JPH03251304A - Microdrill made of trisilicon tetranitride sintered body - Google Patents
Microdrill made of trisilicon tetranitride sintered bodyInfo
- Publication number
- JPH03251304A JPH03251304A JP2048454A JP4845490A JPH03251304A JP H03251304 A JPH03251304 A JP H03251304A JP 2048454 A JP2048454 A JP 2048454A JP 4845490 A JP4845490 A JP 4845490A JP H03251304 A JPH03251304 A JP H03251304A
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- microdrill
- si3n4
- wear resistance
- sintering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title 1
- 239000011812 mixed powder Substances 0.000 claims abstract description 5
- 238000005245 sintering Methods 0.000 claims abstract description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 3
- 238000000465 moulding Methods 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 7
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 abstract description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 2
- 229910052593 corundum Inorganic materials 0.000 abstract 2
- 230000008021 deposition Effects 0.000 abstract 2
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 abstract 2
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 2
- 229910017083 AlN Inorganic materials 0.000 abstract 1
- 229910034327 TiC Inorganic materials 0.000 abstract 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 abstract 1
- 238000004080 punching Methods 0.000 abstract 1
- 238000005553 drilling Methods 0.000 description 9
- 238000003466 welding Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- -1 Ti or Zr Chemical class 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Drilling Tools (AREA)
- Ceramic Products (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
この発明は、特にプリント基板の穴あけに用いられた場
合に、優れた耐摩耗性を示し、長期に亘って優れた寸法
精度での穴あけ加工を行なうことができるSi3N4焼
結体製マイクロドリルに関するものである。[Detailed Description of the Invention] <Industrial Application Field> This invention exhibits excellent wear resistance, especially when used for drilling holes in printed circuit boards, and can be used for drilling holes with excellent dimensional accuracy over a long period of time. This invention relates to a micro drill made of Si3N4 sintered body that can perform the following.
〈従来の技術〉
従来から、WC基超硬合金製の表面に硬質層のないマイ
クロドリルや、通常の化学蒸着法やイオン・ブレーティ
ング法、及びスパッタリング法などの物理蒸着法の表面
被覆処理法を用いて、Ti、またはZrなどの炭化物、
窒化物および炭窒化物のうちの1種、もしくは2種以上
の複層からなる、層厚082〜2011mの表面硬質層
を形成した表面被覆WC基合金製マイクロドリルが、プ
リント基板などに、直径0.5〜1 mm程度の穴を形
成するのに用いられていることはよく知られている。<Conventional technology> Conventionally, micro drills made of WC-based cemented carbide without a hard layer on the surface, physical vapor deposition methods such as ordinary chemical vapor deposition method, ion blasting method, and sputtering method have been used. using carbides such as Ti or Zr,
A surface-coated WC-based alloy microdrill with a hard surface layer of 082 to 2011 m in thickness, consisting of one or more than two types of nitrides and carbonitrides, can be used for printing on printed circuit boards, etc. It is well known that it is used to form holes of about 0.5 to 1 mm.
〈発明が解決しようとする課題〉
しかし、近年、これらプリント基板の穴あけにおいて、
省力化および高速化が必要となり、より穴あけ条件が厳
しいものとなった。そのため、従来のWCC超超硬合金
製マイクロドリル、表面被覆WC基合金製マイクロドリ
ルでは、表面硬質層が短時間にて大きく摩耗したり、剥
離したり、また被削物が溶着したりするため要求される
耐摩耗性を示さないのが現状である。<Problem to be solved by the invention> However, in recent years, when drilling holes in these printed circuit boards,
Labor saving and speeding up became necessary, and the drilling conditions became more severe. For this reason, in conventional WCC cemented carbide microdrills and surface-coated WC-based alloy microdrills, the hard surface layer may wear out or peel off in a short period of time, or the workpiece may adhere to it. Currently, it does not exhibit the required wear resistance.
〈課題を解決するための手段〉
そこで、本発明者らは上記に鑑みて、優れた耐摩耗性、
および耐溶着性をもつマイクロドリル素材を研究、開発
した結果、MgO,Y2O3、AJ!20!、AJ!
N 、 Zr0a、Hf0z、TiC,TiNのうち少
なくとも1種以上を、それぞれの成分について0.01
〜20重量%で含み、残部が5taN4よりなる混合粉
末を用いて焼結、成型することにより313N4焼結体
製マイクロドリルを作製した場合、極めて良好な耐摩耗
性、および耐溶着性を示し、その工具寿命も長くなるこ
とを見出したものである。<Means for Solving the Problems> In view of the above, the present inventors have developed a method with excellent wear resistance,
As a result of researching and developing microdrill materials that are resistant to welding, MgO, Y2O3, AJ! 20! , AJ!
At least one of N, Zr0a, Hf0z, TiC, and TiN at a concentration of 0.01 for each component.
When a micro drill made of a 313N4 sintered body is produced by sintering and molding a mixed powder containing ~20% by weight and the remainder is 5taN4, it exhibits extremely good wear resistance and welding resistance, It has been found that the tool life is also extended.
〈作用〉
即ち、この発明は上記した混合粉末を用いて焼結、成型
して得た5LN4焼結体製マイクロドリルに特徴を有す
るものであって、これはS jiN 4がTiの炭化物
、窒化物および炭窒化物とほぼ同等の硬度を持ち、かつ
プリント基板の穴あけを行なう際の耐溶着性に優れてい
るためである。<Function> That is, the present invention is characterized by a micro drill made of a 5LN4 sintered body obtained by sintering and molding the above-mentioned mixed powder. This is because it has almost the same hardness as carbonitrides and carbonitrides, and has excellent adhesion resistance when drilling holes in printed circuit boards.
〈実施例〉
次に、この発明のマイクロドリルを実施例により説明す
る。<Example> Next, the microdrill of the present invention will be described with reference to an example.
先ず、刃先外径: 0.8mm 、刃長: 30.Om
m の寸法を持ったJTS B 4301の形状を有
するこの発明のSi3N4焼結体製マイクロドリルを製
造した。また、比較のために1.JIS−KIOに相当
する組成を有するWCC超超硬合金製マイクロドリル以
下、比較ドリルlと称する)、およびJIS・KIOに
相当する組成を有するWCC超超硬合金製マイクロドリ
ル表面に、公知の真空アーク蒸着法を用いて、Tiの窒
化物を2.nlImの層厚にて形成した表面被覆WC基
超硬合金製マーイクロドリル(以下、比較ドリル2と称
する)を製造した。First, the outer diameter of the cutting edge: 0.8 mm, the blade length: 30. Om
A microdrill made of Si3N4 sintered body of the present invention having a shape of JTS B 4301 with dimensions of m was manufactured. Also, for comparison, 1. A well-known vacuum was applied to the surface of a WCC cemented carbide microdrill having a composition equivalent to JIS-KIO (hereinafter referred to as comparative drill l) and a WCC cemented carbide microdrill having a composition equivalent to JIS-KIO. 2. Ti nitride was deposited using an arc evaporation method. A surface-coated WC-based cemented carbide micro drill (hereinafter referred to as Comparative Drill 2) having a layer thickness of nlIm was manufactured.
これら各種のマイクロドリルについて、被削材:3枚の
4層シート板を、厚さ0.12mmのアルミニウム板と
、厚さ1.6mmのベー、クライト板ではさんだ全厚6
.55mmのブノント基板
回転速度: 60.00Or、p、m
切削速度: 40011mm/min
送り: 50++m /rev
の条件で、穴あけ加工を行ない、穴内径面粗さが寿命判
断基準となる301+mに至るまでの穴加工数を測定し
、刃先を観察し、被削材の溶着状態を調べた。これらの
測定結果を表1に示した。For these various micro drills, the workpiece material: three four-layer sheet plates sandwiched between a 0.12 mm thick aluminum plate and a 1.6 mm thick base and clite plate with a total thickness of 6 mm.
.. Drilling was performed on a 55 mm Benont board under the following conditions: Rotation speed: 60.00 Or, p, m Cutting speed: 40011 mm/min Feed rate: 50++ m/rev Until the hole inner diameter surface roughness reached 301+ m, which is the criterion for determining service life. The number of holes drilled was measured, the cutting edge was observed, and the welding state of the work material was examined. The results of these measurements are shown in Table 1.
第 1 表
〈発明の効果〉
第1表の結果から、この発明のSi3N4焼結体製マイ
クロドリルは、従来の比較ドリル1.2と比べて優れた
耐摩耗性、および耐溶着性を示すことが明らかである。Table 1 <Effects of the Invention> From the results in Table 1, the micro drill made of Si3N4 sintered body of the present invention exhibits superior wear resistance and welding resistance compared to the conventional comparative drill 1.2. is clear.
このようにこの発明のSi3N4焼結体製マイクロドリ
ルは、プリント基板の穴あけ加工において、主材質の5
ial’J4が、優れた耐摩耗性、および耐溶着性をも
っているため、過酷な条件下の穴あけ加工においても、
長期に亘り、良好な寸法精度の穴あけ加工を行なうこと
ができるのである。In this way, the micro drill made of Si3N4 sintered body of the present invention can be used for drilling holes in printed circuit boards.
ial'J4 has excellent wear resistance and welding resistance, so it can be used even when drilling under harsh conditions.
This allows drilling with good dimensional accuracy over a long period of time.
Claims (1)
rO_2、HfO_2、TiC、TiNのうち少なくと
も1種以上を0.01〜20重量%含み、残部がSi_
3N_4よりなる混合粉末を用いて焼結、成型してなる
Si_3N_4焼結体製マイクロドリル。MgO, Y_2O_3, Al_2O_3, AlN, Z
Contains 0.01 to 20% by weight of at least one of rO_2, HfO_2, TiC, and TiN, and the remainder is Si_
A micro drill made of a Si_3N_4 sintered body made by sintering and molding a mixed powder of 3N_4.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2048454A JPH03251304A (en) | 1990-02-27 | 1990-02-27 | Microdrill made of trisilicon tetranitride sintered body |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2048454A JPH03251304A (en) | 1990-02-27 | 1990-02-27 | Microdrill made of trisilicon tetranitride sintered body |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03251304A true JPH03251304A (en) | 1991-11-08 |
Family
ID=12803798
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2048454A Pending JPH03251304A (en) | 1990-02-27 | 1990-02-27 | Microdrill made of trisilicon tetranitride sintered body |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03251304A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19703175C2 (en) * | 1997-01-29 | 2003-02-06 | Fraunhofer Ges Forschung | Process for the production of ceramic or powder metallurgical components with a helical outer contour |
US7799537B2 (en) | 2004-11-29 | 2010-09-21 | Otsuka Pharmaceutical Co., Ltd. | Cholesterol measuring reagent containing a cholesterol esterase |
-
1990
- 1990-02-27 JP JP2048454A patent/JPH03251304A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19703175C2 (en) * | 1997-01-29 | 2003-02-06 | Fraunhofer Ges Forschung | Process for the production of ceramic or powder metallurgical components with a helical outer contour |
US7799537B2 (en) | 2004-11-29 | 2010-09-21 | Otsuka Pharmaceutical Co., Ltd. | Cholesterol measuring reagent containing a cholesterol esterase |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100233154B1 (en) | Coated cutting tools | |
JP3488526B2 (en) | Hard coatings and hard coatings with excellent wear resistance | |
JP5079998B2 (en) | Method of machining a metal workpiece with a coated cutting tool insert and a coated cutting tool insert | |
JPH0745707B2 (en) | Surface-coated titanium carbonitride-based cermet for high-speed cutting | |
WO2019146785A1 (en) | Coated tool, and cutting tool comprising same | |
EP0446375B1 (en) | Surface-coated hard member for cutting and abrasion-resistant tools | |
KR930010710B1 (en) | Surface-coated hard member for cutting and abrasion resistant tools | |
JPH0718415A (en) | Cutting tool made of surface coated cubic boron nitride base ceramics having hard coating layer with superior adhesion | |
KR940011212B1 (en) | Drill bit having a diamond-coated sintered body | |
JPH03251304A (en) | Microdrill made of trisilicon tetranitride sintered body | |
D'Errico et al. | Influences of PVD coatings on cermet tool life in continuous and interrupted turning | |
JPH0230406A (en) | Cutting tool made of surface-coated tungsten carbide radical cemented carbide | |
JPWO2019146784A1 (en) | Covering tool and cutting tool equipped with it | |
JP3170993B2 (en) | Surface-coated tungsten carbide based cemented carbide cutting tool with excellent fracture resistance | |
KR930010709B1 (en) | Surface-coated hard member having excellent abrasion resistance | |
JPS60123209A (en) | Cutting tool for drilling of electronic integrated circuit laminated base board | |
JP2596094B2 (en) | Surface-coated ceramic cutting tool with excellent wear resistance | |
JP3822655B2 (en) | Hard film and hard film coated member with excellent wear resistance | |
JPH0413506A (en) | Microdrill of sintered body of si3n4 coated with diamond | |
JP2564700B2 (en) | Hard film coated drill | |
JPH0413507A (en) | Drill of sintered body of si3n4 coated with diamond | |
JP2841749B2 (en) | Boron carbide coated cutting tools | |
JP2617326B2 (en) | Drill | |
JP2571772B2 (en) | Surface coated cutting tool with excellent fracture resistance | |
JP2003129165A (en) | Surface coated hard alloy |