JPH03253551A - レーザ溶射方法及び装置 - Google Patents
レーザ溶射方法及び装置Info
- Publication number
- JPH03253551A JPH03253551A JP2048991A JP4899190A JPH03253551A JP H03253551 A JPH03253551 A JP H03253551A JP 2048991 A JP2048991 A JP 2048991A JP 4899190 A JP4899190 A JP 4899190A JP H03253551 A JPH03253551 A JP H03253551A
- Authority
- JP
- Japan
- Prior art keywords
- thermal spraying
- plasma
- laser beam
- laser
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005507 spraying Methods 0.000 title description 6
- 239000000463 material Substances 0.000 claims abstract description 116
- 238000006243 chemical reaction Methods 0.000 claims abstract description 21
- 238000002844 melting Methods 0.000 claims abstract description 20
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 230000008018 melting Effects 0.000 claims abstract description 19
- 238000007751 thermal spraying Methods 0.000 claims description 36
- 238000000034 method Methods 0.000 claims description 19
- 239000000155 melt Substances 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010030 laminating Methods 0.000 abstract 1
- 210000002381 plasma Anatomy 0.000 description 42
- 239000007921 spray Substances 0.000 description 22
- 239000007789 gas Substances 0.000 description 11
- 230000001133 acceleration Effects 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 239000006096 absorbing agent Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical group O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010828 elution Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 230000005291 magnetic effect Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Coating By Spraying Or Casting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2048991A JPH03253551A (ja) | 1990-02-28 | 1990-02-28 | レーザ溶射方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2048991A JPH03253551A (ja) | 1990-02-28 | 1990-02-28 | レーザ溶射方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03253551A true JPH03253551A (ja) | 1991-11-12 |
| JPH055893B2 JPH055893B2 (enrdf_load_stackoverflow) | 1993-01-25 |
Family
ID=12818692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2048991A Granted JPH03253551A (ja) | 1990-02-28 | 1990-02-28 | レーザ溶射方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03253551A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006132001A (ja) * | 2004-11-02 | 2006-05-25 | Sulzer Metco Ag | 溶射装置及び溶射方法 |
| JP2019183273A (ja) * | 2018-04-02 | 2019-10-24 | 東京エレクトロン株式会社 | 金属膜の形成方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3918379B2 (ja) | 1999-10-20 | 2007-05-23 | トヨタ自動車株式会社 | 溶射方法、溶射装置及び粉末通路装置 |
-
1990
- 1990-02-28 JP JP2048991A patent/JPH03253551A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006132001A (ja) * | 2004-11-02 | 2006-05-25 | Sulzer Metco Ag | 溶射装置及び溶射方法 |
| JP2019183273A (ja) * | 2018-04-02 | 2019-10-24 | 東京エレクトロン株式会社 | 金属膜の形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH055893B2 (enrdf_load_stackoverflow) | 1993-01-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |