JPS6114870A - Clean bench - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a clean workbench, and more particularly to a clean workbench suitable for making the device thinner.

[Background of the invention]

Standardization of cleaning workbench equipment is required.

In order to meet this requirement, the depth of the work space 181 must be maintained, so normally, as shown in Figure #42, the back surface of the cleaning workbench main body 170 is provided with a depth of 9 mm.
1109 and the depth of the legs 102 provided at the bottom of the main body 170 are tightened. The conventional clean workbench is described in Japanese Patent Publication No. 55-18184, and has a depth of 5 to 7 mm and a depth of the duct, and the back of the fan case is flat with the back of the workbench main body. It is fixed to the leg so that Therefore, as shown in Figure 13, if the depth of the duct part +09 and the depth of the chest 102 are reduced, the depth from the front of the workbench to the suction port 116 of the fan case 119 will be shortened, making it easier for the worker to sit down while working. There was a problem in that the legroom became narrow, making workability difficult. Especially the suction port 116
This problem is even more serious in models in which the electrical outlet 120 is installed, since the depth is further reduced by approximately 200 mm.

In the process of developing the present invention, as shown in FIG.
Although it has been considered to reduce the thickness of the fan case 19 by using a filter, it has been found that it is difficult to obtain a predetermined air volume due to the large pressure loss of the filter. There was also the problem that increasing the number of rotations of the fan in order to increase the amount of air would result in increased noise.

[Purpose of the invention]

An object of the present invention is to provide a hojosaku Higashidai which is efficient in workability, ensuring the same working space as before even if the cleaning workbench is made thinner, without constricting the worker's feet.

[A Meiji of Kaimei]

Honsaki Akira is the author! A duct part provided in communication with the IL nitrogen chamber, a waste work space, a filter provided in the duct part facing the work space, and a leg part provided on the side of the work space and the duct part. A main body part and a fan are built in, the air outlet of the skeleton fan is provided so as to communicate with the duct part, and the part housing the impeller of the fan is configured so as to protrude from the back surface of the main body part. The invention is characterized in that it comprises a fan case.

The present invention also provides a work space, a duct provided in communication with the work space, a filter provided on the duct facing the work space, and a filter provided below the work space and the duct. and a fan case that houses a built-in fan and is detachably attached to the main body part so that the air outlet of the fan communicates with the duct part. It is a statue. The present invention also provides a work space, a duct part connected to the work space, a filter provided in the duct part facing the work space, and a filter provided below the work space and the duct. In the clean workbench, the cleaning workbench is equipped with a main body part which circulates the air by legs alI, and a fan case having a built-in fan and an air outlet of the fan communicating with the duct part. It is a multi-blade fan, and the fan S group of the multi-purpose fan is characterized in that it is provided at a position close to the back side of the front main body portion with respect to the cut-out air outlet.

Further, the present invention provides a work space, a duct part provided in communication with the work space, a filter provided in the duct part facing between the work spaces, and legs provided below the work space and the duct. The multi-blade fan has a main body part composed of a part, a 77 case with a built-in multi-blade fan, and a 77-b case with a built-in multi-blade fan. It is characterized in that it is provided with an opening K11i.

Each of the fan cases is removably provided and includes nine inlets and a cover, and the inlets and the cover may be formed to have the same mounting dimensions, and F! The IJ Funkosu may be configured so that it can be attached to the reverse target Pc after it has been installed.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to @4 factors and FIGS. 6 to 80.

The first example of the present invention is #! It is shown in Figure 6.

FIG. 6 shows an example in which the present invention is applied to a standard-type cleaning workbench with an air flow pattern.

? W cleaning workbench This case 70Fi work space 81, duct 9 which is a duct part built in the work space, and pI#
It consists of a HEPA filter 11, which is a filter, provided in the duct part facing the work space 91, and legs 2, which are leg parts.

The work space 81 has an air outlet 5 with a built-in fluorescent lamp 8o at the top, and has a side wall 8 made of a glass plate or an acrylic plate and a rear wall 4 made of a stainless steel plate, and is FM-controlled on three sides.
The shutter 12 is provided on the front side along the guide 1B so as to be freely closed and closed. A workbench l is provided on the lower surface of the workspace 81. A back plate 1o is provided on the back,
It serves as a partition between the inside and outside of the duct 9.

In this embodiment, the duct 9 is formed in a substantially inverted shape, one end of which is connected to the duct connection portion 20, and the other end of which is connected to the upper surface of the work space 81, and the HEPA filter 11 is provided in this opening. The leg portion 2 is formed to have a substantially U-shaped plane, and casters (not shown) or adjusters 32 are provided at the bottom of two parallel sides, and a fan case mounting base 2a and a duct connection portion 2o are provided at the center side. It consists of

FIG. 7 shows the external shape of the 7-uncase 19, and FIG. 11 shows the #IWr surface of the 7-uncase 19.

The fan case 19 includes a case 18 with opposing two-sided KN openings 6, and nine covers 1 each attached to the openings 6.
7 and the mounting plate 16, and the holding metal fittings 14 and 15 on the mounting plate 16.
The air blower 8 is equipped with a pre-filter 7 attached to the air blower 8 and a blower 8 built into the case 18 and having an impeller 8b. Further, electrical components 26 such as a thermal relay are incorporated as necessary. The pre-filter 7 does not necessarily need to be attached to the fan case 19 via the attachment frame 16;
The frame containing Nozai 7a as shown in yJ? bK It is also possible to add a mounting bracket made of an elastic body such as a leaf spring and attach it directly to the opening 6 that serves as the suction port.

The 7A/case 19Fi is installed on the back side of the cleaning stand, and is fastened to the duct connection part 20 with a screw 22 via a packing 21. Doug 2+ is on the top of fan case 19.
An air outlet 8@ of the fan 8 is provided at a position corresponding to the connecting portion 20. A stopper 24Fi attached to the lower surface of the fan case 19 is used to determine the horizontal mounting position when the stopper 24Fi is attached and to fix it to the fan case mounting base 23 using the screws 25.

If the dimensions of the mounting portion 60 are the same on both sides, and the dimensions of the cover 17 and the mounting plate 16 for reaching the fan case 19 are the same, the mounting position of the pre-filter can be changed as necessary. The fan case 19 may be attached to the leg part 2 by welding, but if it is detachably attached to the leg part 2 as in this embodiment, it may be attached to the back side of the clean workbench after the product is delivered due to local circumstances. 22) In the event of a situation where it is necessary to turn the fan case 19, change the direction of the fan case 19 as shown in Fig.
This can be easily achieved by simply replacing the positions of the mounting base 16 and cover 17. In addition, an electric condenser 120 is provided at the suction port 6 as shown in Fig. 14JI4.

Electrical system M & continuation is fan case 1 as shown in bag 9 figure.
An opening 19a is provided in the surface corresponding to the duct connection h20 of No. 9, and the contact 61 is inserted into this opening with the screw 64 and nut 6.
Attach the insulating plate 60 tightened in step 5, and connect the duct connection part 201.
Power is supplied by a fitting contactor 63 provided at 111. The contactor 68 is attached to the duct connection part 20 via the insulating plate 62. Wiring 66 to the fan 8 is connected to the contacts 61 and 63.
and wiring 67 to a power source are connected to each other. If the contactor 61 is made of an elastic body exclusively used for leaf springs, and is made to come into elastic contact with the contactor 68, even if there is a change in 3 due to Panokino compression or an error in the mounting position of the contactor 63, λ can be avoided. You can stop one attack, one attack, one attack, and one attack. In this case, the duct connection
A limit switch (IK shown) is placed inside the fan case 19, and a dog and i are connected to the contact f03.
'l+, I can read all the articles of ``Hinto'' and ``1'' without being able to take out the kiln.

A one-way connection may be made using the connectors 27 and 28 as shown in the 10th connection. Then, place the 19a in the center of the position where the duct connection part 20 of the fan case 19 is to be inserted. It is possible to square the pillow.The connection part of the air conditioner is not 1 shaku in the Fi system of the fan case 19, and it is Tli or ll of the fan case 19.
It may be provided on the lli surface.

In order to determine the position of the fan case, the fan case 35 may be installed in place of the stopper 24 on the surface corresponding to the duct connection part 20, as shown in FIG. can be attached and detached from either the low thl side or 1m from the back of the stand A to 11. The rising height of the flange 35 is 77mm. Gap LK
However, it is set so that L>1.

A first method of constructing the fan case 19 with the flange 35 removed is shown in FIGS. 13 to 16.

Fig. 13 shows a nut 41 welded to the fan case mounting base 23, and the fan case 19 held between the contact plate 42 provided at the tip of the bolt 40 screwed onto the nano) 41, the duct connection part 20, and the nut 41. It is something to do.

In FIG. 14, the fan case 19 is held between eccentric cams 43, 44 provided in the fan case mounting base 23' and the duct connecting portion 20 (not shown). The eccentric cams 43, 44 are fixed to a rotatably provided shaft 45,
It can be configured to rotate in conjunction with the rotation of the handle 46.

In FIG. 15, the fan case 19 is held between a wedge 47 that is slidably provided on the fan case mounting base 23'' and a duct Wc portion 20 (not shown).Fan case 23' A wedge 48 is fixed to a slidably provided shaft 49 inside, and the wedge 47 has an inclined surface that is shaped like the wedge 48.
is in contact with the slope of

...The contact surfaces of the end 47 and the wedge 48 slide in conjunction with the reciprocating movement of the handle 50, thereby causing the wedge 48 to slide in the vertical direction.

Fig. 16 shows that a part 23''a of the fan case mounting base 23'' is raised above the pantograph installation ftK, and the duct connection part 20 (
(not shown) to hold the fan case 19 between them. Pantograph installation [51 is fan case mounting base 2
a shaft 5 rotatably provided within 3" and provided with a thread;
2, and moves up and down in conjunction with the rotation of the handle 53.

A second embodiment of the present invention is shown in FIGS. 7 and 3.

FIGS. 17 and 18 show the present invention applied to a device assembly type cleaning workbench.

The main body portion 70' of the device-assembled cleaning workbench is not equipped with a workbench l, and the lower surface 7 of the workspace 310 is open toward the floor on which the cleaning workbench is installed. It has the same configuration as the main body portion 70 in the embodiment trap.

In the work space 31, there are installed various types of equipment such as semiconductor manufacturing equipment that require a high degree of cleanliness. Figure 17 shows
Nine examples are shown in which a comparatively heavy and tall device 29 is installed, and FIG. 18 shows an example in which a device 29' with a small cylinder size is installed. In such equipment, the parts that require high cleanliness are usually located in the upper part of the equipment. Therefore, in the device 29 with a large iron gourd height, there is no problem even if the pre-filter 7 faces the work space 31, but in the case of the device 29' with a small device height, the waste that is sucked from the bottom of the cleaning workbench is Since it may be affected by the processed air, by switching the positions of the pre-filter 7 and the cover 17 as shown in FIG. 18, entrainment can be prevented and the air flow condition can be adjusted.

According to the embodiments described above, when a line is formed by arranging cleaning workbenches of the device built-in type and the standard type, the cleaning workbench shown in FIG.
As shown in FIG. 20, the back side of the cleaning workbench can be used as a space for the piping 33 to the device 29, etc., and space can be saved.

1. If the air pressure in the work room where the clean work table is installed contains organic solvent vapor, air from the adjacent room that does not contain the organic bath agent can be sucked in as shown in Figure 21. Furthermore, by attaching the mounting &81 provided with the duct 7 flange 80 to the rear side of the fan case 19, air not containing organic solvent can be supplied via the duct 82 as shown in FIG.

A third embodiment of the present invention is shown in FIGS. 23 and 24.

FIG. 28 shows the present invention applied to a clean workbench equipped with a fan case 19' incorporating a low-noise fan 8' having an impeller 8'b. As shown in FIG. 28, if the part of the fan case 19' where the impeller 8'b is almost housed protrudes toward the back side, the fan case 19' can be used with a low-noise fan 8'.
Even if the shape of the fan case 9' becomes larger, the space under the workbench l remains the same as when the fan case 19 is used. Also,
Since the fan case 19' is removably provided,
If there is not enough space on the back to install a cleaning workbench, the fan case 19' can be turned around and pressed flat on the back as shown in FIG. 24.

A fourth embodiment of the present invention is shown in FIGS. 25 and 26.

FIGS. 25 and 26 show an example in which the present invention is applied to a horizontal airflow cleaning workbench.

The fan case 19 is mounted on the cleaning workbench main body 70'', and the air blown out from the fan 8 built in the fan case 19 is transferred to the duct connection part 20, the duct 9, and the HEPA filter 1.
1 into the working space 31' from the outlet 5'.

Fig. 25 shows an example in which the fan case 19 protrudes toward the back side.
FIG. 26 shows an example in which the back side is laid flat. In this embodiment as well, the same effects as in the first to third embodiments can be obtained. According to the embodiments described above, the main body portion and the fan case portion can be combined arbitrarily, so that a clean workbench suitable for the production of 7 units can be obtained.

FIG. 28 shows a fifth embodiment of the present invention. In this embodiment, a thin multi-blade fan 78 with large blade diameter is incorporated into a fan case 79 to ensure the required air volume.

As shown in FIG. 29, a blowing lower 8a of a fan 78 is provided on the upper surface of the fan case 79, and an impeller 78b is directly connected to a fan motor 78cK. The fan 78 is installed such that the per mouth 78d faces the suction port 6 of the fan case 79. The fan case 79 may be fixed by welding, or may be detachably provided. As shown in FIG. 30, a fan 88 with a fan motor 88C incorporated inside an impeller 88b is mounted in a fan case 79.
It may be incorporated into In this case as well, the fan 88 is
8 a is provided on the upper surface of the fan case 79 , and a per mouth 88 d is installed so as to face the suction port 6 of the fan case 79 . Fan motor 88c is supported by stay 88e. According to this embodiment, it is possible to make the fan case thinner.

〔Effect of the invention〕

According to the present invention, even when the depth dimension of the clean workbench is reduced, since the fan case is provided so as to protrude toward the rear side, the space under the feet of the worker is not narrowed, and a clean workbench with excellent workability is obtained. be able to.

[Brief explanation of drawings]

Figures 1 and 2 are front and side views showing a clean workbench in a conventional example, respectively, and Figures 3 and 4 show usage states of a clean workbench in a conventional example and a first embodiment of the present invention, respectively. 5 is a side sectional view of the cleaning stand that was studied in the process leading to the present invention, and FIG. 6 is the @1 of the present invention.
A side sectional view of the cleaning workbench in the example, FIGS. 7 and 3 are respectively perspective views with a partially broken surface showing the shape of the fan case, and FIGS. 9 and 10 are respectively the structure of the electrical connection part. 18' top view showing an example, FIGS. 11 and 12 are side sectional views showing an example of how to attach the fan case shown in FIG. 7, and FIGS. 13, 14, 15, and 16. are the third
Side views showing examples of how to attach the fan case shown in the figures, Figs. 17 and 18, 2. x9 figure, figure 20, figure 21,
Fig. 22 is a side sectional view, Fig. 28, and Fig.
4 is a side sectional view of a clean workbench according to a third embodiment of the present invention, FIGS. 25 and 26 are side sectional views of a clean workbench according to a fourth embodiment of the present invention, and FIG. 27 is a side sectional view of a clean workbench according to a fourth embodiment of the present invention. FIG. 28 is a side sectional view showing one example of the method; FIG. 28 is a side sectional view of the fifth embodiment of the invention; FIGS. 29 and 30 are diagrams showing the shape of the fan case used in the fifth embodiment of the invention. FIG. 3 is a perspective view showing a broken section. 2: Legs, 6.16: Suction port, 8.8'.78.88; Fan, 8a.8'a.78a
・88a: Air outlet, 8b-da b・78b・88b: Root wheel, 11 filter, 17: Cover, 19・19'・79
°Fan case, 31/81 pa work space, 70/70'
・? 0": Main body part, 78d/88d: Pel mouth. Cleaning of drawings (no change in content) 畢30 亭4 drawings, 5!
21 Figure 6 $7E21 8 concave, 77. base 13 lead
Rate 14121 Warehouse Indentation Name Purification Worker Kazumasa 11 cases and 1 person Patent Applicant Name Name 151 Ql Materials Company Hitachi (
Mr. Jito

Claims (1)

[Claims] 1. A work space, a duct provided in communication with the work space, a filter provided on the duct facing the work space, and a filter provided below the work space and the duct. a main body portion comprising a leg portion with a built-in fan; an air outlet of the fan is provided to communicate with the duct portion;
A clean workbench comprising: a fan case configured such that a portion housing an impeller of the fan protrudes from a back surface of the main body portion. 2. A work space, a duct provided in communication with the work space, a filter provided on the duct facing the work space, and legs provided below the work space and the duct. and a fan case that has a built-in fan and is detachably attached to the main body part so that the air outlet of the fan communicates with the duct part. The stand. 3. Consists of a work space, a duct provided in communication with the work space, a filter provided on the duct facing the work space, and legs provided below the work space and the duct. In the cleaning workbench, the fan is a multi-blade fan, and the fan case is provided with a built-in fan and an outlet of the fan communicates with the duct part, and the fan is a multi-blade fan. A cleaning workbench characterized in that the impeller of the fan is provided on a side closer to the back of the main body portion with respect to the air outlet. 4. Consists of a work space, a duct provided in communication with the work space, a filter provided on the duct facing the work space, and legs provided below the work space and the duct. and a fan case incorporating a multi-blade fan, the multi-blade fan is provided with an air outlet communicating with the duct part, and a pel mouth is provided facing the suction port of the fan case. A clean workbench characterized by: 5. The fan case is provided with a suction port and a cover, each of which is detachably provided, and the suction port and the cover are formed to have the same mounting dimensions.Claims 1 and 2 of the claims. A clean workbench according to any one of Items 1, 3, and 4. 6. According to any one of claims 1, 2, 3, 4, and 5, wherein the fan case is configured so that it can be attached to a front-back reversal position. Clean workbench as described.