JPH0323312B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a clean workbench, and more particularly to a clean workbench suitable for making the device thinner.

[Background of the invention]

Standardization of cleaning workbench equipment is required.
To meet this requirement, the depth of the work space 131 must be ensured, so normally the depth dimension of the duct section 109 provided on the back side of the clean workbench main body 170 and the main body as shown in FIG. 1
This is achieved by tightening the depth dimension of the leg section 102 provided at the lower part of the leg section 70. As described in Japanese Patent Publication No. 55-18134, in the conventional clean workbench, the depth of the fan case and the depth of the duct are equal, and the back of the fan case is flat with the back of the workbench main body. is fixed to the leg. Therefore, when the depth of the duct part 109 and the depth of the leg part 102 are tightened as shown in FIG.
There was a problem in that the depth of the workbench was shortened, and when the workbench was seated, the worker's feet were narrow, resulting in poor workability. In particular, an electrostatic precipitator 1 is installed at the suction port 116.
For models equipped with 20, the depth is approximately
This problem is significant since it is 200mm shorter.

In the process leading up to the present invention, it was considered to reduce the thickness of the fan case 19'' by using a small fan 8'' as shown in FIG. The problem is that it is difficult to Another problem was that increasing the rotational speed of the fan to increase the air volume resulted in increased noise.

[Purpose of the invention]

An object of the present invention is to provide a clean workbench that is suitable for flexible production and that can easily accommodate changes in specifications on site.

[Summary of the invention]

The present invention includes a working chamber having a working opening on the front side and side walls on both sides so that clean air is supplied to the inside, and a duct section provided on the back side of the working chamber. A filter provided in the duct part and provided to supply clean air to the working chamber, and a fan provided upstream of the duct part so that an air outlet communicates with the duct. The clean workbench includes a fan case having a depth larger than the depth of the duct part and configured to house the fan;
The fan case is provided below the duct part so as to selectively take a first position protruding rearward from the back surface of the duct part and a second position protruding forward from the front surface of the duct part. It is characterized by this.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to FIGS. 4 and 6.
This will be explained with reference to FIG.

A first embodiment of the present invention is shown in FIG.

FIG. 6 shows an example in which the present invention is applied to a standard clean workbench with vertical airflow.

The clean workbench main body 70 includes a work space 31 as a work room, a duct 9 that is a duct part that communicates with the work space, and a HEPA filter that is provided in the duct part facing the work space 31. It comprises a filter 11 and legs 2 which are leg parts.

The work space 31 has an air outlet 5 with a built-in fluorescent lamp 30 at the top, and the work space 31 is constructed with a side wall 3 made of a glass plate or an acrylic plate and a stainless steel plate.
Surrounded on three sides by a rear wall 4 formed on the back of the
A shutter 12 is provided on the front side along a guide 13 so as to be openable and closable. A workbench 1 is provided on the lower surface of the workspace 31. Clean workbench body 70
A back plate 10 is provided on the back side of the duct 9, and serves as a partition between the inside and outside of the duct 9. The depth dimension of the duct 9 is set to be larger than the air outlet 8a of the fan 8 and smaller than the maximum diameter of the scroll 8c of the fan 8.

In this embodiment, the duct part 9 is formed into a substantially inverted L shape, and one end is connected to the duct part connection part 20, and the other end is opened to the upper surface of the work space 31.
A HEPA filter 11 is provided. Legs 2
is formed to have a substantially U-shaped plane, and a caster (not shown) or an adjuster 32 is provided at the bottom of two parallel sides, and a fan case mounting base 23 and a duct connection portion 20 are provided at the center side. It consists of In this embodiment, the fan 8 is provided at the rear of the downward extension of the rear wall 4, that is, the back surface of the work chamber 31, and the protrusion 8e of the fan 8 is located on the back plate 1.
0, that is, the rear wall of the duct 9, and an end portion 8d of the scroll 8c is provided close to the downward extension of the rear wall 4.

Figure 7 shows the external shape of the fan case 19.
Each figure shows a side cross section of the fan case 19.
The fan case 19 includes a case 18 having openings 6 on two opposing sides, a cover 17 and a mounting plate 16 attached to each of the openings 6, and a pre-filter attached to the mounting plate 16 using holding fittings 14 and 15. 7. The air blower 8 is built in the case 18 and has an impeller 8b. Further, electrical components 26 such as a thermal relay are incorporated as necessary. The pre-filter 7 does not necessarily need to be attached to the fan case 19 via the attachment frame 16, and
As shown in the figure, a mounting bracket made of an elastic body such as a leaf spring may be attached to the frame 7b in which the material 7a is housed, and may be directly attached to the opening 6 that serves as the suction port.

The fan case 19 is attached from the back side of the cleaning workbench, and is connected to the duct connection part 20 with screws 22 through a gasket 21. fan case 19
An air outlet 8a of the fan 8 is provided on the upper surface of the fan 8 at a position corresponding to the duct connecting portion 20. A stopper 24 attached to the bottom surface of the fan case 19 is used to determine the horizontal mounting position during installation and to tighten the screws 2.
5 is used for fixing to the fan case mounting base 23.

If the dimensions of the mounting portion 6 are the same on both sides, and the mounting dimensions of the cover 17 and the mounting plate 16 to the fan case 19 are the same, the mounting position of the prefilter can be changed as necessary. If the fan case 19 is removably attached to the legs 2 as in this embodiment, even if it becomes necessary to make the back side of the cleaning workbench flat due to local circumstances after the product is delivered, it can be used as shown in Fig. 12. This can be easily done by simply changing the orientation of the fan case 19 and swapping the positions of the mounting base 16 and cover 17. In the state shown in FIG. 12, the end portion 8 of the scroll 8c of the fan 8
d is provided on the back surface of the duct portion 9, that is, close to the downward extension line of the back plate 10, so that the protruding portion 8e is provided at a position opposite to the downward extension line of the back plate 10. Further, the suction port 6 may be provided with an electrostatic precipitator 120 as shown in FIG.

To connect the electrical system, as shown in FIG. 9, an opening 19a is provided in the surface of the fan case 19 corresponding to the duct connection part 20, and a contact 61 is fastened to this opening using an insulating plate with a screw 64 and a nut 65. 60 is attached, and the contact 6 provided on the duct connection part 20 side
Power is supplied by 3. The contactor 63 is attached to the duct connection part 20 via the insulating plate 62. contact 6
Wiring 66 to fan 8 and wiring 67 to power supply are connected to 1 and 63, respectively. contact 6
If 1 is made of an elastic body such as a leaf spring so that it comes into elastic contact with the contact 63, the packing will not be compressed.
Even if there is a change in the contactor 63 or an error in the mounting position of the contactor 63, poor contact can be prevented. In this case, if a limit switch (not shown) is installed in the duct connection part 20 to detect the attachment of the fan case 19 and supply power to the contact 63, the live part will not be exposed and maintenance work will be safer. can be increased. In addition, as shown in Fig. 10, the connector 2
7, 28 may be used to make electrical connections. Connect the opening 19a to the duct connection part 2 of the fan case 19.
If it is provided in the center of the position corresponding to 0, the electrical connection can be made as is even if the orientation of the fan case 19 is changed. The connection portion of the electrical system is not limited to the upper surface of the fan case 19, and may be provided on the lower surface or side surface of the fan case 19.

To position the fan case, a flange 35 may be attached to the surface corresponding to the duct connection part 20 instead of the stopper 24, as shown in FIG.
According to this, the fan case can be attached and detached from either the front side or the back side of the cleaning workbench.

The rising height l of the flange 35 is set so that L>l with respect to the gap L between the bottom surface of the fan case 19 and the fan case mounting base 23 when the fan case is fixed.

A method of attaching the fan case 19 provided with the flange 85 is shown in FIGS. 13 to 16.

Figure 13 shows the nut 4 of the fan case mounting base 23.
1 is welded and bolt 40 is screwed onto nut 41.
The contact plate 42 provided at the tip of the duct connection part 20
The fan case 19 is held between the fan case 19 and the fan case 19.

FIG. 14 shows the eccentric cams 43 and 44 provided in the fan case mounting base 23' and the duct connection part 20.
(not shown) to hold the fan case 19 between them. The eccentric cams 43 and 44 are fixed to a rotatably provided shaft 45 and are configured to rotate in conjunction with the rotation of the handle 46.

Figure 15 shows the wedge 47 and the duct connection part 20 that are slidably provided on the fan case mounting base 23''.
(not shown) to hold the fan case 19 between them. A wedge 48 is fixed to a slidably provided shaft 49 inside the fan case 23'.
The wedge 47 has its slope in contact with the slope of the wedge 48. The contact surfaces of the wedges 47 and 48 slide in conjunction with the reciprocating motion of the handle 50, thereby causing the wedges 48 to slide in the vertical direction.

Figure 16 shows part 2 of the fan case mounting base 23''.
3"a is raised by the pantograph device, and the fan case 1
It holds 9. Pantograph device 51
is rotatably provided in the fan case mounting base 23'' and is threadedly engaged with a threaded shaft 52, which moves up and down in conjunction with the rotation of the handle 53.

A second embodiment of the invention is shown in FIGS. 7 and 8.

FIGS. 17 and 18 show the present invention applied to a device built-in cleaning workbench.

The main body portion 70' of the device built-in cleaning workbench does not include the workbench 1, and the lower surface of the work space 31 is open toward the floor on which the cleanliness workbench is installed. It has the same configuration as the main body portion 70 in one embodiment.

Inside the work space 31, various types of equipment that require high cleanliness, such as semiconductor manufacturing equipment, are incorporated. 1st
FIG. 7 shows an example in which a device 29 having a relatively large height is incorporated, and FIG. 8 shows an example in which a device 29' having a small device height is incorporated. In such devices, the parts that require high cleanliness are usually located at the top of the device. Therefore, in the device 29 with a large device height, there is no problem even if the prefilter 7 faces the work space 31, but in the device 29 with a small device height, there is no problem even if the prefilter 7 faces the work space 31.
9' may be affected by untreated air drawn from the bottom of the clean workbench, so replacing the positions of the prefilter 7 and cover 17 as shown in Figure 18 will prevent entrainment and improve the airflow condition. It can be measured.

According to the embodiment described above, when cleaning workbenches of the device built-in type and standard type are lined up to form a line, the back of the cleaning workbench is connected to the piping to the device 29 as shown in FIGS. 19 and 20, respectively. 33, etc., and can save space.

Furthermore, if the air in the work room where the clean work table is installed contains organic solvent vapor, air from an adjacent room that does not contain organic solvent can be sucked in as shown in FIG. Furthermore, by attaching a mounting plate 81 provided with a duct flange 80 to the back side of the fan case 19, air containing no organic solvent can be supplied through a duct 82 as shown in FIG.

A third embodiment of the present invention is shown in FIGS. 23 and 24.

FIG. 23 shows the present invention applied to a clean workbench equipped with a fan case 19' incorporating a low-noise fan 8' having an impeller 8'b. As shown in Fig. 23, if the part of the fan case 19' in which the impeller 8'b is housed protrudes toward the rear side, the work surface can be maintained even if the shape of the fan case 19' becomes larger due to the use of the low-noise fan 8'. The space below 1 is the same as when the fan case 19 is used. In addition, since the fan case 19' is removably provided,
If you cannot secure space at the back to install a clean workbench, install the fan case 1 as shown in Figure 24.
You can also change the direction of 9' to make the back flat.

A fourth embodiment of the present invention is shown in FIGS. 25 and 26.

FIGS. 25 and 26 show an example in which the present invention is applied to a horizontal airflow cleaning workbench.

The fan case 19 is installed in the cleaning workbench main body 70'', and the air blown out from the fan 8 built in the fan case 19 passes through the duct connection part 20, the duct part 9, and the HEPA filter 11 to the work space from the air outlet 5'. It is blown out into 31'.

FIG. 25 shows an example in which the fan case 19 protrudes toward the back side, and FIG. 26 shows an example in which the back side is laid flat. In this example as well, the first to third examples
Effects similar to those of the embodiment can be obtained. Also,
According to the embodiments described above, since the main body portion and the fan case portion can be combined arbitrarily, a clean workbench suitable for flexible production can be obtained.

In addition, according to the above embodiment, even when the depth of the cleaning workbench is reduced, the fan case is provided so as to protrude from the back side, so the space under the feet of the worker is not narrowed, and the cleaning workbench with excellent workability is achieved. You can get a workbench.

〔Effect of the invention〕

According to the present invention, it is possible to obtain a clean workbench that is suitable for flexible production and that can easily accommodate changes in specifications on site.

[Brief explanation of drawings]

Figures 1 and 2 are a front view and a side view, respectively, of a conventional cleaning workbench, and Figures 3 and 4 are
The figures are side sectional views showing the usage conditions of the clean work bench in the conventional example and the first embodiment of the present invention, respectively. Figure 5 is a side sectional view of the clean work bench studied in the process leading up to the present invention. 1 is a side sectional view of a cleaning workbench according to the first embodiment of the present invention, FIGS. 7 and 8 are perspective views showing the shape of the fan case with a part cut away, and FIGS. 9 and 10 are respectively 11 and 12 are side sectional views showing examples of how to attach the fan case shown in FIG. 7, and FIG. 13, FIG. 14, and FIG. 15, respectively. 1st
6 is a side view showing an example of how to attach the fan case shown in FIG. 8, and FIGS. 23 and 24 are side sectional views showing various usage conditions of the clean work bench in the second embodiment, and FIGS. 25 and 26 are side sectional views of the clean work bench in the third embodiment of the present invention. FIG. 27 is a side sectional view of a cleaning workbench according to the fourth embodiment of the present invention, and FIG. 27 is a side sectional view showing one example of a prefilter attachment method. 2: Leg, 6, 16: Suction port, 8, 8', 78,
88: Juan, 8a, 8'a, 78a, 88a:
Air outlet, 8b, 8'b, 78b, 88b: impeller,
11: Filter, 17: Cover, 19, 19',
79: Fan case, 31, 31': Work space,
70, 70', 70'': Main body part, 78d, 88
d: bell mouth.

Claims (1)

[Claims] 1. A working chamber configured to have a working opening on the front side and side walls on both sides so that clean air is supplied to the inside, and a working chamber provided on the back side of the working chamber. a duct part; a filter provided in the duct part to supply clean air to the working room; and a fan provided upstream of the duct part so that an air outlet communicates with the duct. A clean workbench comprising: a fan case having a depth larger than the depth of the duct portion and configured to house the fan; A clean workbench, characterized in that it is provided below the duct part so as to selectively take a first position where it projects and a second position where it projects forward from the front surface of the duct part. 2. The fan is provided so that the end portion of the scroll faces the front of the working chamber in the first position of the fan case, and the end part of the scroll faces the back of the working chamber in the second position of the fan case. A cleaning workbench according to claim 1, characterized in that: 3. The cleaning workbench according to claim 1, wherein the fan case is detachably attached to the duct part. 4. The cleaning operation according to claim 3, wherein each of the fan cases includes a removably installed suction port and a cover, and the suction port and the cover are formed to have the same mounting dimensions. The stand.