping force and with high precision. In addition to being able to position the parts, it also has the effect of simultaneously gripping and positioning these parts. Moreover, since one fine movement mechanism is used for controlling the position and gripping force of each hand, it is possible to control the position and gripping force of each hand at the same time with a small number of members. ) Since the throat parts can be driven independently by the fine movement mechanism, they can be operated in a variety of ways according to the shape of the other member to which the parts are assembled, resulting in improved versatility.

According to the second aspect of the invention, the position control section and the gripping force control section of each hand section can be arranged between the notch and the leaf spring, between the leaf spring and the notch, between the notches, and between the leaf springs. According to the third aspect of the invention, the fine movement mechanism of each hand part includes a piezoelectric element, a magnetostrictive element, and a piezoelectric element whose volume changes and whose force changes in response to chemical changes. Since we use either an element whose volume changes and whose force changes in response to physical changes, it is possible to grip the part with an appropriate gripping force and position it with high precision at the same time. There are effects that can be achieved accurately.

Furthermore, according to the invention as set forth in claim 4, the hand portion is made of a material whose volume changes and force changes in response to a chemical change, and a material whose volume changes and force changes in response to a physical change. At least two of the hand parts are arranged facing each other to grip the part to be gripped, and a position sensor and a gripping force sensor are attached to each hand part. The position and gripping force of each hand part can be controlled based on the detected values of the position sensor and gripping force sensor attached to the hand part, and this invention also has the ability to grip parts with an appropriate gripping force and a high gripping force. There is an effect that accurate positioning can be performed at the same time, and there is also an effect that it can be constructed with fewer members.

Further, according to the invention as set forth in claim 5, the hand unit is attached to a coarse movement mechanism capable of coarse adjustment in at least two dimensions in the gripping direction of the gripped part, and when gripping the gripped part, With each hand of the hand unit open, the coarse movement mechanism is driven to move the hand section to a position where it grips the part to be gripped, and then each hand part is driven by the fine movement mechanism to grip the part to be gripped. , and because the fine movement mechanism positions the gripped part relative to the other member to be assembled, the hand unit can be used to efficiently and accurately assemble the parts.

Furthermore, according to the invention set forth in claim 6, an optical system for irradiating illumination light is provided at the center of the hand unit, and furthermore, according to the invention set forth in claim 7, each hand of the hand unit Since we are equipped with an image processing device that captures and processes the relative position of the part and the part to be gripped,
Each has the effect of allowing work to be performed more efficiently and accurately.

Further, according to the invention as set forth in claim 8, since both the optical system and the image processing device are provided, there is an effect that the work can be carried out more efficiently and accurately.

According to the ninth aspect of the invention, the hand unit is used, and at least one of the plurality of hand parts constituting the hand unit is brought into contact with the part to be tested, and a predetermined application is performed. Since pressure is applied to check the quality of the joint between the part under test and other members, the hand unit can be used to accurately test the joint state of the part and other members. be.

[Brief explanation of drawings]

1 to 10 (A) and (B) show an embodiment of the present invention, in which FIG. 1 is a perspective view of an assembly device for micro parts, FIG. 2 is a conceptual diagram of the same assembly device, Fig. 3 is an enlarged perspective view of one hand part constituting the hand unit, and Fig. 4 shows the supply, gripping, positioning, and positioning of the target micro parts.
Flowchart showing the process leading to assembly, Figure 5 (A
), (B) are schematic diagrams showing the deformed state of the position detection section provided in the hand section, and FIGS. 5(c) and (D) show the deformed state of the gripping force control section provided in the same hand section. Schematic diagram, No. 6
Figures (A) to (D) are diagrams showing the relationships between load-strain amount, voltage-displacement, voltage-strain amount, and voltage-load applied to the hand unit when a piezoelectric element is used as the fine movement mechanism of the hand unit, 7(A) to (C) are explanatory diagrams of the hand unit position control 9 gripping force control 2 position and gripping force control, and FIG. 8(A)
, (B) is an explanatory diagram when gripping force control and position control of the hand unit are performed at the same time, and Figures 9 (A) to (E) and Figures 10 (A) and (B) are parts of various shapes. FIG. 4 is an explanatory diagram of the positioning of the microcomponents to be assembled thereto, and the direction in which the hand portion of the hand unit is released. 11 to 14 each show various embodiments of the hand portion of the hand unit, and are perspective views of only one hand portion. 15 to 17 (A) to (D) show other embodiments of the hand unit of the present invention, FIG. 15 is a conceptual diagram of the hand unit, FIG. 16 is a conceptual diagram showing the operating state, Figure 17 (A
) to (D) are diagrams showing the relationship between the material constituting the hand portion and the amount of light. FIGS. 18(A) to 18(D) show another embodiment of the hand unit of the present invention, and are diagrams showing the relationship between the material constituting the hand portion and the wavelength of light. 1st
Figures 9 (A) and (B) and Figure 20 show a test method for the joint state of parts using the hand unit of the present invention, and Figures 19 (A) and (B) are one implementation of the test method. An explanatory diagram of an example, FIG. 20, is a flowchart showing the process of the test method. 3... Parts supply stand, 5... Parts as the other member to which the micro parts are assembled, 6... Minute parts that are the target parts, 7... Hand unit, 8, 9... Hand Part, 11...Chuck part of hand part, +2...
-Position control section, 12a, 12b... Notch forming the position control section, 13...Gripping force control section, 13a,
13b...Plate spring forming the gripping force control section, 14...
... Strain gauge as a position sensor, 15... Strain gauge as a gripping force sensor, 16°17... Piezoelectric element as a fine movement mechanism, 20... Coarse movement mechanism of the hand unit, 21.
・・Ball screw that constitutes the coarse movement mechanism, 22.23
...Same guide, 24...Same X-direction linear stage,
25... The same X-direction linear stage, 26 The same rotary stage around the Y-axis, 27... The same rotary stage around the Z-axis,
28... the same motor, 30... the same actuator, 3
1.32...same motor, 38...optical system, 39...
- Control device for each part, 42... position control unit for the hand part,
42a, 42b...Plate spring, 43...Gripping force control section, 43a, 43b...Notch portion. 44... I' control section, 44a, 44b... Notch section, 45... Gripping force control section, 45a, 45b...
Notch portion, 46...Position control portion, 46a, 46b...
- Leaf spring, 47...Gripping force control section, 47a, 47b
...Plate spring, 48...Position control section, 48a, 48
b... Notch part, 49... Gripping force control part, 49a,
49b... Leaf spring, 50... Hand unit, 51
．． 52... Hand part, 53... Optical sensor which is a position sensor, 54... Optical sensor which is a gripping force sensor. 55... Light which is a fine movement driving source of the hand part, 56...
Light amount control device, 57...Soldering part, 58...Component fixing stand.

Claims (1)

[Claims] 1. A pair of at least two hand parts for gripping a part to be gripped are arranged opposite to each other, and each hand part is provided with a position control part and a gripping force control part, A position sensor is attached to the position control section, a grip force sensor is attached to the grip force control section, and one piece is attached to each hand section based on the detected values from the position sensor and grip force sensor attached to the hand section. A hand unit of a component characterized by being provided with a fine movement mechanism that finely controls the position and gripping force of a hand part. 2. In claim 1, the position control section and the gripping force control section of each hand section are constituted by either a notch part and a leaf spring part, a leaf spring and a notch part, two notch parts, or two leaf spring parts. A hand unit of parts featuring the following. 3. In claim 1, as the fine movement mechanism of each hand part,
Using either a piezoelectric element, a magnetostrictive element, an element whose volume changes and force changes in response to chemical changes, or an element whose volume changes and force changes in response to physical changes. A hand unit of parts characterized by the following. 4. The hand part is formed of either a material whose volume changes and force changes in response to a chemical change, or a material whose volume changes and force changes in response to a physical change, and At least two of the hand parts are arranged facing each other to grip the part to be gripped, a position sensor and a gripping force sensor are attached to each hand part, and the position sensor and the gripping force sensor attached to each hand part are connected to each other. A hand unit of a component characterized in that the position and gripping force of each hand part can be controlled based on detected values. 5. A parts assembly apparatus, characterized in that the hand unit according to any one of claims 1 to 4 is attached to a coarse movement mechanism capable of coarse adjustment in at least two dimensions in the gripping direction of the gripped part. 6. The parts assembly apparatus according to claim 5, wherein an optical system is provided in the center of the hand unit. 7. The parts assembly apparatus according to claim 5, further comprising an image processing device that takes an image of the relative position of each hand part of the hand unit and the gripped part and processes the image. 8. Claim 5 is characterized in that the hand unit is provided with an optical system and an image processing device that images the relative position of each hand part of the hand unit and the gripped part and processes the image at the center of the hand unit. Parts assembly equipment. 9. Using the hand unit according to any one of claims 1 to 4, at least one of the plurality of hand parts constituting the hand unit is brought into contact with the part to be tested, and a predetermined application is performed. A method for testing the joint state of parts, characterized by applying pressure and inspecting the quality of the joint between the test part and other members.