JPH03230336A - Method for backing stamper - Google Patents

Abstract

PURPOSE:To prevent the generation of ruggedness on a stamper by imposing a stamper via a cold curing type adhesive onto a flat and rigid plate with its matrix surface faced upward, laminating a UV curing resin, transparent flat plate, UV curing resin, and glass plate on the stamper, compressing these resins and plates to cure the adhesives, then peeling the stamper from the cured resin. CONSTITUTION:An adhesive 8 of a cold curing type is applied atop a backing plate having about 0.01mum average surface roughness and <=10mum parallelism and the stamper 1 with its matrix surface faced upward is then placed thereon by fitting a center hub 9 for positioning into a central hole. The UV curing resin 4 is applied atop the stamper 1 and a transparent plate 7 made of plastic having a central hole is placed thereon; further, the UV curing resin 4' is applied thereon. The polished glass plate 10 is placed thereon and a load is applied onto this plate to roll the resins 4, 4' and the adhesive 8. The resins 4, 4' are irradiated with UV rays from the glass plate 10 side upon curing of the adhesive 8 and are thereby cured. The stamper 1 is peeled from the resin 4 layer by utilizing the gap by the transparent plate 7. The center hub 9 is removed and the stamper backed with the backing plate 2 is obtd.

Description

Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a method for reinforcing the backing of a stamper, which is a matrix, for transferring information recording guide grooves onto a transparent plate using an ultraviolet curing resin. be.

(Prior Art) In recent years, optical discs have been occupying an important position as media for recording information. In addition, information recording is progressing toward higher capacity and higher density, and disks with larger diameters are being developed. Optical discs are manufactured by forming a recording film on a grooved substrate in which information recording guide grooves are formed, and the method for manufacturing the grooved substrate that is the base is the 2P method (Photo-Pol method).
Ywler method), injection molding method, gyleft canting method, etc. are known, and among them, the 2P method is a method that yields a substrate with high reliability.

The 2P method, as shown in FIG. 2, is a method in which a matrix of information guide grooves on the surface of a stamper (1) is transferred onto a transparent plate (3) using an ultraviolet curing resin (4). The stamper (1) used here is generally a thin one with a thickness of about 0.3 M obtained by coating a glass plate with photoresist, forming a conductive film, then performing nickel electroforming and peeling it off from the glass plate. , supported on a support member to maintain the flatness of the stamper (1). The method of supporting it is 1. Vacuum chucking method 2. Magnet chucking is required. Here, in method 1.2, the support member and stamper are in direct contact, so especially when using φ20
For large-diameter stampers of 0 mm or more, minute undulations,
Minor unevenness may occur on the stamper due to uneven chucking or the like. In the grooved substrate manufactured by the 2P method in this state, the thickness of the ultraviolet curable resin layer may be uneven, which may seriously affect the surface runout characteristics, which are the mechanical characteristics of the optical disk.

In the third method, if the glass plate is lined while it is still attached to the glass plate during the manufacturing stage of the stamper, a lined stamper with excellent smoothness can be obtained.

However, since the stamper is usually obtained in a peeled state, the stamper must be bonded with an adhesive after being peeled off, and even with this method, it is difficult to maintain smoothness.

(Problems to be Solved by the Invention) The present invention relates to an improvement in a method for reinforcing the backing of a stamper, and an object of the present invention is to obtain a backing stamper with excellent smoothness.

(Means for Solving the Problems) That is, the present invention is a method of mounting a stamper, on which a matrix of information recording guide grooves is formed, on a flat rigid plate with the matrix side facing upward, using a room-temperature curing adhesive. Then, on the stamper, place ultraviolet curing resin (1), transparent flat plate, and ultraviolet curing resin (II).
After laminating the glass plates in this order and curing the adhesive by pressing, irradiate ultraviolet rays from the glass plate side to cure the infrared curable resin layer, and peel between the stamper and the ultraviolet curable resin (1) layer. This is a stamper lining method characterized by:

Hereinafter, the lining method of the present invention will be specifically explained based on the drawings.

First, as shown in FIG. 1(a), a backing plate (2) whose upper surface is polished and has excellent parallelism is prepared.

It is preferable that the surface accuracy is within a tolerance of about 0.01 μm in average surface roughness and 10 μm or less in parallelism. This is because it affects the surface smoothness of the stamper when it is lined. Apply adhesive (8) on the top surface of this backing plate (2). The adhesive used in the present invention is preferably of a room temperature curing type and has a pound life of 30 minutes or more, in consideration of workability and prevention of damage to the stamper, glass plate, etc. due to heat treatment.

Next, place the stamper (1) with the mother mold side up, fit the release-treated middle piece (9) for positioning into the center hole, and place it so that it fits into the center hole of the backing plate (2). . Next, apply ultraviolet curable resin I (4) to the top surface (matrix surface) of the stamper (1). (7) is placed and further coated with ultraviolet curing resin 11 (4°). A polished glass plate 00) is placed on top of this, and if necessary, a load is applied to foam the ultraviolet curing resin (4), (4") and adhesive (8). The adhesive (8) is cured. The state shown in Fig. 1 (b) is maintained until the temperature is reached, and then ultraviolet rays are irradiated from the glass temporary O side to cure the ultraviolet curing resin (4) and (4'). , peel off between the stamper (1) and the ultraviolet curable resin [4] using a plastic wrapper, and remove the middle piece (9) to remove the backing plate (2).
The stamper shown in FIG. 1(d) is obtained.

Note that the adhesive (8) may be applied to the back side of the stamper (1). In addition, the ultraviolet curing resins (4) and (4') were also coated with the ultraviolet curing resin I
t(4') and bonded to the transparent plate (7), further coated with ultraviolet curing resin I(4), and placed on the backing plate (2) coated with adhesive (8). You may do so. Further, the middle piece (9) used for positioning can be left in an adhesive state without being removed. In this case, the diameter of the head of the middle piece (9) must be equal to or less than the inner diameter of the center hole of the optical disc. This is because when performing the 2P method later, if a center hole is previously made in the transparent substrate onto which the grooves are to be transferred, the substrate can be positioned. .

(Effects of the Invention) According to the method of the present invention, the stamper can be pressed uniformly, and since the stamper is pressed through liquid resin, the generation of minute irregularities on the stamper can be prevented, and the surface is smooth. A backing substrate with excellent properties can be obtained.

4,

[Brief explanation of drawings]

FIG. 1 is a diagram showing a process according to an embodiment of the present invention, and FIG. 2 is a diagram showing a manufacturing process of a shouldered substrate by the 2P method.

Claims (1)

[Claims] (1) Using room temperature curing adhesive on a flat rigid plate,
A stamper on which a matrix of information recording guide grooves has been formed is placed with the matrix side facing up, and then a UV curing resin (I), a transparent flat plate, an UV curing resin (II), and a glass plate are placed on the stamper. After sequentially laminating and pressing to harden the adhesive,
A stamper lining method characterized by irradiating ultraviolet rays from the glass plate side to harden the ultraviolet curable resin layer and peeling between the stamper and the ultraviolet curable resin (I) layer.