JPH0325424Y2 - - Google Patents

Info

Publication number
JPH0325424Y2
JPH0325424Y2 JP6581686U JP6581686U JPH0325424Y2 JP H0325424 Y2 JPH0325424 Y2 JP H0325424Y2 JP 6581686 U JP6581686 U JP 6581686U JP 6581686 U JP6581686 U JP 6581686U JP H0325424 Y2 JPH0325424 Y2 JP H0325424Y2
Authority
JP
Japan
Prior art keywords
piezoelectric
support ring
backing material
thermal expansion
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6581686U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62177063U (US20090163788A1-20090625-C00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6581686U priority Critical patent/JPH0325424Y2/ja
Publication of JPS62177063U publication Critical patent/JPS62177063U/ja
Application granted granted Critical
Publication of JPH0325424Y2 publication Critical patent/JPH0325424Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)
JP6581686U 1986-04-28 1986-04-28 Expired JPH0325424Y2 (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6581686U JPH0325424Y2 (US20090163788A1-20090625-C00002.png) 1986-04-28 1986-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6581686U JPH0325424Y2 (US20090163788A1-20090625-C00002.png) 1986-04-28 1986-04-28

Publications (2)

Publication Number Publication Date
JPS62177063U JPS62177063U (US20090163788A1-20090625-C00002.png) 1987-11-10
JPH0325424Y2 true JPH0325424Y2 (US20090163788A1-20090625-C00002.png) 1991-06-03

Family

ID=30903240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6581686U Expired JPH0325424Y2 (US20090163788A1-20090625-C00002.png) 1986-04-28 1986-04-28

Country Status (1)

Country Link
JP (1) JPH0325424Y2 (US20090163788A1-20090625-C00002.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5686443B2 (ja) 2013-01-10 2015-03-18 日本写真印刷株式会社 接着層付きフィルム状感圧センサとこれを用いたタッチパッド、タッチ入力機能付き保護パネル及び電子機器

Also Published As

Publication number Publication date
JPS62177063U (US20090163788A1-20090625-C00002.png) 1987-11-10

Similar Documents

Publication Publication Date Title
USRE32931E (en) Vibratory angular rate sensor system
KR100235129B1 (ko) 하중 셀
US5165279A (en) Monolithic accelerometer with flexurally mounted force transducer
US4546658A (en) Piezoelectric force/pressure sensor
EP0434878B1 (en) Vibration/acceleration sensor
JPS59126261A (ja) はり共振器力変換器を有する加速度計
JPS5856425B2 (ja) 力変換機構
WO1994014035A1 (en) Combined force transducer and temperature sensor
JP2643025B2 (ja) 圧電変換器による加速度の計測装置
JPH0650268B2 (ja) 管内圧力変化検知変換器
JPH08105912A (ja) 加速度センサ
US5717140A (en) Angular rate sensor electronic balance
JPH0325424Y2 (US20090163788A1-20090625-C00002.png)
GB2056219A (en) Vibration sensor for automotive vehicle
JPH02248867A (ja) 加速度センサ
JPH052859Y2 (US20090163788A1-20090625-C00002.png)
JP3368744B2 (ja) 振動型加速度センサ
JPH02248866A (ja) 加速度センサの梁構造
JPH0414946Y2 (US20090163788A1-20090625-C00002.png)
JP3119135B2 (ja) 加速度センサ
JPH085656A (ja) 加速度変換器
CA2213245C (en) Mechanical resonance, silicon accelerometer
US5691472A (en) Non-gimballed angular rate sensor
SU1582035A1 (ru) Датчик давлени
JP3129116B2 (ja) 加速度センサ