JPH03253014A - Film capacitor and manufacture thereof - Google Patents
Film capacitor and manufacture thereofInfo
- Publication number
- JPH03253014A JPH03253014A JP4929390A JP4929390A JPH03253014A JP H03253014 A JPH03253014 A JP H03253014A JP 4929390 A JP4929390 A JP 4929390A JP 4929390 A JP4929390 A JP 4929390A JP H03253014 A JPH03253014 A JP H03253014A
- Authority
- JP
- Japan
- Prior art keywords
- film
- dielectric constant
- ceramic
- tantalum
- dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003990 capacitor Substances 0.000 title claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000000919 ceramic Substances 0.000 claims abstract description 26
- 150000004703 alkoxides Chemical class 0.000 claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 229920000620 organic polymer Polymers 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000012643 polycondensation polymerization Methods 0.000 claims 1
- 239000002861 polymer material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 14
- 239000002985 plastic film Substances 0.000 abstract description 12
- 229920006255 plastic film Polymers 0.000 abstract description 10
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 abstract description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 6
- -1 polyethylene Polymers 0.000 abstract description 6
- 239000004698 Polyethylene Substances 0.000 abstract description 5
- 229920000573 polyethylene Polymers 0.000 abstract description 5
- NGCRLFIYVFOUMZ-UHFFFAOYSA-N 2,3-dichloroquinoxaline-6-carbonyl chloride Chemical compound N1=C(Cl)C(Cl)=NC2=CC(C(=O)Cl)=CC=C21 NGCRLFIYVFOUMZ-UHFFFAOYSA-N 0.000 abstract description 2
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 150000001875 compounds Chemical class 0.000 abstract description 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
- 239000004033 plastic Substances 0.000 description 9
- 229920003023 plastic Polymers 0.000 description 9
- 239000004793 Polystyrene Substances 0.000 description 8
- 229920002223 polystyrene Polymers 0.000 description 8
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 6
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 5
- 229910002113 barium titanate Inorganic materials 0.000 description 5
- 239000002131 composite material Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000012700 ceramic precursor Substances 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 2
- 125000006519 CCH3 Chemical group 0.000 description 1
- 206010067482 No adverse event Diseases 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- ITHZDDVSAWDQPZ-UHFFFAOYSA-L barium acetate Chemical compound [Ba+2].CC([O-])=O.CC([O-])=O ITHZDDVSAWDQPZ-UHFFFAOYSA-L 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000006068 polycondensation reaction Methods 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- JMXKSZRRTHPKDL-UHFFFAOYSA-N titanium ethoxide Chemical compound [Ti+4].CC[O-].CC[O-].CC[O-].CC[O-] JMXKSZRRTHPKDL-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はフィルムコンデンサに関し、その誘電部となる
有機高分子フィルムに形成するセラミックス膜、および
、その製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a film capacitor, and more particularly to a ceramic film formed on an organic polymer film serving as a dielectric part thereof, and a method for manufacturing the same.
ポリエチレンやポリプロピレンなどの有機高分子が主成
分であるフィルムを誘電体とし、内部電極として金属箔
や蒸着金属を使い、これらを巻いたり積層したあと、端
子電極を接続した形状をしているフィルムコンデンサは
、特に、誘電損失が小さい、絶縁抵抗が高い、などの点
から、汎用コンデンサとして優れた特徴を持っている。A film capacitor is a film capacitor in which the dielectric is a film whose main component is an organic polymer such as polyethylene or polypropylene, metal foil or vapor-deposited metal is used as the internal electrode, and after these are rolled or laminated, terminal electrodes are connected. has excellent characteristics as a general-purpose capacitor, especially in terms of low dielectric loss and high insulation resistance.
しかし、その誘電部である有機高分子フィルムの誘電率
は、約２〜３程度と小さいもので、そのためコンデンサ
の大容量化２寸法の小型化を図るには困難があった。コ
ンデンサの大容量化・小型化を図るために、誘電層を薄
くする、という方法が考えられるが、この場合、耐電圧
の低下を招き、また製造工程上て電極の短絡などが生じ
易くなり製造歩留りという点ても有利とはいえない。However, the dielectric constant of the organic polymer film, which is the dielectric part, is as small as about 2 to 3, which makes it difficult to increase the capacitance of the capacitor and to reduce its size by two dimensions. In order to increase the capacitance and downsize the capacitor, it is possible to make the dielectric layer thinner, but in this case, the withstand voltage decreases, and electrode short-circuits are more likely to occur during the manufacturing process, making it difficult to manufacture. It cannot be said that it is advantageous in terms of yield.
すなわち、フィルムコンデンサに関しては、従来の技術
では前述の理由により、大容量化・小型化という点に問
題があった。That is, with regard to film capacitors, conventional techniques have had problems in increasing the capacity and reducing the size for the reasons mentioned above.
発明者らは、フィルムコンデンサの大容量化・小型化を
達成するために、誘電体材料白身の高誘電率化に着眼し
、検討してきた。本発明の目的は、高い誘電率を持つ誘
電体フィルムを使った新規なフィルムコンデンサを提供
することであり、さらに他の目的は、その誘電体フィル
ムを製造する方法を提供することである。In order to achieve larger capacitance and smaller size of film capacitors, the inventors have focused on and have studied increasing the dielectric constant of the white dielectric material. An object of the present invention is to provide a novel film capacitor using a dielectric film with a high dielectric constant, and a further object is to provide a method for manufacturing the dielectric film.
誘電層に用いる誘電体フィルムを高誘電率化するために
、プラスチック等の有機物に比較して数桁高い誘電率を
示すセラミックスを、誘電部を形成する電極と対向した
面に直接、数の厚さで形成させた複合体を作成した。こ
のような層状構造をしたフィルムの誘電率は、有機部分
とセラミックス部分との層厚さと、各成分の誘電率とて
決まってくるが、典型的に、誘電率が２．０ のポリ
スチレンフィルムと、誘電率２０００を有するチタン酸
バリウム系セラミックスを用い、その厚さの比（ｄ有機
物／ｄ無機物）を４とした場合、もともとのポリスチレ
ンに較へで２５％程度、誘電率は向上する。従って、こ
の構造を持つフィルムを用いることで、同一容量では２
５％、その寸法の小さいコンデンサを得ることができる
。セラミックス層の形成は、有機フィルムの片面でも両
面でも良い。この複合フィルムは単に異種材料を重ね合
わせたものと違い、セラミックスの前駆体としてアルコ
キシドという官能基を持つ溶液を用いているため、下地
の有機フィルムとの親和性が良く、有機フィルムとセラ
ミックスとが、直接、結合している。その結果、接合部
での気泡の発生などはなく、電気的特性に悪影響を与え
ることは無い。In order to increase the dielectric constant of the dielectric film used for the dielectric layer, ceramics, which have a dielectric constant several orders of magnitude higher than organic materials such as plastics, are directly deposited several times thicker on the surface facing the electrode forming the dielectric part. A complex was created using The dielectric constant of a film with such a layered structure is determined by the layer thickness of the organic part and the ceramic part and the dielectric constant of each component, but typically a polystyrene film with a dielectric constant of 2.0 is used. When a barium titanate ceramic having a dielectric constant of 2000 is used and the thickness ratio (dorganic material/d inorganic material) is set to 4, the dielectric constant is improved by about 25% compared to the original polystyrene. Therefore, by using a film with this structure, for the same capacity, 2
5% smaller capacitors can be obtained. The ceramic layer may be formed on one or both sides of the organic film. This composite film is different from simply stacking different materials on top of each other, as it uses a solution with a functional group called alkoxide as a ceramic precursor, so it has good affinity with the underlying organic film, and the organic film and ceramics bond together. , are directly connected. As a result, no bubbles are generated at the joint, and the electrical characteristics are not adversely affected.
このようなセラミックスとプラスチック材料とを、直接
、複合させたフィルムを作る場合、技術的な障害は、品
質の良いセラミックスを得るために、通常高温（＞１０
００’Ｃ）の熱処理を要することである。すなわち、プ
ラスチックフィルムを下地として、それにセラミックス
粉末をポリビニルアルコールなどの有機バインダで結合
させたグリーンシートを乗せ、高温で熱処理すると、下
地は完全に分解してしまう。発明者らは鋭意検討した結
果、ゾル・ゲル法により熱処理をせずに、また仮に熱処
理を要したとしてもその温度を下地であるプラスチック
が特に影響を受けない低い温度にさせて、セラミックス
を、直接、プラスチックフィルム上に形成させる方法を
開発した。すなわち、セラミックス前駆体である金属ア
ルコキシド水溶液（Ｍｅ＋ＯＲ）ｎ Ｍ ｅ ：金属元
素、Ｒ：アルキル基）をプラスチックフィルム上に塗布
する。この溶液に波長２００〜３００ｎｍの紫外光を当
て、縮重合反応を起こさせアルコキシド基を分解し、膜
状の金属酸化物にする。必要に応じて、再度、光（１８
４ｎｍ）を当て、膜内に残留したアルコキシド基を酸化
し、取除く。また本プロセス中で加温（＜２００’Ｃ）
Ｌ、化学反応を促進させることも可能である。このよう
にして得られた金Ｒａ化物（セラミックス）は、下地の
プラスチックと一体接合され、高熱処理工程を含まない
ために下地への悪影響は全くみられない。反応に用いる
光の波長は、目的とする酸化物の金属アルコキシド中の
Ｍｅ−ＯＲの結合エネルギに対応する吸収波長を選ぶの
が最も良いが、多少はずれていても、反応時間が若干遅
くなる程度で特に大きな問題とはならない。また、得ら
れる酸化物（セラミックス）層の厚みは、−回の塗布→
光照射工程で１μｍ程度であるが、これは用いる金属ア
ルコキシド溶液の粘度、また、多数回この工程を繰返す
ことで調節可能である。When creating a film that directly combines ceramics and plastic materials, the technical hurdle is that high temperatures (>10
00'C) heat treatment is required. That is, if a green sheet made of ceramic powder bound with an organic binder such as polyvinyl alcohol is placed on a plastic film as a base and then heat-treated at a high temperature, the base will completely decompose. As a result of extensive research, the inventors found that they could produce ceramics using the sol-gel method without heat treatment, and even if heat treatment was required, the temperature was kept at a low temperature that would not particularly affect the underlying plastic. We have developed a method to form it directly on plastic film. That is, a metal alkoxide aqueous solution (Me+OR)nMe: metal element, R: alkyl group), which is a ceramic precursor, is applied onto a plastic film. This solution is exposed to ultraviolet light with a wavelength of 200 to 300 nm to cause a polycondensation reaction, decomposing the alkoxide groups, and forming a film-like metal oxide. If necessary, turn on the light (18
4 nm) to oxidize and remove the alkoxide groups remaining in the film. Also heated during this process (<200'C)
L. It is also possible to promote chemical reactions. The gold-Ra compound (ceramic) thus obtained is integrally bonded to the underlying plastic, and since no high heat treatment process is involved, no adverse effects on the underlying material are observed. It is best to select the wavelength of the light used for the reaction to be the absorption wavelength that corresponds to the binding energy of Me-OR in the metal alkoxide of the target oxide, but even if it is slightly off, the reaction time will be slightly delayed. It's not a particularly big problem. Also, the thickness of the obtained oxide (ceramics) layer is - times of application →
It is about 1 μm in the light irradiation process, but this can be adjusted by adjusting the viscosity of the metal alkoxide solution used and by repeating this process many times.
以上のように、高温熱処理を必要とせずに、プラスチッ
クフィルム面に、直接、セラミックスを結合させるプロ
セスを開発したので、高誘電率の誘電体フィルムが得ら
れ、これを誘電層とする新規なフィルムコンデンサ（巻
回型、積層型）を得ることが可能になる。As described above, we have developed a process to bond ceramics directly to the surface of a plastic film without requiring high-temperature heat treatment, resulting in a dielectric film with a high dielectric constant, and a new film using this as a dielectric layer. It becomes possible to obtain capacitors (wound type, laminated type).
本発明では、誘電体の材質としてプラスチックを取扱っ
たが、はぼ室温で直接、セラミックスを合成できる点か
ら、紙などでも良くこれは紙コンデンサとして適用可能
である。In the present invention, plastic is used as the dielectric material, but since ceramics can be directly synthesized at room temperature, paper or the like may also be used, which can be used as a paper capacitor.
母材である低誘電率プラスチックフィルム面に、直接、
高誘電率のセラミックスを形成させることで、フィルム
の高誘電率化が達成され、従って、このフィルムを誘電
層として用いたコンデンサは大容量化・小型化が可能と
なる。このようなフィルムを製造する際、下地（プラス
チック）に塗布した金属アルコキシド溶液に光を当てて
無機セラミックスとするが、光を当てることによって低
温（はぼ室温）で金属アルコキシドの分解・縮重合反応
が促進され、下地であるプラスチックの方には悪影響を
及ぼさない。従って品質の良い誘電層用のフィルムを得
ることが可能となる。Directly on the surface of the low dielectric constant plastic film that is the base material.
By forming a ceramic with a high dielectric constant, a high dielectric constant of the film can be achieved, and therefore, a capacitor using this film as a dielectric layer can be made larger in capacity and smaller in size. When producing such a film, a metal alkoxide solution coated on a base (plastic) is exposed to light to create inorganic ceramics, but the decomposition and condensation reactions of the metal alkoxide occur at low temperatures (nearly room temperature). is promoted, and the underlying plastic is not adversely affected. Therefore, it is possible to obtain a film for a dielectric layer of good quality.
以下、本発明を実施例により説明する。 The present invention will be explained below with reference to Examples.
〈実施例１〉
誘電層の厚みが１０μｍになるように、下地のプラスチ
ックフィルムの厚さ（ｄｌ）とセラミックス部分の厚さ
（ｄ２）との比率を変えた有機−無機シートを用意した
。作成法の例を示す。<Example 1> Organic-inorganic sheets were prepared in which the ratio of the thickness (dl) of the underlying plastic film to the thickness (d2) of the ceramic portion was changed so that the thickness of the dielectric layer was 10 μm. An example of how to create it is shown below.
厚さ９μｍのポリエチレンシート（誘電率：２）に、タ
ンタルエトキシド（Ｔａ＋○Ｃ２Ｈ３Ｌ））の水溶液（
粘性： １００００ｃｐｓに調節したもの）を公知のド
クタプレート法により塗布した。これにタンタル−エト
キシ基の結合エネルギに対応する２５４ｎｍの光を約−
時間照射し、均一な厚み（１μｍ）をもつ五酸化タンタ
ル（Ｔａ２０５）膜を形成した。膜厚を変えるときは、
金属アルコキシド塗布→光照射工程をくり返す。このフ
ィルムの五酸化タンタル上に金属アルミニウムを蒸着（
耳幅：０．５ｍｎ）Ｌ、第１図に示す金属−セラミック
ス−プラスチック複合フィルムを得た。このようなフィ
ルムを二枚作成し、これを重ね合せ、巻取った。こうし
て得られた円筒状のものを加圧した後、両端にアルミニ
ウムでメタリコンを施し、リード線をはんだづけした。An aqueous solution of tantalum ethoxide (Ta+○C2H3L) (
Viscosity: adjusted to 10,000 cps) was coated by a known doctor plate method. To this, light of 254 nm corresponding to the bond energy of the tantalum-ethoxy group is applied to about -
The irradiation was carried out for a period of time to form a tantalum pentoxide (Ta205) film having a uniform thickness (1 μm). When changing the film thickness,
Repeat the metal alkoxide coating → light irradiation process. Metallic aluminum is deposited on the tantalum pentoxide of this film (
A metal-ceramic-plastic composite film shown in FIG. 1 was obtained. Two such films were made, overlapped, and rolled up. After pressurizing the cylindrical object thus obtained, metallized aluminum was applied to both ends, and lead wires were soldered.
この素子部に約８０℃で樹脂モールドを行ない、巻回型
のフィルムコンデンサを作成した。同様に、厚さ１０μ
ｍのポリエチレンシートを用い、五酸化タンタルを形成
せずに有機フィルム単独のフィルムコンデンサも比較例
として作成した。得られたコンデンサの緒特性を表１に
示す。This element portion was resin molded at about 80° C. to produce a wound type film capacitor. Similarly, the thickness is 10μ
A film capacitor using only an organic film without forming tantalum pentoxide was also created as a comparative example using a polyethylene sheet of 1.0 m. Table 1 shows the characteristics of the obtained capacitor.
表に見られるように、ポリエチレンという有機プラスチ
ックに、誘電率の高い五酸化タンタルを、直接、つけた
複合シートを用いることで、同一寸法のコンデンサを作
った場合、その容量をａｌｔ／ｄ２比率を変えると二〜
入側向上させることができる。このような複合シートに
より、絶縁破壊電圧も、同時に高くなり製品としては好
ましい傾向を示す。抵抗値や誘電損失は比較例と変わら
ず、高レベルを維持している。As shown in the table, if a capacitor of the same size is made by using a composite sheet in which tantalum pentoxide, which has a high dielectric constant, is directly attached to an organic plastic called polyethylene, the capacitance will be increased by the alt/d2 ratio. If you change it, it will be two~
Entry side can be improved. With such a composite sheet, the dielectric breakdown voltage also increases, which is a desirable tendency as a product. The resistance value and dielectric loss are unchanged from the comparative example and remain at a high level.
本発明により大容量化が達成されたのは、誘電層として
用いるシートの誘電率が高くなったためであり、従って
、従来と同し容量のコンデンサでもシートを巻く長さを
短くでき、コンデンサ素子を小型化できる。The large capacitance achieved by the present invention is due to the increased dielectric constant of the sheet used as the dielectric layer.Therefore, even for capacitors with the same capacity as conventional capacitors, the winding length of the sheet can be shortened, and the capacitor element can be Can be made smaller.
〈実施例２〉
厚さ２ａｎのアルミニウム板（３ａｎ角）に、ｎ−ヘキ
サンで溶解したポリスチレン融液を使い、スピンコード
法によりポリスチレン膜を形成した。<Example 2> A polystyrene film was formed on a 2 ann thick aluminum plate (3 ann square) by a spin cord method using a polystyrene melt dissolved in n-hexane.
充分に乾燥させた後、この膜上に、酢酸バリウム（Ｂａ
（○○ＣＣＨ３）２）とチタンエトキシド（Ｔ１（○Ｃ
２Ｈ３）４）との等量混合エタノール溶液（粘性： １
００〜１０００ｃｐｓ）をスピンコードした。次に、２
５４ｎｍの光を一時間照射し、さらに１８４ｎｍの光を
十分量照射し、アルコキシド基の分解、酸化を促進させ
る。こうして得られたチタン酸バリウム（Ｂ ａ Ｔ
ｉ○３）膜に、アルミニウムを蒸着して電極（３φ）と
した。こうして得られた試料の容量を測定することによ
り誘電率を求めた。また比較例としてチタン酸バリウム
を形成しない、ポリスチレン単独のサンプルも用意した
。ポリスチレンの厚み（ｄｌ）、チタン酸バリウムの厚
み（ｄｌ）を変えて作成した試料の誘電率を表２に示す
。After sufficiently drying, barium acetate (Ba
(○○CCH3)2) and titanium ethoxide (T1(○C
2H3)4) Ethanol solution mixed in equal amounts with 4) (viscosity: 1
00-1000 cps) was spin-coded. Next, 2
Light of 54 nm is irradiated for one hour, and a sufficient amount of light of 184 nm is further irradiated to promote decomposition and oxidation of alkoxide groups. The barium titanate (B a T
i○3) Aluminum was vapor-deposited on the film to form an electrode (3φ). The dielectric constant was determined by measuring the capacitance of the sample thus obtained. In addition, as a comparative example, a sample made of polystyrene alone without forming barium titanate was also prepared. Table 2 shows the dielectric constants of samples prepared by changing the thickness (dl) of polystyrene and the thickness (dl) of barium titanate.
表 ２
＊誘電率は５０Ｈｚで測定
表２に見られるように、ポリスチレン単独の誘電率にく
らへて、本発明によりチタン酸バリウムを形成させた試
料では、誘電率がポリスチレン単体よりも格段に向上し
た。Table 2 *The dielectric constant was measured at 50 Hz As shown in Table 2, the dielectric constant of the sample formed with barium titanate according to the present invention is much higher than that of polystyrene alone, compared to the dielectric constant of polystyrene alone. did.
本発明では、誘電率の低い有機プラスチックシートに、
直接、高誘電率の無機セラミックス層を形成させること
ができるので、シートの誘電率がニないし入側高くでき
、従って、このような複合シートを用いたフィルムコン
デンサは、従来品と同一寸法では大容量化９等容量では
小型化が達成でき、産業上に及ぼす効果は大なるものが
ある。In the present invention, an organic plastic sheet with a low dielectric constant,
Since it is possible to directly form an inorganic ceramic layer with a high dielectric constant, the dielectric constant of the sheet can be made high on the dielectric or inlet side.Therefore, a film capacitor using such a composite sheet is larger than conventional products with the same dimensions. If the capacity is increased to 9, it is possible to achieve miniaturization, which has a great industrial effect.
第１図は本発明の一実施例の金属−セラミック−プラス
チックフィルムの断面図である。
１・・・プラスチックフィルム部（ポリエチレン）、２
・・セラミックス部（五酸化タンタル）、３ 金属（蒸
着）部（アルミニウム）。
第１図FIG. 1 is a cross-sectional view of a metal-ceramic-plastic film according to an embodiment of the present invention. 1...Plastic film part (polyethylene), 2
...Ceramics part (tantalum pentoxide), 3 Metal (evaporation) part (aluminum). Figure 1
Claims (4)
ンサにおいて、 前記誘電部の有機高分子フィルムの両面又は片面にセラ
ミックス膜が形成されていることを特徴とするフィルム
コンデンサ。1. 1. A film capacitor having a dielectric part made of an organic polymer material, characterized in that a ceramic film is formed on both sides or one side of the organic polymer film of the dielectric part.
膜が形成された有機高分子フィルムを巻いて誘電層とし
ているフィルムコンデンサ。2. The film capacitor described in item 1 is a film capacitor in which an organic polymer film on which a ceramic film is formed is wound as a dielectric layer.
膜が形成された有機高分子フィルムを積層しているフィ
ルムコンデンサ。3. The film capacitor described in item 1 is a film capacitor in which organic polymer films on which ceramic films are formed are laminated.
において誘電部のセラミックス部は、有機高分子フィル
ムに金属アルコキシド溶液をつけ、これに光を当て、金
属アルコキシドの縮重合反応させる工程により得られる
フィルムコンデンサの製造方法。4. In the film capacitor according to claim 1, 2 or 3, the ceramic part of the dielectric part is a film capacitor obtained by applying a metal alkoxide solution to an organic polymer film and exposing it to light to cause a condensation polymerization reaction of the metal alkoxide. manufacturing method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2049293A JP2786298B2 (en) | 1990-03-02 | 1990-03-02 | Film capacitor and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2049293A JP2786298B2 (en) | 1990-03-02 | 1990-03-02 | Film capacitor and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03253014A true JPH03253014A (en) | 1991-11-12 |
| JP2786298B2 JP2786298B2 (en) | 1998-08-13 |
Family
ID=12826867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2049293A Expired - Fee Related JP2786298B2 (en) | 1990-03-02 | 1990-03-02 | Film capacitor and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2786298B2 (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9852846B2 (en) | 2015-02-26 | 2017-12-26 | Capacitor Sciences Incorporated | Self-healing capacitor and methods of production thereof |
| US9899150B2 (en) | 2014-05-12 | 2018-02-20 | Capacitor Sciences Incorporated | Energy storage device and method of production thereof |
| US9916931B2 (en) | 2014-11-04 | 2018-03-13 | Capacitor Science Incorporated | Energy storage devices and methods of production thereof |
| US9932358B2 (en) | 2015-05-21 | 2018-04-03 | Capacitor Science Incorporated | Energy storage molecular material, crystal dielectric layer and capacitor |
| US9941051B2 (en) | 2015-06-26 | 2018-04-10 | Capactor Sciences Incorporated | Coiled capacitor |
| US9978517B2 (en) | 2016-04-04 | 2018-05-22 | Capacitor Sciences Incorporated | Electro-polarizable compound and capacitor |
| US10026553B2 (en) | 2015-10-21 | 2018-07-17 | Capacitor Sciences Incorporated | Organic compound, crystal dielectric layer and capacitor |
| US10153087B2 (en) | 2016-04-04 | 2018-12-11 | Capacitor Sciences Incorporated | Electro-polarizable compound and capacitor |
| US10305295B2 (en) | 2016-02-12 | 2019-05-28 | Capacitor Sciences Incorporated | Energy storage cell, capacitive energy storage module, and capacitive energy storage system |
| US10340082B2 (en) | 2015-05-12 | 2019-07-02 | Capacitor Sciences Incorporated | Capacitor and method of production thereof |
| US10347423B2 (en) | 2014-05-12 | 2019-07-09 | Capacitor Sciences Incorporated | Solid multilayer structure as semiproduct for meta-capacitor |
| US10395841B2 (en) | 2016-12-02 | 2019-08-27 | Capacitor Sciences Incorporated | Multilayered electrode and film energy storage device |
| JP2020004743A (en) * | 2018-06-25 | 2020-01-09 | マシン・テクノロジー株式会社 | Film material for film capacitor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56149711A (en) * | 1980-04-22 | 1981-11-19 | Unitika Ltd | High dielectric composite film |
| JPS63216323A (en) * | 1987-03-05 | 1988-09-08 | 松下電器産業株式会社 | Metallized plastic film capacitor |
| JPS63260122A (en) * | 1987-04-17 | 1988-10-27 | 日本特殊陶業株式会社 | Manufacture of laminated ceramic element |
-
1990
- 1990-03-02 JP JP2049293A patent/JP2786298B2/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56149711A (en) * | 1980-04-22 | 1981-11-19 | Unitika Ltd | High dielectric composite film |
| JPS63216323A (en) * | 1987-03-05 | 1988-09-08 | 松下電器産業株式会社 | Metallized plastic film capacitor |
| JPS63260122A (en) * | 1987-04-17 | 1988-10-27 | 日本特殊陶業株式会社 | Manufacture of laminated ceramic element |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9899150B2 (en) | 2014-05-12 | 2018-02-20 | Capacitor Sciences Incorporated | Energy storage device and method of production thereof |
| US10685782B2 (en) | 2014-05-12 | 2020-06-16 | Capacitor Sciences Incorporated | Capacitor and method of production thereof |
| US10347424B2 (en) | 2014-05-12 | 2019-07-09 | Capacitor Sciences Incorporated | Energy storage device and method of production thereof |
| US10347423B2 (en) | 2014-05-12 | 2019-07-09 | Capacitor Sciences Incorporated | Solid multilayer structure as semiproduct for meta-capacitor |
| US9916931B2 (en) | 2014-11-04 | 2018-03-13 | Capacitor Science Incorporated | Energy storage devices and methods of production thereof |
| US9852846B2 (en) | 2015-02-26 | 2017-12-26 | Capacitor Sciences Incorporated | Self-healing capacitor and methods of production thereof |
| US10340082B2 (en) | 2015-05-12 | 2019-07-02 | Capacitor Sciences Incorporated | Capacitor and method of production thereof |
| US9932358B2 (en) | 2015-05-21 | 2018-04-03 | Capacitor Science Incorporated | Energy storage molecular material, crystal dielectric layer and capacitor |
| US10672561B2 (en) | 2015-06-26 | 2020-06-02 | Capacitor Sciences Incorporated | Coiled capacitor |
| US9941051B2 (en) | 2015-06-26 | 2018-04-10 | Capactor Sciences Incorporated | Coiled capacitor |
| US10854386B2 (en) | 2015-06-26 | 2020-12-01 | Capacitor Sciences Incorporated | Coiled capacitor |
| US10026553B2 (en) | 2015-10-21 | 2018-07-17 | Capacitor Sciences Incorporated | Organic compound, crystal dielectric layer and capacitor |
| US10305295B2 (en) | 2016-02-12 | 2019-05-28 | Capacitor Sciences Incorporated | Energy storage cell, capacitive energy storage module, and capacitive energy storage system |
| US10672560B2 (en) | 2016-04-04 | 2020-06-02 | Capacitor Sciences Incorporated | Electro-polarizable compound and capacitor |
| US10153087B2 (en) | 2016-04-04 | 2018-12-11 | Capacitor Sciences Incorporated | Electro-polarizable compound and capacitor |
| US10707019B2 (en) | 2016-04-04 | 2020-07-07 | Capacitor Science Incorporated | Electro-polarizable compound and capacitor |
| US9978517B2 (en) | 2016-04-04 | 2018-05-22 | Capacitor Sciences Incorporated | Electro-polarizable compound and capacitor |
| US10395841B2 (en) | 2016-12-02 | 2019-08-27 | Capacitor Sciences Incorporated | Multilayered electrode and film energy storage device |
| JP2020004743A (en) * | 2018-06-25 | 2020-01-09 | マシン・テクノロジー株式会社 | Film material for film capacitor |
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| Publication number | Publication date |
|---|---|
| JP2786298B2 (en) | 1998-08-13 |
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