JPH03230337A - Method for backing stamper - Google Patents
Method for backing stamperInfo
- Publication number
- JPH03230337A JPH03230337A JP2527690A JP2527690A JPH03230337A JP H03230337 A JPH03230337 A JP H03230337A JP 2527690 A JP2527690 A JP 2527690A JP 2527690 A JP2527690 A JP 2527690A JP H03230337 A JPH03230337 A JP H03230337A
- Authority
- JP
- Japan
- Prior art keywords
- stamper
- adhesive
- layer
- film
- matrix surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 30
- 239000000853 adhesive Substances 0.000 claims abstract description 18
- 230000001070 adhesive effect Effects 0.000 claims abstract description 18
- 239000010410 layer Substances 0.000 claims abstract description 16
- 239000011159 matrix material Substances 0.000 claims abstract description 9
- 239000012790 adhesive layer Substances 0.000 claims abstract description 5
- 239000011347 resin Substances 0.000 abstract description 6
- 229920005989 resin Polymers 0.000 abstract description 6
- 239000007788 liquid Substances 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000007605 air drying Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/20—Making multilayered or multicoloured articles
- B29C43/203—Making multilayered articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
- B29C43/361—Moulds for making articles of definite length, i.e. discrete articles with pressing members independently movable of the parts for opening or closing the mould, e.g. movable pistons
- B29C2043/3615—Forming elements, e.g. mandrels or rams or stampers or pistons or plungers or punching devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
- B29C33/3857—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts
- B29C33/3878—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts used as masters for making successive impressions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
- B29C33/68—Release sheets
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、透明平板に情報記録用案内溝を転写するため
の母型となるスタンパの裏打ち方法に関するものである
。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method for lining a stamper that serves as a matrix for transferring information recording guide grooves onto a transparent flat plate.
（従来の技術）
情報記録用の媒体としての光ディスクは重要なメディア
の一つであり、近年、より高密度高容量化が進められて
いる。特に、書き込み・消去が可能な光磁気記録媒体で
は、２００ｎｍ以上の径の大口径ディスク開発も行われ
ている。このような情報記録用光ディスクは情報記録用
案内溝が形成された溝付き基板に記録膜を形成して製造
されるが、ベースとなる溝付き基板の製造方法としては
、２Ｐ法（Ｐｈｏｔｏ−Ｐｏｌｙｍｅｒ法）、射出成形
による方法、ダイレクトカッティング法等が知られてお
り、中でも２Ｐ法は高信鯨性の基板が得られる方法であ
る。(Prior Art) Optical discs are one of the important media for recording information, and in recent years, the optical discs have been made more dense and have higher capacities. In particular, as for writeable/erasable magneto-optical recording media, large-diameter disks with a diameter of 200 nm or more are being developed. Such information recording optical discs are manufactured by forming a recording film on a grooved substrate in which information recording guide grooves are formed, but the 2P method (Photo-Polymer method) is used as a manufacturing method for the base grooved substrate. methods), injection molding methods, direct cutting methods, etc. are known, and among them, the 2P method is a method that allows a substrate with high reliability to be obtained.
２Ｐ法は、第３図に示したように、スタンパ（１）表面
の情報記録用案内溝の母型を、紫外線硬化樹脂（４）を
用いて透明板（３）に転写させる方法である。As shown in FIG. 3, the 2P method is a method in which a matrix of information recording guide grooves on the surface of a stamper (1) is transferred onto a transparent plate (3) using an ultraviolet curing resin (4).
ここで用いられるスタンパ（１）は一般に、ガラス板に
フォトレジストを塗布し、導電膜を成膜しニッケル電鋳
を行い、ガラス板から剥離して得られる厚み０．３ ｔ
ｍ程度の薄いものであり、スタンパ（１）の平坦性を維
持するためにはサポート部材に担持する。その方法とし
ては、１．真空チャフキング法、２、磁石チャ、７キン
グ法、３．接着剤でバッキングプレートに接着裏打ちす
る方法等が知られている。The stamper (1) used here generally has a thickness of 0.3 t obtained by coating a glass plate with photoresist, forming a conductive film, performing nickel electroforming, and peeling it off from the glass plate.
The stamper (1) is as thin as 500 m, and is supported on a support member in order to maintain the flatness of the stamper (1). The method is 1. Vacuum chaffing method, 2. Magnet chafing method, 7-king method, 3. A method of adhesively lining a backing plate with an adhesive is known.
ここで１．２の方法はサポート部材とスタンパが直接接
するので、大口径スタンパの場合は、微小なうねりや平
均二なチャッキング等の原因でスタンパに微小な凹凸が
生ずることがあった。そしてこの状態で２Ｐ法を行い製
造された溝付き基板は、紫外線硬化樹脂層の厚みむらが
生じ、光ディスクの特性である面振れ特性に重大な影響
を及ぼす恐れがあった。又、３番目の方法では、スタン
パの製造段階でガラス板に付いたままの状態で裏打ちを
行えば、平滑性の優れたスタンパを得ることができる。In method 1.2, since the support member and the stamper are in direct contact with each other, in the case of a large-diameter stamper, minute irregularities may occur on the stamper due to minute waviness or uneven chucking. In the grooved substrate manufactured by performing the 2P method in this state, the thickness of the ultraviolet curable resin layer may be uneven, which may seriously affect the surface runout characteristics, which are the characteristics of the optical disk. In the third method, if the backing is performed while the glass plate is still attached to the glass plate during the manufacturing stage of the stamper, a stamper with excellent smoothness can be obtained.
しかし、通常スタンパは剥離した状態で人手されるため
、剥離後に接着剤で貼合せることになり、この方法でも
平滑性を維持させることは困難である。However, since the stamper is usually used in a peeled state by hand, the stamper must be bonded with an adhesive after being peeled off, and even with this method, it is difficult to maintain smoothness.
（発明が解決しようとする課題）
本発明は、薄膜状のスタンパを剛体平板に接着固定し裏
打ちするる方法について鋭意検討して完成させるに至っ
たもので、平滑性よく接着することにより、微小な凹凸
がなく、面振れ特性等の優れた光デイスク用溝付き基板
の製造に適した裏打ちスタンパを得ることを目的とした
ものである。(Problems to be Solved by the Invention) The present invention was completed after intensive study on a method of adhesively fixing a thin film stamper to a rigid flat plate and lining it. The object of the present invention is to obtain a backing stamper suitable for manufacturing a grooved substrate for an optical disk that has no unevenness and excellent surface runout characteristics.
（課題を解決するための手段）
すなわち本発明は、情報記録用案内溝が形成されたスタ
ンパの母型面側に剥離性フィルム層を設け、該スタンパ
を母型面を上にし接着剤を介してサポート部材となる剛
体平板上に載置し、さらに前記フィルム層の上に接着剤
を介して剛体平板を載置し、圧締しつつ接着剤層を硬化
せしめた後、剥離フィルムとスタンパの母型面で剥離す
ることを特徴とするスタンパの裏打ち方法である。(Means for Solving the Problems) That is, the present invention provides a releasable film layer on the mother mold surface side of a stamper in which an information recording guide groove is formed, and attaches the stamper with the mother mold surface facing up through an adhesive. Then, the rigid flat plate is placed on top of the film layer via an adhesive, and the adhesive layer is cured while being pressed, and then the release film and stamper are This is a stamper lining method characterized by peeling off on the matrix surface.
以下、図面を用いて本発明の方法を詳しく説明する。Hereinafter, the method of the present invention will be explained in detail using the drawings.
第１図に示したように、まず（ａｌスタンバ（１）を用
意し、（ｂ）その母型面に剥離性フィルム（９）の層を
形成する。ここで用いられる剥離性フィルム（９）は、
フェス状の樹脂液をデインピング、スプレー、スピンコ
ード等の方法により塗布し、風乾して形成する材料が好
ましい。特にフェスは１μｍ以下のフィルターを通して
精製したものを用いる。As shown in FIG. 1, first, prepare an (al standbar (1)), and (b) form a layer of a releasable film (9) on the mother mold surface.The releasable film (9) used here teeth,
Preferably, the material is formed by applying a face-shaped resin liquid by a method such as deimping, spraying, or spin cording, and then air-drying it. In particular, we use Fes that has been purified through a filter of 1 μm or less.
次に、（Ｃ）スタンパ（１）のサポート部材となるバッ
キングプレート（２）上に接着剤（５）を塗布し、この
上に母型面を上にしたスタンパ（１）を載置する。更に
剥離性フィルム（９）上に接着剤（６）を塗布し、・圧
締板（７）をｉ！２置する。尚、この圧締板（７）を載
置する工程では、第２図のようにスタンパ（１）と圧締
板（７）との間に平板００）を−秋分した構成をとるこ
とも可能であり、このようにギヤングをつければ、後の
工程で剥離する時の手掛となり容易に剥離する事ができ
る。また、ここで用いる接着剤（５）、 （６）は、１
μｍ以下のフィルターで濾過精製したもので、同し材料
であっても構わない、又、異なるものを用いてもよいが
、少なくともスタンパ（１）とパッキングフツート（２
）との接着性に優れた材料を用いる。更に、接着剤（５
）、 （６）は作業性を考慮に入れ、室温硬化でボット
ライフが３０分以上である事が好ましい。Next, (C) an adhesive (5) is applied on the backing plate (2) which serves as a support member for the stamper (1), and the stamper (1) is placed on top of this with the matrix surface facing up. Furthermore, apply the adhesive (6) on the removable film (9), and press the pressure plate (7) with i! Place 2. In addition, in the process of placing this pressing plate (7), it is also possible to adopt a configuration in which a flat plate 00) is placed between the stamper (1) and the pressing plate (7) as shown in Fig. 2. By attaching a guyan in this way, it becomes a clue when peeling in a later process and can be easily peeled off. Moreover, the adhesives (5) and (6) used here are 1
They are purified by filtration using a micrometer or smaller filter, and may be made of the same material or different materials, but at least the stamper (1) and the packing foot (2) may be used.
) Use a material that has excellent adhesion. Furthermore, adhesive (5
) and (6), taking workability into consideration, it is preferable that the bot life is 30 minutes or more when cured at room temperature.
又、接着剤（５）はスタンパを接着しないようにするた
め、剥離性フィルム（９）を溶解するものは好ましくな
い。Further, in order to prevent the adhesive (5) from adhering the stamper, it is not preferable to use an adhesive that dissolves the releasable film (9).
続いて、（ｄ）プレス機を用いて圧締し、接着剤（５）
。Subsequently, (d) the adhesive (5) is pressed using a press machine.
.
（６）を薄くのばし、そのままの状態で硬化させる。Spread (6) thinly and let it harden as it is.
十分硬化した後、（ｅ）接着層（６）と剥離フィルム（
９）層、又は剥離フィルム（９）層とスタンパ（１）の
間で剥離する。前者の場合は、後で剥離フィルム（９）
層を除去する事により、バッキングプレート（２）に裏
打ちされたスタンパが得られる。After sufficiently curing, (e) adhesive layer (6) and release film (
9) layer or between the release film (9) layer and the stamper (1). In the former case, remove the release film (9) afterwards.
By removing the layer, a stamper backed by a backing plate (2) is obtained.
（発明の効果）
本発明に従うと、スタンパにサポート部材となる剛性平
板（バッキングプレート）を接着する際に、スタンパの
母型面側よりスタンパを変形し、又はキズつける事なく
均一に圧締できるため、平滑性よくバッキングプレート
で裏打ちする事ができ、このスタンパを用いて２Ｐ法を
行えば、紫外線硬化樹脂層の厚みが均一で厚みむらのな
い溝付基板を得る事がじき、高品質の溝付基板製造用ス
タンパとして有用である。(Effects of the Invention) According to the present invention, when bonding a rigid flat plate (backing plate) serving as a support member to a stamper, it is possible to uniformly press the stamper from the mother die side of the stamper without deforming or damaging the stamper. Therefore, it can be lined with a backing plate with good smoothness, and if the 2P method is performed using this stamper, it will be possible to obtain a grooved substrate with an even and uniform thickness of the ultraviolet curing resin layer, resulting in high quality. It is useful as a stamper for producing grooved substrates.
第１図は本発明によるスタンパ裏打ち工程の一実施例を
説明するための図で、第２図は第１図（Ｃ）。
（ｄ）工程の他の実施例を示す図である。又、第３図は
２Ｐ法を説明するための図である。FIG. 1 is a diagram for explaining an embodiment of the stamper lining process according to the present invention, and FIG. 2 is FIG. 1(C). (d) It is a figure which shows another Example of a process. Moreover, FIG. 3 is a diagram for explaining the 2P method.
Claims (1)
側に剥離性フィルム層を設け、該スタンパを母型面を上
にし接着剤を介してサポート部材となる剛体平板上に載
置し、さらに前記フィルム層の上に接着剤を介して剛体
平板を載置し、圧締しつつ接着剤層を硬化せしめた後、
剥離フィルムとスタンパの母型面で剥離することを特徴
とするスタンパの裏打ち方法。(1) A releasable film layer is provided on the mother mold surface side of the stamper on which the information recording guide groove is formed, and the stamper is placed on a rigid flat plate serving as a support member with the mother mold surface facing up via adhesive. Then, a rigid flat plate is placed on the film layer via an adhesive, and the adhesive layer is cured while being pressed.
A stamper lining method characterized by peeling the release film and the matrix surface of the stamper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2527690A JPH03230337A (en) | 1990-02-06 | 1990-02-06 | Method for backing stamper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2527690A JPH03230337A (en) | 1990-02-06 | 1990-02-06 | Method for backing stamper |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03230337A true JPH03230337A (en) | 1991-10-14 |
Family
ID=12161499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2527690A Pending JPH03230337A (en) | 1990-02-06 | 1990-02-06 | Method for backing stamper |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03230337A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0689470A (en) * | 1991-11-07 | 1994-03-29 | Nec Corp | Lining method for stamper |
| WO2012022576A1 (en) * | 2010-08-20 | 2012-02-23 | Osram Opto Semiconductors Gmbh | Process for producing a layer composite made of a luminescence conversion layer and a scattering layer |
-
1990
- 1990-02-06 JP JP2527690A patent/JPH03230337A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0689470A (en) * | 1991-11-07 | 1994-03-29 | Nec Corp | Lining method for stamper |
| WO2012022576A1 (en) * | 2010-08-20 | 2012-02-23 | Osram Opto Semiconductors Gmbh | Process for producing a layer composite made of a luminescence conversion layer and a scattering layer |
| US8748201B2 (en) | 2010-08-20 | 2014-06-10 | Osram Opto Semiconductors Gmbh | Process for producing a layer composite consisting of a luminescence conversion layer and a scattering layer |
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