JPH03241634A - Manufacture of fluorescent screen for color cathode-ray tube - Google Patents

Manufacture of fluorescent screen for color cathode-ray tube

Info

Publication number
JPH03241634A
JPH03241634A JP3603790A JP3603790A JPH03241634A JP H03241634 A JPH03241634 A JP H03241634A JP 3603790 A JP3603790 A JP 3603790A JP 3603790 A JP3603790 A JP 3603790A JP H03241634 A JPH03241634 A JP H03241634A
Authority
JP
Japan
Prior art keywords
light source
radius
exposure
ray tube
color cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3603790A
Other languages
Japanese (ja)
Inventor
Satoshi Muto
無藤 里志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3603790A priority Critical patent/JPH03241634A/en
Publication of JPH03241634A publication Critical patent/JPH03241634A/en
Pending legal-status Critical Current

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  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)

Abstract

PURPOSE:To form dots with a shape near a true circle at all portions on a fluorescent screen by rotating a linear light source covered by a shielding plate having slits around the preset axis at a preset radius, and weighing the required exposure. CONSTITUTION:Phosphor dots are formed on a panel 1 by the exposure of a linear light source 3. The linear light source 3 is rotated at a preset radius centering a straight line 2a parallel with the tangential plane of the panel 1 through the exposure center 2. The linear light source 3 is covered by a shielding plate 5 having slits 4 with the preset width in the longitudinal direction centering the light source center 3a. The rotating radius is changed continuously or in steps as desired during rotation and finally set to zero. The slit width is inversely proportional to the rotating radius. The exposure time is inversely proportional to the rotating radius. The light source luminance is inversely proportional to the rotating radius. The light source 3 can be referred as equivalent to a light source apparently approximate to a sphere.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明はシャドウマスク方式ドツト形螢光体のカラー陰
極線管螢光面のホトリソグラブ技術による製造方法に係
り、特に偏向角度が広い場合でも螢光面全面で真円に近
いドツト形状が得られるようなカラー陰極線管の螢光面
製造方法に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for manufacturing a color cathode ray tube phosphor surface of a shadow mask type dot-type phosphor using photolithographic technology, and in particular, the present invention relates to a method for manufacturing a phosphor surface of a color cathode ray tube using a shadow mask type dot-type phosphor, and in particular, the present invention relates to a method of manufacturing a phosphor surface of a color cathode ray tube using a shadow mask type dot-type phosphor. This invention relates to a method for manufacturing a fluorescent surface of a color cathode ray tube, which allows a dot shape close to a perfect circle to be obtained over the entire surface.

[従来の技術] 一般のテレビジョン用カラー受像管には、螢光面に幅の
細い3原色螢光体の縦方向ストライプパターンを多数平
行に所定の色順序で繰返し配列したものが主として用い
られているが、精細度の高い表示を要求されるデータ処
理装置の表示端末などには、小径の略円形のドツトパタ
ーンを配列したものを用いる。
[Prior Art] Generally used color picture tubes for television use have a fluorescent surface in which a large number of narrow longitudinal stripe patterns of three primary color phosphors are repeatedly arranged in parallel in a predetermined color order. However, display terminals for data processing devices that require high-definition display use an array of small-diameter, generally circular dot patterns.

上記表示端末用カラー陰極線管の螢光面には、コントラ
ストを向上させるために螢光体ドラ1−パターン対応位
置にそれぞれ孔を開けた黒色無反射層(ブラックマトリ
クス)、これらの孔を埋めた3原色螢光体ドツトパター
ンが形成されており、いずれも、所定の(実質的)n光
中心に配置した光源から放射されシャドウマスクの孔を
通過した光線で、露光位置にあるホトレジスト膜や感光
性物質を混合した螢光体膜を感光、固化させる公知のホ
I・リングラフ技術を用いて製造される。この工程で、
以前は小型の超高圧水銀灯にコリメータと通称する朶光
器を組合せた点光源を使用していた。
The fluorescent surface of the above color cathode ray tube for display terminals is coated with a black non-reflective layer (black matrix) in which holes are formed at positions corresponding to the phosphor driver 1 pattern to improve contrast, and these holes are filled. A three-primary color phosphor dot pattern is formed, and in each case, the light rays are emitted from a light source placed at a predetermined (substantially) n-light center and passed through a hole in the shadow mask, and the photoresist film or photosensitive material at the exposure position is exposed. It is manufactured using the well-known Holingraph technology, in which a phosphor film mixed with a fluorescent substance is exposed to light and solidified. In this process,
Previously, a point light source was used, which was a combination of a small ultra-high-pressure mercury lamp and a halo, commonly known as a collimator.

この光源を用いた場合は、ドツト形状などでは余り問題
は生しなかったが、光強度が弱く、長い露光時間を要す
るため、線状光源、実際には以前のものよりは長さの長
い超高圧水銀灯の比較的長い部分からの光を、所謂コリ
メータなどを通さず、直接、露光光源として使用し、多
量の光束を得るようにした方法がとられるようになった
。しかし、このような細長い光源を静止させたままで使
用すると、円形であって欲しいドラ1〜形状が長円形に
なるとか、螢光面上の位置によって形状、大きさが異な
るとか、種々の問題が生しるため、以下に一部を例示す
るように、多くの対策提案がなされてきた。
When using this light source, there were no problems with dot shapes, etc., but because the light intensity was low and the exposure time was long, it was necessary to use a linear light source, which was actually longer than the previous one. A method has come to be used in which light from a relatively long section of a high-pressure mercury lamp is used directly as an exposure light source without passing through a so-called collimator to obtain a large amount of luminous flux. However, when such a long and thin light source is used while stationary, there are various problems such as the desired circular shape becoming oval, and the shape and size varying depending on the position on the fluorescent surface. Therefore, many countermeasure proposals have been made, some of which are listed below.

実公昭54−22375号公報には、比較的長い超高圧
水銀灯(実際には安定した発光部となるアークの中央部
分からの光だけを取出すスリン1〜のある遮蔽板で覆っ
て使用する)を収容したランプハウスごと回転させるこ
とが示されている。螢光血中央部では問題ないが周辺部
ではシャドウマスクの円形の孔を通過した光線がパネル
に斜めに投射するためドツト形状が真円ではなくなり、
またドツト周縁で露光強度が緩やかに変化し現像時に切
れの悪い個所ができる。
Japanese Utility Model Publication No. 54-22375 describes a relatively long ultra-high pressure mercury lamp (actually, it is used by covering it with a shielding plate that extracts only the light from the central part of the arc, which is a stable light emitting part). It is shown that the entire housed lamp house can be rotated. There is no problem at the center of the fluorescent blood, but at the periphery, the dot shape is no longer a perfect circle because the light rays that passed through the circular hole in the shadow mask are projected diagonally onto the panel.
Furthermore, the exposure intensity changes gradually at the periphery of the dot, resulting in areas with poor sharpness during development.

実開昭62−34.743号公報には、光源と螢光面と
の距離を変化させながら回転させることが開示されてい
る。
Japanese Utility Model Application Publication No. 62-34.743 discloses rotating the light source and the fluorescent surface while changing the distance therebetween.

特開昭61−99245号や特開昭62−281230
号公報には、スリンl−のある遮光板で覆った超高圧水
銀灯を、その管軸に直交する方向に移動または往復動さ
せることが開示されている。
JP-A-61-99245 and JP-A-62-281230
The publication discloses moving or reciprocating an ultra-high pressure mercury lamp covered with a light-shielding plate containing Surin l- in a direction perpendicular to its tube axis.

[発明が解決しようとする課題] 3 上記従来の技術は、それぞれの提案が改善を図っている
螢光面上の周辺部特定位置では、それなりの効果が認め
られるが、周辺部の何処でも中央部と同様な大きさの真
円に近い形状のドツトが得られるようにはならない。
[Problems to be Solved by the Invention] 3. The above-mentioned conventional techniques have certain effects at specific positions on the periphery of the fluorescent surface, which each proposal aims to improve; It is not possible to obtain a dot with a shape close to a perfect circle of the same size as the part.

本発明は、実質的に球形に近い光源となるように光源の
位置、移動速度、大きさ、明るさなどを制御して、螢光
面の中央部のみならず周辺部の何処でも、真円に近い形
状で同様な大きさのドツトが得られるようにしたカラー
陰極線管の螢光面製造方法を提供することを目的とする
The present invention controls the position, moving speed, size, brightness, etc. of the light source so that it becomes a substantially spherical light source, and creates a perfect circle not only in the center of the fluorescent surface but also anywhere on the periphery. An object of the present invention is to provide a method for manufacturing a fluorescent surface of a color cathode ray tube, which allows dots of similar size and shape to be obtained.

[課題を解決するための手段] 上記目的を達成するために本発明においては、光源の長
手方向に直交する所望幅のスリン1〜を有する板で覆っ
た線状光源(螢光面を形成すべきパネルにパネル中心で
接する接平面に平行)を、露光中心を通り光源に平行な
直線を中心軸にして所望半径で回転させながら露光する
ようにした。更に具体的には、a)上記回転中の半径の
長さを、所望の如く連続的または段階的に変化させる。
[Means for Solving the Problems] In order to achieve the above object, the present invention provides a linear light source (forming a fluorescent surface) covered with a plate having a desired width of 1 to 100 mm perpendicular to the longitudinal direction of the light source. (parallel to a tangential plane touching the panel at the center of the panel) was exposed while rotating at a desired radius around a straight line passing through the exposure center and parallel to the light source as the central axis. More specifically, a) the length of the radius during the rotation is changed continuously or stepwise as desired;

b)半径の長い状態ではスリット幅が狭く、半径の短い
又は光源が露光中心を通る状態ではスリット幅が広くな
るように、半径の変化に連動させて所望の如く連続的ま
たは段階的にスリット幅を変化させる、C)半径の長い
状態では露光時間が短く、半径の短い又は光源が露光中
心を通る状態では露光時間が長くなるように、連続的ま
たは段階的に半径の変化の速さを制御する、d)半径の
長い状態では光源輝度が低く、半径の短い又は光源が露
光中心を通る状態では光源輝度が高くなるように、半径
の変化に連動させて連続的または段階的に光源の輝度を
変化させる、ようにする。
b) The slit width is adjusted continuously or stepwise as desired in conjunction with changes in the radius, so that the slit width is narrow when the radius is long, and becomes wide when the radius is short or the light source passes through the exposure center. C) Control the speed of radius change continuously or stepwise so that the exposure time is short when the radius is long and the exposure time is long when the radius is short or the light source passes through the exposure center. d) Adjust the light source brightness continuously or stepwise in conjunction with changes in the radius so that the light source brightness is low when the radius is long, and high when the radius is short or the light source passes through the exposure center. to change, to make.

[作用コ 光源が一平面上にのみに存在(回転または平行移動させ
ても)すると、シャドウマスクの真円に近い孔を通過し
た光線がパネル内面に形成させる露光部の形状は、光源
が実質的に円形または正方形になっていれば、光線がシ
ャドウマスク面に直交するパネル中央部では略真円形と
なるが、光線がシャドウマスク面に斜交するパネル周辺
部では円形ではなくなる。線状光源を回転させながら回
転軸を上下動させれば形状は円形に近付くが、露光部の
照度したがって感光性物質の化学変化の程度にむらが生
じ、現像後にきれいな円形のドツトを得られないことが
ある。
[Action] If the light source exists only on one plane (even if it is rotated or translated in parallel), the shape of the exposed area formed on the inner surface of the panel by the light rays passing through the nearly perfect circular hole of the shadow mask will be If it is generally circular or square, it will be a substantially perfect circle at the center of the panel where the light rays intersect perpendicularly to the shadow mask surface, but it will not be circular at the periphery of the panel where the light rays obliquely intersect the shadow mask surface. If the linear light source is rotated and the axis of rotation is moved up and down, the shape approaches a circle, but the illuminance of the exposed area and the degree of chemical change in the photosensitive material become uneven, making it impossible to obtain a neat circular dot after development. Sometimes.

以前使用した点状光源は光量不足で長い露光時間を要し
たが、ドツト形状などの問題は殆どなかった。本発明は
線状でやや長い光源を、露光中心を通り、露光対象であ
るパネル面に平行(厳密にはパネル中心でパネル面に接
する接平面に平行)な直線の周囲に回転させて、回転の
半径を適当(半径の変化の速さ(段階的に変えるときは
段毎の停止時間)を制御して)に変化させ、必要ならば
、光源を覆う遮光板のスリット幅や光源輝度を半径の変
化に連動して変化させることにより、中心付近が最も明
るく周辺では輝度が漸次低下した実質的に(点を球へ拡
大させた)球状に近い光源を実現させるようにした。こ
のような光源ならば、パネル面の何処でも略円形のドツ
トが得られる。実際には、半径の変化の速さ、スリット
幅、光源輝度などを組合せて制御して、螢光面上の広い
範囲で円形ドツトが得られるように調節する。感光性物
質膜の化学変化は被露光部の露光量すなわち照度の時間
積分値に対応して生ずるから、上記球状光源と言うのも
其のような意味においてである。
The point light source used previously required a long exposure time due to insufficient light intensity, but there were almost no problems with the shape of the dots. The present invention rotates a linear and somewhat long light source around a straight line that passes through the center of exposure and is parallel to the panel surface that is the exposure target (strictly speaking, parallel to the tangential plane that is in contact with the panel surface at the center of the panel). Change the radius appropriately (by controlling the speed of radius change (stopping time for each stage when changing stepwise)), and if necessary, change the slit width of the light shielding plate covering the light source or the light source brightness to change the radius. By changing the brightness in conjunction with the change in , a substantially spherical light source (expanding a point into a sphere) is realized, with the brightness being highest near the center and gradually decreasing in brightness at the periphery. With such a light source, substantially circular dots can be obtained anywhere on the panel surface. In practice, the speed of change in radius, slit width, light source brightness, etc. are controlled in combination so that circular dots can be obtained over a wide range on the fluorescent surface. The chemical change in the photosensitive material film occurs in response to the amount of exposure of the exposed area, that is, the time-integrated value of the illuminance, so it is in this sense that the light source is referred to as a spherical light source.

[実施例] 本発明を第1図(a)によって説明する。図中、1は一
裏面に感光性膜を形成させであるパネル、2は露光中心
、2aは露光中心を通り回転の中心軸となる直線、3は
パネル中心でパネルに接する接平面に平行に配置された
線状光源(超高圧水銀灯)、3aは光源中心である。直
線2aと光源3との距離すなわち回転の半径は1〜2I
IIn程度(S/4〜S/2、但し、Sは隣接する各原
色露光中心間距離)とする。第1図(b)は光源部詳細
図で、光源中心3aの両側に対称に光源に直交して形成
されたスリット4を有する遮光板5が線状光源3を覆っ
ている。
[Example] The present invention will be explained with reference to FIG. 1(a). In the figure, 1 is a panel with a photosensitive film formed on one back side, 2 is the exposure center, 2a is a straight line passing through the exposure center and serves as the central axis of rotation, and 3 is a line parallel to the tangential plane touching the panel at the center of the panel. The arranged linear light source (ultra-high pressure mercury lamp) 3a is the center of the light source. The distance between the straight line 2a and the light source 3, that is, the radius of rotation, is 1 to 2I.
It is approximately IIn (S/4 to S/2, where S is the distance between adjacent primary color exposure centers). FIG. 1(b) is a detailed view of the light source section, in which the linear light source 3 is covered by a light shielding plate 5 having slits 4 formed symmetrically on both sides of the light source center 3a and perpendicular to the light source.

露光開始と共に線状光源3を直線2aを中心にして回転
させ、露光が進むと共に回転半径を減少させて、露光終
了時には、光源3を直線2aに一致させる。この時の回
転半径を減少させて行く速さを第2図(a)に示すよう
にすることによって、光源3が回転の中心軸である直線
2aに近付くにつれて露光時間が長くなる。更に、光源
3が回転の中心軸である直線2aに近付くにつれて、第
2図(b)に示すように光源輝度を高くする、或いは第
2図(c)に示すようにスリット幅を広げることにより
、回転中心の直線2a付近での露光量を増加させても良
い。このように露光量の重み付けを最適化することによ
り、見掛け」二、球に近似な光源で露光を行うのと等価
となるため、光源形状とシャドウマスク孔形状との合成
によって形成されるブラックマドリスク孔形状、螢光体
ドツト形状の真円性を向上させることができ、色純度の
裕度向上、地磁気裕度向上などの効果が得られる。
At the start of exposure, the linear light source 3 is rotated about the straight line 2a, and as the exposure progresses, the radius of rotation is decreased, and at the end of the exposure, the light source 3 is aligned with the straight line 2a. At this time, by reducing the radius of rotation at a speed as shown in FIG. 2(a), the exposure time becomes longer as the light source 3 approaches the straight line 2a, which is the central axis of rotation. Furthermore, as the light source 3 approaches the straight line 2a, which is the central axis of rotation, the light source brightness is increased as shown in FIG. 2(b), or the slit width is widened as shown in FIG. 2(c). , the exposure amount may be increased near the straight line 2a at the center of rotation. By optimizing the weighting of the exposure amount in this way, it becomes equivalent to performing exposure with a light source that is approximately spherical in appearance. The roundness of the risk hole shape and the phosphor dot shape can be improved, and effects such as improved color purity tolerance and geomagnetic tolerance can be obtained.

[発明の効果] 以上説明したように本発明によれば、製品特性上では1
色線度裕度と地磁気裕度がそれぞれ10μm程度向上し
、また、ブラックマトリクス孔や螢光体ドツトの周囲の
膜切れ状態が向上し、色むらレベルも向上する。一方、
生産面でも、従来の方法よりもスリット幅を広く選べる
ため、光源輝度を同一としても照度を向上させることが
できるので、露光時間が半分程度に短縮され、スループ
ットが向上する。
[Effect of the invention] As explained above, according to the present invention, the product characteristics are 1.
The color linearity latitude and geomagnetic latitude are each improved by about 10 μm, the state of film breakage around the black matrix holes and phosphor dots is improved, and the level of color unevenness is also improved. on the other hand,
In terms of production, since the slit width can be selected wider than in conventional methods, the illuminance can be improved even if the light source brightness remains the same, so the exposure time can be cut in half and throughput improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(a)は本発明説明図、第1図(b)は本発明に
係る光源部詳細図、第2図(、)は光源の回転半径が露
光時間の経過に伴って減少する状態を示す図、第2図(
b)は光源輝度が露光時間の経過に伴って高くなる状態
を示す図。第2図(c)は光源遮光板のスリット幅が露
光時間の経過に伴って広くなる状態を示す図である。 1・・・パネル、 2・・露光中心、 2a・・・露光
中心を通り回転の中心軸となる直線、  3・・・線状
光源、 3a・・光源中心、 4・・・スリット、 5
第 1 図 (0) (b) 4−.7ソ・ゾ1 5−窟を坂 第 図 (b) 188−
FIG. 1(a) is an explanatory diagram of the present invention, FIG. 1(b) is a detailed view of the light source according to the present invention, and FIG. 2(, ) is a state in which the radius of rotation of the light source decreases as the exposure time passes. Figure 2 (
b) is a diagram showing a state in which the light source brightness increases as the exposure time elapses; FIG. 2(c) is a diagram showing a state in which the slit width of the light source shielding plate becomes wider as the exposure time elapses. 1... Panel, 2... Exposure center, 2a... Straight line passing through the exposure center and serving as the central axis of rotation, 3... Linear light source, 3a... Light source center, 4... Slit, 5
Figure 1 (0) (b) 4-. 7 So・Zo 1 5-Cave wo Saka Diagram (b) 188-

Claims (1)

【特許請求の範囲】 1、夫々発光色の異なる螢光体ドットを配設した螢光面
をホトリソグラフ技術により形成するシャドウマスク方
式カラー陰極線管の螢光面製造方法において、光源の長
手方向に直交する所望幅のスリットを有する板で覆った
線状光源を、露光中心を通り光源に平行な直線を中心軸
にして所望半径で回転させながら露光するようにしたこ
とを特徴とするカラー陰極線管の螢光面製造方法。 2、半径の長さを、連続的または段階的に変化させなが
ら回転させることを特徴とする請求項1記載のカラー陰
極線管の螢光面製造方法。 3、半径の長い状態ではスリット幅が狭く、半径の短い
又は光源が露光中心を通る状態ではスリット幅が広くな
るように、半径の変化に連動させて連続的または段階的
にスリット幅を変化させることを特徴とする請求項2記
載のカラー陰極線管の螢光面製造方法。
[Claims] 1. In a method for manufacturing a fluorescent surface of a shadow mask type color cathode ray tube, in which a fluorescent surface on which phosphor dots of different emission colors are arranged is formed by photolithography, A color cathode ray tube characterized in that a linear light source covered with a plate having orthogonal slits of a desired width is exposed while being rotated at a desired radius with the central axis being a straight line passing through the exposure center and parallel to the light source. A method for manufacturing a fluorescent surface. 2. The method for manufacturing a fluorescent surface of a color cathode ray tube according to claim 1, wherein the rotation is performed while changing the length of the radius continuously or stepwise. 3. The slit width is changed continuously or stepwise in conjunction with the change in radius so that when the radius is long, the slit width is narrow, and when the radius is short or the light source passes through the exposure center, the slit width is wide. 3. A method for manufacturing a fluorescent surface of a color cathode ray tube according to claim 2.
JP3603790A 1990-02-19 1990-02-19 Manufacture of fluorescent screen for color cathode-ray tube Pending JPH03241634A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3603790A JPH03241634A (en) 1990-02-19 1990-02-19 Manufacture of fluorescent screen for color cathode-ray tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3603790A JPH03241634A (en) 1990-02-19 1990-02-19 Manufacture of fluorescent screen for color cathode-ray tube

Publications (1)

Publication Number Publication Date
JPH03241634A true JPH03241634A (en) 1991-10-28

Family

ID=12458517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3603790A Pending JPH03241634A (en) 1990-02-19 1990-02-19 Manufacture of fluorescent screen for color cathode-ray tube

Country Status (1)

Country Link
JP (1) JPH03241634A (en)

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