JPH03276521A - Manufacture of superconductive tape - Google Patents
Manufacture of superconductive tapeInfo
- Publication number
- JPH03276521A JPH03276521A JP2078413A JP7841390A JPH03276521A JP H03276521 A JPH03276521 A JP H03276521A JP 2078413 A JP2078413 A JP 2078413A JP 7841390 A JP7841390 A JP 7841390A JP H03276521 A JPH03276521 A JP H03276521A
- Authority
- JP
- Japan
- Prior art keywords
- tape
- target
- tape substrate
- substrate
- rotating drum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 239000002887 superconductor Substances 0.000 claims abstract description 17
- 239000000843 powder Substances 0.000 claims abstract description 8
- 238000004804 winding Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明は超伝導テープの製造方法に関し、特に超伝導
マグネットや超伝導ケーブルへの応用が期待できる長尺
超伝導テープの製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method for manufacturing a superconducting tape, and particularly to a method for manufacturing a long superconducting tape that can be expected to be applied to superconducting magnets and superconducting cables.
（従来の技術）
超伝導体は超伝導マグネット、超伝導体として各種分野
での利用が期待されているが、これを実用化させるため
に、超伝導体を取扱い易いテープ状にする技術の確立が
急務である。(Conventional technology) Superconductors are expected to be used in various fields as superconducting magnets and superconductors, but in order to put them into practical use, it is necessary to establish a technology to make superconductors into tapes that are easy to handle. is an urgent need.
超伝導テープ製造法としては、従来平面状のターゲット
に平行して一条のテープ基板をゆっくり移動させ、その
間に基板表面に超伝導体粉末をスパッター付着させる方
法で超伝導テープが作成された。Conventionally, superconducting tapes have been produced by slowly moving a strip of tape substrate parallel to a planar target, and sputtering superconductor powder onto the surface of the substrate during this time.
（発明が解決しようとする問題点）
しかしながら、以上の方法ではターゲットに沿ってテー
プ基板をゆっくりと移動させて超伝導テープを製造する
ため、長尺なテープを作成するために膨大な時間を必要
とする重大な欠陥がある。(Problem to be solved by the invention) However, in the above method, the tape substrate is moved slowly along the target to produce superconducting tape, which requires a huge amount of time to produce a long tape. There are serious flaws.
また、テープ作成のために可成りのスペースを必要とす
るなどの問題もある。Another problem is that a considerable amount of space is required to create the tape.
（問題点を解決するための手段）
以上の問題点を解決するため、この発明では中空の超伝
導体ターゲット内にテープ基板をスパイラル状に巻き付
けた回転ドラムを配置し、この回転ドラムを回転させな
がら上記テープ基板を上記ターゲットの入口から出口方
向に移動させ、その間にターゲット内で超伝導体粉末を
テープ基板の表面にスパッター付着させるようにした超
伝導テープ製造方法を提案するものである。(Means for Solving the Problems) In order to solve the above problems, in the present invention, a rotating drum in which a tape substrate is spirally wound is arranged inside a hollow superconductor target, and this rotating drum is rotated. However, the present invention proposes a superconducting tape manufacturing method in which the tape substrate is moved from the inlet to the outlet of the target, and during this time superconductor powder is sputtered onto the surface of the tape substrate within the target.
ここで、テープ基板の表面に付着させる超伝導体材料と
しては酸化物超伝導体をはじめとしてスパッター可能な
全ての材料を使用することができる。Here, as the superconductor material to be deposited on the surface of the tape substrate, all materials that can be sputtered, including oxide superconductors, can be used.
（作用）
以上のように、この発明によれば、テープ基板を回転ド
ラムに隙間な（スパイラル状に巻き付け、これを中空の
超伝導体ターゲット内で回転させながらテープ基板を中
空ターゲットの入口から出口方向に移動させるため、中
空ターゲット内に存在する全ての長尺なテープ基板の表
面に超伝導体粉末が同時にスパッター蒸着され、したが
って短時間に長尺な超伝導テープを作製することができ
る。(Function) As described above, according to the present invention, a tape substrate is wound around a rotating drum in a spiral manner, and while the tape substrate is being rotated within a hollow superconductor target, the tape substrate is moved from the inlet to the outlet of the hollow target. Since the superconductor powder is moved in the direction, the superconductor powder is simultaneously sputter-deposited on the surfaces of all the long tape substrates present in the hollow target, and therefore long superconducting tapes can be produced in a short time.
また、この発明では広いスペースを必要とせずに超伝導
テープの作成ができる。Furthermore, with this invention, a superconducting tape can be produced without requiring a large space.
（実施例） 以下、この発明を図示の実施例に基いて説明する。(Example) The present invention will be explained below based on illustrated embodiments.
■は、内径３０ｃｍ、長さ３０ｃｍの中空円筒形のイツ
トリウム系酸化物超伝導体の焼結ターゲット、２は外径
２０ｃｍの回転ドラムである。回転ドラム２には例えば
ハステロイの表面に酸化マグネシウムをバッファー層と
してスパッターしたテープ基板３をスパイラル状に巻装
する６例えばテープ基板３はテープ幅を５ａ＋ｍとした
場合、回転ドラム２には重ならずに約０．４５６度の角
度で密に巻くと５３．６ターン、約３７．５１＋巻くこ
とができる。2 is a hollow cylindrical sintered target of yttrium-based oxide superconductor with an inner diameter of 30 cm and a length of 30 cm, and 2 is a rotating drum with an outer diameter of 20 cm. A tape substrate 3 made by sputtering magnesium oxide as a buffer layer on the surface of Hastelloy, for example, is spirally wound around the rotating drum 26. For example, if the tape substrate 3 has a tape width of 5 a+m, it will not overlap the rotating drum 2. If it is tightly wound at an angle of about 0.456 degrees, it can be wound in 53.6 turns, or about 37.51+ turns.
なお、回転ドラム２に巻き付けられるテープ基板３の長
さはターゲットＩと回転ドラム２の直径と長さ、巻く角
度を変えることにより調節可能であり、もっと長（する
ことも可能である。The length of the tape substrate 3 wound around the rotating drum 2 can be adjusted by changing the diameter and length of the target I and the rotating drum 2, and the winding angle, and can be made longer.
以上のように、テープ基板３を巻き付けた回転ドラム２
をターゲットｌ内に配置し、テープ基板３の基端はター
ゲット１の入口側よりテープの送り用リール４に巻き取
らせ、テープ基板３の先端はターゲット１の出口側より
テープ巻取り用リール５に取り付ける。As described above, the rotating drum 2 with the tape substrate 3 wrapped around it
is placed in the target 1, the base end of the tape substrate 3 is wound on the tape feeding reel 4 from the inlet side of the target 1, and the tip of the tape substrate 3 is wound on the tape winding reel 5 from the outlet side of the target 1. Attach to.
次に、テープ基板３が１時間に３７．５＋＋＋移動する
ように回転ドラム２、巻取りリール５を回転させてテー
プ基板３がターゲットｌ内を通過するようにする。これ
により、入口からターゲット１内に入ったテープ基板３
は、１時間後にターゲット１内でその表面に１ミクロン
の厚みで酸化物超伝導体粉末がスパッターされて、ター
ゲット１の出口より出て（る。Next, the rotating drum 2 and the take-up reel 5 are rotated so that the tape substrate 3 moves 37.5+++ per hour, so that the tape substrate 3 passes through the target l. As a result, the tape substrate 3 that has entered the target 1 from the entrance
After one hour, oxide superconductor powder is sputtered to a thickness of 1 micron on the surface of the target 1 and exits from the outlet of the target 1.
このスパッターされたテープは、そのまま巻取りドラム
で巻き取ってもよいし、引き続き炉へ導入して熱処理を
行なってもよい。This sputtered tape may be wound up as is on a winding drum, or may be subsequently introduced into a furnace and subjected to heat treatment.
（発明の効果）
以上要するに、この発明によれば従来不可能であった長
尺の酸化物超伝導テープの作製を短時間で実現できる。(Effects of the Invention) In summary, according to the present invention, it is possible to manufacture a long oxide superconducting tape in a short time, which was previously impossible.
また、この発明によれば広いスペースを必要とせずに長
尺な超伝導テープの作製が可能となる。Further, according to the present invention, a long superconducting tape can be manufactured without requiring a large space.
第１図は、この発明の一実施例を示す概略図である。
図中、１は中空円筒状の酸化物超伝導体の焼結ターゲッ
ト、２は回転ドラム、３はテープ基板。
４はテープの送り用リール、５はテープ巻き取り用リー
ル。FIG. 1 is a schematic diagram showing an embodiment of the present invention. In the figure, 1 is a hollow cylindrical sintering target of oxide superconductor, 2 is a rotating drum, and 3 is a tape substrate. 4 is a tape feeding reel, and 5 is a tape winding reel.
Claims (1)
に巻き付けた回転ドラムを配置し、該回転ドラムを回転
させながら上記テープ基板を上記ターゲットの入口から
出口方向に移動させ、その間にターゲット内で超伝導体
粉末をテープ基板の表面にスパッター付着させるように
したことを特徴とする超伝導テープの製造方法。A rotating drum on which a tape substrate is wound in a spiral is placed inside a hollow superconductor target, and while the rotating drum is rotated, the tape substrate is moved from the inlet to the outlet of the target. A method for producing a superconducting tape, characterized in that conductive powder is sputtered onto the surface of a tape substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2078413A JPH0758602B2 (en) | 1990-03-27 | 1990-03-27 | Superconducting tape manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2078413A JPH0758602B2 (en) | 1990-03-27 | 1990-03-27 | Superconducting tape manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03276521A true JPH03276521A (en) | 1991-12-06 |
| JPH0758602B2 JPH0758602B2 (en) | 1995-06-21 |
Family
ID=13661351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2078413A Expired - Lifetime JPH0758602B2 (en) | 1990-03-27 | 1990-03-27 | Superconducting tape manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0758602B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0588461A1 (en) * | 1992-09-14 | 1994-03-23 | Hitachi Cable, Ltd. | Superconductive current lead |
| US5372089A (en) * | 1992-07-30 | 1994-12-13 | Sumitomo Electric Industries, Ltd. | Method of forming single-crystalline thin film |
| JP2010520599A (en) * | 2007-03-08 | 2010-06-10 | コリア アドバンスト インスティテュート オブ サイエンス アンド テクノロジ− | Equipment for continuous production of superconducting tape wire |
-
1990
- 1990-03-27 JP JP2078413A patent/JPH0758602B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5372089A (en) * | 1992-07-30 | 1994-12-13 | Sumitomo Electric Industries, Ltd. | Method of forming single-crystalline thin film |
| EP0588461A1 (en) * | 1992-09-14 | 1994-03-23 | Hitachi Cable, Ltd. | Superconductive current lead |
| JP2010520599A (en) * | 2007-03-08 | 2010-06-10 | コリア アドバンスト インスティテュート オブ サイエンス アンド テクノロジ− | Equipment for continuous production of superconducting tape wire |
| US8685166B2 (en) | 2007-03-08 | 2014-04-01 | Korea Advanced Institute Of Science And Technology | Apparatus for continuous fabricating superconducting tapes |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0758602B2 (en) | 1995-06-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |