JPH03244944A - Clean room construction system - Google Patents

Abstract

PURPOSE:To make it possible to perform a delicate room temperature control which corresponds with the quantity of heat load in respective regions by a method wherein room temperature control in a clean room is performed by providing a required number of direct expanding type dry coil units at optional spots. CONSTITUTION:On the ceiling surface which is moduled into a lattice state by ceiling frames, a required number of fan filter units (FFU) 30 are arranged, and a desire air circulating passage is formed by the selection of a provision number or operation number of FFU to construct a clean room. In this clean room, at the air circulating passage, a required number of air cooling heat exchangers (direct expanding type dry coil units) 40 are arranged, and at the same time, an outdoor unit which includes a compressor 56 and condenser 58 to circulation-feed a medium to these direct expanding type dry coil units is arranged outside of the clean room. Then, by these direct expanding type dry coil units, substantially all of sensible heat load which generates in the clean room is processed, and at the same time, the surface temperature of each dry coil unit is kept higher than the dew point temperature of air which passes through the dry coil unit.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention makes it possible to create a clean room with the required air cleanliness and room temperature inside an existing building in a short period of time and with simple construction. Concerning a multi-purpose clean room construction system.

[Prior Art] Various techniques have been attempted to realize a full-fledged lean room by simple construction in an existing building that is not dedicated to a clean room, and examples thereof will be described below.

First, a ceiling frame with a large number of small frames of a predetermined shape and size is stretched near the ceiling of the building, leaving space behind the ceiling, and a fan filter unit (FFU) or blind plate is fitted into the small frames to create a new ceiling. Complete the surface Next, place porous material (e.g. grating material) under the building.
The Shinjo surface was formed by extending the roof, leaving space under the floor.

Furthermore, the space between the 5 new ceiling surfaces and the Shinjo surface (hereinafter referred to as the "middle floor space") is divided into multiple areas by partitions in the contraction direction, and the new ceiling surfaces corresponding to each area are provided with the space required for that area. By installing a number of FFUs corresponding to the cleanliness level, multiple clean rooms with different cleanliness levels can be realized.

As a result, the attic space can be used as a plenum chamber, the underfloor space can be used as a return plenum, and areas in the mid-level space that do not require particularly high cleanliness (
For example, a "passageway" can be used as a return area, so an existing building can be easily used as a clean room without major construction work.

[Problem to be solved by the invention]

As described above, according to the conventional example, an existing building can be easily and quickly converted into a clean room.

However, conventionally, the room temperature inside a clean room has been controlled using an air conditioner installed at an appropriate location in the air circulation path, which has caused the following problems.

■Since the entire clean room, including the plenum chamber and return plenum, will be uniformly cooled,
In particular, when there are areas that need to be cooled intensively and areas that do not need to be cooled that much, it becomes impossible to set and maintain the room temperature precisely according to each cooling load.

■In order to install heat source facilities (refrigerators, cooling towers, pumps, etc.) that have the ability to cool almost the entire building, a fairly large space is required, and this space must be prepared in advance within the building or in a nearby location. It is necessary to secure it.

■It is necessary to install drain piping to drain the drain generated in the cooler.

- It takes time and effort to move the cooler once installed to another location, and new installation space must be secured, so it is not possible to flexibly deal with layout changes within the clean room.

■If equipment in the heat source facility breaks down, cooling of the entire clean room will stop all at once.

An object of the present invention is to provide a lean room construction system that can overcome the problems of the prior art.

[Means to solve problems]

In order to achieve the above object, there are provided two clean room construction systems according to the present invention in claim 1.

A required number of fan filter units (FFU) are installed on the ceiling surface, which is modularized in a lattice shape by the ceiling frame, and the space above the attic is configured as a plenum chamber, and the space under the floor is configured as a return plenum, and from the return plenum to the plenum chamber. In a clean room equipped with a return area through which air circulates and a desired air circulation path is formed by selecting the number of installed or operating FFUs, the required number of air cooling heat exchangers ( An outdoor unit including a compressor and a condenser for circulating and supplying refrigerant to this direct expansion type dry coil unit is placed outside the clean room. The dry coil unit is configured to treat substantially all of the sensible heat load generated in the clean room, and to maintain the surface temperature of each dry coil unit higher than the dew point temperature of the air passing through it.

In the second aspect of the present invention, the direct expansion type dry coil unit is installed on a ceiling surface that is modularized into a lattice shape by a ceiling frame.

Further, in claim 3, the direct expansion type dry coil unit is connected to the ceiling surface of an internal heat load generation zone of manufacturing equipment or the like in a clean room.

The air that has passed through the former dry coil unit is placed on the ceiling surface of the return area and is guided to the FFU installed on the ceiling surface of the internal heat load generation zone, and the air that has passed through the latter dry coil unit enters the plenum chamber. It was configured to be sent to

Moreover, in the fourth aspect of the present invention, the direct expansion type dry coil unit is arranged in a return plenum.

Further, in the fifth aspect of the present invention, the direct expansion type dry coil unit is arranged on a suction surface to an underfloor return plenum in an internal heat load generation zone.

Furthermore, in claim 6, a plurality of direct expansion dry coil units are connected to the outdoor unit through a common refrigerant pipe.

〔Example〕

Embodiments of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 is a simplified diagram showing the entire clean room construction system according to the present invention.

As shown in the figure, a ceiling frame 8 is stretched around the ceiling 4 of the existing building 2 leaving a ceiling space 6, thereby forming a new ceiling 10. Although not shown in the drawings, the ceiling frame 8 is formed by making a plurality of bars of a predetermined shape made of aluminum or the like orthogonal to each other at regular intervals vertically and horizontally.As a result, the ceiling frame 8 has a predetermined shape and dimensions. A large number of modularized small frames are formed. On the other hand, in the vicinity of the pressure 12, a porous material (
For example, grating material) 16 is stretched across the area.

As a result, a Shinjo surface 18 is formed. In this way, the interior of the building 5 2 is divided into three areas: the attic space 6, the underfloor space 14, and the space sandwiched between the new ceiling and the Shinjo surface (hereinafter referred to as "middle-story space"). 9 The middle space is mainly used as a clean room 20 that requires a high degree of cleanliness, but it is also divided into multiple areas by vertical partitions 21, and these are service areas where maintenance and inspection of machines, etc. 22, passage 24, etc.

In the underfloor space 14, an outside m*26 and an exhaust fan 28 are installed. Thus, fresh outside air is supplied into the building 2 by the external air conditioner 1126, and the air inside the building 2 is exhausted to the outside by the exhaust fan 28, thereby ventilating the inside of the building 2. Additionally, the nuclear outside IISm has a built-in humidifier and dehumidifier, and these are used to adjust the humidity in the clean room.

The small frame formed in the frame 8 is provided with a fan filter unit (FF
U) 30 is installed. FFU3O has a rectangular parallelepiped shape and has a fan 32 and a high-performance filter (
It has a built-in HEPA or ULPA filter 34, which takes air from the attic space 6 into the casing through the upper opening 36, and in the process of exhausting it through the lower opening, removes dust and other particles with the high-performance filter 34, purifying the air. do. Incidentally, since the FFU 3O itself is well known, further explanation will be omitted.

The frame 8 is further fitted with a direct expansion type dry coil unit 40, which is an air cooling heat exchanger and has a shape and size that just closes the small frame. As shown in FIG. 2, this direct expansion type dry coil unit 40 is a fin tube type heat exchanger in which a cooling coil 42 functioning as an evaporator is attached. A refrigerant is supplied to the cooling coil 42 via a refrigerant supply pipe 44 and an expansion valve 46, and this refrigerant is evaporated within the cooling coil 42. At that time, from below the unit (i.e. from the indoor side),
The air that has flowed into the unit is cooled by contacting this unit and is discharged into the attic space 6.

The direct expansion type dry coil unit 40 is connected to an outdoor unit 54, which is an outdoor unit, via refrigerant piping (a refrigerant supply pipe 44 and a refrigerant discharge pipe 52) to form a refrigerant circuit. Inside the outdoor unit 54, a compressor 56. Condenser58. Fan 60. An accumulator 62 and a liquid receiver 64 are installed. The gas refrigerant compressed by the compressor 60 to a high temperature and high pressure is cooled by air blowing by the fan 60 when passing through the condenser 58, and becomes liquid. The liquid refrigerant is carried into the direct expansion type dry gyle unit 40 via the liquid receiver 64 and the refrigerant supply pipe 44, passes through the expansion valve 46, is depressurized, and is then supplied into the cooling coil 42. cooling coil 42
The refrigerant guided inside absorbs heat from the surrounding air and evaporates into gas. This gas refrigerant is returned to the compressor 60 via the refrigerant discharge pipe 50, the evaporation pressure regulating valve 52, and the accumulator 62.

Figure 3 shows a nostem that controls the surface temperature of the direct expansion type dry coil unit 7) 40 so that it does not fall below the dew point temperature. 55 in total, and this temperature t
The temperature controller turns the compressor 56 ON-OFF so that the detected value of the temperature sensor 53 falls within the setting range of the A moderator 55.
Or issue ON-unload, 0FF-unload control commands. As a result, the temperature inside the clean room is maintained within the set temperature range. On the other hand.

Evaporation pressure regulating valve 52 installed on the suction side of the compression lR56
is adjusted so that the pressure of the refrigerant in the dry coil (evaporator) 20 does not fall below a predetermined pressure.

As shown in FIG. 4, this evaporation pressure regulating valve 52 is a direct-acting type having a valve body 59 biased by a pressure regulating spring 57, and this valve 52 changes the resistance on the suction side of the compressor. As a result, although the suction pressure to the compressor decreases, the evaporation pressure in the detonator remains constant. When R-22 is used as the refrigerant, the evaporation pressure of the generator is adjusted to about 6 kg by the evaporation pressure regulating valve 52.
The evaporation temperature can be maintained at 10'C by controlling it so that it does not fall below /cm''G.A temperature-sensitive expansion valve is used as the expansion valve 46.In this way, the cooling coil 4
Maintain the surface temperature of 2 above the dew point temperature of the air.

The outdoor unit 54 is installed outside the clean room, but it may also be installed outside the building or in an appropriate empty space such as a separate space under the ceiling. Although one direct expansion type dry coil unit 40 may be associated with the outdoor unit 54, the fifth
As shown in the figure, by employing a so-called multi-type dry coil unit in which a plurality of direct expansion type dry coil units 40 are associated with one outdoor unit 54, it is possible to improve the -layer efficiency. In this case, a separate refrigerant circuit can be formed by incorporating a plurality of compressors 56 and condensers 58 in one outdoor unit 54 and making them correspond to a plurality of direct expansion dry coil units 40. can.

The number of installed FFUs 3O and direct expansion type dry coil units 40 described above is determined by the required air cleanliness and cooling load. For example, in the frame 8 in the clean room 20 where particularly high cleanliness is required, many F
Install FU3O. On the contrary, the FFU 3O is not installed in the frame 8 on the passage 24 where the need for air purification is low, and instead of the FFU 3O, a direct expansion type tri-coil unit 40 is installed. In addition, the frame 8 in the service area 22, where a medium level of cleanliness is required and where a high cooling load occurs, is equipped with the required number of air conditioners.
FU3O is installed, and a direct expansion type dry coil unit 40 is installed in the empty small frame.

2. Although not shown in the diagram, the FFU of the small frame of frame 8
In areas where neither the 3O nor the direct expansion type dry coil unit 40 needs to be installed, a blind panel having approximately the same size and shape as the small frame is fitted to block the small frame and prevent unpurified air from flowing out. Prevent entry into the clean room 20, etc.

In FIG. 1, air in the attic space 6 is sucked into the FFU 3O by operating a fan 32 built into the FFU 3O, and the purified air passes through the filter 34 and is sent to the clean room 20 and service It is blown out into the area 22, blows down the intermediate zone, captures dust, etc. floating in the room, passes through the Shinjo surface 18 formed of the porous material 16, and flows into the underfloor space 14. The air in the underfloor space 14 rises from the underfloor side into the passage 24 and is cooled as it passes through the direct expansion type dry coil unit 40 installed on the frame 8 one passage above. This cooled air is again purified within the FFU 3O and then supplied to the clean room 20 or the like.

As mentioned above, the attic space 6 is used as a plenum chamber, and the underfloor space is used as a return plenum.
Furthermore, the aisle serves as a return area. That is, FFU3O and direct expansion type dry coil unit 4
By selecting the number of installations and the installation location of 0, a desired air circulation path can be formed.

As shown in the service area 22 in Figure 2, the FFU 3O and the direct expansion type dry coil unit 4 are installed in the frame 8 on the same area.
0 and communicate with each other via the duct 66 or the like, it becomes possible to intensively cool only that area. That is, a part of the air released from the FFU 3O is sucked into the direct expansion type dry coil unit 40 before reaching the underfloor space 14, and the air cooled there is directly distributed without being diffused throughout the attic space 6. It is returned to FFU3O, cleaned again, and released into the room.

As a result, it is possible to form a local cooling cycle within a certain specific area, separately from processing the cooling load of the entire system, and it is possible to process a high cooling load more efficiently. This is effective when cooling an area where a particularly high cooling load occurs due to manufacturing equipment being installed or the like.

Alternatively, instead of communicating through the duct 66 or the like, a box 68 may be placed over the specific FFU 3O and the direct expansion type dry coil unit 40 from behind the ceiling to form a double plenum chamber within the attic space 6. A similar effect can also be achieved with a duct connection.

Next, an application example of the clean room construction system according to the present invention is shown in FIGS. 6 to 9.

In the example shown in FIG. 6, only FFU3O is placed on the frame 8 above the clean room 20 where a high degree of air cleanliness is required, and only the dry coil unit 40 is placed on one passage 24, so that the entire building 2 is covered. Cooling is in progress.

On the other hand, a dedicated dry coil unit 40 and FFU 3O are mounted on the frame 8 above the service area 22 where equipment 70 etc. having a high calorific value are placed, and the dry coil unit 40 and FFU 3O are connected to the duct 66. communicated via. Further, the floor surface is made of a non-breathable material 72 instead of the porous material 16. Therefore, all of the clean air discharged from the FFU 3O is reflected on the floor and returned into the dry coil unit 40, so that only the service area 22 can be intensively cooled.

The seventh episode is almost the same as FIG. 4, but instead of communicating the FFU 3O and the dry coil unit 40 via the duct 66, the FFU 3O and the dry coil unit are mounted on the frame 8 on the service area 22. The box 68 is completely placed over the ceiling 40 to form a double chamber in the attic space 6, thereby preventing the cooling air from spreading to other areas.

FIG. 8 differs from FIG. 6 in that the dry coil unit 40 is installed under the floor of one passage instead of being mounted on the frame 8 above one passage 24.

FIG. 9 shows an example in which a dedicated dry coil unit 40 is installed under the floor in order to cope with the high cooling load in the service area 22. In this case, it goes without saying that the flooring of the portion corresponding to the air intake of the dry coil unit 40 is made of porous material 16 in order to ensure ventilation. Since there is no need to install unit 40 on frame 8, F
A large amount of FU3O can be placed. Therefore, it is suitable for areas that have a high cooling load and require high air cleanliness.

[Effect]

Since the clean room construction system according to the present invention has the above configuration, it has the following effects.

■The room temperature inside the clean room can be adjusted by installing the required number of direct expansion dry coil units at any location, which corresponds to the size of the heat load in each area. Allows for fine-grained room temperature control.

■By passing through the direct expansion type dry coil unit, the cooled air can be guided directly to any FFU, making it possible to separate areas with particularly high heat loads from other areas and cool them intensively. can.

■Since seven compact direct-expansion dry coil units are installed in a distributed manner as needed, there is no need to secure a large amount of space for installing a large cooler.

■Since the direct expansion type dry coil unit is configured so that no condensate occurs, there is no need for condensate piping.

■Since it is a direct expansion type dry coil unit, there is no need to supply cold water to each unit. Therefore, there is no need to separately install a heat source facility (such as a refrigerator or a cooling tower) for supplying cold water, and an existing building can be converted into a clean room more easily and quickly. Furthermore, since there is no need for water piping, leaks due to piping accidents can be avoided.

■From the above ■■■, it is easy to relocate the direct expansion type dry coil unit, and it is possible to flexibly deal with layout changes in the clean room.

■Since the outdoor unit containing the compressor, etc. is installed outdoors and connected to the direct expansion type dry coil unit via refrigerant piping, noise generation by the compressor can be prevented.

■Since each outdoor unit and one or more direct expansion type dry coil units corresponding thereto constitute an independent basic unit, it is possible to spread the risk in the event of a failure.

[Brief explanation of drawings]

Fig. 1 is a simplified diagram showing the overall configuration of the clean room construction system according to the present invention, Fig. 2 is a refrigerant circuit diagram showing the connection state between the direct expansion type dry coil unit and the outdoor unit, and Fig. 3 explains temperature control. System configuration diagram for
The figure is a schematic sectional view of the evaporation pressure regulating valve, Figure 5 is a refrigerant circuit diagram showing another example of the connection state between the direct expansion type dry coil unit nod and the outdoor unit, and Figures 6 to 9 are all FIG. 2 is a simplified explanatory diagram showing an application example of the clean room construction system according to the present invention. 6 ・ 8 ・ 10 ・ 14 ・ 30 ・ 40 ・ 46 ・ 52 ・ 53 ・ 54 ・ 55 ・ Explanation of symbols・Behind the ceiling space・Ceiling frame・Ceiling surface・Underfloor space・Fan filter unit (FFU)・Direct expansion type dryer Coil unit/expansion valve (temperature-sensitive expansion valve) ・evaporation pressure adjustment valve/temperature sensor/outdoor unit (outdoor unit) ・temperature controller 56 ・ ・compressor 58 ・ ・condenser

Claims (6)

[Claims] (1) The required number of fan filter units (FFU) are installed on the ceiling surface, which is modularized into a grid pattern using the ceiling frame.
The attic space is configured as a plenum chamber, the underfloor space is configured as a return plenum, and a return area is provided where air flows from the return plenum to the plenum chamber. In a clean room configured to form an air circulation path, a required number of air cooling heat exchangers (direct expansion dry coil units) are arranged in the air circulation path, and refrigerant is supplied to the direct expansion dry coil units. An outdoor unit including a compressor and condenser for circulating supply is placed outside the clean room, and this direct expansion type dry coil unit handles virtually all of the sensible heat load generated within the clean room. A clean room construction system configured to maintain the surface temperature higher than the dew point temperature of the air passing through it. (2) The clean room construction system according to claim 1, wherein the direct expansion type dry coil unit is installed on a ceiling surface that is modularized into a lattice shape by a ceiling frame. (3) The direct expansion type dry coil unit is arranged on the ceiling surface of the internal heat load generation zone of manufacturing equipment etc. in the clean room and on the ceiling surface of the return area, and the air that has passed through the former dry coil is placed on the ceiling surface of the internal heat load generation zone of manufacturing equipment etc. 2. The clean room construction system according to claim 1, wherein the air is guided to the FFU installed on the ceiling surface of the internal heat load generation zone, and the air that has passed through the latter dry coil unit is sent into the plenum chamber. (4) The clean room construction system according to claim 1, wherein the direct expansion type dry coil unit is arranged in a return plenum. (5) The clean room construction system according to claim 1, wherein the direct expansion type dry coil unit is arranged on a suction surface to an underfloor return plenum in an internal heat load generation zone. (6) The clean room construction system according to claim 1, wherein a plurality of the direct expansion dry coil units are connected to an outdoor unit through a common refrigerant pipe.