JPH0321844U - - Google Patents

Info

Publication number
JPH0321844U
JPH0321844U JP8284289U JP8284289U JPH0321844U JP H0321844 U JPH0321844 U JP H0321844U JP 8284289 U JP8284289 U JP 8284289U JP 8284289 U JP8284289 U JP 8284289U JP H0321844 U JPH0321844 U JP H0321844U
Authority
JP
Japan
Prior art keywords
wafer
susceptor
heater cover
heater
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8284289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8284289U priority Critical patent/JPH0321844U/ja
Publication of JPH0321844U publication Critical patent/JPH0321844U/ja
Pending legal-status Critical Current

Links

JP8284289U 1989-07-14 1989-07-14 Pending JPH0321844U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8284289U JPH0321844U (US20020051482A1-20020502-M00012.png) 1989-07-14 1989-07-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8284289U JPH0321844U (US20020051482A1-20020502-M00012.png) 1989-07-14 1989-07-14

Publications (1)

Publication Number Publication Date
JPH0321844U true JPH0321844U (US20020051482A1-20020502-M00012.png) 1991-03-05

Family

ID=31630008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8284289U Pending JPH0321844U (US20020051482A1-20020502-M00012.png) 1989-07-14 1989-07-14

Country Status (1)

Country Link
JP (1) JPH0321844U (US20020051482A1-20020502-M00012.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006222372A (ja) * 2005-02-14 2006-08-24 Nippon Telegr & Teleph Corp <Ntt> 酸化炉装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006222372A (ja) * 2005-02-14 2006-08-24 Nippon Telegr & Teleph Corp <Ntt> 酸化炉装置
JP4510661B2 (ja) * 2005-02-14 2010-07-28 日本電信電話株式会社 酸化炉装置

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