JP2679489B2 - Ni stamper manufacturing method and pattern transfer method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing an optical disk, in particular, a method for obtaining a duplicate disk from a stamper having a fine pattern by using a liquid molding resin which can be cured by ultraviolet irradiation, so-called photopolymer (2P). The method relates to a method for manufacturing a stamper having a fine pattern. Further, the present invention relates to a pattern transfer method for an optical disc manufactured by the sol-gel method using the method.

[0002]

2. Description of the Related Art A conventional Ni stamper manufacturing method for an optical disk will be described with reference to FIG. A glass master having a resist layer having a fine pattern is subjected to Ni sputtering and electroforming. The Ni electroformed film having a certain thickness is generally called a master-Ni stamper 10. The Ni stamper 10 is released from the glass master, and is placed on the fixing base 7 while performing alignment using the centering color 21, as shown in FIG. Next, a fixed amount of the anaerobic curable resin 4 is applied to the middle part of the back surface of the stamper. This is also centered color
The metal reinforcing member 5 is attached while aligning using 21. The surface to which the reinforcing material is attached should be mirror-finished. Let it stand as it is, and cure the resin. In this way, 2P molding was performed using the Ni stamper to which the reinforcing material was attached, to manufacture the optical disk substrate.

Alternatively, the above master Ni stamper is used as a mold and subjected to electroforming again to produce a mother Ni stamper in which the direction of rotation and pattern irregularities of the master Ni stamper are reversed. The mother Ni stamper is attached with a reinforcing material as shown in FIG. 2 and 2P molding is performed. The substrate manufactured by 2P molding is used as a work stamper for sol-gel transfer,
Sol-gel transfer is performed as follows. That is, an alcohol solution (sol solution) containing a metal alcoholate, polyethylene glycol and hydrochloric acid is applied onto a glass substrate by a spin coat method to form a sol-gel layer. The work stamper is pressed against this sol-gel surface to transfer a fine pattern. After performing the primary firing while overlapping, the work
The glass substrate with a fine pattern released from the stamper is secondarily fired. An optical disc has been manufactured through such a process.

[0004]

The above-mentioned Ni stamper (both master Ni stamper and mother-Ni stamper) is thin and difficult to stick with good flatness, and sticks to the reinforcing material in a wrinkled or warped state. I was killed. Therefore, in the substrate which is 2P-molded using this Ni stamper, the film thickness distribution of the 2P layer may be deteriorated, resulting in an optical disc having poor characteristics. Furthermore, since the anaerobic curable resin is used for bonding, the inner and outer peripheral parts contacting with air were not cured. Therefore, it may deteriorate from the inner and outer circumferences after repeated use and may come off. Similarly, in the case where an optical disk substrate manufactured by the sol-gel transfer method using the substrate formed by 2P molding using the above-mentioned mother Ni stamper as a stamper has a poor film thickness distribution of the 2P layer, a transfer pattern cannot be obtained. There was also. Further, particularly in the sol-gel transfer method, as described above, Ni
Since the number of steps of stamper production is large and a fine pattern is repeatedly transferred over a relatively large area, there is a problem in terms of yield and cost. The present invention aims to simplify the manufacturing process and the film thickness distribution of a good UV curable resin.
Method for manufacturing Ni stamper used in manufacturing optical disc using P method or optical disc using sol-gel method, and pattern by sol-gel method using the method
It provides a transfer method.

[0005]

The first aspect of the present invention is to provide a step of forming a fine pattern resist layer on a glass master by a master writing method, a step of forming a Ni layer on the resist layer, and the above glass. A step of adhering the Ni layer and the reinforcing material on the master using an anaerobic curable resin; a step of releasing the resist layer and the Ni layer from each other;
A Ni stamper for an optical disk, comprising: a step of cutting an unnecessary portion of the i layer; and a step of sealing a gap between the reinforcement layer and the Ni layer protruding from the reinforcement material with a resin. It is a manufacturing method. A second aspect of the present invention is a step of forming a resist layer on a glass master that is patterned by a master writing method so that the rotation direction of a fine pattern is counterclockwise, and Ni on the resist layer. A step of forming a layer, a step of adhering a Ni layer on the glass master and a reinforcing material using an anaerobic curing resin, a step of releasing the resist layer from the Ni layer, A step of cutting an unnecessary portion of the layer, a step of manufacturing a Ni stamper by sealing a gap between the Ni layer protruding from the reinforcing material and the reinforcing material with a resin, and a 2P molding method using the Ni stamper To form a work stamper, a step of applying a sol-gel solution on a glass substrate by a spin coat method to form a sol-gel layer, and a flat surface of the work stamper on the opposite surface of the sol-gel layer. The step of pressing the wax stamper against the glass substrate having the sol-gel layer to transfer a fine pattern from the wax stamper to the sol-gel layer, and the step of solidifying the sol-gel layer. It is a pattern transfer method characterized in that

[0006]

According to the present invention, Ni having a thin plate thickness as in the past is used.
A single stamper is not directly backed by a reinforcing material, but is formed directly on a glass master that is hard, thick, and has sufficient flatness.
Line the i stamper. Therefore, the Ni stamper cannot be wrinkled or flattened when the reinforcing material is attached. As a result, in the substrate that is 2P-molded using the Ni stamper to which the reinforcing material is attached, the film thickness distribution of the ultraviolet curable resin layer becomes uniform, and a good disk can be obtained. Similarly, as a work stamper for sol-gel transfer, a 2P molded substrate lined with a Ni stamper directly formed on a glass master is used.
In this case, the master writing process
A glass master disk in which a fine pattern such as a pit or a pit rotates counterclockwise (clockwise in a normal master Ni stamper) is manufactured. The backing material was attached to the Ni stamper with a glass master manufactured in this manner, and the film thickness distribution of the UV curable resin layer of the substrate subjected to 2P molding was uniform, and good pattern transfer was achieved even in the sol-gel transfer process. You can do it. Further, since the master Ni stamper is used instead of the mother Ni stamper as in the conventional case, the number of steps is smaller,
The present invention is more advantageous in terms of cost, yield and the like.

[0007]

Next, an embodiment of the present invention will be described. Example 1 FIG. 1 is a sectional view for explaining a method for manufacturing a Ni stamper of the present invention. Reference numeral 1 is a glass master having a very small surface roughness. 2 is a fine pattern by the master writing method.
Is a resist layer on which the resin is formed. A Ni layer 3 is formed on this by an electroforming method or the like. Ni layer 3 with this glass master
The anaerobic curable resin 4 is dropped by the dispenser method in the middle area of the Ni layer side. Next, a reinforcing material 5 made of a metal plate that has been subjected to mirror polishing is applied to the Ni layer 3 while using a centering jig 6.
And paste. At this time, the centering jig 6 is aligned with the center pin 8 attached to the fixed base 7, and the center pin 8 is aligned with the inner diameter of the glass master. Next, the anaerobic curable resin 4 is cured. Then, the glass master 1 and the resist layer 2 are released from the Ni layer 3. Fine pattern of Ni layer 3 lined with reinforcing material 5
The center of rotation is read from the laser by laser light and the Ni layer 3
Cut off the unnecessary parts of to make the inside and outside diameters as specified. Next, as shown in (b), the back surface of the Ni layer 3 protruding from the reinforcing material 5 is sealed with a two-component epoxy resin. 2P molding was performed using the Ni stamper that had been subjected to this bonding process, and the manufactured optical disk substrate had a uniform thickness of the ultraviolet curable resin layer, and a duplicate substrate having good mechanical properties was obtained. Further, the flatness of the bonded Ni stamper did not deteriorate even after repeated molding.

Example 2 Example 2 shows a pattern transfer method for an optical disk by the sol-gel method of the present invention. A method of manufacturing an optical disc substrate using the sol-gel method will be described with reference to FIG. A sol-gel solution containing tetraethoxysilane, polyethylene glycol and hydrochloric acid was applied on a glass substrate by a spin coat method to form a sol-gel layer of 2000 to 3000 angstrom. Next, the substrate manufactured by the 2P molding method was used as the work stamper 12, and as shown in FIG. 3, the glass substrate 11 with the sol-gel layer was used as a rotary pump (RP) 16 and a diffusion pump (D. P.) 17 to reduce the pressure inside the device, and stack and press under reduced pressure. At this time, in order to improve the flatness of the work stamper, the rubber mat 14 is used and pressed by the hydraulic cylinder 20. In that state, the heater plate 13 is used to perform primary firing at 100 ° C. for 10 minutes. After that, the work stamper 12 was released from the glass substrate 11, and only the glass substrate 11 was subjected to secondary firing at 350 ° C. for 10 minutes to obtain a glass substrate having a desired fine pattern.

The production of the fine pattern by the 2P molding method for producing the work stamper shown above will be described below. The resist layer on the glass master was rotated counterclockwise, which is the reverse of the master Ni stamper, to produce a fine pattern in which the pit irregularities were reversed. That is, in the optical disk substrate manufactured by the sol-gel method, the pattern was manufactured such that the rotation direction of the fine pattern was the counterclockwise direction which is the usual reverse direction and the pits were in a convex state. A reinforcing material is attached to the Ni stamper with the glass master as shown in the first embodiment. 2P molding was performed using a Ni stamper to which this reinforcing material was attached, to produce a work stamper. When sol-gel transfer was performed using this work stamper, a sol-gel layer having a fine pattern could be obtained on the entire surface of the 120φ glass substrate. The C1 error rate of the manufactured optical disk was also low. Further, since it is not necessary to manufacture a mother type stamper as in the conventional case, one process can be shortened.

[0010]

As described above, the N according to the present invention is
As for the manufacturing method of the i stamper, a Ni stamper having good flatness is obtained as compared with the conventional method, and the film thickness distribution of the ultraviolet curable resin layer formed by 2P molding using this is good. According to the pattern transfer method by sol-gel transfer according to the present invention, the flatness is good, and the pattern transfer to the large area sol-gel layer becomes possible. Further, the process is shortened, which is advantageous in terms of yield or cost, and its industrial significance is great.

[Brief description of the drawings]

FIG. 1 is a sectional view illustrating an example of a method for manufacturing a Ni stamper according to the present invention.

FIG. 2 is a cross-sectional view showing a conventional Ni stamper manufacturing method.

FIG. 3 is a configuration diagram illustrating an example of a pattern transfer method according to the present invention.

[Explanation of symbols]

1 Glass Master 2 Resist Layer 3 Ni Layer 4 Anaerobic Curing Resin 5 Reinforcing Material 6 Centering Jig 7 Fixing Stand 8 Center Pin 9 Sealing Agent 10 Ni Stamper 11 Sol-Gel / Glass Substrate 12 Work Stamper 13 Heater Plate -T 14 Rubber mat 15 O-ring 16 R. P. 17 D. P. 18 Heat Insulation Plate (Ceramics) 19 Bellows 20 Hydraulic Cylinder 21 Centering Color

Claims (2)

(57) [Claims] 1. A fine pattern by a master writing method.
Forming a resist layer on the glass master, forming a Ni layer on the resist layer, and bonding the Ni layer and the reinforcing material on the glass master using an anaerobic curable resin, A step of releasing the resist layer and the Ni layer from each other, a step of cutting unnecessary portions of the Ni layer, and a gap between the Ni layer protruding from the reinforcing material and the reinforcing material sealed with resin. A method for manufacturing a Ni stamper for an optical disk, which comprises a step of stopping. 2. A step of forming a resist layer on a glass master disk in which a fine pattern is rotated in a counterclockwise direction by a master writing method and a pattern in which unevenness is reversed is formed, and a step of forming the resist layer on the resist layer. A step of forming a Ni layer on the glass substrate, a step of attaching the Ni layer on the glass master and a reinforcing material using an anaerobic curing resin, the resist layer and the Ni layer.
A Ni stamper is manufactured by releasing the layer from the mold, cutting unnecessary portions of the Ni layer, and sealing a gap between the Ni layer protruding from the reinforcing material and the reinforcing material with a resin. And a step of manufacturing a work stamper by a 2P molding method using the Ni stamper, a step of applying a sol-gel solution on a glass substrate by a spin coat method to form a sol-gel layer, and a step of forming the sol-gel layer. A step of installing the work stamper on a flat surface on the opposite surface; a step of pressing the work stamper against a glass substrate having the sol-gel layer to transfer a fine pattern from the work stamper to the sol-gel layer And a step of solidifying the sol-gel layer, which is a pattern transfer method.