JPH03251380A - Suction collet - Google Patents

Suction collet

Info

Publication number
JPH03251380A
JPH03251380A JP2046764A JP4676490A JPH03251380A JP H03251380 A JPH03251380 A JP H03251380A JP 2046764 A JP2046764 A JP 2046764A JP 4676490 A JP4676490 A JP 4676490A JP H03251380 A JPH03251380 A JP H03251380A
Authority
JP
Japan
Prior art keywords
package
suction
movable part
cylinder body
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2046764A
Other languages
Japanese (ja)
Inventor
Toshihiko Okawa
敏彦 大川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP2046764A priority Critical patent/JPH03251380A/en
Publication of JPH03251380A publication Critical patent/JPH03251380A/en
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

PURPOSE:To suppress the force applied on an IC package to a small value and prevent the lead of the IC package from being bent even if a transport device such as a robot overruns, by installing the second cylinder body which is fitted in shiftable manner towards the center axis direction of the first cylinder body and sucks the IC package by the top edge, on the first cylinder body. CONSTITUTION:When an IC package 8 is sucked to the top edge of a movable part (second cylinder body) 3 by the suction force of a vacuum device, the movable part 3 retracts to a supporting part 2, and stops at one edge of the shift range. Further, when the suction by the vacuum device is suspended, the movable part 3 slowly shifts to the other edge of the shift range reversely to the case of suction by an urging force, and the IC package 8 is separated. Further, when a transport device overruns at the suction position or separating position of the IC package 8, the movable part 3 retracts to a supporting part (first cylinder body) 2, and the force applied on the IC package 8 is suppressed to the small value.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、検査選別工程等におけるICパッケージの移
載の為に、ロボット等の搬送装置に取付けられ、真空装
置の吸引力によりICパッケージを吸着する吸着コレッ
トに関する。
[Detailed Description of the Invention] <Industrial Application Field> The present invention is attached to a transfer device such as a robot for transferring IC packages in an inspection and sorting process, etc., and uses the suction force of a vacuum device to transfer the IC packages. It relates to a suction collet that adsorbs.

〈従来の技術〉 平板状のパッケージ本体から四方へリートを取出した、
所謂表面実装型のICパッケージを、搬送ロボットによ
り検査選別装置のテスト部とトレー(収納容器)との間
なとて移載する際、そのICパッケージをロボットに保
持させる為に、この種の吸着コレットが広く用いられて
いる。この吸着コレットを用いることにより、大きさの
異なる多種のICパッケージを素早く移載することかで
きる。
<Conventional technology> Reeds are taken out in all directions from a flat package body.
When a so-called surface-mounted IC package is transferred between the test section of an inspection and sorting device and a tray (storage container) by a transport robot, this type of suction is used to hold the IC package in the robot. Collets are widely used. By using this suction collet, various types of IC packages of different sizes can be quickly transferred.

従来のこの種の吸着コレットは、真空装置に連結された
単なる筒状部材から成るものてあった。
Conventional suction collets of this type have consisted of a simple cylindrical member connected to a vacuum device.

そしてこのコレットを鉛直にロボットに取付け。Then, attach this collet vertically to the robot.

その鉛直下方に向いた開放端を、検査選別装置のテスト
部やトレー上に水平に載置されたICパッケージの上面
に接近させて、真空装置の吸引力により吸着させる。
The open end facing vertically downward is brought close to the test section of the inspection and sorting device or the top surface of the IC package placed horizontally on the tray, and is attracted by the suction force of the vacuum device.

又、吸着させたICパッケージを、移載光の所定位置に
上方より接近させ、その状態て真空装置の作動を停止さ
せてコレット内の圧力を大気圧に近+jけ、パッケージ
の自重によりコレットから離反させる。
In addition, the attracted IC package is approached from above to the predetermined position of the transfer light, and in this state, the operation of the vacuum device is stopped to bring the pressure inside the collet close to atmospheric pressure, and the package is removed from the collet by its own weight. alienate

〈発明が解決しようとする課題〉 しかし上記従来の吸着コレットでは、そのコレットを取
付けた搬送ロボットが、吸着位置或いは離反位置をオー
バーランした場合に、ICパッケージをテスト部やトレ
ーに押し付けてしまうことになる。その結果、パッケー
ジ本体を支えているリートを曲げ、そのICパッケージ
を不良品にしてしまうという問題かあった。
<Problems to be Solved by the Invention> However, with the above-mentioned conventional suction collet, when the transfer robot to which the collet is attached overruns the suction position or separation position, the IC package may be pressed against the test section or tray. become. As a result, there was a problem in that the reel supporting the package body was bent, resulting in the IC package being defective.

本発明は、上記リード曲げの問題を解決すべく、ロボッ
ト等の搬送装置かオーバーランした場合にICパッケー
ジに加わる力を小さく抑えることのてきる吸着コレット
を提供することを目的とする。
SUMMARY OF THE INVENTION In order to solve the problem of lead bending, an object of the present invention is to provide a suction collet that can suppress the force applied to an IC package when a transfer device such as a robot overruns the IC package.

〈課題を解決するだめの手段〉 」−記]1的を達成する為に、本発明に係る吸着コレッ
トては次の様な構成とした。
[Means for Solving the Problem] In order to achieve the first objective, the suction collet according to the present invention has the following configuration.

即ち、搬送装置に取付けられるとともに真空装置に連結
された第一の筒体と、この第一の筒体に、その筒体の中
心軸方向に移動可能に嵌合され、先端てICパッケージ
を吸着する第二の筒体と、この第二の筒体の、L記第−
の筒体に対する移動範囲を規制する手段と、上記第二の
筒体な、その先端方向へ付勢する手段とを備えた。
That is, a first cylindrical body is attached to a transfer device and connected to a vacuum device, and the first cylindrical body is fitted into the first cylindrical body so as to be movable in the direction of the central axis of the cylindrical body, and the tip is used to adsorb the IC package. a second cylindrical body, and this second cylindrical body,
and means for biasing the second cylinder toward its distal end.

〈作用〉 −に記構成ては、真空装置の吸中力によりICパッケー
ジを可動部の先端に吸着させると、可動部か支持部の方
へ引っ込み、移動範囲の一端で停止する。又、真空装置
による吸引を停止させると、吸着時と逆に可動部か付勢
力により移動範囲の他端まで緩やかに移動してから、I
Cパッケージが離反する。
<Function> In the configuration described in -, when the IC package is attracted to the tip of the movable part by the suction force of the vacuum device, the movable part retracts toward the support part and stops at one end of the moving range. Also, when the suction by the vacuum device is stopped, the movable part moves gently to the other end of the moving range due to the urging force, and then the I
C package leaves.

更に上記構成によれば、搬送装置かICパッケージの吸
着位置或いは離反位置てオーバーランした場合には、可
動部か支持部の方へ引っ込んだ状態となる為、ICパッ
ケージに加わる力か小さく抑えられる。
Furthermore, according to the above configuration, if the transfer device overruns the IC package at the suction position or separation position, the force applied to the IC package can be suppressed because it is retracted toward the movable part or the support part. .

〈実施例〉 以下、図面に基づいて本発明の一実施例を説明する。<Example> Hereinafter, one embodiment of the present invention will be described based on the drawings.

第1図は、本発明に係る吸着コレットの側断面図である
FIG. 1 is a side sectional view of a suction collet according to the present invention.

図に示す様に、この吸着コレットlは、第一の筒体であ
る支持部2の内側に、第二の筒体である可動部3を、上
記支持部2の中心軸方向に移動可能に嵌合して構成され
ている。
As shown in the figure, this suction collet l has a movable part 3, which is a second cylinder, inside a support part 2, which is a first cylinder, and is movable in the direction of the central axis of the support part 2. They are configured to fit together.

上記支持部2は、その開放端を鉛直下方に向けた状態で
搬送ロボット(図示せず)に増刊けられるとともに、真
空装置(図示せず)に連結されている。この支持部2の
内径は、開放端付近て拡大されており、その拡径部分2
aに上記可動部3が、先端つまり下端を支持部2の開放
端から突出させた状態で隙間のない様に嵌合されている
。それとともに−に記拡径部分2aの可動部3の上方に
は、可動部3をその先端方向へ刊勢する手段として、コ
イルへネ4か挿着されている。このコイルへネ4のハネ
力については、可動部3か後述の如く動作し得る様に適
宜に設定される。
The support section 2 is attached to a transfer robot (not shown) with its open end facing vertically downward, and is connected to a vacuum device (not shown). The inner diameter of this support portion 2 is enlarged near the open end, and the enlarged diameter portion 2
The movable part 3 is fitted to the support part 2 with no gap, with the tip or lower end protruding from the open end of the support part 2. At the same time, a coil spring 4 is inserted above the movable part 3 of the enlarged diameter portion 2a as shown in - as a means for urging the movable part 3 toward its distal end. The spring force of the coil 4 is appropriately set so that the movable part 3 can operate as described below.

更に、支持部2に対する可動部3の移動範囲を規制する
手段どして、可動部3に水平にシャフト5が通されると
ともに、そのシャフト5の両端が、支持部2に形成され
た二つの縦長孔6に係合されている。I−記シャフ1〜
5か支持部2の縦長孔6から抜けない様に、シャフト5
の両端にはEリング7か取付けられている。上記規制手
段により、可動部3は支持部2から抜は落ちることがな
く、しかも後述の如くL昇した際にその先端か支持部2
内に入り込むこともない。
Further, as a means for regulating the movement range of the movable part 3 with respect to the support part 2, a shaft 5 is passed through the movable part 3 horizontally, and both ends of the shaft 5 are connected to the two ends formed in the support part 2. It is engaged with the vertically elongated hole 6. I-Shafu 1~
Make sure that the shaft 5 does not fall out from the vertical hole 6 of the support part 2.
E-rings 7 are attached to both ends of the . Due to the above-mentioned regulating means, the movable part 3 does not fall out from the support part 2, and moreover, as described later, when the movable part 3 is raised L, the tip of the movable part 3 does not fall off the support part 2.
It doesn't even go inside.

上記筒状の吸着コレラl−1の径は、可動部3の先端か
、搬送対象となるICパッケージ8の本体8a上面内に
完全に収まる様に設定される。
The diameter of the cylindrical adsorbed cholera l-1 is set so that it fits completely within the tip of the movable portion 3 or within the upper surface of the main body 8a of the IC package 8 to be transported.

次に上記構成の吸着コレット1の動作を、第1図及び第
2図の動作説明図を参照しつつ説明する。
Next, the operation of the suction collet 1 having the above structure will be explained with reference to the operation diagrams of FIGS. 1 and 2.

水平な台9上に載置されたICパッケージ8を吸着する
場合には、先ず真空装置を作動させて可動部3先端から
の吸引を開始する。この時、可動部3は、コイルハネ4
のハネ力によって移動範囲のド限へ降下した状態にある
When suctioning the IC package 8 placed on the horizontal table 9, the vacuum device is first activated to start suctioning from the tip of the movable part 3. At this time, the movable part 3
It is in a state where it has descended to the limit of its movement range due to the spring force.

この状態で、搬送ロボットを制御することにより、第1
図の如く吸着コレットlをICパッケージ8の真上に移
動させ、更に降下゛させて可動部3の先端をICパッケ
ージ8の本体8a上面に接近させる。i’j7動部3の
先端か本体8a上面かられずかに離れた所定の吸着位置
て吸着コレットlの降下を停!トさせるか、その吸着位
置に達する前に、ICパッケージ8は真空装置の吸引力
により吸い」−げられ、可動部3の先端に吸着する。検
者すれば、その様に真空装置の吸引力を設定しておく。
In this state, by controlling the transfer robot, the first
As shown in the figure, the suction collet 1 is moved directly above the IC package 8 and further lowered to bring the tip of the movable part 3 close to the upper surface of the main body 8a of the IC package 8. i'j7 Stop the descent of the suction collet l at a predetermined suction position that is slightly away from the tip of the moving part 3 or the upper surface of the main body 8a! Before the IC package 8 is moved or reaches its suction position, the IC package 8 is sucked up by the suction force of the vacuum device and is suctioned to the tip of the movable part 3. If you are an examiner, set the suction power of the vacuum device accordingly.

例えば、可動部3の内径か71の吸着コレットlと、7
00〜500mmHgの負圧を生しさせる真空装置とを
用いて、44ピン或いは56ピンのICパッケージ8を
吸着させる場合には、そのICパッケージ8は、本体8
 a−L面と可動部3の先端との距1111dか2n+
m程度になった位置て吸い上げられて吸着する。
For example, if the inner diameter of the movable part 3 is 71, the suction collet l is 71,
When a 44-pin or 56-pin IC package 8 is adsorbed using a vacuum device that generates a negative pressure of 00 to 500 mmHg, the IC package 8 is attached to the main body 8.
The distance between the a-L plane and the tip of the movable part 3 is 1111d or 2n+
It is sucked up and adsorbed at a position of about m.

ICパッケージ8か可動部3の先端に吸着すると、吸着
コレット1内の圧力は、開口部か塞かれる為に急速に低
下する。すると真空装置の吸引力か、コイルハネ4のハ
ネ力、可動部3とICパッケージ8の重量、及び可動部
3と支持部2との間の摩擦といった下向きの力を上回る
ことにより、可動部3は、第2図に示す様にICパッケ
ージ8を吸着したまま上昇し、支持部2内へ嵌入する。
When the IC package 8 is attracted to the tip of the movable part 3, the pressure inside the suction collet 1 rapidly decreases because the opening is closed. Then, by exceeding the downward force such as the suction force of the vacuum device, the spring force of the coil spring 4, the weight of the movable part 3 and the IC package 8, and the friction between the movable part 3 and the support part 2, the movable part 3 moves. As shown in FIG. 2, the IC package 8 is raised while being sucked and inserted into the support part 2.

そして移動範囲の上限て停止する。It then stops at the upper limit of its movement range.

この状態て搬送ロボットを制御することにより、吸着コ
レット1をICパッケージ8の移載光の真上へ移動させ
、所定の離反位置で停止させる。その後、ICパッケー
ジ8を吸着コレットlから離反させることになる。
By controlling the transfer robot in this state, the suction collet 1 is moved directly above the transfer light of the IC package 8 and stopped at a predetermined separation position. Thereafter, the IC package 8 is separated from the suction collet l.

ICパッケージ8を離反させる際には、真空装置の作動
を停止する、或いは真空装置に設けた電磁弁を開くこと
などにより吸引を停止させて吸着コレットl内の圧力を
上昇させる。すると可動部3は、吸引力の低下に伴って
上記吸着時と逆に、コイルバネ4のバネ力、及び可動部
3とICパッケージ8の重量により移動範囲の下限まて
緩やかに降下する。更に吸着コレットl内の圧力か大気
圧に近刊くと、ICパッケージ8はその自重によって可
動部3から離反し、第1図と同様に所定位置に載置され
る。これで−個のICパッケージ8の移載か完了する。
When separating the IC package 8, the suction is stopped and the pressure inside the suction collet 1 is increased by stopping the operation of the vacuum device or opening a solenoid valve provided in the vacuum device. Then, as the suction force decreases, the movable part 3 gently descends to the lower limit of its movement range due to the spring force of the coil spring 4 and the weight of the movable part 3 and the IC package 8, contrary to the above-mentioned attraction. Furthermore, when the pressure inside the suction collet 1 approaches atmospheric pressure, the IC package 8 is separated from the movable part 3 by its own weight and placed in a predetermined position as in FIG. 1. This completes the transfer of - IC packages 8.

上記吸着コレットlでは、ロボットか吸着位置でオーバ
ーランしてこの吸着コレラ1〜lが台9−1−のICパ
ッケージ8を押圧した場合、可動部3が支持部2の方へ
引っ込む。又、ロボットか離反位置てオーバーランした
場合には、可動部3がその移動範囲の下限まて降下する
前にICパッケージ8か台9に達し、やはり可動部3か
支持部2の方へ引っ込んだ状態となる。これらの場合に
ICパッケージ8に加わる力は、主に可動部3を付勢す
るコイルハネ4のバネ力であるが、そのバネ力は、IC
パッケージ8のリート8bを曲げる様な大きさの力より
小さく設定し得るものである。即ちこの吸着コレットl
では、ICパッケージ8を押圧した状態になったとして
も、そのリート8bを曲げることはない。
In the suction collet 1, when the robot overruns at the suction position and the suction cholera 1 to 1 press the IC package 8 on the stand 9-1-, the movable part 3 retracts toward the support part 2. In addition, if the robot overruns at the separation position, the IC package 8 or the stand 9 will be reached before the movable part 3 descends to the lower limit of its movement range, and it will also retract towards the movable part 3 or the support part 2. It becomes a state. In these cases, the force applied to the IC package 8 is mainly the spring force of the coil spring 4 that urges the movable part 3;
This force can be set smaller than the force that would bend the leat 8b of the package 8. That is, this suction collet l
Then, even if the IC package 8 is pressed, the reed 8b will not be bent.

更に上記吸着コレット1では、離反動作において可動部
3か降下していく時には、吸着コレットl内の圧力か大
気圧に近付く為、ICパッケージ8を吸着させる吸引力
は著しく低下する。よって第3図の動作説明図に示ず如
く、ガイド斜面10aを設けた溝部10等へICパッケ
ージ8を移載する際に、吸着コレットlの水平面内ての
離反位置がずれて、可動部3と共に降下するICパッケ
ージ8のリート8bかガイド斜面10aに当接し、リー
ド8bに水平方向(矢印A)の力がかかったとしても、
ICパッケージ8は吸着したまま容易に横ずれし、或い
は落下する。即ちこの様な場合にも、リート8bを曲げ
ることかない。これに対し従来の吸着コレラ1〜ては、
降下中には吸引力か低下しない為、この様な場合、吸着
したICパッケージのリートに大きな力がかかり曲がっ
てしまう。
Furthermore, in the suction collet 1, when the movable part 3 descends during the separation operation, the pressure inside the suction collet 1 approaches atmospheric pressure, so that the suction force for suctioning the IC package 8 is significantly reduced. Therefore, as shown in the operation explanatory diagram of FIG. 3, when the IC package 8 is transferred to the groove 10 etc. provided with the guide slope 10a, the separation position of the suction collet l in the horizontal plane is shifted, and the movable part 3 Even if the lead 8b of the IC package 8 that descends with the IC package comes into contact with the guide slope 10a, and a horizontal force (indicated by arrow A) is applied to the lead 8b,
The IC package 8 easily shifts laterally or falls while being attracted. That is, even in such a case, there is no need to bend the ream 8b. In contrast, conventional adsorption cholera 1~
Since the suction force does not decrease during descent, in such a case, a large force is applied to the leet of the IC package that is attracted, causing it to bend.

尚、上記可動部3とコイルハネ4とを、支持部2の外周
へ嵌着させる様に構成してもよい。
Note that the movable portion 3 and the coil spring 4 may be configured to be fitted onto the outer periphery of the support portion 2.

〈発明の効果〉 以上述べた様に本発明の吸着コレットによれ 0 ば、可動部を備えた為に、ロボット等の搬送装置かオー
バーランした場合にもICパッケージに加わる力か小さ
く抑えられ、よってそのICパッケージのリートを曲げ
て不良品を生しさせてしまうということが防止される。
<Effects of the Invention> As described above, since the suction collet of the present invention is provided with a movable part, the force applied to the IC package can be suppressed to a small level even if a transport device such as a robot overruns the IC package. Therefore, it is possible to prevent the IC package from being bent and producing defective products.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本考案の実施例を示す側断面図、第2図は、
実施例における動作説明図、第3図は、実施例における
他の動作説明図である。 1・・・吸着コレット。 2・・・支持部(第一の筒体)。 3・・・可動部(第二の筒体)。 4・・・コイルバネ、  5・・・シャフト。 6・・・縦長孔、   8・・・ICパッケージ。
FIG. 1 is a side sectional view showing an embodiment of the present invention, and FIG.
FIG. 3 is a diagram illustrating another operation in the embodiment. 1...Adsorption collet. 2... Support part (first cylindrical body). 3...Movable part (second cylindrical body). 4...Coil spring, 5...Shaft. 6... Vertical hole, 8... IC package.

Claims (1)

【特許請求の範囲】 ICパッケージの搬送装置に取付けられ、真空装置の吸
引力を利用してICパッケージを吸着する吸着コレット
において、 搬送装置に取付けられるとともに真空装置に連結された
第一の筒体と、 上記第一の筒体に、その筒体の中心軸方向に移動可能に
嵌合され、先端でICパッケージを吸着する第二の筒体
と、 上記第二の筒体の、上記第一の筒体に対する移動範囲を
規制する手段と、 上記第二の筒体を、その先端方向へ付勢する手段とを備
えたことを特徴とする吸着コレット。
[Scope of Claims] In a suction collet that is attached to an IC package transfer device and adsorbs the IC package using the suction force of a vacuum device, a first cylindrical body that is attached to the transfer device and connected to the vacuum device; and a second cylindrical body that is fitted into the first cylindrical body so as to be movable in the direction of the central axis of the cylindrical body and that adsorbs the IC package at its tip; A suction collet characterized by comprising: means for regulating the range of movement of the second cylinder with respect to the cylinder; and means for biasing the second cylinder towards its distal end.
JP2046764A 1990-02-27 1990-02-27 Suction collet Pending JPH03251380A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2046764A JPH03251380A (en) 1990-02-27 1990-02-27 Suction collet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2046764A JPH03251380A (en) 1990-02-27 1990-02-27 Suction collet

Publications (1)

Publication Number Publication Date
JPH03251380A true JPH03251380A (en) 1991-11-08

Family

ID=12756405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2046764A Pending JPH03251380A (en) 1990-02-27 1990-02-27 Suction collet

Country Status (1)

Country Link
JP (1) JPH03251380A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101224859B1 (en) * 2010-09-13 2013-01-22 국방과학연구소 Vacuum collet chuck and processing apparatus having the same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5837592U (en) * 1981-09-04 1983-03-11 東芝熱器具株式会社 dial display device
JPS59161288A (en) * 1983-03-03 1984-09-12 三菱重工業株式会社 Device for delivering article
JPS61101321A (en) * 1984-10-24 1986-05-20 Toshiba Mach Co Ltd Wafer transport device
JPH0231687B2 (en) * 1982-06-14 1990-07-16 Nonogawa Shoji Yk
JPH03178790A (en) * 1989-12-04 1991-08-02 Toshiba Ceramics Co Ltd Vacuum pad

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5837592U (en) * 1981-09-04 1983-03-11 東芝熱器具株式会社 dial display device
JPH0231687B2 (en) * 1982-06-14 1990-07-16 Nonogawa Shoji Yk
JPS59161288A (en) * 1983-03-03 1984-09-12 三菱重工業株式会社 Device for delivering article
JPS61101321A (en) * 1984-10-24 1986-05-20 Toshiba Mach Co Ltd Wafer transport device
JPH03178790A (en) * 1989-12-04 1991-08-02 Toshiba Ceramics Co Ltd Vacuum pad

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101224859B1 (en) * 2010-09-13 2013-01-22 국방과학연구소 Vacuum collet chuck and processing apparatus having the same

Similar Documents

Publication Publication Date Title
JP4545681B2 (en) Adsorption conveyance device and conveyance method for plate workpiece
JP2534196B2 (en) Wafer sticking method
JP5358239B2 (en) Wafer holding apparatus, semiconductor manufacturing apparatus, and wafer suction method
TWI396241B (en) A semiconductor wafer picking device
JPH03251380A (en) Suction collet
JP3079502B2 (en) Die push-up device
KR100847579B1 (en) Picker unit for semiconductor device
JPS626655B2 (en)
JPH0852679A (en) Holding device for fine article
JPS6344650B2 (en)
JPWO2022176076A5 (en)
CN219340898U (en) Electronic material tray code reading and grabbing device
TWI747204B (en) Cover delivery machine
JP2003011077A (en) Suction cup device
JPS63298884A (en) Carrying device of reel support spring for magnetic tape
JPH0213401Y2 (en)
KR20180065242A (en) Adsorption mean for vacumm adsorption apparatus having the side simultaneous grip of adsorption object
JPH0229065Y2 (en)
JPH0357436Y2 (en)
JPH03201458A (en) Suction/holding device
JPH07227786A (en) Article holding device
JPH04266331A (en) Hand device of robot
JPS60244728A (en) Sheet separator
JPS63174899A (en) Device for separating product from mold punching sheet
JPH01156242A (en) Thin piece conveying robot device