JPH03209612A - Thin-film magnetic head - Google Patents
Thin-film magnetic headInfo
- Publication number
- JPH03209612A JPH03209612A JP417590A JP417590A JPH03209612A JP H03209612 A JPH03209612 A JP H03209612A JP 417590 A JP417590 A JP 417590A JP 417590 A JP417590 A JP 417590A JP H03209612 A JPH03209612 A JP H03209612A
- Authority
- JP
- Japan
- Prior art keywords
- thin
- magnetic
- thin film
- substrate
- lead
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 239000000853 adhesive Substances 0.000 abstract description 4
- 239000004020 conductor Substances 0.000 abstract description 3
- 239000012212 insulator Substances 0.000 abstract description 3
- 238000007740 vapor deposition Methods 0.000 abstract description 3
- 229910018605 Ni—Zn Inorganic materials 0.000 abstract description 2
- 229910000859 α-Fe Inorganic materials 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052593 corundum Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 2
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000003486 chemical etching Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000992 sputter etching Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、多数チャンネルを同時に記録・再生する薄膜
磁気ヘッドに関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a thin film magnetic head for simultaneously recording and reproducing multiple channels.
従来の技術
近年、記録容量の増大に伴ない、データを貯蔵する磁気
記録装置も高容量、高密度化が進行している。磁気テー
プ装置においては、記憶容量の増加に比例してアクセス
タイムが遅くなるという欠点がある。これを抑えるため
には、テープスピードの高速化および多数チャンネルを
同時に記録・再生することが必要となってくる。2. Description of the Related Art In recent years, as recording capacity has increased, magnetic recording devices for storing data have also become higher in capacity and density. Magnetic tape devices have the disadvantage that access time slows down in proportion to the increase in storage capacity. In order to suppress this, it is necessary to increase the tape speed and simultaneously record and reproduce multiple channels.
多数チャンネルを同時に記録・再生できる装置として、
現在実用化されている装置は、18M社で開発された#
3480磁気テープ装置である。As a device that can record and play multiple channels simultaneously,
The device currently in practical use was developed by 18M Company #
3480 magnetic tape device.
これは18チヤンネルを有する薄膜磁気ヘッドにより、
2 m / s e cのスピードで記録・再生できる
ものである。This uses a thin film magnetic head with 18 channels.
It is capable of recording and reproducing at a speed of 2 m/sec.
現在、さらに高容量化を目指して1/2〃幅に36チヤ
ンネルを有する薄膜磁気ヘッドが研究。Currently, a thin film magnetic head with 36 channels in 1/2 width is being researched with the aim of increasing capacity.
ヘッドにおいて、最も大きい課題は、薄膜形成プロセス
において、1/2=幅に36チヤンネル形成することで
はなく、薄膜素子と接続するケーブルをいかに作成する
かということである。第4図は従来の単一の磁性基板1
1にMR素子(磁気抵抗効果素子)12が形成され、チ
ャンネル1 (CHI)から順番に列んでいる様子を示
し、例えば第5図に示すように、磁性基板11とフエラ
イト力バー13に対して、FPC(フレキシブルプリン
ト基板)14を用い、FPCのリードの一部をそのリー
ドを被覆したポリイミドより露出させ、薄膜素子と直接
、金−全圧接接合、金−錫結合、半田による接合等の手
段により接続することが従来より行われてきた。従来の
18チヤンネルの磁気ヘッドにおいては、リード線ピッ
チがおよそ315μm、リード線幅が100μmであっ
た。この比率を36チヤンネルの磁気ヘッドに適用する
と、リード線ピッチを158μm、リード線幅を50μ
mとしなければならず、FPC作成の限界にあり、コス
トも非常に高くなるという欠点があった。The biggest issue in the head is not how to form 36 channels with a width of 1/2 in the thin film forming process, but how to create a cable that connects to the thin film element. Figure 4 shows a conventional single magnetic substrate 1
1, MR elements (magnetoresistive elements) 12 are formed and are arranged in order from channel 1 (CHI). For example, as shown in FIG. Using an FPC (flexible printed circuit board) 14, a part of the lead of the FPC is exposed from the polyimide covering the lead, and directly connected to the thin film element by means such as gold-full pressure bonding, gold-tin bonding, solder bonding, etc. Conventionally, connection has been made by In a conventional 18-channel magnetic head, the lead line pitch was approximately 315 μm and the lead line width was 100 μm. When this ratio is applied to a 36-channel magnetic head, the lead line pitch is 158 μm and the lead line width is 50 μm.
m, which is at the limit of FPC production and has the disadvantage that the cost is also very high.
本発明はこのような課題を解決し、安価で、高密度のチ
ャンネル数を持つ磁気ヘッドを提供することを目的とす
る。SUMMARY OF THE INVENTION An object of the present invention is to solve these problems and provide a magnetic head that is inexpensive and has a high density of channels.
課題を解決するための手段
本発明は、上記課題を解決するために、全チャンネルを
単一の磁性基板上に形成しないで、チャンネルを奇数チ
ャンネルと偶数チャンネルに分割し、それぞれ異なる磁
性基板上に全チャンネルの半数ずつを形成し、FPCを
接続した後、接着剤等で貼り合わせて多数チャンネルを
持つ薄膜磁気ヘッドを構成するものである。Means for Solving the Problems In order to solve the above problems, the present invention does not form all channels on a single magnetic substrate, but divides the channels into odd-numbered channels and even-numbered channels, and forms them on different magnetic substrates. After forming half of all the channels and connecting them with an FPC, they are bonded together with an adhesive or the like to form a thin film magnetic head having a large number of channels.
作用
本発明は、上記した構成により所望するチャンネル数の
半数を1個の磁性基板上に形成することにより、薄膜素
子とFPCのリード線の接合において、リード線のピッ
チが必要とするピッチの半分で良く、容易にFPCが作
成され、接合も容易であり、かつ高密度のチャンネル数
を持つ磁気ヘッドの製造が可能となる。Effect of the present invention By forming half of the desired number of channels on one magnetic substrate with the above-described configuration, the pitch of the lead wires can be reduced to half the required pitch when joining the lead wires of a thin film element and an FPC. This makes it possible to easily create an FPC, facilitate bonding, and manufacture a magnetic head having a high density of channels.
実施例
以下本発明を、図面の実施例を参照して詳細に説明する
。EXAMPLES The present invention will be explained in detail below with reference to examples shown in the drawings.
第1図に、本発明に係わる薄膜磁気ヘッドの再生側ヘッ
ドの実施例を示す。Ni−Znフェライトのような高い
比抵抗を持つ第1の磁性基板1の薄膜を形成する面のM
R素子形成部とリード接続部が150°〜170”の角
度θになるように研削、ラップ加工する。つぎに第2図
の下半分に示すようにこの第1の磁性基板1上に、第1
ギャップ層(2−a)として、At! 203または5
i02等の絶縁物をスパッタリング等で1000〜20
00A厚に形成し、バイアス用導体3として、Tiを真
空蒸着法等で1500A程度形成する。さらにMR素子
4を500A程度形成し、所定のパターンになるように
ケミカルエツチングまたはイオンエツチング等によりエ
ツチングを行う。つぎに第1図に示すようなリード部5
に金を蒸着等により形成し、パターンを出した後、MR
素子4上に、第2のギャップ(2−b)として、A[2
03または5i02をスパッタリング等で5000〜8
000A厚に形成する。この時、形成されるMR素子4
のパターンは、所定のパターン数の半数とし、1チヤン
ネルおきに配置する。素子のない部分は、ケミカルエツ
チングまたはイオンエツチングにより、Ae203また
は5i02等の絶縁層を除去する。FIG. 1 shows an embodiment of a reproducing head of a thin film magnetic head according to the present invention. M of the surface on which the thin film is formed of the first magnetic substrate 1 having a high resistivity such as Ni-Zn ferrite
Grinding and lapping are performed so that the R element forming part and the lead connecting part form an angle θ of 150° to 170". Next, as shown in the lower half of FIG. 1
As the gap layer (2-a), At! 203 or 5
1000~20 by sputtering an insulator such as i02
The bias conductor 3 is formed to have a thickness of about 1,500 A using a vacuum evaporation method or the like. Furthermore, an MR element 4 of about 500 A is formed and etched by chemical etching, ion etching, etc. so as to form a predetermined pattern. Next, the lead part 5 as shown in FIG.
After forming gold by vapor deposition etc. and forming a pattern, MR
On the element 4, as the second gap (2-b), A[2
03 or 5i02 by sputtering etc. 5000~8
Formed to a thickness of 000A. At this time, the MR element 4 formed
The number of patterns is half of the predetermined number of patterns, and they are arranged every other channel. The insulating layer, such as Ae203 or 5i02, is removed from the part where no element is present by chemical etching or ion etching.
一方、第1の磁性基板lと同様にMR素子4形成部とリ
ード5形成部の面が150°〜170゜の角度θになる
ように研磨された第2の磁性基板6上に第2図の上半分
に示すように第2ギャップ層(ib)として、At!
203または5i02等の絶縁物をスパッタリング等に
より5000〜8000Aの厚さに形成する。次にMR
素子4を500A程度の厚さに形成した後、バイアス用
導体3として、Tiを真空蒸着法等により1000〜2
000Aの厚さに形成し、所定のパターンとなるように
ケミカルエツチングまたはイオンエツチング等によりエ
ツチングを行う。さらにリード5部に金を蒸着等により
形成し、Ti上に第1のギャップ(2−a)として、A
i!203または5i02をスパッタリング等で100
0〜2000A厚に形成する。この時、形成されるMR
素子4のパターンは、第1の磁性基板1と同じく所定の
パターン数の半数ではあるが、チャンネルが異なるよう
に配置する。すなわち第1の磁性基板1が1.3,5.
7等と奇数チャンネル(CH)に形成されておれば、第
2の磁性基板6は2゜4.6等と偶数チャンネル(CH
)として形成する。On the other hand, as shown in FIG. As the second gap layer (ib) as shown in the upper half of At!
An insulator such as 203 or 5i02 is formed to a thickness of 5000 to 8000 Å by sputtering or the like. Next, M.R.
After forming the element 4 to a thickness of about 500A, as the bias conductor 3, Ti is deposited with a thickness of 1000 to 2
The film is formed to a thickness of 0.000A, and etched by chemical etching, ion etching, etc. to form a predetermined pattern. Further, gold is formed on the lead 5 portion by vapor deposition, etc., and a first gap (2-a) is formed on the Ti.
i! 203 or 5i02 by sputtering etc.
Form to a thickness of 0 to 2000A. At this time, MR formed
Like the first magnetic substrate 1, the patterns of the element 4 are half of the predetermined number of patterns, but are arranged so that the channels are different. That is, the first magnetic substrate 1 is 1.3, 5.
7 etc., the second magnetic substrate 6 is formed in 2°4.6 etc. and an even channel (CH).
).
このようにして作られた2個の磁性基板1,6は、第2
図に示すように第1の磁性基板1上の薄膜素子と第2の
磁性基板6上の薄膜素子が薄膜素子側を向かい合せて貼
り合せた時に交互に配置されるようにすなわち重ならな
いように接着剤7で接着し、磁気テープ走行面の円筒加
工を行った後、テープ走行面端部逃げ溝加工やテープ浮
上制御用の溝を入れた後、第3図のようにFPC8とリ
ード部を金−全結合や半田付等により接合し、再生用ヘ
ッドとして記録ヘッドと組み合せる。The two magnetic substrates 1 and 6 made in this way are
As shown in the figure, the thin film elements on the first magnetic substrate 1 and the thin film elements on the second magnetic substrate 6 are arranged alternately, that is, so that they do not overlap when they are bonded with their thin film element sides facing each other. After bonding with adhesive 7 and processing the magnetic tape running surface into a cylinder, cutting grooves at the end of the tape running surface and grooves for tape floating control, connect the FPC 8 and the lead part as shown in Figure 3. It is joined by gold-full bonding, soldering, etc., and combined with a recording head as a reproducing head.
一方、記録ヘッドも前述の再生ヘッドと同様、2個の磁
性基板上に分割して薄膜素子を形成する。On the other hand, like the above-described reproducing head, the recording head is also divided into two magnetic substrates to form thin film elements.
発明の効果
本発明は、薄膜素子を最終的に得られるピッチの2倍の
距離をおいて半数だけ1個の磁性基板上に形成し、この
磁性基板2個を貼り合せることによりFPCと接続する
端子のピッチ間隔を2倍にでき、高密度化対応が容易と
なり、さらに薄膜素子から引き出すリード線幅を広くで
きるため、発熱を抑えるという効果を得ることができる
優れた薄膜磁気ヘッドを実現できるものである。Effects of the Invention In the present invention, half of the thin film elements are formed on one magnetic substrate at a distance twice the pitch that will be finally obtained, and the two magnetic substrates are bonded together to connect to the FPC. The terminal pitch interval can be doubled, making it easier to support higher density, and the width of the lead wire drawn out from the thin film element can be widened, making it possible to create an excellent thin film magnetic head that has the effect of suppressing heat generation. It is.
第1図は本発明の実施例における薄膜素子を配置した一
方の磁性基板の斜視図、第2図はテープ走行面より見た
2個の磁性基板の貼り合せ面の断面図、第3図は2個の
磁性基板の貼り合せ後の薄膜磁気ヘッド完成品の要部斜
視図、第4図は薄膜素子を配置した従来の磁性基板の斜
視図、第5図は従来の薄膜磁気ヘッドの要部斜視図であ
る。
1.6・・・・・・磁性基板、4・・・・・・磁気抵抗
効果素子(薄膜素子)、7・・・・・・接着剤。FIG. 1 is a perspective view of one of the magnetic substrates on which a thin film element is arranged according to an embodiment of the present invention, FIG. 2 is a sectional view of the bonded surface of two magnetic substrates viewed from the tape running surface, and FIG. A perspective view of the main parts of a completed product of a thin film magnetic head after two magnetic substrates are bonded together, FIG. 4 is a perspective view of a conventional magnetic substrate on which thin film elements are arranged, and FIG. 5 is a main part of a conventional thin film magnetic head. FIG. 1.6... Magnetic substrate, 4... Magnetoresistive element (thin film element), 7... Adhesive.
Claims (1)
記薄膜素子の半数個を最終的に得られるピッチの2倍の
距離をおいて1個の磁性基板上に形成し、この磁性基板
2個を薄膜素子側が向かい合いかつ向かい合う薄膜素子
が重ならないように貼り合せた薄膜磁気ヘッド。In a thin film magnetic head having a large number of thin film elements, half of the thin film elements are formed on one magnetic substrate at a distance twice the final pitch, and two of these magnetic substrates are A thin-film magnetic head in which the element sides face each other and the opposing thin-film elements are bonded together so that they do not overlap.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004175A JP2808774B2 (en) | 1990-01-11 | 1990-01-11 | Thin film magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004175A JP2808774B2 (en) | 1990-01-11 | 1990-01-11 | Thin film magnetic head |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03209612A true JPH03209612A (en) | 1991-09-12 |
JP2808774B2 JP2808774B2 (en) | 1998-10-08 |
Family
ID=11577383
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004175A Expired - Fee Related JP2808774B2 (en) | 1990-01-11 | 1990-01-11 | Thin film magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2808774B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002013187A3 (en) * | 2000-08-03 | 2003-02-06 | Storage Technology Corp | Tape head modules having adjacent substrates each provided with write and/or read elements |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5028248A (en) * | 1973-04-13 | 1975-03-22 | ||
JPS63217516A (en) * | 1987-03-05 | 1988-09-09 | Matsushita Electric Ind Co Ltd | Thin film magnetic head |
-
1990
- 1990-01-11 JP JP2004175A patent/JP2808774B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5028248A (en) * | 1973-04-13 | 1975-03-22 | ||
JPS63217516A (en) * | 1987-03-05 | 1988-09-09 | Matsushita Electric Ind Co Ltd | Thin film magnetic head |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002013187A3 (en) * | 2000-08-03 | 2003-02-06 | Storage Technology Corp | Tape head modules having adjacent substrates each provided with write and/or read elements |
US6570738B1 (en) | 2000-08-03 | 2003-05-27 | Storage Technology Corporation | Tape head modules having adjacent substrates each provided with write and/or read elements |
Also Published As
Publication number | Publication date |
---|---|
JP2808774B2 (en) | 1998-10-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |