KR960005116B1 - Thin film magnetic head - Google Patents

Abstract

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Description

Multichannel Thin Film Magnetic Head

1 to 5 illustrate a method of manufacturing an embodiment of a multi-channel thin film magnetic head to which the present invention is applied, according to a process thereof.

1 is a perspective view of a step of forming an inclined groove.

2 is a perspective view of a coil conductor and a drawing conductor forming process.

3 is a perspective view of a step of forming a resin layer.

4 is a perspective view of a process of forming an upper magnetic film.

5 is a front view of the bonding process of the protective plate and the slicing process.

6 is a front view showing a thin film magnetic head created through the manufacturing process shown in FIGS.

FIG. 7 is a front view showing a state in which the pair of head blocks shown in FIG. 5 are joined so that the azimuth gaps face each other when viewed in the magnetic recording medium travel direction.

8 (a) is a front view showing a double azimuth thin film magnetic head prepared by cutting the head block shown in FIG. 7 and a double azimuth thin film magnetic head having a shield layer formed in FIG. 8 (b).

9 is a front view showing a state in which the pair of head blocks shown in FIG. 5 are joined so that each azimuth gap slightly overlaps when viewed in the magnetic recording medium travel direction.

FIG. 10 (a) is a front view showing a multi-channel thin film magnetic head produced by cutting the head block shown in FIG. 9, and FIG. 10 (b) shows a multi-channel thin film magnetic head having a shield layer formed thereon.

FIG. 11 (a) is a front view showing a four-channel thin film magnetic head, and FIG. 11 (b) is a four-channel thin film magnetic head having a shield layer formed thereon.

12 to 14 show another embodiment of the present invention according to the manufacturing process,

12 is a perspective view of the forming process of the inclined groove and the electrode groove.

Fig. 13 (a) is a perspective view of a step of forming a magnetic circuit portion.

Fig. 13 (b) is a cross-sectional view of the magnetic circuit section along the a-a line in Fig. 13 (a).

14 is a perspective view of the bonding process of the protective plate.

FIG. 15 is a perspective view of the thin film magnetic head produced through the manufacturing process shown in FIGS. 12 to 14 when viewed from the back side. FIG.

16 and 17 show another embodiment of the present invention,

16 is a perspective view of a process of forming a lower magnetic film.

FIG. 17 is a front view of a multi-channel thin film magnetic head produced using the composite substrate shown in FIG.

18 and 19 show another embodiment of the present invention,

18 is a perspective view of a step of forming a lower magnetic film.

FIG. 19 is a front view of a multi-channel thin film magnetic head produced using the composite substrate shown in FIG. 18. FIG.

20 is a front view showing an embodiment of another multi-channel thin film magnetic head to which the present invention is applied in which azimuth gaps inclined in opposite directions are alternately arranged.

21 to 23 show a manufacturing method of another embodiment of a multi-channel thin film magnetic head to which the present invention is applied, according to the process thereof.

21 is a perspective view of the forming process of the inclined table.

22 is a perspective view of a process of forming a magnetic circuit portion.

23 is a front view of the bonding process and the slicing process of the protective plate.

FIG. 24 is a front view of the thin film magnetic head produced through the process shown in FIGS. 21 to 23. FIG.

FIG. 25 is a front view showing a state in which the head blocks shown in FIG. 23 are bonded so as to face each azimuth gap when viewed from the magnetic recording medium travel direction.

FIG. 26 is a front view showing a double azimuth thin film magnetic head prepared by cutting the head block shown in FIG. 25; FIG.

FIG. 27 is a front view showing a four-channel thin film magnetic head made using the headblock shown in FIG.

28 and 29 show another embodiment of the present invention,

28 is a perspective view of a process of forming a lower magnetic film.

FIG. 29 is a front view of a multi-channel thin film magnetic head produced using the composite substrate shown in FIG. 28. FIG.

30 is a view showing another embodiment of the present invention, and a front view of a thin film magnetic head in which a lower magnetic film and an upper magnetic film are divided.

31 (a) to 31 (d) are cross-sectional views of the principal parts showing an example of a method for eliminating a step caused by an inclined bag according to the process.

32 (a) to 32 (c) are cross-sectional views of main parts showing another example of the method for eliminating the step caused by the inclined portion according to the process.

33 to 35 show another embodiment of the multi-channel thin film magnetic head to which the present invention is applied.

33 is a perspective view of a multi-channel thin film magnetic head.

34 is a sectional view of the principal parts taken along the line b-b in FIG.

35 is a view showing the excretion process of the inclined table respectively.

36 to 38 show the manufacturing process of the multi-channel thin film magnetic head according to the process order,

36 (a) is a plan view of a formation process of an inclined surface.

36 (b) is a cross-sectional view of the main portion of the substrate when the inclined surface is formed on the inclined portion.

Fig. 36 (c) is a cross-sectional view of the main portion of the substrate when the inclined surface is formed in the inclined groove.

37 is a plan view of principal parts showing the process of forming the magnetic circuit portion;

38 (a) is a front view of a thin film magnetic head produced using the substrate shown in FIG. 36 (b).

38 (b) is a front view of a thin film magnetic head produced using the substrate shown in FIG. 37 (c),

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electromagnetic induction multichannel thin film magnetic head, and more particularly, to a multichannel thin film magnetic head suitable for a so-called azimuth recording method.

BACKGROUND ART Generally, a thin film magnetic head is known as a device for recording information signals at high density onto a magnetic recording medium such as a magnetic tape or a magnetic disk.

Since the thin film magnetic head uses a ferromagnetic metal thin film such as Fe-Al-Si alloy as the magnetic core material, the effective magnetic permeability in the high frequency region is high and the saturation magnetic flux density is high, so the gap length is excellent. It has the advantages of easy control and narrow gap, a thin and rapid recording magnetic field near the magnetic gap, mass production of homogeneous head to form a large number of head elements on the wafer, and high speed. It is put to practical use as a magnetic head corresponding to high density recording.

In recent years, in order to improve the recording density, the guard bands between the recording tracks have been eliminated, and so-called azimuth recording has been made. In this azimuth recording method, the magnetic gap of the head is arranged obliquely with respect to the width direction of the recording track, and recording and reproduction are performed. The azimuth recording actively utilizes so-called azimuth loss to reproduce signals from adjacent tracks (cross-talk. talk)).

Conventionally, a thin film magnetic head bonded to the azimuth recording method, i.e., a head having a structure in which the magnetic gap is inclined with respect to the traveling direction of the magnetic medium, is prepared by the following method. That is, first, a lower magnetic film is formed on the upper surface of the substrate, and then a coil conductor is laminated and wound on the lower magnetic film through an insulating film. Then, the upper magnetic film is laminated through a gap spacer or an insulating film to form a magnetic gap. Next, in this step, since the magnetic gap is arranged in parallel with the upper surface of the substrate serving as the reference plane, the head is formed by cutting the wafer at an angle with respect to the reference plane when cutting the wafer so that the magnetic gap has an azimuth gap. .

However, in the case where the head is formed by cutting the wafer at an angle as described above, in order to secure the azimuth accuracy of the magnetic gap, it is necessary to polish this cut surface with high precision. Therefore, the manufacturing process of the thin film magnetic head is complicated, and at the same time, there is a problem in securing azimuth precision.

Moreover, in recent years, high quality recording has been pursued in the field of VTR, and video signals are recorded by the PCM (pulse signal modulation) recording method. The development of so-called digital VTRs is being promoted. In this digital VTR, since the amount of signals to be recorded is dramatically increased as compared with a normal VTR (analog), a multichannel recording method for simultaneously recording a plurality of tracks is adopted. In this situation, development of a multi-channel thin film magnetic head having azimuth in the magnetic gap is desired.

However, the above manufacturing method has an inherent drawback that it is impossible to create a multichannel thin film magnetic head in which azimuth gaps are arranged inline because the azimuth is provided in the magnetic gap when the head block is cut out by the headpiece.

Therefore, conventionally, a plurality of head chips have a predetermined azimuth in the running direction of the tape and are fixed to the head drum with high accuracy. However, this work requires considerable skill, and in particular, considerable effort is forced to adjust the gap gap and adjust the track height. As a result, the efficiency of the assembling operation of the recording and reproducing apparatus is drastically reduced, and there are great difficulties in terms of yield and manufacturing cost.

Therefore, the present invention has been proposed in view of the above-described conventional situation, and an object thereof is to provide a thin film magnetic head having excellent azimuth precision, and also has a multi-line pattern having an inline pattern of a double azimuth thin film magnetic head or an azimuth gap easily. An object of the present invention is to provide a thin film magnetic head capable of constructing a channel thin film magnetic head.

According to the present invention, since the inclined surface in which the substrate is inclined at a predetermined angle with respect to the upper surface is formed by the inclined groove or the inclined portion at the portion adjacent to the contact surface of the substrate with the magnetic medium, it is possible to keep the magnetic gap. Mus is set by the inclined surface. As a result, the substrate is inclined at a predetermined angle from the beginning with respect to the upper surface of the substrate as the azimuth reference plane. Thus, azimuth gaps are formed by slicing the substrate in a direction orthogonal to the mating surface to produce the cut headpiece. Thus, the polishing step of the cut surface is unnecessary, thereby simplifying the manufacturing process and significantly improving azimuth precision.

As used herein, the term in-line installation or in-line pattern of azimuth gaps refers to the same length or symmetry in the same direction or symmetry with respect to the vertical line when the azimuth gaps are viewed toward the facing surface of the headblock or the substrate, and the vertical lines of the facing surface are the same. It is meant to be in an area extending parallel to the end.

EMBODIMENT OF THE INVENTION Next, the specific Example of this invention is described, referring drawings. Incidentally, in the following drawings, insulating films formed between layers such as substrates, coil conductors, magnetic films, and the like are omitted, and the insulating layers are insulated from one another.

Hereinafter, in order to clarify the configuration of the thin film magnetic head of the present embodiment, a manufacturing method thereof will be described. To manufacture the thin film magnetic head of the present embodiment, first, as shown in FIG. 1, grinding or ion processing is performed on a portion 12b near the magnetic recording medium facing surface on the upper surface 12 of the flattened magnetic substrate 11. A plurality of inclined grooves 13 are formed by an etching process or the like, and an inclined surface 13a inclined at a predetermined azimuth angle θ is formed. This inclined surface 13a corresponds to the magnetic gap formation surface. The inclined surface 13a is formed such that the width l of the magnetic recording medium facing surface direction is at least greater than the depth of the magnetic gap, and moreover, the width m of the inclined surface 13a is equal to or slightly larger than the predetermined track width.

As the magnetic substrate 11, a ferromagnetic oxide material such as Mn-Zn ferrite or Ni-Zn ferrite was used in this embodiment. One magnetic core of the magnetic substrate 11 is constituted.

Next, as shown in FIG. ₂ , an insulating film (not shown) made of SiO ₂ or the like is formed on the entire upper surface 12 including the inclined surface 13a, and then a conductive metal material such as Cu or Al is coated on the upper surface 12. The coil conductors 14 are formed on the flat portions 12a of the Ns) by a vacuum thin film forming technique such as sputtering and pattern-etched in a predetermined shape. An insulating film (not shown) is formed to cover the coil conductor 14, and the lead electrode 15 is electrically connected to the coil conductor 14 through a contact window formed on the insulating film. In other words, in this embodiment, the coil conductor 14 has a spiral 3-turn winding structure. The winding structure of the coil conductor 14 is not limited to the spiral type, but may be any winding structure such as a multilayer helical type or a zigzag type type.

Thus, in this embodiment, since the coil conductor 14 is formed on the inclined surface 13a and the other flat part 12a which becomes a magnetic gap formation surface, an etching resist is apply | coated uniformly at the time of this patterning. Can be. Therefore, even if the inclined groove 13 is formed in the magnetic substrate 11 as in this embodiment, the patterning accuracy of the coil conductor 14 can be ensured.

Subsequently, as shown in FIG. 3, the coil conductor 14 is used to alleviate the unevenness caused by the coil conductor 14 and the lead electrode 15, and at the same time to form an electrical insulating film with the upper magnetic film described later. ) And the resin layer 16 is formed. The resin layer 16 is formed by applying a heat resistant resin or a heat resistant resist and then removing the resin in the front gap portion and the back gap portion. In place of the resin layer 16, an insulating film such as SiO ₂ may be formed by sputtering or the like.

Here, polyimide resin is used as the heat-resistant resin, and for example, a resin having excellent heat resistance such as PIQ (trade name) manufactured by Hitachi Chemical Co., Ltd., pyralin (trade name) manufactured by DuPont, or SP series manufactured by Toray Corporation can be used. have. On the other hand, as the heat resistant resist, a rubber negative type resist is used, and for example, an OMR-83 system manufactured by Tokyo Oka Corporation, a JSP system manufactured by Nippon Kosei Rubber Co., and the like can be used.

After the insulating film laminated on the inclined surface 13a is removed by ion etching or the like, a gap film (not shown) such as SiO ₂ or Ta ₂ O ₅ is formed on the inclined surface 13a so as to have a predetermined gap length.

Subsequently, as shown in FIG. 4, a ferromagnetic metal material is coated on the resin layer 16 including the inclined surface 13a, and then the upper magnetic film 17 is formed by etching to obtain a predetermined track width Tw. . As described above, an azimuth gap g having a track width Tw is formed by the upper magnetic film 17 on the inclined surface 13a.

That is, the azimuth gap g has a structure inclined by an angle θ with respect to the upper surface 12 of the magnetic substrate 11 serving as a reference plane.

Here, the coil layer 14 wound around the lower layer of the upper magnetic film 17 has a step that is relaxed in the resin layer 16, so that the upper magnetic film 17 becomes almost flat. Therefore, the film properties, particularly the magnetic properties, of the upper magnetic film are improved.

As the material of the upper magnetic film 17, a ferromagnetic amorphous metal alloy, an amorphous alloy, a Fe-Al-Si alloy, a Fe-Ni alloy, a Fe-Al alloy, Fe -Si-Co-based alloys or Fe-Ga-Si-based alloys are suitable, and as the method for attaching the film, vacuum thin film formation techniques such as flash deposition, ion plating, sputtering, or cluster ion beam methods are used. Are employed. The upper magnetic film 17 is not limited to the single layer film as in the present embodiment, and for example, highly wear-resistant insulating films such as SiO ₂ , Ta ₂ O ₅ , Al ₂ O ₃ , ZrO ₂ , Si ₃ N ₄ , and the like. It is good also as a laminated film which laminated | stacked the thin film which consists of said ferromagnetic metal materials alternately. In this case, the number of laminated ferromagnetic metal thin films can be arbitrarily set. The upper magnetic film 17 constitutes the other magnetic core.

Subsequently, as shown in FIG. 5, the magnetic circuit portion constituted by the coil conductor 14, the upper magnetic film 17, or the like is protected, and the upper magnetic film 17 is secured to secure a contact portion with the magnetic recording medium. The nonmagnetic material 18, such as glass, is raised to fill and planarized. Then, the protective plate 19 is melted and pasted onto the nonmagnetic material 18 to form a head block 20.

Finally, the slicing process is performed in a direction orthogonal to the cutting position indicated by the AA and A'-A 'lines during the fifth, i. Polishing to complete the single-track thin film magnetic head shown in FIG.

The thin film magnetic head obtained above has a structure inclined by a predetermined angle θ with respect to the upper surface 12 on which the magnetic gap is the reference plane.

As described above, in the present embodiment, since the azimuth of the magnetic gap is regulated in advance on the inclined surface 13a formed to be inclined at a predetermined angle θ with respect to the upper surface 12 of the magnetic substrate 11, the thin film magnetic head having excellent azimuth precision. Becomes That is, conventionally, in order to give azimuth to the magnetic gap by obliquely slicing the upper surface 12, and to secure azimuth precision again, polishing of the slicing surface is required, and workability or aziness is required. Although it was a big problem in terms of muscle precision, it is easy and high precision azimuth regulation of a magnetic gap by applying this embodiment.

Here, a multi-channel thin film magnetic head in which the azimuth gap g is lined inline is obtained by setting a large cutting gap in the slicing process shown in FIG. 5 and arranging a plurality of the magnetic gaps on one head chip. 5 shows a thin film magnetic head of three channels, the number of channels is not limited.

As described above, in the present embodiment, a thin film magnetic head having a single azimuth gap g or a multi-channel thin film magnetic head having a structure in which a plurality of azimuth gaps g are lined in line can be easily and accurately formed.

Further, in the multi-channel thin film magnetic head, it is advantageous in terms of reliability because it is attached with high precision without attaching the track or the like when attaching to the drum. Since the time axis between the channels coincides with each other, a circuit or the like for correcting the time axis becomes unnecessary, so that the driving circuit portion can be miniaturized.

Then, as shown in FIG. 7, the pair of headblocks 20 and 20 integrates each azimuth gap g, and then cuts indicated by lines BB and B'-B 'during the seventh time. By performing the slicing process at the position, the so-called double azimuth thin film magnetic head shown in Fig. 8A can be produced.

Thus, in the present embodiment, since the azimuth gap g is already arranged in the same azimuth direction before the slicing step in the state of the head block 20, the pair of head blocks 20 and 20 are faced to each other. By cutting in the direction orthogonal to the reference plane, the double azimuth thin film magnetic head can be easily configured with high precision.

The double azimuth thin film magnetic head is suitable for a head for special reproduction, such as field still reproduction, in which the same recording track is repeatedly reproduced. In such a case, the azimuth precision to which the present embodiment is applied is improved. Excellent special regeneration characteristics are obtained. In addition, since at least the magnetic film (upper magnetic film) disposed on the opposite sides of the head blocks 20 and 20 has a thin film structure, the gap spacing is larger than that of a double azimuth magnetic head in which a bulk type magnetic head is integrated. The narrowing of δ is attained. Therefore, the configuration in which both azimuth gaps g and g are in uniform sliding contact with the magnetic recording medium is improved, and so-called excellent recording and reproduction characteristics with improved bonding characteristics are obtained. In addition, since a complicated process of attaching a single azimuth head to each rotating drum is unnecessary as in the related art, the attachment work of the head becomes easy and the reliability is also improved.

As shown in FIG. 9, when the pair of head blocks 20 and 20 are integrated, when the azimuth gap g is viewed in the magnetic recording medium traveling direction X, both the blocks 20 and 20 are integrated. Integrating so as to overlap slightly, and then slicing processing at the cutting positions indicated by the CC line and the C'-C 'line during the ninth period, the multichannel thin film magnetic head shown in FIG. 10 (a) can be produced. This multi-channel thin film magnetic head can simultaneously record signals of a plurality of channels (two channels in this example) at a high density, and is suitable for application to digital VTRs, for example.

As such, when the present embodiment is applied to a double azimuth thin film magnetic head or a multi-channel thin film magnetic head, it is unnecessary to adjust the gap interval δ or to adjust the track height, and also depend on the mechanical precision when attaching the head to the rotating drum. Decreases. Therefore, the reliability of these thin film magnetic heads is further improved. Of course, azimuth precision, productivity, yield, narrowing of the gap gap, and of course, the bonding property with the tape are also improved.

In the slicing process shown in Figs. 7 and 9, the cut-out interval is set large so that a multichannel thin film magnetic head formed by arranging a plurality of azimuth gaps g on one head chip can be produced. FIG. 7 shows a three-channel double azimuth thin film magnetic head, and FIG. 9 shows a six-channel thin magnetic film head.

Fig. 11A shows a four-channel double azimuth thin film magnetic head obtained by slicing at the cutting position of the CC line and C "-C" during the ninth. The thin film magnetic head is provided with azimuth gaps G ₁ , G ₂ and G ₃ , G ₄ arranged inline in each thin film head portion (I) and (II), and these azimuth gaps G ₁ , G ₂ and G ₃ are arranged. And G ₄ overlaps slightly when viewed from the magnetic recording medium traveling direction X. FIG.

Here, as shown in FIGS. 8A, 10A, and 11A, when the azimuth gap g is disposed to face the contact with the magnetic recording medium according to the narrowing of the gap interval δ While this is improved, so-called crosstalk is easily generated between the opposing gaps g, and it is difficult to obtain good electron conversion characteristics.

Therefore, in order to eliminate the crosstalk, as shown in FIG. 8 (b), 10 (b) and 11 (b), the shield layer 21 is sandwiched between both azimuth gaps g. You can do that.

In this way, the shielding layer 21 is sandwiched between the azimuth gaps g, so that the leakage magnetic field causing the crosstalk is blocked by the shielding layer 21, so that good electron conversion characteristics are obtained.

As the material of the shield layer 21, for example, a high permeability material such as a Ni-Fe-based alloy (permaloy) is suitable, and a vacuum thin film forming technique such as a sputtering method is mentioned as this forming method.

In addition, the thickness of the shield layer 21 is too thick and the gap interval δ is increased, so that both azimuth gaps do not uniformly contact the magnetic recording medium, and when too small, sufficient shielding effect cannot be obtained. It is necessary to set appropriately considering conditions. The shield layer 21 may simply be sandwiched between azimuth gaps g or grounded through a terminal. In the present embodiment, two layers of shield layers 21 are provided. However, as long as the shield layers 21 are sandwiched between opposing azimuth gaps g, several layers may be provided. FIG. 11 (b) shows a multi-channel thin film magnetic head in which shield layers 21 and 21 having a thickness of 2 m are sandwiched between azimuth gaps g and g.

As the gap gap δ is narrowed, the electrode portions of both thin film head portions for connecting with external terminals (for example, flexible printed circuit boards) are arranged in close proximity, making this connection difficult. In order to ensure the connection, the electrode portion may be formed on the rear end side of the head (the back side of the sliding contact surface of the magnetic recording medium). In FIGS. 12 to 14, the same reference numerals are given to the same members as those shown in FIGS. 1 to 11 in the following description, and the description thereof will be omitted.

That is, as shown in FIG. 12, a plurality of inclined grooves 13 are formed in the portion 32b near the magnetic recording medium abutting surface of the magnetic substrate 31, and the magnetic gap forming surface inclined at a predetermined azimuth angle θ. While forming the inclined surface 13a corresponding to the plurality of grooves 33, the plurality of electrode grooves 33 are formed in portions corresponding to the electrode portions of the coil conductor 14 and the lead conductor 15 formed in a later step.

Next, as shown in FIG. 13 (a) and FIG. 13 (b), the conductive metal is filled in the electrode groove 33 to form the electrode portion 34. Next, an insulating film (not shown) is formed over the entire upper surface 32 except for the electrode portion 34, and the coil conductor 14 and the lead conductor 15 are formed using the same method as in the previous embodiment. It becomes a structure electrically connected with the electrode portion 34.

Thereafter, the resin layer 16 or the upper magnetic film 17 is formed using the same method as in the previous embodiment.

Subsequently, as shown in FIG. 14, glass or the like is applied to the entire magnetic substrate 31 for protecting the magnetic circuit part constituted by the magnetic substrate 31, the coil conductor 14, the upper magnetic film 17, and the like. The nonmagnetic material 18 is melt-filled, and if necessary, a shield layer 21 made of a high permeability material is coated on the nonmagnetic material 18, and then the protective plate 19 is bonded to each other to form the head block 35. Write.

Finally, the pair of head blocks 35 obtained are integrated together while being track-fitted, and then cut at a predetermined cutting position as in the previous embodiment, and at the same time, a cutting position corresponding to the formation position of the electrode portion 34 ( The electrode portion 34 is exposed and cut out to a position indicated by aa line in FIG. 13 to obtain the thin film magnetic head shown in FIG.

In this thin film magnetic head, the gap 34 is formed on the one flat surface 25 on the rear side of the magnetic recording medium contact surface 24 in which the electrode portion 34 formed in electrical conduction with the coil conductor 14 and the lead conductor 15 is formed. Even if δ is narrowed down, a reliable connection with an external terminal can be achieved. And since the protection plate 19 can be arrange | positioned in the whole head, it is ensured by the mechanical strength of a head. The same effect can also be obtained when the electrode portion 34 is formed on the side surface 31c of the substrate 31.

In the above embodiment, an example in which a magnetic substrate made of a ferromagnetic oxide material such as Mn-Zn ferrite is used as the substrate has been described, but the present invention is not limited thereto, and the ferromagnetic metal material is laminated on a nonmagnetic substrate made of ceramic. The same applies to the use of a composite substrate or a composite substrate having a ferromagnetic metal material laminated on the ferromagnetic oxide substrate.

However, in the case where these composite substrates are used, as shown in FIG. 16, the inclined grooves 42 are formed in the nonmagnetic substrate (or ferromagnetic oxide substrate) 41 in the same manner as in the previous embodiment, and the inclined surface having azimus After forming 42a, a ferromagnetic metal is coated on the entire surface of the substrate 41 including the inclined surface 42a, and the lower magnetic layer 43 is formed. Here, when a nonmagnetic substrate is used as the substrate 41, the lower magnetic film 43 constitutes one magnetic core. When a ferromagnetic oxide substrate is used, the lower magnetic film 43 is combined to form one magnetic core. Construct a magnetic core.

Thereafter, as shown in FIG. 17, the coil conductor (not shown), the upper magnetic film 45, or the like are insulated (not shown) using a fine processing technique such as a photolithography technique as in the previous embodiment. At the same time, the protective plate 47 is fusion-bonded to the nonmagnetic substrate 41 by the nonmagnetic material 46 to protect the coil conductor and the lower magnetic film 43. In this way, a head block is obtained, wherein a plurality of azimuth gaps g are formed in an in-line pattern, and the track width Tw of the azimuth gaps g is formed on the lower magnetic film 43 and the upper magnetic film 45 of the inclined surface 42a. Regulated by

The thin film magnetic head formed of a ferromagnetic metal material, which is a high saturation magnetic flux density alloy as a magnetic core material, can obtain excellent recording or reproducing characteristics even for a high magnetic force magnetic recording medium suitable for high density recording.

Alternatively, as shown in FIG. 18, on the nonmagnetic substrate (or ferromagnetic oxide substrate) 51 having an inclined surface 53a inclined with a predetermined azimuth with respect to the upper surface 52 of the substrate 51, a ferromagnetic metal material. After coating by sputtering or the like, a composite substrate patterned for each channel and used as the lower magnetic film 54 may be used so that the ferromagnetic metal material remains only in the portion where the material is formed.

Thereafter, as shown in FIG. 19, the coil conductor (not shown) or the upper magnetic film 57 is formed on the lower magnetic film 54 through the insulating film (not shown) by the same method as in the previous embodiment, and at the same time, the protective plate 59 ) Is welded to the substrate 51 with a nonmagnetic material 58 to form a head block of azimuth gap g lined inline to protect the coil conductor. Then, the thin film magnetic head is completed by cutting at a predetermined cutting position.

The resulting thin film magnetic head has a structure in which a magnetic gap g is divided for each channel. Therefore, when the head is used with the multi-channel thin film magnetic head, it is possible to provide a thin film magnetic head which is excellent in recording and reproduction characteristics, with reduced cross talk from adjacent tracks or adjacent tracks.

In addition to the use of grinding wheels for processing or ion etching, it is also possible to form metals for the substrates 41 or 51 with workable metals or non-metals such as Cu-Zn alloys or aluminum, Inclined grooves on the nonmagnetic substrate 41 or 51 by forming to form a nonmagnetic substrate 41 or 51 having the inclined grooves 42 or 53 by electroforming. (42) or (53) are formed. Since metal forming is used to form the substrate with the inclined grooves, a thin film magnetic head having an azimuth gap g can be manufactured at a considerable cost.

Then, as shown in FIG. 20, the inclined groove 63 formed by alternately and inverting the inclined surface 63a having a predetermined azimuth with respect to the upper surface 62 of the magnetic substrate 61 serving as the reference surface. After forming a plurality of, the coil conductor (not shown) or the upper magnetic film 64 or the like is laminated on the substrate corresponding to the inclined surface 63a, and the protective plate 66 is again made of the non-magnetic material 65 by the substrate 61. The upper magnetic film 64 is protected by fusion splicing) to form a thin film magnetic head. In this case as well, the above various composite substrates can be used, as well as a double azimuth thin film magnetic head in which two head blocks having in-line azimuth gaps are opposed to each other.

In the embodiment of the thin film magnetic head, the azimuth angle of the magnetic gap is formed by the inclined surface of the inclined groove formed in the magnetic or nonmagnetic substrate. The azimuth angle may be formed by the inclined surface of the inclined portion having a predetermined azimuth.

In the manufacture of the thin film magnetic head of this embodiment, first, as shown in FIG. 21, a plurality of inclined portions are formed on a portion 52b near the magnetic recording medium facing surface on the upper surface 52 of the flattened magnetic substrate 51. As shown in FIG. A plurality of 53 are disposed over the full width of the magnetic substrate 51 at predetermined intervals.

The ramp 53 is formed of a magnetic material such as ferromagnetic oxide material such as Mn-Zn ferrite or Ni-Zn ferrite, or a ferromagnetic metal material such as Fe-Al-Si alloy. At least one inclined surface 53a of the two inclined surfaces of each inclined table portion 53 corresponding to the magnetic recording medium facing surface is inclined with respect to the upper surface 52 at a predetermined azimuth angle α. have. The inclined surface 53a corresponds to the magnetic gap formation surface.

The inclined surface 53a is set such that the width L of the magnetic recording medium-facing surface direction is at least greater than the depth of the magnetic gap, and furthermore, the width M that extends to the contact surface is equal to or slightly larger than the predetermined track width.

Here, as the method of disposing the inclined stand portion 53, (i) a method of integrally molding the magnetic substrate 51 by injection molding or the like, and (ii) a method of fixing the inclined stand portion 53 with an adhesive or the like. Can be mentioned.

In the case where the inclined surface 53a is formed by the method of (ii), as shown in FIGS. 31 (a) and 32 (a), the inclined table 53 is fixed to the magnetic substrate 51. A step H tends to occur in the contact portion 76 between the inclined surface 53a and the upper surface 52 due to the thickness of the adhesive 75 or a defect in the inclined portion 53. Since this step H causes deterioration of the azimuth accuracy of the magnetic gap, it is important to eliminate this step H.

As a means for eliminating the step H, for example, when the step H is very small (Fig. 31A), the following method may be used. That is, as shown in FIG. 31 (b), an insulating film 77 such as SiO _{2 is} formed on the upper surface 52 of the magnetic substrate 51 including the inclined portion 53 so as to have a film thickness of at least the step H. Form by gluing.

Next, as shown in FIG. 31 (c), an etching resist 78 is applied to cover the insulating film 77. The etching resist 78 preferably has a selectivity of 1: 1 with the insulating film 77 (the etching rate of the etching resist 78 and the etching rate of the insulating film 77). Finally, as shown in FIG. 31 (d), a plasma etching process is performed on the insulating film 77 and the etching resist 78, and the step H is eliminated by the remaining insulating film 77.

Alternatively, as shown in Fig. 32 (a), when the step H is large and the step H is not eliminated as the means, it can be solved by the following method. That is, first, as shown in FIG. 32 (b), the heat resistant resist 79 is applied at least thicker than the step H, and then the etching resist 80 is formed on the portion other than the inclined portion 53. Subsequently, as shown in FIG. 32 (c), the heat resistant resist 79 is removed by etching on the inclined table 53, and the step H is eliminated by removing the etching resist 80 again.

Next, as described above, the magnetic substrate 51 having the inclined table 53 arranged thereon is made. Then, as shown in FIG. 22, the coil conductor 54, the lead conductor 55, and the number of the conductors are as shown in the previous embodiment. The layer 56 and the upper magnetic film 57 are sequentially stacked through an insulating film.

Therefore, the track width Tw is regulated by the upper magnetic film 57, and a magnetic circuit portion having an azimuth gap g regulated by the inclined surface 53a of the inclined base portion 53 is formed.

Here, the coil conductor 54 or the drawing conductor 55 is formed in the flat portion 52a of the magnetic substrate 51, so that high patterning accuracy of the conductor is ensured. Similarly, since the upper magnetic film 57 is formed on an almost flat surface on which the step by the coil conductor 54 or the drawing conductor 55 is alleviated by the resin layer 56, good magnetic properties are obtained.

Next, as shown in FIG. 23, the nonmagnetic material 58, such as glass, is filled so that the said magnetic circuit part may be covered, and the protection plate 59 is again bonded to the nonmagnetic material. In this way, the azimuth of the magnetic gap g is restricted to the inclined surface 53a of the inclined base portion 53, and a head block 60 in which the azimuth gap g is arranged inline is created.

Finally, the head block 60 is sliced in the cutting position indicated by the DD line and the D'-D 'line in the 23rd direction, that is, the direction perpendicular to the upper surface 52 of the magnetic substrate 51. As shown in the figure, a thin film magnetic head having a single azimuth gap g is completed.

Here, a multi-channel thin film magnetic head in which a plurality of azimuth gaps g is arranged inline is obtained by setting a large cutting gap in the slicing process shown in FIG. 23 and arranging a plurality of azimuth gaps on one head chip. . Although Fig. 23 shows a thin film magnetic head of three channels, the number of channels is not limited.

Then, as shown in FIG. 25, the pair of headblocks 60 and 60 of the above-described configuration are integrated to face each other so that both azimuth gaps g and g face each other, and then FIG. 25 shows the line EE and E'-E '. By slicing at the cutting position indicated by the line, the double azimuth thin film magnetic head shown in FIG. 26 is obtained. In this case as well, a double azimuth multichannel thin film magnetic head is obtained by setting a large cutting interval during the slicing process.

Then, in the integration process of the headblocks 60 and 60 shown in FIG. 25, the opposing azimuth gaps g are opposed to each other so as to overlap slightly when viewed in the magnetic recording medium traveling direction X, and then the predetermined cutting position. By cutting at, the multichannel thin film magnetic head (four channels in this example) suitable for the digital VTR shown in FIG. 27 is obtained.

In the case where the azimuth gaps g of the various thin film magnetic heads are disposed to face each other, it is preferable that the shield layer is sandwiched between opposing azimuth gaps g so as to reduce crosstalk due to the narrowing of the gap gap. In the above-described various thin film magnetic heads, an example in which a magnetic substrate made of a ferromagnetic oxide material such as Mn-Zn ferrite is used as a substrate has been described, but the composite substrate or the ferromagnetic material in which the ferromagnetic metal material is laminated on a nonmagnetic substrate made of ceramic This embodiment also applies to a case where a composite substrate having a ferromagnetic metal material laminated on an oxide substrate is used.

That is, as shown in FIG. 28, the inclined surface 63a, which is inclined at a predetermined inclination angle α having the inclined base portion 63 disposed on the nonmagnetic substrate (or ferromagnetic oxide substrate) 61, as in the previous embodiment. After forming, the lower magnetic film 64 made of the ferromagnetic metal material is coated on the entire surface of the substrate 61 having the inclined surface 63a to form a composite substrate.

Thereafter, as shown in FIG. 29, the coil conductor and the upper magnetic film 65 are laminated on the lower magnetic film 64 through the insulating film by using the same method as in the embodiment, and the nonmagnetic material 66 is again formed. The protection plate 67 is joined through. By the above, the head block formed by forming an azimuth gap g from the lower magnetic film 64 and the upper magnetic film 65 on the inclined surface 63a is completed.

Then, the lower magnetic film 64 may be coated and then the lower magnetic film 64 may be patterned to control a track width Tw. In this case, as shown in FIG. 30, the thin film magnetic head obtained has a structure in which the azimuth gap g is divided for each channel in the magnetic recording medium contact surface, so that the lower magnetic film is formed continuously in each channel. Is resolved. Thus, it becomes a thin film magnetic head having good reproduction characteristics.

Incidentally, when the composite substrate is used, the inclined base portion 63 does not necessarily have to be made of a magnetic material, and any of magnetic materials and nonmagnetic materials may be used.

In the above embodiment, the inclined groove or the inclined table for regulating the azimuth of the magnetic gap is formed near the contact surface with the magnetic recording medium, but the present invention is not limited to this special arrangement. For example, when fabricating a thin film magnetic head having a single azimuth gap, the inclined groove or the inclined portion may be continuously formed over the entire surface of the substrate such as the wafer inclined with respect to the track width direction.

In the embodiments of the thin film magnetic head shown in Figs. 33 and 34, the one plane 91a of the substrate 91 made of a nonmagnetic material such as ceramic has a predetermined angle θ ₂ with respect to this one plane 91d. An inclined stand portion 92 having an inclined surface 92a is formed. While the inclined table portion 92 is formed over the entire plane 91a, the inclined table portion 92 of the present embodiment is inclined with respect to the magnetic recording medium facing surface 102 in the vicinity of the magnetic gap g in a wedge shape or a V shape. Is formed.

When the inclined stand 92 is disposed only near the magnetic gap g in this manner, the coil conductor 95 to be described later is formed only on the flatness of the one plane 91a, so that the patterning accuracy is secured.

A lower magnetic film 93 made of a ferromagnetic metal material such as a Fe-Al-Si alloy or an amorphous alloy is coated on the substrate 91 including the inclined stand portion 92. The lower magnetic film 93 is electrically connected through an insulating film 94 through a spiral coil conductor 95 and a contact window 97 opened in the insulating film 96 on the coil conductor 95. An outgoing conductor 98 is formed. The upper magnetic film 100 made of the ferromagnetic metal material is stacked through the insulating film 99.

The lower magnetic film 93 and the upper magnetic film 100 have a magnetic gap g formed in the inclined portion 92, and in the region near the magnetic gap g, these magnetic films 93 and 100 have a predetermined value. It is patterned to have a track width Tw. As viewed from the surface of the magnetic recording medium, the lower magnetic film 93 and the upper magnetic film 100 are actually separated from the adjacent film.

Although not shown, the upper magnetic film 100 is generally used to protect a magnetic circuit part including the lower magnetic film 93, the coil conductor 95, and the upper magnetic film 100, and to secure a junction with the magnetic recording medium. The protective plate is integrated by fusion bonding with glass.

That is, the predetermined angle with respect to one flat surface (102a) corresponding to an inclination arrangement (92) of the wedge-shaped in the treated surface a magnetic recording medium on top (91a) of the substrate 91 to create a thin film magnetic head of the configuration θ ₃ Tilt and fusion splicing. In this case, the step near the junction of the inclined stand 92 is eliminated by the method of the thirty-first (a) to the thirty-first (d) or the thirty-second (a) to the thirty-second (c) degrees.

Thereafter, as in the previous embodiment, the lower magnetic film 93, the coil conductor 95, the upper magnetic film 100, and the like are sequentially stacked, and the head blocks are cut out at predetermined positions. The thin film magnetic head shown in FIG. Is completed.

Thus, in this embodiment a thin film magnetic head, the angle θ ₂ and the magnetic recording medium treat a single plane (91a) of the inclination arrangement (92), the inclined surface (92a) and the substrate (91) that this reference surface of the excretion to the substrate 91 forming The azimuth angle θ ₁ of the magnetic gap g is determined by the angle θ ₃ formed between the surface 102a corresponding to the surface and the wedge-shaped inclined portion 92.

In the thin film magnetic head of the present embodiment, since the azimuth gap g is inclined by the predetermined angle θ ₁ with respect to the upper surface 91a of the substrate 91, the azimuth precision is cut by cutting in the orthogonal direction with respect to the substrate 91. An excellent thin film magnetic head is obtained.

In this case, the thin film magnetic head excellent in the azimuth accuracy can be efficiently produced by determining the excretion position of the inclined table.

That is, as shown in FIG. 36 (a), inclined surfaces 82 and 82 which are inclined with respect to the upper surface 81a on the upper surface 81a (reference surface) of the substrate 81 at a predetermined angle β are parallel to each other. A plurality is formed. Both inclined surfaces 82 and 82 are disposed to face each other. Here, the inclination angles of the inclined surfaces 82 and 82 regulate the azimuth angle of the magnetic gap.

The inclined surfaces 82 and 82 are arranged obliquely with respect to the track width direction of the magnetic gap and are further arranged parallel to each other over the entirety of the substrate 81. Here, the arrangement angle of the inclined surfaces 82 and 82 with respect to the track width direction is set so that the magnetic circuit portion can be formed the most. In this example, the placement angle was set to approximately 45 °.

As a method of forming the inclined surfaces 82 and 82, as shown in FIG. 36 (b), a method of arranging the inclined portion 84a on the upper surface 81a of the substrate 81 or in FIG. As shown, a method of cutting and forming the inclined grooves 84b by grinding, ion etching, or the like can be given. In forming the inclined surface 82 by the inclined stand portion 84a, the step in the vicinity of the engaging surface is shown in FIGS. 31 (a) to 31 (d) or 32 (a) to 32 (c). Should be removed in advance.

Next, as shown in FIG. 37, the lower magnetic film 83, the coil conductor 85, the lead conductor 86, and the upper magnetic film 87 on the substrate 81 including the inclined surfaces 82 and 82. Are sequentially formed through an insulating film (not shown), and the magnetic circuit portion 88 is formed. Here, the magnetic circuit unit 88 is formed so as to alternately face each other with the inclined surfaces 82 and 82 therebetween. In this way, by arranging the magnetic circuit portions 88 and 88 to face each other alternately, a plurality of magnetic circuit portions 88 can be disposed on one substrate 81. Therefore, it is advantageous at the point of mass productivity.

The coil conductor 85 and the lead conductor 86 are connected to each other through a contact window 89 provided in the insulating film between these layers.

In this case, since most of the coil conductor 85 and the lead conductor 86 are formed in the flat portion of the substrate 81, this patterning accuracy is not deteriorated.

Subsequently, the head block is inclined with respect to the cutting positions indicated on the YY and ZZ lines in FIG. 37, that is, the inclined surface 82b, moreover, at the cutting position perpendicular to the upper surface 81a of the substrate 81, The thin film magnetic head shown in Figs. 38 (a) and 38 (b) is completed. In general, of course, the protective plate is integrally bonded with the head block through the non-magnetic material so as to cover the magnetic circuit portion 88 to protect the magnetic circuit portion 88 and to secure the junction with the magnetic recording medium.

In the thin film magnetic head having the azimuth gap g thus produced, the inclined surface 82 having a predetermined azimuth with respect to the upper surface 81a of the substrate 81 is formed by the inclined table portion 84a. The gap g is formed by the upper magnetic film 87 and the lower magnetic film 83 formed on the inclined surface 82.

Moreover, the thin film magnetic head continuously forms the inclined stand portion 84a or the inclined groove 84b in the entirety of the substrate 81, and the plurality of head azimuths in one inclined stand portion 84a or the inclined groove 84b. As it regulates mus, it is advantageous in terms of productivity and productivity.

In addition, since the slicing treatment is orthogonal to the upper surface 81a, a thin film magnetic head having excellent azimuth accuracy can be obtained.

Claims (1)

In a multi-channel thin film magnetic head in which a coil conductor and a magnetic film are respectively laminated on an upper surface of a substrate through an insulating film, an inclined surface that is inclined at a predetermined angle with respect to the upper surface is formed near the magnetic recording medium contact surface of the substrate. A magnetic channel is formed in the magnetic film on the inclined surface, the azimuth of the magnetic gap is regulated as the inclination angle of the inclined surface, and the coil conductor is formed in the flat portion of the upper surface. Magnetic head.

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