JPH0325508B2 - - Google Patents
Info
- Publication number
- JPH0325508B2 JPH0325508B2 JP60209839A JP20983985A JPH0325508B2 JP H0325508 B2 JPH0325508 B2 JP H0325508B2 JP 60209839 A JP60209839 A JP 60209839A JP 20983985 A JP20983985 A JP 20983985A JP H0325508 B2 JPH0325508 B2 JP H0325508B2
- Authority
- JP
- Japan
- Prior art keywords
- ion plating
- crucible
- electron beam
- evaporation source
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007733 ion plating Methods 0.000 claims description 30
- 238000001704 evaporation Methods 0.000 claims description 24
- 230000008020 evaporation Effects 0.000 claims description 23
- 238000010894 electron beam technology Methods 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 13
- 229910000976 Electrical steel Inorganic materials 0.000 description 19
- 229910000831 Steel Inorganic materials 0.000 description 13
- 239000010959 steel Substances 0.000 description 13
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 11
- 238000000137 annealing Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 229910052742 iron Inorganic materials 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000000576 coating method Methods 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 230000005381 magnetic domain Effects 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000005554 pickling Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000010960 cold rolled steel Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000002739 metals Chemical group 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20983985A JPS6270576A (ja) | 1985-09-21 | 1985-09-21 | 大量蒸気流発生用蒸発源装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20983985A JPS6270576A (ja) | 1985-09-21 | 1985-09-21 | 大量蒸気流発生用蒸発源装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6270576A JPS6270576A (ja) | 1987-04-01 |
| JPH0325508B2 true JPH0325508B2 (xx) | 1991-04-08 |
Family
ID=16579469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20983985A Granted JPS6270576A (ja) | 1985-09-21 | 1985-09-21 | 大量蒸気流発生用蒸発源装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6270576A (xx) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0653531U (ja) * | 1991-01-25 | 1994-07-22 | 前田建設工業株式会社 | ベルトコンベヤ |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3286117A (en) * | 1963-01-07 | 1966-11-15 | Stauffer Chemical Co | Linearly expandable filament for electron gun structure |
| US3996469A (en) * | 1975-01-06 | 1976-12-07 | Jersey Nuclear-Avco Isotopes, Inc. | Floating convection barrier for evaporation source |
| US4035574A (en) * | 1974-10-11 | 1977-07-12 | Jersey Nuclear-Avco Isotopes, Inc. | Mixed phase evaporation source |
| DE3330092A1 (de) * | 1983-08-20 | 1985-03-07 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren zum einstellen der oertlichen verdampfungsleistung an verdampfern in vakuumaufdampfprozessen |
| JPS6194240A (ja) * | 1984-10-16 | 1986-05-13 | Fuji Photo Film Co Ltd | 磁気記録媒体の製造方法 |
-
1985
- 1985-09-21 JP JP20983985A patent/JPS6270576A/ja active Granted
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3286117A (en) * | 1963-01-07 | 1966-11-15 | Stauffer Chemical Co | Linearly expandable filament for electron gun structure |
| US4035574A (en) * | 1974-10-11 | 1977-07-12 | Jersey Nuclear-Avco Isotopes, Inc. | Mixed phase evaporation source |
| US3996469A (en) * | 1975-01-06 | 1976-12-07 | Jersey Nuclear-Avco Isotopes, Inc. | Floating convection barrier for evaporation source |
| DE3330092A1 (de) * | 1983-08-20 | 1985-03-07 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren zum einstellen der oertlichen verdampfungsleistung an verdampfern in vakuumaufdampfprozessen |
| JPS6194240A (ja) * | 1984-10-16 | 1986-05-13 | Fuji Photo Film Co Ltd | 磁気記録媒体の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6270576A (ja) | 1987-04-01 |
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