JPH0326765B2 - - Google Patents
Info
- Publication number
- JPH0326765B2 JPH0326765B2 JP6244483A JP6244483A JPH0326765B2 JP H0326765 B2 JPH0326765 B2 JP H0326765B2 JP 6244483 A JP6244483 A JP 6244483A JP 6244483 A JP6244483 A JP 6244483A JP H0326765 B2 JPH0326765 B2 JP H0326765B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- objective lens
- measuring device
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 44
- 230000003287 optical effect Effects 0.000 claims description 31
- 230000035559 beat frequency Effects 0.000 claims description 8
- 230000010355 oscillation Effects 0.000 claims description 6
- 238000000926 separation method Methods 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 2
- 210000001747 pupil Anatomy 0.000 claims description 2
- 230000010287 polarization Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000005469 synchrotron radiation Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6244483A JPS59188511A (ja) | 1983-04-08 | 1983-04-08 | 光学測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6244483A JPS59188511A (ja) | 1983-04-08 | 1983-04-08 | 光学測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59188511A JPS59188511A (ja) | 1984-10-25 |
| JPH0326765B2 true JPH0326765B2 (enrdf_load_stackoverflow) | 1991-04-11 |
Family
ID=13200381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6244483A Granted JPS59188511A (ja) | 1983-04-08 | 1983-04-08 | 光学測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59188511A (enrdf_load_stackoverflow) |
-
1983
- 1983-04-08 JP JP6244483A patent/JPS59188511A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59188511A (ja) | 1984-10-25 |
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