JPH0326440Y2 - - Google Patents

Info

Publication number
JPH0326440Y2
JPH0326440Y2 JP17610884U JP17610884U JPH0326440Y2 JP H0326440 Y2 JPH0326440 Y2 JP H0326440Y2 JP 17610884 U JP17610884 U JP 17610884U JP 17610884 U JP17610884 U JP 17610884U JP H0326440 Y2 JPH0326440 Y2 JP H0326440Y2
Authority
JP
Japan
Prior art keywords
sealed chamber
dust
gas
amount
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17610884U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6191152U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17610884U priority Critical patent/JPH0326440Y2/ja
Publication of JPS6191152U publication Critical patent/JPS6191152U/ja
Application granted granted Critical
Publication of JPH0326440Y2 publication Critical patent/JPH0326440Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
JP17610884U 1984-11-20 1984-11-20 Expired JPH0326440Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17610884U JPH0326440Y2 (enExample) 1984-11-20 1984-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17610884U JPH0326440Y2 (enExample) 1984-11-20 1984-11-20

Publications (2)

Publication Number Publication Date
JPS6191152U JPS6191152U (enExample) 1986-06-13
JPH0326440Y2 true JPH0326440Y2 (enExample) 1991-06-07

Family

ID=30733705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17610884U Expired JPH0326440Y2 (enExample) 1984-11-20 1984-11-20

Country Status (1)

Country Link
JP (1) JPH0326440Y2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0785045B2 (ja) * 1987-02-25 1995-09-13 東京エレクトロン株式会社 発塵量測定方法
JPH0721448B2 (ja) * 1987-02-25 1995-03-08 東京エレクトロン株式会社 発塵量測定装置
KR101675469B1 (ko) * 2016-03-24 2016-11-14 주식회사 코스메카코리아 미세먼지를 함유한 인공대기환경 조성장치
KR102602447B1 (ko) * 2021-07-20 2023-11-16 (주)미디어에버 나노파티클 검출장치의 진동저감 구조

Also Published As

Publication number Publication date
JPS6191152U (enExample) 1986-06-13

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