JPH03249604A - Multilayered optical interference film - Google Patents
Multilayered optical interference filmInfo
- Publication number
- JPH03249604A JPH03249604A JP2047514A JP4751490A JPH03249604A JP H03249604 A JPH03249604 A JP H03249604A JP 2047514 A JP2047514 A JP 2047514A JP 4751490 A JP4751490 A JP 4751490A JP H03249604 A JPH03249604 A JP H03249604A
- Authority
- JP
- Japan
- Prior art keywords
- refractive index
- layers
- titanium dioxide
- sodium fluoride
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 18
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 30
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 claims abstract description 29
- 239000011775 sodium fluoride Substances 0.000 claims abstract description 17
- 239000004408 titanium dioxide Substances 0.000 claims abstract description 15
- 235000013024 sodium fluoride Nutrition 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 abstract description 16
- 238000000151 deposition Methods 0.000 abstract description 4
- 238000003475 lamination Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 45
- 239000010410 layer Substances 0.000 description 34
- 238000000034 method Methods 0.000 description 8
- 230000003595 spectral effect Effects 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 239000005083 Zinc sulfide Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910052984 zinc sulfide Inorganic materials 0.000 description 3
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000012788 optical film Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 201000001880 Sexual dysfunction Diseases 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000012744 reinforcing agent Substances 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
- Optical Filters (AREA)
Abstract
Description
【発明の詳細な説明】
［発明の目的］
（産業上の利用分野）
本発明は、投光照明用の多層膜反射鏡などのように−様
な厚さの薄膜を多層重ね各面での反射光の干渉を利用し
て特定の分光透過率を持たせた多層光干渉膜に係り、特
に、少ない層数で必要とする光学特性が得られ、かつ耐
久性を向上した多層光干渉膜に関する。[Detailed Description of the Invention] [Objective of the Invention] (Industrial Field of Application) The present invention is directed to a multi-layered thin film of various thicknesses, such as a multilayer reflector for floodlights. The present invention relates to a multilayer optical interference film that has a specific spectral transmittance by utilizing the interference of reflected light, and particularly relates to a multilayer optical interference film that can obtain the required optical properties with a small number of layers and has improved durability. .
（従来の技術）
近年、ガラス製投光レフレクタの内面に高屈折物質と低
屈折率物質との各薄膜を交互に積層した多層膜で形成さ
れる多層膜反射鏡が、投影器、店舗用照明、医療用照明
などの光源として多く使用されている。(Prior Art) In recent years, multilayer film reflectors, which are made of a multilayer film in which thin films of high refractive index materials and thin films of low refractive index materials are alternately laminated on the inner surface of a glass flood reflector, have been used for projectors and store lighting. It is often used as a light source for medical lighting, etc.
このような多層膜反射鏡は、可視光線をできるだけ反射
し長波長の赤外領域の熱線を透過させることにより、照
明された物体を熱線によって加熱することを少なくシ、
かつ光源からの熱線が多層膜を透過する際に吸収によっ
て投光レフレクタが加熱されない、いわゆる冷光鏡とし
ての特徴を有している。一般に冷光鏡は鏡面に高屈折物
質と低屈折率物質との薄膜を交互に積層した多層膜で形
成されるが、積層される各物質の屈折率の比が大きいほ
ど高い反射率と広い反射帯を有するものである。冷光鏡
に使用される物質の組合わせと、その屈折率の比を表−
１に示す。この表−１から、広い反射帯域を得るには高
屈折率物質として硫化亜鉛（Ｚ ｎ Ｓ）を、また低屈
折率物質として弗化マグネシウム（ＭｇＦ２）を採用す
るのが有利でしかしながら、表−２に示すように、上記
したＺ ｎ Ｓ Ｍ ｇ Ｆ ２からなる多層膜は、
屈折率比は高いが、耐熱性、耐候性に問題がある。すな
わち、ＺｎＳ−ＭｇＦ２からなる多層膜はハロゲンラン
プなどのように高熱を発生する光源に適用すると、高温
を受けることにより、短時間で剥離し、かつ表層部のＺ
ｎＳが酸化されて白濁する。通常、ハロゲンランプを点
灯した場合、反射鏡の熱負荷が３５０℃のとき３０時間
、３００℃のとき１００時間で使用不能になる。また、
ＺｎＳは吸湿性があるため、温度５０℃、湿度９０％の
雰囲気に５０時間放置すると、膜が剥離してしまう。By reflecting as much visible light as possible and transmitting long-wavelength infrared heat rays, such multilayer mirrors reduce heating of illuminated objects by heat rays.
Moreover, when the heat rays from the light source are transmitted through the multilayer film, the projection reflector is not heated due to absorption, and has the feature of a so-called cold light mirror. In general, a cold light mirror is formed of a multilayer film in which thin films of high refractive index materials and low refractive index materials are alternately laminated on the mirror surface. It has the following. Table of combinations of materials used in cold light mirrors and their refractive index ratios.
Shown in 1. From Table 1, it is advantageous to use zinc sulfide (ZnS) as a high refractive index material and magnesium fluoride (MgF2) as a low refractive index material in order to obtain a wide reflection band. As shown in 2, the multilayer film made of Z n S M g F 2 described above is
Although it has a high refractive index ratio, it has problems with heat resistance and weather resistance. In other words, when a multilayer film made of ZnS-MgF2 is applied to a light source that generates high heat, such as a halogen lamp, it will peel off in a short time due to the high temperature, and the Zn of the surface layer will be removed.
nS is oxidized and becomes cloudy. Normally, when a halogen lamp is turned on, it becomes unusable after 30 hours when the heat load on the reflector is 350°C and 100 hours when the temperature is 300°C. Also,
Since ZnS is hygroscopic, the film will peel off if left in an atmosphere of 50° C. and 90% humidity for 50 hours.
これに対し、ＴｉＯ２−５ｉ０２からなる多層膜は、耐
熱性および耐候性には優れているが、ＺｎＳ−ＭｇＦ２
からなる多層膜と同程度の光学特性を得ようとすれば、
ＺｎＳ−ＭｇＦ２多層膜は２５層の積層であるのに対し
ＴｉＯ２−５ｉＯダ多層膜は膜の積層数を５０％近く多
い３５層とする必要があり、高価になるので、経済的な
面から実用性に問題がある。On the other hand, multilayer films made of TiO2-5i02 have excellent heat resistance and weather resistance, but ZnS-MgF2
If you want to obtain the same optical properties as a multilayer film consisting of
While the ZnS-MgF2 multilayer film has 25 layers, the TiO2-5iO multilayer film requires nearly 50% more layers to 35 layers, making it more expensive, so it is not practical from an economic standpoint. I have a sexual problem.
本発明は、上記事情に鑑みてなされたもので、少ない層
数で必要とする光学特性が得られ、かつ耐熱性および耐
候性に優れた多層光干渉膜を提供することを目的とする
。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a multilayer optical interference film that can obtain necessary optical properties with a small number of layers and has excellent heat resistance and weather resistance.
（以下余白）
ここで、
Ｈ物質・・・・・・高屈折率物質
り物質・・・・・・低屈折率物質
ＮＨ・・・・・・高屈折率物質の屈折率ＮＬ ・・・・
・・低屈折率物質の屈折率〔発明の構成コ
（課題を解決するための手段と作用）
本発明は、上記目的を達成するために、基体面に二酸化
チタンからなる高屈折率層と弗化ナトリウムからなる低
屈折率層とを交互に積層した多層膜を被着してなる構成
としたので、少ない層数で必要とする光学特性が得られ
、かつ優れた耐熱性および耐候性を得ることができる。(Left below) Here, H substance...High refractive index material...Low refractive index material NH...Refractive index NL of high refractive index material...
...Refractive index of low refractive index substance [Constitution of the invention (Means and effects for solving the problem) In order to achieve the above object, the present invention includes a high refractive index layer made of titanium dioxide and a fluorine film on the substrate surface. The structure is made up of a multilayer film in which low refractive index layers made of sodium chloride are laminated alternately, so the required optical properties can be obtained with a small number of layers, and excellent heat resistance and weather resistance can be obtained. be able to.
（実施例） 以下、図面を参照して本発明の詳細な説明する。(Example) Hereinafter, the present invention will be described in detail with reference to the drawings.
第１図は本発明の一実施例の多層膜反射鏡の断面図、第
２図は本発明の一実施例の多層膜の分光透過率特性を示
した図である。FIG. 1 is a sectional view of a multilayer film reflecting mirror according to an embodiment of the present invention, and FIG. 2 is a diagram showing spectral transmittance characteristics of the multilayer film according to an embodiment of the present invention.
第１図に示すように、基体となる硬質ガラス製投光レフ
レクタｌはその一面を拡開させた回転放物状の凹部２を
有して形成され、この凹部２の中心には、例えばハロゲ
ンランプからなる光源３が装着される。この投光レフレ
クタ１の前面には安全のため前面ガラス４が取付けられ
る。As shown in FIG. 1, a hard glass floodlight reflector l serving as a base is formed with a recess 2 in the shape of a paraboloid of revolution expanded on one side. A light source 3 consisting of a lamp is attached. A front glass 4 is attached to the front of the light projecting reflector 1 for safety.
また、投光レフレクタ１の凹部２側の内面上には光源３
から発せられる光を反射投光する多層膜５が被着されて
いる。この多層膜５は、高屈折率物質として屈折率２．
３の二酸化チタン（Ｔ ｉ０２ ） 、低屈折率物質と
して屈折率１．３の弗化ナトリウム（ＮａＦ）を採用し
、表−３に示す膜構成、膜厚で形成される。すなわち、
第１層から第９層までの光学膜厚が１／４λａ （λａ
−８００ｎｍ ）および第１０層から第１７層までの
光学膜厚対膜５ｂが１／４λｂ （λｂ −４５０ｎｍ
）である各物質の薄膜が、第１層を二酸化チタンから
なる層とし第２層から交互に積層された交互層である。Furthermore, a light source 3 is provided on the inner surface of the light emitting reflector 1 on the concave portion 2 side.
A multilayer film 5 is deposited to reflect and project light emitted from the surface. This multilayer film 5 is made of a high refractive index material with a refractive index of 2.
Titanium dioxide (T i02 ) of No. 3 and sodium fluoride (NaF) with a refractive index of 1.3 are used as the low refractive index substance, and are formed with the film structure and film thickness shown in Table 3. That is,
The optical film thickness from the first layer to the ninth layer is 1/4λa (λa
-800nm) and the optical film thickness from the 10th layer to the 17th layer is 1/4λb (λb -450nm)
) are alternate layers in which the first layer is a layer made of titanium dioxide and the second layer is alternately laminated.
従って、第１７層は二酸化チタン層となる。Therefore, the 17th layer becomes a titanium dioxide layer.
この多層膜５の形成方法は、例えば、真空蒸着法によっ
て行なわれる。二酸化チタン層は、酸素およびアルゴン
を導入した、８×１０づ〜１×１０−’ Ｔｏｒｒの低
真空雰囲気内で、反射鏡温度を１００〜３００℃とし、
蒸着母材を電子ビームで衝撃することによって、投光レ
フレクタｌあるいは弗化ナトリウム層上に蒸着される。The method for forming this multilayer film 5 is, for example, a vacuum evaporation method. The titanium dioxide layer was formed in a low vacuum atmosphere of 8 x 10 - 1 x 10 -' Torr with oxygen and argon introduced, with a reflector temperature of 100 - 300 °C.
It is deposited on the projection reflector l or the sodium fluoride layer by bombarding the deposition base material with an electron beam.
また、弗化ナトリウム層は、アルゴンを導入した上記圧
力の低真空雰囲気内で、反射鏡温度を１００〜３００℃
とし、蒸着母材を抵抗加熱することによって、二酸化チ
タン層上に蒸着される。In addition, the sodium fluoride layer was formed in a low vacuum atmosphere at the above pressure with argon introduced, and the reflector temperature was adjusted to 100 to 300°C.
The titanium dioxide layer is then deposited on the titanium dioxide layer by resistance heating the deposition base material.
上記方法により表−３に示す膜構成、膜厚で形成された
Ｔｉ０２−ＮａＦからなる多層膜５は、両層の屈折率比
がＮＨ／ＮＬ−１，７７で、第２図に示す分光透過特性
を有しており、これは第３図に示す従来のＴｉＯ２−５
ｉ０２多層膜の分光透過特性とほぼ同等である。このよ
うに両多層膜はほぼ同等の光学特性を有しているが、こ
の光学特性を得るために、Ｔ ｉ ０２ Ｓ ｉ ０
２多層膜は３５層の積層を必要とするのに対し、ＴｉＯ
２−ＮａＦ多層膜５は１７層の積層で済む。The multilayer film 5 made of Ti02-NaF formed by the above method with the film structure and film thickness shown in Table 3 has a refractive index ratio of both layers of NH/NL-1,77, and a spectral transmission shown in FIG. The conventional TiO2-5 shown in Figure 3 has the following characteristics.
The spectral transmission characteristics are almost the same as those of the i02 multilayer film. In this way, both multilayer films have almost the same optical properties, but in order to obtain these optical properties, T i 02 S i 0
2 multilayer film requires a stack of 35 layers, whereas TiO
The 2-NaF multilayer film 5 only needs to be laminated with 17 layers.
また、弗化ナトリウムは化学的に安定で二酸化チタンと
の積層の際の適合性が従来の積層に比較して極めて良好
であり、ＴｉＯ２−ＮａＦ多層膜５は熱負荷に対して剥
離しにくく、また高温高湿の環境に耐えられる。従って
、ＴｉＯ２−ＮａＦ多層膜５を被着した多層膜反射鏡は
高出力ランプにも耐え、長寿命で耐候性も良い。このＴ
ｉ０２−ＮａＦ多層膜５の耐熱性と耐候性について行な
った試験の結果を表−４に示す。ここで、耐熱性はラン
プ点灯時の反射部の温度である３００℃と３５０℃とに
おける剥離開始までの時間で示し、耐候性は温度５０℃
、湿度９０％の雰囲気中における剥離開始までの時間で
示している。表−２におけるＴｉＯ２−５ｉ０２多層膜
の耐熱性と耐候性と比較し、実施例のＴｉ０２−ＮａＦ
多層膜５が耐熱性と耐候性に優れ、長寿命で苛酷な使用
条件にも耐えられることが明らかである。In addition, sodium fluoride is chemically stable and has extremely good compatibility with titanium dioxide when laminated compared to conventional lamination, and the TiO2-NaF multilayer film 5 is difficult to peel off under heat load. It can also withstand high temperature and high humidity environments. Therefore, the multilayer reflector coated with the TiO2-NaF multilayer film 5 can withstand high-power lamps, has a long life, and has good weather resistance. This T
Table 4 shows the results of tests conducted on the heat resistance and weather resistance of the i02-NaF multilayer film 5. Here, heat resistance is expressed as the time until peeling starts at 300°C and 350°C, which are the temperatures of the reflective part when the lamp is lit, and weather resistance is measured at a temperature of 50°C.
, is shown as the time until the start of peeling in an atmosphere with a humidity of 90%. Comparing the heat resistance and weather resistance of the TiO2-5i02 multilayer film in Table 2, the Ti02-NaF
It is clear that the multilayer film 5 has excellent heat resistance and weather resistance, has a long life, and can withstand harsh usage conditions.
上記したように、弗化ナトリウムは屈折率が１゜３と小
さく、かつ化学的に安定しているので耐熱性と耐候性に
優れている。さらに二酸化チタンと弗化ナトリウムとは
屈折率比が大きいので少ない層数で必要とする光学特性
が得られ、また両者の積層の適合性が良いので剥離し難
く、耐熱性と耐候性に優れた膜が得られる。As mentioned above, sodium fluoride has a small refractive index of 1°3 and is chemically stable, so it has excellent heat resistance and weather resistance. Furthermore, titanium dioxide and sodium fluoride have a large refractive index ratio, so the required optical properties can be obtained with a small number of layers, and because the compatibility of the two layers is good, it is difficult to peel off and has excellent heat resistance and weather resistance. A membrane is obtained.
なお、上記実施例では、多層光干渉膜を多層膜反射鏡へ
適用した例について説明したが、これに限らず、例えば
色フィルタ膜、あるいは紫外線遮断膜などに適用しても
よい。In the above embodiment, an example in which the multilayer optical interference film is applied to a multilayer film reflecting mirror has been described, but the present invention is not limited to this, and may be applied to, for example, a color filter film or an ultraviolet blocking film.
また、上記実施例では、膜の形成方法を真空蒸着法とし
たが、これに限らず、イオンブレーティング法、イオン
アシスト法、ＣＶ Ｄ （ＣｈｅｍｉｃａｌＶａｐｏｒ
Ｄｅｐｏｓｉｔｉｏｎ ）法など他の形成方法でもよ
い。Furthermore, in the above embodiments, the method of forming the film was a vacuum evaporation method, but the method is not limited to this, and may be an ion blating method, an ion assist method, or a CVD (Chemical Vapor Deposition method).
Other forming methods such as a deposition method may also be used.
また、上記実施例では、基体としてガラス製投光レフレ
クタについて説明したが、これに限らず、例えばフィル
タ基板など用途に適したものであればよく、またその形
状や材質は適宜選択すればよい。Further, in the above embodiments, a glass floodlight reflector is used as the base body, but the base body is not limited to this, and any base body suitable for the purpose may be used, such as a filter substrate, and the shape and material thereof may be appropriately selected.
また、二酸化チタン層および弗化ナトリウム層の少なく
とも一方にガラス質強化剤や散光性微粒子などを含有さ
せることは適宜実施してもよい。Further, at least one of the titanium dioxide layer and the sodium fluoride layer may contain a vitreous reinforcing agent, light-diffusing fine particles, etc. as appropriate.
また、本発明は上記実施例に限定されることなく、本発
明の要旨を逸脱しない範囲において、種々変形可能なこ
とは勿論である。Furthermore, it goes without saying that the present invention is not limited to the above embodiments, and can be modified in various ways without departing from the gist of the present invention.
（以下余白）
λａｍ ６００ｓｃ
λｂ纏４５０■謳
［発明の効果コ
以上詳述したように、本発明の多層光干渉膜によれば、
基体面に二酸化チタンからなる高屈折率層と弗化ナトリ
ウムからなる低屈折率層とを交互積層する構成としたこ
とにより、大きな屈折率比が得られ、かつ各成分が化学
的に安定で積層時における適合性がよいので、少ない層
数でも必要とする光学特性を得ることができ、かつ優れ
た耐熱性と耐候性が得られ長寿命で苛酷な使用条件に耐
えることができる。(Space below) λam 600sc λb 450 ■ Effects of the Invention As detailed above, according to the multilayer optical interference film of the present invention,
By adopting a structure in which high refractive index layers made of titanium dioxide and low refractive index layers made of sodium fluoride are alternately laminated on the substrate surface, a large refractive index ratio can be obtained, and each component is chemically stable and laminated. Since it has good compatibility with various times, it is possible to obtain the required optical properties even with a small number of layers, and it also has excellent heat resistance and weather resistance, and can withstand harsh usage conditions with a long life.
また、積層する層数が少ないので、経済的な面でもコス
トダウンが図かれるなど実用的な効果を奏する。Furthermore, since the number of layers to be laminated is small, there are practical effects such as economical cost reduction.
第１図は本発明の一実施例の多層膜反射鏡の断面図、第
２図は本発明の一実施例の多層膜の分光透過率特性を示
す曲線図、第３図は従来の多層膜の分光透過率特性を示
す曲線図である。
ｌ・・・投光レフレクタ（基体）、５・・・多層反射膜
。FIG. 1 is a cross-sectional view of a multilayer film reflecting mirror according to an embodiment of the present invention, FIG. 2 is a curve diagram showing the spectral transmittance characteristics of a multilayer film according to an embodiment of the present invention, and FIG. 3 is a diagram showing a conventional multilayer film. It is a curve diagram showing the spectral transmittance characteristics of. 1...Light projection reflector (substrate), 5...Multilayer reflective film.
Claims (1)
ウムからなる低屈折率層とを交互に積層した多層膜を被
着してなることを特徴とする多層光干渉膜。A multilayer optical interference film comprising a multilayer film in which a high refractive index layer made of titanium dioxide and a low refractive index layer made of sodium fluoride are alternately laminated on a substrate surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2047514A JP2778784B2 (en) | 1990-02-28 | 1990-02-28 | Multilayer reflector for light source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2047514A JP2778784B2 (en) | 1990-02-28 | 1990-02-28 | Multilayer reflector for light source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03249604A true JPH03249604A (en) | 1991-11-07 |
| JP2778784B2 JP2778784B2 (en) | 1998-07-23 |
Family
ID=12777222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2047514A Expired - Fee Related JP2778784B2 (en) | 1990-02-28 | 1990-02-28 | Multilayer reflector for light source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2778784B2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6188203A (en) * | 1984-10-06 | 1986-05-06 | Nec Corp | Band-pass light interference film filter |
-
1990
- 1990-02-28 JP JP2047514A patent/JP2778784B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6188203A (en) * | 1984-10-06 | 1986-05-06 | Nec Corp | Band-pass light interference film filter |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2778784B2 (en) | 1998-07-23 |
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