JPH0321845U - - Google Patents
Info
- Publication number
- JPH0321845U JPH0321845U JP8332989U JP8332989U JPH0321845U JP H0321845 U JPH0321845 U JP H0321845U JP 8332989 U JP8332989 U JP 8332989U JP 8332989 U JP8332989 U JP 8332989U JP H0321845 U JPH0321845 U JP H0321845U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- susceptor
- substrate
- heating
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 150000001495 arsenic compounds Chemical class 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8332989U JPH0321845U (de) | 1989-07-14 | 1989-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8332989U JPH0321845U (de) | 1989-07-14 | 1989-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0321845U true JPH0321845U (de) | 1991-03-05 |
Family
ID=31630906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8332989U Pending JPH0321845U (de) | 1989-07-14 | 1989-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0321845U (de) |
-
1989
- 1989-07-14 JP JP8332989U patent/JPH0321845U/ja active Pending
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