JPH03220910A - Piezoelectric vibrator - Google Patents

Piezoelectric vibrator

Info

Publication number
JPH03220910A
JPH03220910A JP1705790A JP1705790A JPH03220910A JP H03220910 A JPH03220910 A JP H03220910A JP 1705790 A JP1705790 A JP 1705790A JP 1705790 A JP1705790 A JP 1705790A JP H03220910 A JPH03220910 A JP H03220910A
Authority
JP
Japan
Prior art keywords
case
glass
welding
piezoelectric vibrator
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1705790A
Other languages
Japanese (ja)
Inventor
Tatsuo Ikeda
池田 龍夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP1705790A priority Critical patent/JPH03220910A/en
Publication of JPH03220910A publication Critical patent/JPH03220910A/en
Pending legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To obtain a piezoelectric vibrator with less frequency change even after aging for a long period by prolonging part of a metallic ring of a cylindrical or elliptic air-tight terminal in the lengthwise direction and welding the prolonged part with no glass in existence thereat and an opening of a case within the outside of the case. CONSTITUTION:A metallic ring 2 is prolonged to an outer lead 4 for welding at sealing. A case 9 is covered to an air-tight terminal 5 under vacuum or in an inactive gas to be set to a jig, and the prolonged part of the metallic ring 2 in the lengthwise direction with no glass in existence therein and an opening of a cylindrical case 9 without a guard are sealed by means of a laser welding or a parallel seam welding or the like while the case 9 and the air-tight terminal 5 are being turned to keep the air-tightness. The welding is to be implemented at a location as remote as possible from the glass 3 but no excess spacing is required and may be a half the length of the glass 3. Thus, the frequency change is reduced even in aging over a long period.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は圧電振動子に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a piezoelectric vibrator.

〔従来の技術〕[Conventional technology]

従来の圧電振動子の平面図を第7図に示す。 FIG. 7 shows a plan view of a conventional piezoelectric vibrator.

図のように従来の圧電振動子の断面は円筒形をしている
As shown in the figure, the cross section of a conventional piezoelectric vibrator is cylindrical.

第8図は従来の圧電振動子の正面図である。FIG. 8 is a front view of a conventional piezoelectric vibrator.

インナーリード21は外側の金属環22とガラス23に
より絶縁され固定し、気密端子25となっている。
The inner lead 21 is insulated and fixed by an outer metal ring 22 and glass 23, forming an airtight terminal 25.

アウターリード24はそのまま延長しである。The outer lead 24 is just an extension.

矩形状圧電発振片26は蒸着等の手段を用いて電極27
を形成しである。
The rectangular piezoelectric oscillation piece 26 is attached to the electrode 27 using means such as vapor deposition.
It is formed.

この矩形状圧電発振片26とインナーリード21とは半
田28により固定されていた。
This rectangular piezoelectric oscillation piece 26 and the inner lead 21 were fixed with solder 28.

そして、真空中でAg(図示せず)等を電極27上に付
着させて周波数調整をしていた。
Then, the frequency was adjusted by depositing Ag (not shown) or the like on the electrode 27 in a vacuum.

これを真空中又は不活性ガス中でケース2つと気密端子
25をプレスにより圧入し封入していた。
This was sealed by press-fitting the two cases and the airtight terminal 25 in a vacuum or an inert gas.

尚、封入換気密性を保つために金属環22の外周、ケー
ス28に半田30等をあらかしめメツキさせておき、封
入後、気密端子25とケース28のハメアイにより気密
性を保っていた。
Incidentally, in order to maintain the sealing ventilation tightness, the outer periphery of the metal ring 22 and the case 28 were pre-plated with solder 30, etc., and after the sealing, the airtightness was maintained by fitting the airtight terminal 25 and the case 28.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかし、従来の技術では気密性を保つために半田を使用
しているので、長期間放置するエージング特性において
、半田から放出するガスや、封止部の半田のシメシロの
ゆるみにより周波数が徐々に変化するという欠点を有し
ていた。
However, since conventional technology uses solder to maintain airtightness, the frequency gradually changes due to the aging characteristics of leaving it for a long time due to the gas released from the solder and the loosening of the solder at the sealing part. It had the disadvantage of

そこで本発明の目的とするところは長期間のエジングに
おいても周波数変化の少ない圧電振動子を提供するとこ
ろにある。
Therefore, an object of the present invention is to provide a piezoelectric vibrator that exhibits little frequency change even during long-term aging.

〔課題を解決するための手段〕[Means to solve the problem]

断面か円形で外側の金属環とガラスにより絶縁された二
本以上のリードを有する気密端子を用いて、インナーリ
ートが矩形状圧電発振片の同一平面状に二本以上固定さ
れており、この気密端子の金属環の一部を長さ方向に延
長し、ガラスのない部分でツバのない円筒形のケースと
ケース外径内て溶接により封止されていることを特徴と
する。
An inner lead is fixed to the same plane of a rectangular piezoelectric oscillator piece using an airtight terminal having a circular cross section and two or more leads insulated by an outer metal ring and glass. A part of the metal ring of the terminal is extended in the length direction, and the part without glass is sealed with a cylindrical case without a flange by welding inside the outer diameter of the case.

さらに断面を楕円形にしたことを特徴とする。Furthermore, it is characterized by having an oval cross section.

また、矩形状圧電発振片がインナー側のリードに片持て
支持されていることを特徴とする。
Further, the rectangular piezoelectric oscillation piece is supported by a cantilever on the inner lead.

〔実 施 例〕〔Example〕

本発明の実施例を以下により説明する。 Examples of the present invention will be described below.

第1図は本発明の圧電振動子の平面図を示してあり、断
面は円形で直径を3mmにしである。
FIG. 1 shows a plan view of a piezoelectric vibrator of the present invention, which has a circular cross section and a diameter of 3 mm.

第2図は本発明の圧電振動子の正面図を示しである。FIG. 2 shows a front view of the piezoelectric vibrator of the present invention.

リードは矩形状圧電発振片6を固定する側をインナーリ
ード1と呼び、基板等に実装する側をアウターリード4
と呼ぶ。
The side where the rectangular piezoelectric oscillation piece 6 is fixed is called the inner lead 1, and the side where the rectangular piezoelectric oscillation piece 6 is fixed is called the outer lead 4.
It is called.

インナーリード1、アウターリード4は外側の金属環2
とはガラス3により絶縁されて、気密端子5となってい
る。
Inner lead 1 and outer lead 4 are the outer metal ring 2
and is insulated by glass 3, forming an airtight terminal 5.

金属環2は封止時の溶接のためにアウターリード4側に
延長されている。このガラス3のない延長された金属環
の長さはガラス封止部の長さの1/2もあれば良い。あ
まり長くしても圧電振動子としての長さか長くなるたけ
なので必要最小限の寸法にしておけばよい。
The metal ring 2 is extended toward the outer lead 4 for welding during sealing. The length of the extended metal ring without the glass 3 may be 1/2 of the length of the glass sealing portion. If it is made too long, it will only increase the length of the piezoelectric vibrator, so it is best to keep it to the minimum necessary size.

矩形状圧電発振片6は蒸着等の手段を用いてAg等の金
属を3000 A m位両面に電極7として形成してあ
り、先端部にはインナーリード1との導通をとる為のパ
ターン形成をしである。
The rectangular piezoelectric oscillation piece 6 has a metal such as Ag formed as an electrode 7 on both sides at a thickness of about 3000 Amps using means such as vapor deposition, and a pattern is formed on the tip to establish electrical conduction with the inner lead 1. It is.

そして、矩形状圧電発振片6とインナーリード1とは導
電性接着剤8等により同一平面状に片持て固定されてい
る。
The rectangular piezoelectric oscillation piece 6 and the inner lead 1 are fixed in a cantilevered manner on the same plane using a conductive adhesive 8 or the like.

導電性接着剤8はAgペースト等を用いればよい。As the conductive adhesive 8, Ag paste or the like may be used.

又、導電性接着剤8のかわりにインナーリート1に半田
等をつけて、矩形状圧電発振片6を固定しても半田量が
少ないので特性等への影響は小さい。
Further, even if the rectangular piezoelectric oscillation piece 6 is fixed by applying solder or the like to the inner REIT 1 instead of the conductive adhesive 8, the effect on the characteristics etc. is small because the amount of solder is small.

そして、真空中でAg等を電極7上に付着させて、周波
数調整をする。
Then, Ag or the like is deposited on the electrode 7 in vacuum to adjust the frequency.

この周波数調整量は少ないほど加工時間も少なく、特性
も安定するので6000PPM以下が望ましい。
This frequency adjustment amount is desirably 6000 PPM or less because the smaller the processing time, the more stable the characteristics.

次に封止を行なうわけて、真空中又は不活性ガス中でケ
ース9を気密端子5にかふせ、治具にセットし、金属環
2の長さ方向に延長させたガラス3のない部分とツバの
ない円筒形のケース9との目端をレーザー溶接やパラレ
ルシーム溶接等の手段を用いて、ケース9と気密端子5
を回転させなから封止をし、気密性を保っている。
Next, sealing is performed by covering the airtight terminal 5 with the case 9 in a vacuum or inert gas, setting it on a jig, and attaching the part without the glass 3 extending in the length direction of the metal ring 2. The case 9 and the airtight terminal 5 are connected by laser welding, parallel seam welding, etc. at the edge of the cylindrical case 9 without a brim.
It is sealed to prevent rotation and maintain airtightness.

ケース9の材料は洋白等を用い、Niメツキ等をほどこ
しである。金属環2の材料はコバール等を用い、同様に
Niメツキ等をはとこしである。
The case 9 is made of nickel silver or the like, and is coated with Ni plating or the like. The material of the metal ring 2 is Kovar or the like, and similarly Ni plating or the like is used.

ガラス3のある所て溶接を行なわない理由は溶接時の急
熱、急冷により、金属環2とガラス3の間に微小クラッ
クか入りやすく、リークの原因となり、気密性がそこな
われる為である。
The reason why welding is not performed in the area where the glass 3 is located is that due to the rapid heating and cooling during welding, minute cracks are likely to form between the metal ring 2 and the glass 3, causing leaks and damaging the airtightness. .

溶接はできるたけガラス3より離れた所で行なう方がよ
いが余分に長くする必要はなく、ガラス3の長さの1/
2もあれば良い。
It is better to weld as far away from the glass 3 as possible, but there is no need to make it extra long;
2 would be good too.

本発明の他の実施例を第3図に示す。Another embodiment of the invention is shown in FIG.

これは金属環11をインナーリード1側に延長し、ケー
ス10を短かくして、溶接を行なえば第2図の方法に比
べ全体の圧電振動子としての長さを短かくすることがで
きる。
In this case, by extending the metal ring 11 toward the inner lead 1 side, shortening the case 10, and performing welding, the length of the entire piezoelectric vibrator can be shortened compared to the method shown in FIG. 2.

第4図も本発明の他の実施例で金属環13をアウターリ
ード4側に延長し、ケース12を受けるためのツバ14
を設けてケース12と溶接を行なう方r去である。
FIG. 4 also shows another embodiment of the present invention, in which the metal ring 13 is extended toward the outer lead 4 side, and a collar 14 for receiving the case 12 is shown.
It is preferable to provide a holder and weld it to the case 12.

ツバ14をつけることにより、ケース12をかぶせた時
の長さ方向の位置決めになり、圧電振動子とした時の長
さの管理がやりやすくなる。
By attaching the collar 14, the positioning in the length direction when the case 12 is covered becomes possible, making it easier to manage the length when used as a piezoelectric vibrator.

ツバ]4の外径寸法はケース12の外径寸法よりも小さ
い方が圧電振動子として小型になってよい。すなわち、
ケース12か直径3mmならばツバ14の外径は直径3
mm以下とする。
If the outer diameter of the collar 4 is smaller than the outer diameter of the case 12, the piezoelectric vibrator can be made smaller. That is,
If the case 12 is 3 mm in diameter, the outer diameter of the collar 14 is 3 mm in diameter.
It shall be less than mm.

第5図も他の実施例を示す図で溶接をしやすくした方法
である。
FIG. 5 is also a diagram showing another embodiment, which is a method for making welding easier.

ケース15の先端の切口を図のように内側を長くなるよ
うに加工し、ツバ14にかぶせた時にケス15の内側の
みが当たり、長さ方向の位置決めを行なう。
The cut at the tip of the case 15 is processed so that the inside becomes longer as shown in the figure, and when the case 15 is put over the collar 14, only the inside of the case 15 comes into contact, and positioning in the length direction is performed.

そして、外周のスキマの部分をレーサー溶接することに
より、ケース15とツバ14の材料が同時に溶けて溶接
がしやすくなる。
By racer welding the gap on the outer periphery, the materials of the case 15 and the collar 14 are melted at the same time, making welding easier.

更に、ケース15の内周はツバ14と接しているため、
溶接時のガスやチリがケース15内に入るのを防止する
ことができ、封止後の圧電振動子としての特性は向上す
る。
Furthermore, since the inner circumference of the case 15 is in contact with the collar 14,
Gas and dust during welding can be prevented from entering the case 15, and the properties of the piezoelectric vibrator after sealing are improved.

ケース15の切口は余り鋭角にしてツバ14との間隙を
あけてもいけないので溶接時に両者の材料がとけやすい
ように1mm以下にしておく方が望ましい。
The cut of the case 15 should not be too acute to leave a gap with the collar 14, so it is preferable to make the cut of the case 15 less than 1 mm so that the two materials can easily melt during welding.

第6図は本発明の実施例の断面を楕円形にした図である
FIG. 6 is an elliptical cross-sectional view of an embodiment of the present invention.

第1図のようにケースつと気密端子5を円形から楕円形
のケース15と気密端子16にする事により、厚みを薄
くすることができ、小型化がはかれる。
By changing the case 15 and airtight terminal 5 from circular to oval as shown in FIG. 1, the thickness can be reduced and the device can be made smaller.

第1図か直径3mmに対し、楕円にすることにより、巾
3mm、厚みを2mmにすることかできる。
In Fig. 1, the diameter is 3 mm, but by making it elliptical, the width can be made 3 mm and the thickness 2 mm.

携帯機器等の厚みか制限される部品としてはよリベター
な形状となる。
The shape is more flexible for parts such as mobile devices where thickness is limited.

〔発明の効果〕〔Effect of the invention〕

本発明の圧電振動子は円筒又は楕円形の気密端子の金属
環の一部を長さ方向に延長し、ガラスのない部分てケー
スの外形内で溶接することにより、半田を使わないケー
スやプラグを用いるため半田からのガスの放出もなく、
半田圧入によるシメシロのゆるみもなく、片持の為、温
度による圧電発振片の延びは影響l−ない、エージング
特性に優れ、かつ、楕円形の為、小型化できる圧電振動
子を提C共することができる。
The piezoelectric vibrator of the present invention can be manufactured by extending a part of the metal ring of a cylindrical or oval airtight terminal in the length direction and welding the part without glass within the outer shape of the case. Because it uses solder, there is no gas release from the solder.
We offer a piezoelectric vibrator that does not loosen due to solder press-fitting, has a cantilever structure, has no effect on the elongation of the piezoelectric oscillator piece due to temperature, has excellent aging characteristics, and can be made smaller due to its elliptical shape. be able to.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の実施例の平面図。 第2図は本発明の実施例の正面図。 第3図は本発明の他の実施例を示す正面図。 第4図は本発明の他の実施例を示す正面図。 第5図は本発明の他の実施例を示す正面図。 第6図よ本発明の他の実施例を示す平面図。 第7図よ従来の圧電振動子の平面図。 第8図は従来の圧電振動子の正面図。 1・・・インナーリード 2・・・金属環 3・・・ガラス 4・・・アウターリード 5・・・気密端子 6・・・矩形状圧電発振片 7・・・電極 8・・・導電性接着剤 9・・・ケース 10・・・ケース 11・・・金属環 12・・・ケース 13・・・金属環 14◆・・ツバ 15・◆・ケース 16・・・気密端子 21・・・インナーリード 22・・・金属環 23 ・ 24 ・ 25 ・ 26 ・ 27 ・ 28 ・ 29 ・ 30 ・ ・ガラス ・アウターリード ・気密端子 ・矩形状圧電発振片 ・電極 ・ハンダ ・ケース ・半田 FIG. 1 is a plan view of an embodiment of the present invention. FIG. 2 is a front view of an embodiment of the present invention. FIG. 3 is a front view showing another embodiment of the present invention. FIG. 4 is a front view showing another embodiment of the present invention. FIG. 5 is a front view showing another embodiment of the present invention. FIG. 6 is a plan view showing another embodiment of the present invention. FIG. 7 is a plan view of a conventional piezoelectric vibrator. FIG. 8 is a front view of a conventional piezoelectric vibrator. 1...Inner lead 2...metal ring 3...Glass 4...Outer lead 5...Airtight terminal 6... Rectangular piezoelectric oscillation piece 7... Electrode 8... Conductive adhesive 9...Case 10...case 11...metal ring 12...Case 13...metal ring 14◆・・・Brim 15・◆・Case 16...Airtight terminal 21...Inner lead 22...metal ring 23・ 24・ 25・ 26・ 27・ 28・ 29・ 30・ ・Glass ・Outer lead ・Airtight terminal ・Rectangular piezoelectric oscillation piece ·electrode ・Solder ·Case ·solder

Claims (1)

【特許請求の範囲】 1) 断面が円形で外側の金属環とガラスにより絶縁さ
れた二本以上のリードを有する気密端子を用いて、イン
ナーリードが矩形状圧電発振片の同一平面状に二本以上
固定されており、この気密端子の金属環の一部を長さ方
向に延長し、ガラスのない部分でツバのない円筒形のケ
ースとケース外径内で溶接により封止されていることを
特徴とする圧電振動子。 2) 断面が楕円形であることを特徴とする請求項1)
記載の圧電振動子。 3) 矩形状圧電発振片がインナー側のリードの片持で
支持されていることを特徴とする請求項1)記載の圧電
振動子。
[Scope of Claims] 1) Using an airtight terminal having a circular cross section and two or more leads insulated by an outer metal ring and glass, the inner leads are two on the same plane of a rectangular piezoelectric oscillation piece. A part of the metal ring of this airtight terminal is extended in the length direction, and the part without glass is sealed by welding to the cylindrical case without a flange and the outside diameter of the case. Features a piezoelectric vibrator. 2) Claim 1) characterized in that the cross section is elliptical.
The piezoelectric vibrator described. 3) The piezoelectric vibrator according to claim 1, wherein the rectangular piezoelectric oscillating piece is supported by a cantilever of the inner lead.
JP1705790A 1990-01-26 1990-01-26 Piezoelectric vibrator Pending JPH03220910A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1705790A JPH03220910A (en) 1990-01-26 1990-01-26 Piezoelectric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1705790A JPH03220910A (en) 1990-01-26 1990-01-26 Piezoelectric vibrator

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP1290597A Division JPH09186541A (en) 1997-01-27 1997-01-27 Manufacture of piezoelectric vibrator

Publications (1)

Publication Number Publication Date
JPH03220910A true JPH03220910A (en) 1991-09-30

Family

ID=11933359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1705790A Pending JPH03220910A (en) 1990-01-26 1990-01-26 Piezoelectric vibrator

Country Status (1)

Country Link
JP (1) JPH03220910A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997008826A1 (en) * 1995-08-30 1997-03-06 Miyota Co., Ltd Sealing container for piezoelectric vibrator
US5736710A (en) * 1994-07-25 1998-04-07 Seiko Epson Corporation Method and apparatus for sealing piezoelectric resonator via laser welding
US6005329A (en) * 1995-05-11 1999-12-21 Seiko Epson Corporation Method and apparatus for sealing piezoelectric resonator via laser welding
WO2000008755A1 (en) * 1998-08-07 2000-02-17 Seiko Epson Corporation Piezoelectric vibrator container, piezoelectric vibrator using it and circuit board mounting piezoelectric vibrator thereon and production method for piezoelectric vibrator
JP2003500840A (en) * 1999-05-12 2003-01-07 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング Electrical equipment

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5736710A (en) * 1994-07-25 1998-04-07 Seiko Epson Corporation Method and apparatus for sealing piezoelectric resonator via laser welding
US6005329A (en) * 1995-05-11 1999-12-21 Seiko Epson Corporation Method and apparatus for sealing piezoelectric resonator via laser welding
WO1997008826A1 (en) * 1995-08-30 1997-03-06 Miyota Co., Ltd Sealing container for piezoelectric vibrator
US5898256A (en) * 1995-08-30 1999-04-27 Miyota Co., Ltd. Container for enclosing a piezo-electric transducer
WO2000008755A1 (en) * 1998-08-07 2000-02-17 Seiko Epson Corporation Piezoelectric vibrator container, piezoelectric vibrator using it and circuit board mounting piezoelectric vibrator thereon and production method for piezoelectric vibrator
US6590314B1 (en) 1998-08-07 2003-07-08 Seiko Epson Corporation Piezoelectric resonator container, piezoelectric resonator using the same, circuit board mounting piezoelectric resonator thereon, and method for manufacturing piezoelectric resonator
JP2003500840A (en) * 1999-05-12 2003-01-07 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング Electrical equipment

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