JPH03237773A - Metal vapor laser equipment - Google Patents

Metal vapor laser equipment

Info

Publication number
JPH03237773A
JPH03237773A JP3425890A JP3425890A JPH03237773A JP H03237773 A JPH03237773 A JP H03237773A JP 3425890 A JP3425890 A JP 3425890A JP 3425890 A JP3425890 A JP 3425890A JP H03237773 A JPH03237773 A JP H03237773A
Authority
JP
Japan
Prior art keywords
heat
discharge tube
discharge
inner tube
inner discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3425890A
Other languages
Japanese (ja)
Inventor
Hiroshi Ito
寛 伊藤
Akihiko Iwata
明彦 岩田
Tatsuki Okamoto
達樹 岡本
Yoshihiro Ueda
植田 至宏
Kazuhiko Fukushima
一彦 福島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3425890A priority Critical patent/JPH03237773A/en
Publication of JPH03237773A publication Critical patent/JPH03237773A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/03Constructional details of gas laser discharge tubes
    • H01S3/031Metal vapour lasers, e.g. metal vapour generation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To reduce the heat loss in the axial direction caused by radiation from an inner discharge tube, and improve laser efficiency, by blockading the part between a vacuum jacket and an inner discharge tube by using a heat reflecting plate which is heat-resistant and insulative, at the axial end portion of an atmospheric heat insulating layer filling the part between the vacuum jacket and the inner discharge tube. CONSTITUTION:Heat reflecting plates 15 are installed between both ends of an inner discharge tube 2 in the axial direction and a vacuum jacket 1, and closely cover both end portions of an atmospheric heat insulating layer 3. These heat reflecting plates 15 are constituted of two divided semicircular type rings 15a, 15b made of quartz members (heat-resistant insulating members). Heat reflecting mirror surfaces 15c wherein gold as material of high reflection factor is vapor-deposited are formed on the inner end surfaces in the axial direction of the divided rings 15a, 15b. The heat radiated from the inner discharge tube 2 is reflected by the heat reflecting plates 15, so that the heat loss of the inner discharge tube 2 in the axial direction can be blocked.

Description

【発明の詳細な説明】[Detailed description of the invention] 【産業上の利用分野】[Industrial application field]

この発明は、銅粒などの金属粒を放電熱で溶融して金属
蒸気を励起することによりレーザ光を得るための金属蒸
気レーザ装置に関し、特に軸方向の放射による熱損失の
減少を図った金属蒸気レーザ装置に関する。
The present invention relates to a metal vapor laser device for obtaining laser light by exciting metal vapor by melting metal grains such as copper grains with discharge heat, and in particular, a metal vapor laser device that is designed to reduce heat loss due to radiation in the axial direction. This invention relates to a vapor laser device.

【従来の技術】[Conventional technology]

第4図は従来の金属蒸気レーザ装置を示す断面図であり
、図において、1は金属外管よりなる真空容器(真空ジ
ャケラt−)、laはその真空容器lの周壁部に形成さ
れ、後述する放電内管2から径方向への熱伝達や対流に
よる熱損失を制御するための真空層、2は上記真空容器
1内の軸心部に挿入配置された放電内管、3は上記真空
容器1と上記放電内管2との間に充填され、該放電内管
2から径方向への熱伝達や対流による熱損失を防止する
ためのウール層などによる大気断熱層、4は上記放電内
管2内に設置されて金属蒸気を生成する銅粒などの金属
粒、5は上記放電内管2の一端部(第3図中の左端)に
接続された筒状の陰極、6はこの陰極5の外端に設けら
れた陰極側レーザ光取出用の窓、7は上記陰極5に電極
フランジ8を介して接続された陰極端子、9は上記放電
内管2の他端部(第3図中の右端)に接続された筒状の
陽極、10はこの陽極9の外端に設けられた陽極側レー
ザ光取出用の窓、11は陽極端子であり、この陽極端子
11は上記真空容器lおよび該真空容器1の陽極側端部
を閉塞する接続板12と上記陽極9側の電極フランジ1
3とを介して上記陽極9に接続されている。 従って、上記大気断熱層3の陰極5例の端部における上
記真空容器1と上記放電内管2との間は大気中に開放さ
れた空間部りとなっている。 14は上記放電内管2内に封入された放電ガスである。 次に動作について説明する。 陰極端子7と陽極端子11との間にパルス電圧が印加さ
れると、放電内管2内における放電ガス14雰囲気中の
陰極5と陽極9との間にパルス放電が発生することによ
り、上記放電内管2内は放電状態となる。そして、その
放電により発生した熱は、上記放電内管2に伝導し、該
放電内管2から径方向および軸方向に放射されるが、こ
れに起因した熱損失、即ち、上記放電内管2からの放射
による熱損失が、上記放電内管2を取り囲む大気断熱層
3と真空層1aとによって極力抑えられることにより、
上記放電内管2の温度が上昇する。 この温度上昇によって、上記放電内管2内の金属粒4が
溶融し、レーザ発振を得るために必要な金属蒸気が発生
する。そして、この金属蒸気は上記パルス電圧で励起さ
れ、反転分布を起こす。このため、上記放電内管2の両
端部の窓6.10の外側に光共振器(図示せず)を配置
しておけば、それらの窓6.10を通じてレーザ光が得
られる。
FIG. 4 is a sectional view showing a conventional metal vapor laser device. In the figure, 1 is a vacuum vessel (vacuum jacket t-) made of a metal outer tube, la is formed on the peripheral wall of the vacuum vessel l, and is described later. A vacuum layer for controlling heat transfer from the discharge inner tube 2 in the radial direction and heat loss due to convection; 2 is the discharge inner tube inserted into the axial center of the vacuum vessel 1; 3 is the vacuum vessel 1 and the discharge inner tube 2, an atmospheric insulation layer such as a wool layer to prevent heat transfer from the discharge inner tube 2 in the radial direction and heat loss due to convection; 4, the discharge inner tube 2; Metal grains such as copper grains are installed in the inner discharge tube 2 to generate metal vapor, 5 is a cylindrical cathode connected to one end (the left end in FIG. 3) of the inner discharge tube 2, and 6 is the cathode 5. 7 is a cathode terminal connected to the cathode 5 via an electrode flange 8, and 9 is the other end of the discharge inner tube 2 (in FIG. 3). 10 is a window for extracting laser light on the anode side provided at the outer end of this anode 9, 11 is an anode terminal, and this anode terminal 11 is connected to the vacuum vessel l and A connecting plate 12 that closes the anode side end of the vacuum container 1 and an electrode flange 1 on the anode 9 side.
The anode 9 is connected to the anode 9 via the anode 3 and the anode 9. Therefore, the space between the vacuum vessel 1 and the discharge inner tube 2 at the end of the five cathodes of the atmospheric heat insulating layer 3 is a space open to the atmosphere. 14 is a discharge gas sealed in the discharge inner tube 2. Next, the operation will be explained. When a pulse voltage is applied between the cathode terminal 7 and the anode terminal 11, a pulse discharge is generated between the cathode 5 and the anode 9 in the atmosphere of the discharge gas 14 in the discharge inner tube 2, thereby causing the above-mentioned discharge. The inside of the inner tube 2 is in a discharge state. The heat generated by the discharge is conducted to the discharge inner tube 2 and radiated from the discharge inner tube 2 in the radial and axial directions. Heat loss due to radiation from the discharge tube 2 is suppressed as much as possible by the atmospheric heat insulating layer 3 surrounding the discharge inner tube 2 and the vacuum layer 1a.
The temperature of the discharge inner tube 2 rises. Due to this temperature rise, the metal particles 4 within the discharge inner tube 2 are melted, and metal vapor necessary for obtaining laser oscillation is generated. Then, this metal vapor is excited by the pulse voltage, causing population inversion. For this reason, if optical resonators (not shown) are placed outside the windows 6.10 at both ends of the inner discharge tube 2, laser light can be obtained through these windows 6.10.

【発明が解決しようとする課題】[Problem to be solved by the invention]

従来の金属蒸気レーザ装置は以上のように構成されてい
るので、熱は放電内管2から大気断熱層3中に放射及び
伝導され、該大気断熱層3中で軸方向に熱が移動した熱
が、真空容器Iと放電内管2との間の空間部りより損失
し、レーザ効率が低下するという課題があった。 この発明は上記のような課題を解消するためになされた
もので、放電内管からの放射による軸方向への熱損失を
効率的に減少させることができ、レーザ効率の向上が図
れる金属蒸気レーザ装置を得ることを目的とする。
Since the conventional metal vapor laser device is configured as described above, heat is radiated and conducted from the discharge inner tube 2 into the atmospheric heat insulating layer 3, and the heat transferred in the axial direction in the atmospheric heat insulating layer 3 is However, there was a problem in that the laser efficiency was lost due to the space between the vacuum vessel I and the discharge inner tube 2, resulting in a decrease in laser efficiency. This invention was made to solve the above-mentioned problems, and provides a metal vapor laser that can efficiently reduce axial heat loss due to radiation from the discharge inner tube and improve laser efficiency. The purpose is to obtain equipment.

【課題を解決するための手段】[Means to solve the problem]

この発明に係る金属蒸気レーザ装置は、真空ジャケット
内における放電内管との間に充填された大気断熱層の軸
方向端部において、上記真空ジャケットと上記放電内管
との間を耐熱絶縁性の熱反射板で閉塞したものである。
In the metal vapor laser device according to the present invention, a heat-resistant insulating layer is provided between the vacuum jacket and the discharge inner tube at the axial end of the atmospheric insulation layer filled between the vacuum jacket and the discharge inner tube. It is closed with a heat reflector.

【作 用】[For use]

この発明における金属蒸気レーザ装置は、放電内管から
大気断熱層中に放射され、該大気断熱層中で軸方向に対
流・伝達される熱が熱反射板によって大気断熱層中に反
射するため、上記放電内管からの放射による上記大気断
熱層から軸方向の熱損失が減少し、レーザ効率が向上す
る。
In the metal vapor laser device of the present invention, heat is emitted from the inner discharge tube into the atmospheric insulation layer, and the heat that is convected and transmitted in the axial direction in the atmospheric insulation layer is reflected into the atmospheric insulation layer by the heat reflection plate. Axial heat loss from the atmospheric insulation layer due to radiation from the discharge inner tube is reduced, improving laser efficiency.

【実施例】【Example】

以下、この発明の一実施例を図について説明する。第1
図はこの発明の一実施例による金属蒸気レーザ装置の断
面図、第2図は熱反射板の断面図、第3図はその熱反射
板の正面図であり、第4図と同一部分には同一符号を付
して重複説明を省略する。 図において、15は放電内管2の軸方向両端部における
真空ジャケット1との間に設けられ、大気断熱層3の両
端部を密に覆う熱反射板である。 これらの熱反射板15は、第3図に示すように、2分割
された半円形状の石英部材(耐熱絶縁部材)による分割
リング15a、15bからなり、これら分割リング15
a、15bの軸方向内端面には、例えば高反射率材料と
して金を蒸着した熱反射鏡面15c(第2図参照)が形
成されている。 次に動作について説明する。 放電内管2内の放電ガス14雰囲気中における電極間(
陰極5と陽極9との間)のパルス放電により発生した熱
は、上記放電内管2に伝達され、該放電内管2から大気
断熱層3中に放射されるが、この場合、該大気断熱層3
中で軸方向に対流・伝達されて上記放電内管2の軸方向
端部における真空ジャケット1との間より外部に逃げよ
うとする熱は、熱反射板15の熱反射鏡面15cに当っ
て上記大気断熱層3中に反射する。 このように、上記放電内管2から放射される熱が上記熱
反射板15で反射することによって、上記放電内管2か
らの軸方向の熱損失が効率的に阻止される。 なお、上記各実施例における熱反射板15は2分割され
たものに限定されず、複数分割または一体リングからな
るものであってもよい。
An embodiment of the present invention will be described below with reference to the drawings. 1st
The figure is a sectional view of a metal vapor laser device according to an embodiment of the present invention, FIG. 2 is a sectional view of a heat reflecting plate, and FIG. 3 is a front view of the heat reflecting plate. The same reference numerals are used to omit redundant explanation. In the figure, reference numeral 15 denotes a heat reflecting plate that is provided between the vacuum jacket 1 at both ends of the discharge inner tube 2 in the axial direction, and closely covers both ends of the atmospheric heat insulating layer 3. These heat reflecting plates 15, as shown in FIG.
A heat reflecting mirror surface 15c (see FIG. 2) formed of, for example, vapor-deposited gold as a high reflectance material is formed on the axially inner end surfaces of the mirrors a and 15b. Next, the operation will be explained. Between the electrodes in the atmosphere of the discharge gas 14 in the discharge inner tube 2 (
The heat generated by the pulse discharge (between the cathode 5 and the anode 9) is transferred to the discharge inner tube 2 and radiated from the discharge inner tube 2 into the atmospheric insulation layer 3; layer 3
The heat that is convected and transmitted in the axial direction and tries to escape to the outside from between the axial end of the discharge inner tube 2 and the vacuum jacket 1 hits the heat reflecting mirror surface 15c of the heat reflecting plate 15 and It is reflected into the atmospheric insulation layer 3. In this manner, the heat radiated from the discharge inner tube 2 is reflected by the heat reflecting plate 15, thereby efficiently preventing heat loss from the discharge inner tube 2 in the axial direction. Note that the heat reflecting plate 15 in each of the above embodiments is not limited to being divided into two parts, but may be composed of a plurality of parts or an integral ring.

【発明の効果】【Effect of the invention】

以上のように、この発明によれば、真空ジャケット内に
おける放電内管との間に充填された大気断熱層の軸方向
端部を、上記真空ジャケットと放電内管との間に設けた
熱反射板で覆ったので、上記放電内管から上記大気断熱
層中に放射され、該大気断熱層中で軸方向に放射される
熱の損失を上記熱反射板によって効率的に減少させるこ
とができ、このため、レーザ効率が向上するという効果
がある。
As described above, according to the present invention, the axial end of the atmospheric heat insulating layer filled between the vacuum jacket and the discharge inner tube is replaced by a heat reflection layer provided between the vacuum jacket and the discharge inner tube. Since it is covered with a plate, the loss of heat radiated from the discharge inner tube into the atmospheric insulation layer and radiated in the axial direction within the atmospheric insulation layer can be efficiently reduced by the heat reflection plate, This has the effect of improving laser efficiency.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例による金属蒸気レーザ装置
の断面図、第2図は熱反射板の断面図、第3図はその熱
反射板の正面図、第4図は従来の金属蒸気レーザ装置を
示す断面図である。 ■・・・真空ジャケット、2・・・放電内管、3・・・
大気断熱層、4・・・金属粒、5・・・陰極(電極)、
9・・・陽極(電極)、15・・・熱反射板。 なお、図中、同一符号は同一、または相当部分を示す。 特 許 出 願 人  三菱電機株式会社第1図 第4図 第2図 第3図 5 11;隔場堵子 12:掩続諜
Fig. 1 is a sectional view of a metal vapor laser device according to an embodiment of the present invention, Fig. 2 is a sectional view of a heat reflecting plate, Fig. 3 is a front view of the heat reflecting plate, and Fig. 4 is a conventional metal vapor laser device. FIG. 2 is a cross-sectional view showing a laser device. ■...Vacuum jacket, 2...Discharge inner tube, 3...
Atmospheric heat insulation layer, 4... Metal particles, 5... Cathode (electrode),
9... Anode (electrode), 15... Heat reflecting plate. In addition, in the figures, the same reference numerals indicate the same or equivalent parts. Patent applicant: Mitsubishi Electric Corporation Figure 1 Figure 4 Figure 2 Figure 3 Figure 5 11;

Claims (1)

【特許請求の範囲】[Claims] 真空層を有する真空ジャケットと、この真空ジャケット
内に挿入され、且つ、金属蒸気生成用の金属粒を内蔵し
て電極間に配置された放電内管と、上記真空ジャケット
内における上記放電内管との間に充填された大気断熱層
とを備えた金属蒸気レーザ装置において、上記大気断熱
層中の軸方向端部における上記真空ジャケットと上記放
電内管との間に、それらの間の空間部を閉塞する耐熱絶
縁性の熱反射板を設けたことを特徴とする金属蒸気レー
ザ装置。
a vacuum jacket having a vacuum layer; an inner discharge tube inserted into the vacuum jacket and containing metal grains for generating metal vapor and arranged between electrodes; and the inner discharge tube inside the vacuum jacket. In a metal vapor laser device comprising an atmospheric heat insulating layer filled between the vacuum jacket and the discharge inner tube at an axial end of the atmospheric heat insulating layer, a space is defined between the vacuum jacket and the discharge inner tube. A metal vapor laser device characterized by being provided with a heat-resistant and insulating heat reflecting plate that closes.
JP3425890A 1990-02-15 1990-02-15 Metal vapor laser equipment Pending JPH03237773A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3425890A JPH03237773A (en) 1990-02-15 1990-02-15 Metal vapor laser equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3425890A JPH03237773A (en) 1990-02-15 1990-02-15 Metal vapor laser equipment

Publications (1)

Publication Number Publication Date
JPH03237773A true JPH03237773A (en) 1991-10-23

Family

ID=12409152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3425890A Pending JPH03237773A (en) 1990-02-15 1990-02-15 Metal vapor laser equipment

Country Status (1)

Country Link
JP (1) JPH03237773A (en)

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