JPH0324719U - - Google Patents
Info
- Publication number
- JPH0324719U JPH0324719U JP7495390U JP7495390U JPH0324719U JP H0324719 U JPH0324719 U JP H0324719U JP 7495390 U JP7495390 U JP 7495390U JP 7495390 U JP7495390 U JP 7495390U JP H0324719 U JPH0324719 U JP H0324719U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- transducer
- piezoelectric film
- piezoelectric
- transducer formed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 239000002131 composite material Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 238000010897 surface acoustic wave method Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
第１図および第２図は共に従来例を示す断面図
、第３図および第４図は共に本考案の異なつた実
施例を示す断面図である。 １……半導体基板、２……圧電薄膜、３，４…
…トランスデユーサ電極、５……周辺回路素子、
６……回路基板。
、第３図および第４図は共に本考案の異なつた実
施例を示す断面図である。 １……半導体基板、２……圧電薄膜、３，４…
…トランスデユーサ電極、５……周辺回路素子、
６……回路基板。
Claims (1)
- 【実用新案登録請求の範囲】 半導体基板と、 前記半導体基板表面側に設けられた圧電膜と、 該圧電膜に接して形成されたトランスデユーサ
と、 上記半導体基板の裏面側に形成され上記圧電膜
とトランスデユーサとを含む表面弾性波機能素子
を駆動するための周辺回路素子と、から構成され
たことを特徴とする複合半導体装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7495390U JPH0324719U (ja) | 1990-07-12 | 1990-07-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7495390U JPH0324719U (ja) | 1990-07-12 | 1990-07-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0324719U true JPH0324719U (ja) | 1991-03-14 |
Family
ID=31615103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7495390U Pending JPH0324719U (ja) | 1990-07-12 | 1990-07-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0324719U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006121259A (ja) * | 2004-10-20 | 2006-05-11 | Seiko Epson Corp | 弾性表面波装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5112780A (en) * | 1974-07-10 | 1976-01-31 | Matsushita Electric Ind Co Ltd | Handotaishusekikairosochi |
-
1990
- 1990-07-12 JP JP7495390U patent/JPH0324719U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5112780A (en) * | 1974-07-10 | 1976-01-31 | Matsushita Electric Ind Co Ltd | Handotaishusekikairosochi |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006121259A (ja) * | 2004-10-20 | 2006-05-11 | Seiko Epson Corp | 弾性表面波装置 |
| JP4548088B2 (ja) * | 2004-10-20 | 2010-09-22 | セイコーエプソン株式会社 | 弾性表面波装置 |