JPH0324248U - - Google Patents

Info

Publication number
JPH0324248U
JPH0324248U JP8528789U JP8528789U JPH0324248U JP H0324248 U JPH0324248 U JP H0324248U JP 8528789 U JP8528789 U JP 8528789U JP 8528789 U JP8528789 U JP 8528789U JP H0324248 U JPH0324248 U JP H0324248U
Authority
JP
Japan
Prior art keywords
charged particle
aperture
particle beam
passage
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8528789U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8528789U priority Critical patent/JPH0324248U/ja
Publication of JPH0324248U publication Critical patent/JPH0324248U/ja
Pending legal-status Critical Current

Links

JP8528789U 1989-07-20 1989-07-20 Pending JPH0324248U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8528789U JPH0324248U (enrdf_load_stackoverflow) 1989-07-20 1989-07-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8528789U JPH0324248U (enrdf_load_stackoverflow) 1989-07-20 1989-07-20

Publications (1)

Publication Number Publication Date
JPH0324248U true JPH0324248U (enrdf_load_stackoverflow) 1991-03-13

Family

ID=31634339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8528789U Pending JPH0324248U (enrdf_load_stackoverflow) 1989-07-20 1989-07-20

Country Status (1)

Country Link
JP (1) JPH0324248U (enrdf_load_stackoverflow)

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