JPH0324248U - - Google Patents
Info
- Publication number
- JPH0324248U JPH0324248U JP8528789U JP8528789U JPH0324248U JP H0324248 U JPH0324248 U JP H0324248U JP 8528789 U JP8528789 U JP 8528789U JP 8528789 U JP8528789 U JP 8528789U JP H0324248 U JPH0324248 U JP H0324248U
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- aperture
- particle beam
- passage
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8528789U JPH0324248U (OSRAM) | 1989-07-20 | 1989-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8528789U JPH0324248U (OSRAM) | 1989-07-20 | 1989-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0324248U true JPH0324248U (OSRAM) | 1991-03-13 |
Family
ID=31634339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8528789U Pending JPH0324248U (OSRAM) | 1989-07-20 | 1989-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0324248U (OSRAM) |
-
1989
- 1989-07-20 JP JP8528789U patent/JPH0324248U/ja active Pending
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