JPH0325229U - - Google Patents
Info
- Publication number
- JPH0325229U JPH0325229U JP8562489U JP8562489U JPH0325229U JP H0325229 U JPH0325229 U JP H0325229U JP 8562489 U JP8562489 U JP 8562489U JP 8562489 U JP8562489 U JP 8562489U JP H0325229 U JPH0325229 U JP H0325229U
- Authority
- JP
- Japan
- Prior art keywords
- impurity
- gas
- hole
- sides
- semiconductor wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8562489U JPH0325229U (OSRAM) | 1989-07-24 | 1989-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8562489U JPH0325229U (OSRAM) | 1989-07-24 | 1989-07-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0325229U true JPH0325229U (OSRAM) | 1991-03-15 |
Family
ID=31634851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8562489U Pending JPH0325229U (OSRAM) | 1989-07-24 | 1989-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325229U (OSRAM) |
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1989
- 1989-07-24 JP JP8562489U patent/JPH0325229U/ja active Pending