JPH0321846U - - Google Patents
Info
- Publication number
- JPH0321846U JPH0321846U JP8244489U JP8244489U JPH0321846U JP H0321846 U JPH0321846 U JP H0321846U JP 8244489 U JP8244489 U JP 8244489U JP 8244489 U JP8244489 U JP 8244489U JP H0321846 U JPH0321846 U JP H0321846U
- Authority
- JP
- Japan
- Prior art keywords
- washing tank
- water
- carrier
- washing
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005406 washing Methods 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8244489U JPH0321846U (es) | 1989-07-13 | 1989-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8244489U JPH0321846U (es) | 1989-07-13 | 1989-07-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0321846U true JPH0321846U (es) | 1991-03-05 |
Family
ID=31629263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8244489U Pending JPH0321846U (es) | 1989-07-13 | 1989-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0321846U (es) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0531809U (ja) * | 1991-10-14 | 1993-04-27 | 大昭和精機株式会社 | 工具ホルダー |
| JP2014017369A (ja) * | 2012-07-09 | 2014-01-30 | Sharp Corp | 洗浄装置および洗浄方法 |
-
1989
- 1989-07-13 JP JP8244489U patent/JPH0321846U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0531809U (ja) * | 1991-10-14 | 1993-04-27 | 大昭和精機株式会社 | 工具ホルダー |
| JP2014017369A (ja) * | 2012-07-09 | 2014-01-30 | Sharp Corp | 洗浄装置および洗浄方法 |