JPH0323259A - Dielectric porcelain composition - Google Patents
Dielectric porcelain compositionInfo
- Publication number
- JPH0323259A JPH0323259A JP1156500A JP15650089A JPH0323259A JP H0323259 A JPH0323259 A JP H0323259A JP 1156500 A JP1156500 A JP 1156500A JP 15650089 A JP15650089 A JP 15650089A JP H0323259 A JPH0323259 A JP H0323259A
- Authority
- JP
- Japan
- Prior art keywords
- dielectric
- capacitance
- rare earth
- earth elements
- breakdown strength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000203 mixture Substances 0.000 title claims description 18
- 229910052573 porcelain Inorganic materials 0.000 title abstract description 6
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 13
- 229910052779 Neodymium Inorganic materials 0.000 claims abstract description 9
- 229910052777 Praseodymium Inorganic materials 0.000 claims abstract description 8
- 229910052746 lanthanum Inorganic materials 0.000 claims abstract description 8
- 229910052772 Samarium Inorganic materials 0.000 claims abstract description 6
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910001936 tantalum oxide Inorganic materials 0.000 claims abstract description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims 1
- 230000015556 catabolic process Effects 0.000 abstract description 16
- 238000009413 insulation Methods 0.000 abstract description 14
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract description 12
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 abstract description 12
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract description 6
- 239000003985 ceramic capacitor Substances 0.000 description 11
- 239000000843 powder Substances 0.000 description 9
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 239000013078 crystal Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000006467 substitution reaction Methods 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000032798 delamination Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 230000007847 structural defect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- -1 BaTi03 Chemical class 0.000 description 1
- 101100496968 Caenorhabditis elegans ctc-1 gene Proteins 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 101100221647 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) cox-1 gene Proteins 0.000 description 1
- 101150062589 PTGS1 gene Proteins 0.000 description 1
- 208000003251 Pruritus Diseases 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000007803 itching Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Insulating Materials (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は誘電率,絶縁抵抗,絶縁破壊電圧が高く、良好
度Qを大幅に改善し、静電容量温度係数が小さく、かつ
積層セラミックコンデンサへの利用においては、内部電
極の厚みを薄くしたときの静電容量と良好度Qの低下を
防ぎ、静電容量と良好度Qのバラツキを小さくできる誘
電体磁気組成物に関するものである。[Detailed description of the invention] Industrial application field The present invention has high dielectric constant, insulation resistance, and dielectric breakdown voltage, greatly improves the quality Q, and has a small capacitance temperature coefficient, and is suitable for multilayer ceramic capacitors. In terms of usage, the present invention relates to a dielectric magnetic composition that can prevent a decrease in capacitance and quality Q when the thickness of internal electrodes is reduced, and can reduce variations in capacitance and quality Q.
従来の技術
従来から誘電率,絶縁抵抗が高く、良好度Qにすぐれ、
静電容量温度係数が小さい誘電体磁気組成物として下記
のような系が知られている。Conventional technology Conventionally, the dielectric constant and insulation resistance are high, and the quality Q is excellent.
The following systems are known as dielectric magnetic compositions with small capacitance temperature coefficients.
・BaO Ti02−Nd20z系
・BaO−TiO2 Sm203系
発明が解決しようとする課題
しかし、これらの組成は、例えば0.09BaOO.5
6T i 02−0.35NdOs/tの組威比からな
る誘電体材料を使用し、パラジウムの内部電極厚み4μ
m、誘電体厚み12μm、内部電極の重なり寸法1 .
2 win X O . 7 wa、誘電体層数19
の積層構造をもつ積層セラミックコンデンサを作製する
と、静電容量の平均値:742pF、良好度Qの平均値
.8700、静電容量温度係数の平均値:N35ppm
/℃、絶縁抵抗の平均値:6.OX1012Ω、絶縁破
壊強度の平均値:117kv/Ilmlであり、絶縁抵
抗において満足のできる値ではない。また、結晶粒径が
1〜5μmと大きいため、素体中の気孔率が大きくなる
とともに結晶粒子1個当たりにかかる電界強度が大きく
なり、絶縁破壊強度も満足のできる値ではない。・BaO Ti02-Nd20z system ・BaO-TiO2 Sm203 system Problems to be solved by the invention However, these compositions, for example, 0.09BaOO. 5
6T i 02-A dielectric material with a composition ratio of 0.35NdOs/t is used, and the internal electrode thickness of palladium is 4μ.
m, dielectric thickness 12 μm, internal electrode overlap dimension 1.
2 win XO. 7 wa, number of dielectric layers 19
When a multilayer ceramic capacitor with a multilayer structure is manufactured, the average capacitance is 742 pF, and the average quality Q is . 8700, average value of capacitance temperature coefficient: N35ppm
/°C, average value of insulation resistance: 6. OX1012Ω, average value of dielectric breakdown strength: 117 kv/Ilml, which is not a satisfactory value in terms of insulation resistance. Further, since the crystal grain size is large, 1 to 5 μm, the porosity in the element body becomes large, and the electric field strength applied to each crystal grain becomes large, and the dielectric breakdown strength is also not a satisfactory value.
さらに、積層セラミックコンデンサのコストダウンを行
うため、および素体内部の構造欠陥であるデラミネーシ
ョンの発生を防ぐため、パラジウムの内部電極厚みを4
μmから2μmに薄くすると、上記の組戒比の誘電体材
料を使用し、上記の誘電体厚み,内部電極重なり寸法,
誘電体層数の積層構造をもつ積層セラミックコンデンサ
の静電容量の平均値が610pFと小さくなるとともに
静電容量のバラツキが256〜713pFと大きくなる
。さらに、良好度Qの平均値も4000と低くなるとと
もに良好度Qのバラツキが600〜8800と大きくな
るという課題があった。Furthermore, in order to reduce the cost of multilayer ceramic capacitors and to prevent the occurrence of delamination, which is a structural defect inside the element body, the thickness of the palladium internal electrode was increased by 4.
When thinning from μm to 2 μm, a dielectric material with the above composition ratio is used, the dielectric thickness is the above, the internal electrode overlap dimension is
The average value of capacitance of a multilayer ceramic capacitor having a laminated structure with a number of dielectric layers is as small as 610 pF, and the variation in capacitance is large as 256 to 713 pF. Furthermore, there was a problem in that the average value of the quality level Q was as low as 4,000, and the variation in the quality level Q was large, ranging from 600 to 8,800.
課題を解決するための手段
これらの課題を解決するために本発明は、一般式x B
a O − y[(T i 02)(+−11>(Z
r 02)III − z( R e r+−n)M
en) 03/2と表した時(ただし、x+y+z=
1.OO,0.001≦m≦0.200,0.01≦n
≦0.20,ReはL a + P r ,N d ,
Smから選ばれる一種以上の希土類元素、MeはLa.
Pr,Nd,Smを除く希土類元素から選ばれる一種以
上の希土類元素。)、x.y,zが以下に表す各点a.
b,c.d,e,fで囲まれるモル比の範囲からなる生
成分100重量部に対し、副成分としてタンタル酸化物
をTa205に換算して0.1〜io.o重量部含有し
たことを特徴とする誘電体磁器組底物を提案するもので
ある。Means for Solving the Problems In order to solve these problems, the present invention provides the general formula x B
a O − y[(T i 02)(+−11>(Z
r 02)III-z(Rer+-n)M
en) When expressed as 03/2 (however, x+y+z=
1. OO, 0.001≦m≦0.200, 0.01≦n
≦0.20, Re is L a + P r , N d ,
One or more rare earth elements selected from Sm, Me is selected from La.
One or more rare earth elements selected from rare earth elements excluding Pr, Nd, and Sm. ), x. Each point a.y,z represents below.
b, c. With respect to 100 parts by weight of the product having a molar ratio within the range of d, e, and f, tantalum oxide is added as a subcomponent in terms of Ta205 of 0.1 to io. The present invention proposes a dielectric porcelain assembly characterized by containing 0 parts by weight.
作用
第1図は本発明にかかる組成物の主成分の組成範囲を示
す三元図であり、主成分の組戒範囲を限定した理由を第
1図を参照しながら説明する。すなわち、A領域では焼
結が著しく困難である。また、B領域では良好度Qが低
下し実用的でなくなる。さらに、C,D領域では静電容
量沼度係数がマイナス側に大きくなりすぎて実用的でな
くなる。そして、E領域では静電容量温度係数がプラス
方向に移行するが、誘電率が小さく実用的でなくなる。FIG. 1 is a ternary diagram showing the composition range of the main components of the composition according to the present invention, and the reason for limiting the composition range of the main components will be explained with reference to FIG. That is, sintering is extremely difficult in region A. Furthermore, in region B, the quality Q decreases, making it impractical. Furthermore, in regions C and D, the capacitance coefficient becomes too large on the negative side, making it impractical. In region E, the temperature coefficient of capacitance shifts to a positive direction, but the dielectric constant is too small to be practical.
また、ReをLa.Pr,Nd.Smから選ぶことによ
り、La.Pr.Nd,Smの順で誘電率を大きく下げ
ることなく、静電容量温度係数をプラス方向に移行する
ことが可能であり、La.Pr.Nd.Smの1種ある
いは組合せにより静電容量温度係数の調節が可能である
。さらに、La,Pr,Nd.Smから選ばれる一種以
上の希土類元素の一部を、La,Pr.Nd,Smを除
く希土類元素から選ばれる一種以上の希土類元素で置換
することにより、良好度Qを大幅に改善する効果を有し
、その置換量が0.01未満では置換効果はな<,0.
20を越えると誘電率が低下し実用的でなくなる。Also, Re is La. Pr, Nd. By selecting from Sm, La. Pr. It is possible to shift the capacitance temperature coefficient in the positive direction without significantly lowering the dielectric constant in the order of Nd and Sm, and La. Pr. Nd. The capacitance temperature coefficient can be adjusted by using one type or a combination of Sm. Furthermore, La, Pr, Nd. A part of one or more rare earth elements selected from Sm, La, Pr. Substitution with one or more rare earth elements selected from rare earth elements other than Nd and Sm has the effect of significantly improving the goodness factor Q, and if the amount of substitution is less than 0.01, there is no substitution effect. ..
When it exceeds 20, the dielectric constant decreases and becomes impractical.
また、Ti02をZr02で置換することにより、誘電
率,良好度Q,静電容量温度係数.絶縁抵抗の値を大き
く変えることなく,結晶粒径を小さくし、絶縁破壊強度
を大きくする効果を有し、その置換率mがo.ooi未
満では置換効果はなく、一方0.200を越えると誘電
率,良好度Q,絶縁抵抗が低下する。In addition, by replacing Ti02 with Zr02, the dielectric constant, goodness factor Q, capacitance temperature coefficient. It has the effect of reducing the crystal grain size and increasing the dielectric breakdown strength without greatly changing the value of insulation resistance, and the substitution rate m is o. If it is less than ooi, there will be no substitution effect, while if it exceeds 0.200, the dielectric constant, goodness factor Q, and insulation resistance will decrease.
第2図(a)〜(e)は本発明にかかる組成物の主成分
に対し、副威分Ta205の含有効果を積層セラミック
コンデンサの特性で示すグラフであり、Ta20sの含
有範囲を限定した理由をグラフを参照しながら説明する
。第2図に示すようにTa205を含有することにより
、絶縁抵抗,絶縁破壊強度が向上し、また静電容量と良
好度Qを高め、静電容量と良好度Qのバラツキを小さく
する効果を有する。そして、Ta205の含有により、
絶縁抵抗.絶縁破壊強度は向上するが、Ta20sの含
有量が主成分l00重量部に対し、0.1重量部未満は
静電容量と良好度Qが低く、また静電容量と良好度Qの
バラッキが大きいため、この発明の範囲から除外した。FIGS. 2(a) to (e) are graphs showing the effect of the addition of the secondary component Ta205 on the characteristics of a multilayer ceramic capacitor with respect to the main component of the composition according to the present invention, and the reason why the content range of Ta20s was limited. will be explained with reference to the graph. As shown in Figure 2, the inclusion of Ta205 improves insulation resistance and dielectric breakdown strength, increases capacitance and quality Q, and has the effect of reducing variations in capacitance and quality Q. . And, due to the inclusion of Ta205,
Insulation resistance. Although the dielectric breakdown strength is improved, if the content of Ta20s is less than 0.1 parts by weight per 100 parts by weight of the main component, the capacitance and goodness Q are low, and the capacitance and goodness Q are highly variable. Therefore, it was excluded from the scope of this invention.
一方、Ta205の含有量が主威分に対し、1 0.0
重量部を越えると良好度Q,絶縁抵抗が低下し、静電容
量温度係数がマイナス側に大きくなり、実用的でなくな
る。On the other hand, the content of Ta205 is 1 0.0
If it exceeds parts by weight, the quality Q and insulation resistance will decrease, and the temperature coefficient of capacitance will become negative, making it impractical.
実施例 以下に、本発明を具体的実施例により説明する。Example The present invention will be explained below using specific examples.
(実施例1)
出発原料には化学的に高純度のBaCO3T i 02
.2 r02.La203,P reo++.Nd20
3Sm203,Ce02,Gd203,Dy203およ
びTa205粉末を下記の第1表に示す組成比になるよ
うに秤量し、めのうボールを備えたゴム内張りのポール
ミルに純水とともに入れ、湿式混合後、脱水乾燥した。(Example 1) Chemically high purity BaCO3T i 02 was used as the starting material.
.. 2 r02. La203, Preo++. Nd20
3Sm203, Ce02, Gd203, Dy203, and Ta205 powders were weighed to have the composition ratio shown in Table 1 below, put into a rubber-lined pole mill equipped with an agate ball together with pure water, wet mixed, and then dehydrated and dried.
この乾燥粉末を高アルミナ質のルツポに入れ、空気中で
1100℃にて2時間仮焼した。この仮焼粉末を、めの
うボールを備えたゴム内張りのボールミルに純水ととも
に入れ、湿式粉砕後、脱水乾燥した。この粉砕粉末に、
有機バインダーを加え、均質とした後、32メッシュの
ふるいを通して整粒し、金型と油圧プレスを用いて成形
圧力1ton/cjで直径15wa,厚み0. 4+n
mに成形した。次いで、成形円板をジルコニア粉末を敷
いたアルミナ質のサヤに入れ、空気中にて下記の第l表
に示す温度で2時間焼成し、第1表に示す組威比の誘電
体磁器を得た。This dry powder was placed in a high alumina crucible and calcined in air at 1100° C. for 2 hours. This calcined powder was put into a rubber-lined ball mill equipped with agate balls together with pure water, wet-pulverized, and then dehydrated and dried. In this crushed powder,
After adding an organic binder and making it homogeneous, the particles were sized through a 32-mesh sieve, and molded using a mold and hydraulic press at a molding pressure of 1 ton/cj to a diameter of 15 wa and a thickness of 0. 4+n
It was molded into m. Next, the molded disk was placed in an alumina pod covered with zirconia powder and fired in air at the temperature shown in Table 1 below for 2 hours to obtain dielectric porcelain having the composition ratio shown in Table 1. Ta.
(以下余白)
このようにして14られた誘電体磁器円板は、厚みと直
径を測定し、誘電率,良好度Q,静電容量温度係数測定
用試料は、誘電体磁器円板の両面全体に銀電極を焼き付
け、絶縁抵抗,絶縁破壊強度測定用試料は、誘電体磁器
円板の外周より内側に1−の幅で銀電極のない部分を設
け、銀電極を焼き付けた。そして、誘電率,良好度Q,
静電容量温度係数は、YHP社製デジタルLCRメータ
のモデル4275Aを使用し、測定温度20℃,測定電
圧1.OVrms,+11定周波#!ilMHzでの測
定より求めた。なお、静電容量温度係数は、20℃と8
5℃の静電容量を測定し、次式により求めた。(Left below) The thickness and diameter of the dielectric porcelain disk prepared in this manner were measured, and the sample for measuring the dielectric constant, goodness Q, and capacitance temperature coefficient was measured on both sides of the dielectric porcelain disk. A sample for measuring insulation resistance and dielectric breakdown strength was prepared by providing a 1-width portion without a silver electrode inside the outer periphery of a dielectric ceramic disk, and baking a silver electrode thereon. Then, the dielectric constant, the goodness Q,
The capacitance temperature coefficient was measured using a YHP digital LCR meter model 4275A at a measurement temperature of 20°C and a measurement voltage of 1. OVrms, +11 constant frequency #! It was determined by measurement at ilMHz. In addition, the capacitance temperature coefficient is 20℃ and 8
The capacitance at 5° C. was measured and calculated using the following formula.
TC−(C−Co)/CoX1/65X106TC:静
電容量塩度係数(ppm/℃)Co : 20℃での静
電容量(pF)C :85℃での静電容量(pF)
また、誘電率は次式より求めた。TC-(C-Co)/CoX1/65X106TC: Capacitance salinity coefficient (ppm/℃) Co: Capacitance at 20℃ (pF) C: Capacitance at 85℃ (pF) Also, dielectric The rate was calculated using the following formula.
K=143.8XCoXt/D2
K :誘電率
Co:20℃での静電容量(pF)
D =誘電体磁器の直径(IvI)
t :誘電体磁器の厚み(印〉
さらに、絶縁抵抗は、YHP社製H Rメータのモデル
4329Aを使用し、測定電圧50V.D.C.、測定
時間1分間による測定より求めた。K=143.8 It was determined by measurement using an HR meter model 4329A manufactured by Co., Ltd., at a measurement voltage of 50 V.D.C., and a measurement time of 1 minute.
そして、絶縁破壊強度は、菊水電子工業@製高電圧電源
PH835K−3形を使用し、試料をシリコンオイル中
に入れ、昇圧速度50V/secにより求めた絶縁破壊
電圧を誘電体厚みで除算し、1++s当たりの絶縁破壊
強度とした。また、結晶粒径は、倍率400での光学R
微鏡観察より求めた。Then, the dielectric breakdown strength was determined by using a high voltage power supply PH835K-3 manufactured by Kikusui Electronics Co., Ltd., placing the sample in silicone oil, and dividing the dielectric breakdown voltage determined by a voltage increase rate of 50 V/sec by the dielectric thickness. Dielectric breakdown strength per 1++s. In addition, the crystal grain size is the optical R at a magnification of 400.
Obtained from microscopic observation.
試験結果を下記の第2表に示す。The test results are shown in Table 2 below.
( 以 下 余 白 )
(実施例2)
出発原料には化学的に高純度のBaCO3TiOz .
ZrO2.Nd20s .CeO2およびTa20s粉
末を使用し、組成比0.09BaO−0,56丁i 0
2−0.35[ (NdO3/2)o.ss( C e
02)O.051の主威分100重量部に対し、Ta
20sを0.0.05.0.1.0.50,1.00,
5.00,10.00,12。OO重量部含有した仮焼
粉砕粉を実施例lと同様の方法で作製する。(Left below) (Example 2) Chemically high-purity BaCO3TiOz.
ZrO2. Nd20s. Using CeO2 and Ta20s powder, composition ratio 0.09BaO-0,56toni0
2-0.35[(NdO3/2)o. ss( C e
02) O. For 100 parts by weight of the main component of 051, Ta
20s is 0.0.05.0.1.0.50, 1.00,
5.00, 10.00, 12. A calcined pulverized powder containing parts by weight of OO is prepared in the same manner as in Example 1.
ただし、Ta205含有量が0.0.05.1 2.0
0重量部は、この発明の範囲外であり、0.100,0
.500,1.00,5.00.10.00重量部は、
この発明の範囲内である。However, Ta205 content is 0.0.05.1 2.0
0 parts by weight is outside the scope of this invention, and 0.100,0 parts by weight is outside the scope of this invention.
.. 500, 1.00, 5.00.10.00 parts by weight are
It is within the scope of this invention.
この仮焼粉砕粉末に、有機バインダー,可塑剤,分散剤
,有機溶剤を加え、アルミナボールを備えたポットで混
合し、スラリーを作製した。混合後、ろ過したスラリー
は、焼結後の誘電体厚みがl2μmとなるようなグリー
ンシ一トに加工した。このようなグリーンシ一ト10枚
を支持台の上に積層し、昭栄化学C株製内部電極パラジ
ウムベ一ストML − 3 7 2 4を焼結後の内部
電極厚みが2 u mとなるようにスクリーン印刷し,
乾燥した。この上にグリーンシ一ト1枚を積層し、焼結
後の内部電極瓜なり寸法が1 . 2 w X 0 .
7 mとなるように印刷位置をずらして内部電極パラ
ジウムペーストを印刷し、乾燥後、グリーンシ一ト1枚
を積廣した。これらの操作を、誘電体層数が19となる
まで繰り返した。このLに、グリーンシ一ト10枚を積
層した。この積層体を焼結後、内部電極重なり寸法が1
.21IIll×0.7ml、誘電体層数が19の積層
構造をもつ積層セラミックコンデンサ,となるように切
断した。この切断した試料は、ジルコニア粉末を敷いた
アルミナ質のサヤに入れ、空気中にて室温から350℃
までを5℃7 h rで痒γ品し、350℃より100
℃/ h rで昇温し、1270℃で2時間焼戒後、1
00℃/hrで室温まで降温した。次いで、焼成後の試
料は、試料面を研磨し、外部電極と接合する内部電極部
分を充分露出させ、内部電極露出部分に銀の外部電極を
焼き付け、内部電極と導通させ、積層セラミックコンデ
ンサを作製した。An organic binder, plasticizer, dispersant, and organic solvent were added to this calcined and pulverized powder and mixed in a pot equipped with alumina balls to prepare a slurry. After mixing, the filtered slurry was processed into a green sheet having a dielectric thickness of 12 μm after sintering. Ten such green sheets were stacked on a support stand, and internal electrode palladium best ML-3724 manufactured by Shoei Kagaku C Co., Ltd. was sintered so that the internal electrode thickness would be 2 um. screen print on
Dry. A green sheet is laminated on top of this, and after sintering, the internal electrode dimensions are 1. 2 w X 0.
Internal electrode palladium paste was printed by shifting the printing position so that the distance was 7 m, and after drying, one green sheet was stacked. These operations were repeated until the number of dielectric layers reached 19. Ten green sheets were laminated on this L. After sintering this laminate, the internal electrode overlap dimension is 1
.. It was cut into a multilayer ceramic capacitor having a laminated structure of 21IIll x 0.7ml and 19 dielectric layers. The cut sample was placed in an alumina pod covered with zirconia powder and heated from room temperature to 350°C in the air.
Itching was carried out for 7 hours at 5℃, and
After increasing the temperature at ℃/hr and baking at 1270℃ for 2 hours, 1
The temperature was lowered to room temperature at a rate of 00°C/hr. Next, the sample surface of the fired sample is polished to fully expose the internal electrode part that will be connected to the external electrode, and a silver external electrode is baked on the exposed part of the internal electrode to make it conductive with the internal electrode, producing a multilayer ceramic capacitor. did.
これらの試料の静電容量,良好度Q,静電容吸1=度係
数,絶縁抵抗.絶縁破壊強度は、実施例1と同様の条件
での測定により求めた。また、積層構造の確認は、積層
セラミックコンデンサの長さ方向および幅方向の約17
72の研磨断面を、内部電極重なり寸法は倍率100、
誘電体厚みど内部電極厚みは倍率400での光学顕微鏡
観察,より求めた。The capacitance, quality Q, capacitance absorption coefficient, and insulation resistance of these samples. The dielectric breakdown strength was determined by measurement under the same conditions as in Example 1. In addition, the laminated structure was confirmed by approximately 17 mm in the length and width directions of the laminated ceramic capacitor.
72 polished cross section, internal electrode overlap dimension is magnification 100,
The dielectric thickness and the internal electrode thickness were determined by optical microscope observation at a magnification of 400.
この測定結果を第2図(a)〜(e)に示す。The measurement results are shown in FIGS. 2(a) to (e).
なお、実施例における誘電体磁器の作製方法では、B
a CO3, T i 02, Z r 02, L
a201Pr6011.Nd203,Sm203 .C
e02Gd203,Dy2o3およびTa205を使用
したが、この方法に限定されるしのではなく、所望の組
成比になるように、BaTi03などの化合物、あるい
は炭酸塩,水酸化物など空気中での加熱により 、 B
ad, TiO2 , Zr02 , La2
03PrsO++,NdzO:+ .SIT1203
.Cen2Gd203,Dy20:+およびT a 2
0 5となる化合1カを使用しても実施例と同程度の
特性を得ることができる。In addition, in the method for producing dielectric ceramic in the example, B
a CO3, T i 02, Z r 02, L
a201Pr6011. Nd203, Sm203. C
Although e02Gd203, Dy2o3 and Ta205 were used, the method is not limited to this method, and by heating in air a compound such as BaTi03, or a carbonate, a hydroxide, etc., to obtain the desired composition ratio. B
ad, TiO2, Zr02, La2
03PrsO++, NdzO:+. SIT1203
.. Cen2Gd203, Dy20:+ and T a 2
Even if one compound having a value of 0.05 is used, properties comparable to those of the examples can be obtained.
また、主成分をあらかじめ仮焼し、副成分を添和しても
実施例と同程度の特性を得ることができる。Further, even if the main component is calcined in advance and the subcomponents are added, properties comparable to those of the examples can be obtained.
また、実施例ではLa,Pr,Nd,Smを除く希土類
元素M eとしてCe,Dy.Gdについて説明したが
、その他の希土類元素を使用しても実施例と同程度の特
性を得ることができる。In the examples, rare earth elements Me other than La, Pr, Nd, and Sm include Ce, Dy. Although Gd has been described, characteristics comparable to those of the examples can be obtained even if other rare earth elements are used.
また、上述の基本組成のほかに、SiO2Mn02,F
e203 .ZnOなど一般にフラックスと考えられて
いる塩類,酸化物などを、特性を損なわない範囲で加え
ることもできる。In addition to the basic composition mentioned above, SiO2Mn02, F
e203. Salts, oxides, etc., which are generally considered to be fluxes, such as ZnO, can also be added within a range that does not impair the properties.
発明の効果
以Eのように本発明によれば、桔晶粒径が小さく、誘電
率.絶縁抵抗,絶縁破壊電圧が高く、良好度Qを大幅に
改善し、静電容量温度係数が小さく、かつ積層セラミッ
クコンデンサへの利用においては、内部電極の厚みを薄
くしたときの静電容量と良好度Qの低下を防ぎ、静電容
量と良好度Qのベラツキを小さくできるため、内部t
44iの79みを薄くしで、積層セラミックコンデンサ
のコス1・ダウンが行えるとともに内部構造欠陥である
デラミネーションの発生を防ぐことができる。また、絶
縁破壊電圧が高いため誘電体層の厚みを薄くし7、素体
の小型化.大容量化が可能である。Effects of the Invention According to the present invention, as shown in E, the crystal grain size is small and the dielectric constant. The insulation resistance and breakdown voltage are high, the quality Q is greatly improved, the temperature coefficient of capacitance is small, and when used in multilayer ceramic capacitors, the capacitance is better than that of thinner internal electrodes. The internal t
By reducing the thickness of 44i by 79, the cost of the multilayer ceramic capacitor can be reduced by 1, and the occurrence of delamination, which is an internal structural defect, can be prevented. In addition, because the dielectric breakdown voltage is high, the thickness of the dielectric layer has been reduced7, and the element body has been made smaller. Larger capacity is possible.
第l図は本発明にかかる組成物の主成分のill成範囲
を説明する三元図、第2図(a)〜(e)は本発明にか
かる組成比0.09BaO−0.56T i O20.
3 5 [ (N d 03/2) 0.95 (C
e 02) 0.051の主威分100重量部に対する
副成分Ta205の含有効果を、誘電体厚み・12μm
、内部電極改なり寸法+1.2llwIX0.7m、誘
電体層数=1!1の積層構造をもつ積層セラミックコン
デンサの電気特性で示すグラフである。Figure 1 is a ternary diagram explaining the illumination range of the main components of the composition according to the present invention, and Figures 2 (a) to (e) are composition ratios of 0.09BaO-0.56T i O20 according to the present invention. ..
3 5 [ (N d 03/2) 0.95 (C
e 02) The effect of the addition of Ta205 as a subcomponent to 100 parts by weight of the main component of 0.051 is calculated using the dielectric thickness of 12 μm.
, is a graph showing the electrical characteristics of a multilayer ceramic capacitor having a multilayer structure in which internal electrode dimensions + 1.2 llw IX 0.7 m and number of dielectric layers = 1!1.
Claims (1)
ZrO_2)_m]−z(Re_(_1_−_n_)M
e_n)O_3_/_2と表した時(ただし、x+y+
z=1.00,0.001≦m≦0.200,0.01
≦n≦0.20、ReはLa,Pr,Nd,Smから選
ばれる一種以上の希土類元素、MeはLa,Pr,Nd
,Smを除く希土類元素から選ばれる一種以上の希土類
元素。)、x,y,zが以下に表す各点a,b,c,d
,e,fで囲まれるモル比の範囲からなる主成分100
重量部に対し、副成分としてタンタル酸化物をTa_2
O_5に換算して0.1〜10.0重量部含有したこと
を特徴とする誘電体磁器組成物。 ▲数式、化学式、表等があります▼[Claims] General formula xBaO-y[(TiO_2)_(_1_-_m_)(
ZrO_2)_m]-z(Re_(_1_-_n_)M
e_n) When expressed as O_3_/_2 (however, x+y+
z=1.00,0.001≦m≦0.200,0.01
≦n≦0.20, Re is one or more rare earth elements selected from La, Pr, Nd, Sm, Me is La, Pr, Nd
, one or more rare earth elements selected from rare earth elements excluding Sm. ), x, y, z are the points a, b, c, d represented below
, e, f consisting of a range of molar ratios
Based on the weight part, tantalum oxide is added as a subcomponent to Ta_2
A dielectric ceramic composition containing 0.1 to 10.0 parts by weight calculated as O_5. ▲Contains mathematical formulas, chemical formulas, tables, etc.▼
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1156500A JP2847765B2 (en) | 1989-06-19 | 1989-06-19 | Multilayer ceramic capacitors |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1156500A JP2847765B2 (en) | 1989-06-19 | 1989-06-19 | Multilayer ceramic capacitors |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0323259A true JPH0323259A (en) | 1991-01-31 |
JP2847765B2 JP2847765B2 (en) | 1999-01-20 |
Family
ID=15629121
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JP1156500A Expired - Fee Related JP2847765B2 (en) | 1989-06-19 | 1989-06-19 | Multilayer ceramic capacitors |
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Country | Link |
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JP (1) | JP2847765B2 (en) |
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1989
- 1989-06-19 JP JP1156500A patent/JP2847765B2/en not_active Expired - Fee Related
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