JPH0323925U - - Google Patents
Info
- Publication number
- JPH0323925U JPH0323925U JP8415289U JP8415289U JPH0323925U JP H0323925 U JPH0323925 U JP H0323925U JP 8415289 U JP8415289 U JP 8415289U JP 8415289 U JP8415289 U JP 8415289U JP H0323925 U JPH0323925 U JP H0323925U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- organic solvent
- tray
- drying apparatus
- wafer drying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000003960 organic solvent Substances 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 7
- 238000004140 cleaning Methods 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8415289U JPH0323925U (enrdf_load_stackoverflow) | 1989-07-18 | 1989-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8415289U JPH0323925U (enrdf_load_stackoverflow) | 1989-07-18 | 1989-07-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0323925U true JPH0323925U (enrdf_load_stackoverflow) | 1991-03-12 |
Family
ID=31632400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8415289U Pending JPH0323925U (enrdf_load_stackoverflow) | 1989-07-18 | 1989-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0323925U (enrdf_load_stackoverflow) |
-
1989
- 1989-07-18 JP JP8415289U patent/JPH0323925U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0247046U (enrdf_load_stackoverflow) | ||
| JPH01104022U (enrdf_load_stackoverflow) | ||
| JPH0323925U (enrdf_load_stackoverflow) | ||
| JP3477994B2 (ja) | 半導体ウエハ乾燥装置 | |
| JP2511873B2 (ja) | ベ−パ乾燥装置 | |
| JP3506851B2 (ja) | 蒸気乾燥装置及び半導体ウエハの乾燥方法 | |
| JPH0629276A (ja) | 乾燥装置および洗浄装置 | |
| JPS5988827A (ja) | 蒸気乾燥装置 | |
| JP2522546Y2 (ja) | 温純水乾燥装置 | |
| JPH0622225B2 (ja) | 表面処理装置 | |
| JPH04346433A (ja) | ベーパ乾燥装置 | |
| JPH0312372Y2 (enrdf_load_stackoverflow) | ||
| US1516131A (en) | Waste-preventing chute for centrifugal extractors | |
| JPH0331432Y2 (enrdf_load_stackoverflow) | ||
| JPH06138648A (ja) | 基板洗浄方法及び洗浄装置 | |
| KR980011979A (ko) | 웨이퍼 세정/건조 장치 및 방법 | |
| JPH04159714A (ja) | イソプロピルアルコールベーパー乾燥装置 | |
| JPS6166937U (enrdf_load_stackoverflow) | ||
| JPH0360124A (ja) | ベーパ乾燥装置 | |
| JPH0352147Y2 (enrdf_load_stackoverflow) | ||
| JPH0319988Y2 (enrdf_load_stackoverflow) | ||
| JPH02187182A (ja) | 洗浄方法 | |
| JPS6194567U (enrdf_load_stackoverflow) | ||
| JPS5835325Y2 (ja) | スプレ−ガンの塗料容器 | |
| JPH0396036U (enrdf_load_stackoverflow) |