JPH03207467A - Method and device for applying coating agent - Google Patents

Abstract

PURPOSE:To rapidly stabilize the temp. of the material itself to be applied, to uniform the temp. distribution and to shorten a time of treatment by controlling the temp. of a coating agent and an application treatment part and directly controlling the temp. of the material to be coated which is applied with the coating agent by the infrared rays. CONSTITUTION:The material 112 to be coated which is carried from the outside is attracted and held in the prescribed position on a spin chuck 106. Thereafter the temp. of this material 12 at normal temp. is measured with an infrared-ray detector 113 and a temp. information signal obtained from this detector 113 is treated by a signal processor 114. When it is decided that the measured temp. is lower than the prescribed temp., a signal is sent to the power source 115 of an infrared light source and the infrared rays are irradiated from the infrared light source 101. Then when the temp. of the material 112 to be coated reaches the temp. optimum to apply a coating agent, the coating agent described hereunder is discharged from a nozzle 104 thereof. The coating agent is controlled at the temp. optimum to apply the coating agent by a pipe 111 for temp. control provided to the inside of a temp. controlling jacket 110.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for applying a coating agent and an apparatus therefor, and more particularly to a method for spin coating a coating agent and an apparatus therefor.

[Conventional technology]

BACKGROUND ART Conventionally, in a coating agent application method and an apparatus thereof, in order to uniformize the coating thickness of a coating agent, the temperature of a coating agent and a coating processing section is adjusted and spin coating is performed.

[Problem to be solved by the invention]

In the conventional coating agent application method described above, the temperature of the coating agent and the coating processing section is controlled, but the temperature of the object to be coated is not directly controlled, so the temperature of the object itself is It is unstable and requires a long time to stabilize the temperature of the object to be coated and to make the temperature distribution uniform. Furthermore, if the coating agent is applied before the temperature of the object to be coated is sufficiently stabilized, there is a drawback that the film thickness will become non-uniform.

[Means to solve the problem]

The method and apparatus for applying a coating agent of the present invention include a means for controlling the temperature of the coating agent and the coating processing section, and a means for directly controlling the temperature of the object to be coated by irradiating the object with infrared rays. There is. A resist can be used as the coating agent, and polyimide can also be used as the coating agent. Furthermore, silica glass can also be used as a coating agent.

The coating agent coating apparatus of the present invention further includes means for detecting the temperature of the object to be coated using an infrared detector, and an amount of infrared rays irradiated by the apparatus for irradiating the object with infrared rays based on the temperature information from the detection means. A means for changing the .

The present invention irradiates the object with infrared rays and directly adjusts the temperature so that the temperature of the object held at a predetermined position in the coating processing section becomes the optimum temperature for applying the coating agent. Since the temperature can be stabilized more quickly and the temperature distribution can be made uniform, the processing time can be shortened and the uniformity of the mold film thickness of the coating agent can be further improved. [Example] Next, the present invention will be described with reference to the drawings.

FIG. 1 is a longitudinal sectional view of a first embodiment of the invention. 1st
As shown in the figure, the coating processing section is connected to the coating processing section upper cover 1.
02, a coating processing section lower cover 103, and a coating processing section cup 105.

This coating processing section is constantly supplied with air or nitrogen gas whose temperature, humidity, and flow rate are adjusted to predetermined values from the outside. In this example, the temperature of the coating processing section is set to be about 3 to 5 degrees F) lower than the optimal temperature for coating the coating agent.

The object to be coated 112 transported from the outside is held at a predetermined position on the spin chuck 106 by suction.

Thereafter, the temperature information signal obtained from the infrared detector 113 that measures room temperature is processed by the signal processing device 114, and if it is determined that the temperature is lower than a predetermined temperature, a signal is sent to the infrared light source power supply 115. Feed infrared light source 101
irradiates infrared rays. If it is determined that the temperature is higher than a predetermined temperature, an irradiation stop signal is sent to the infrared light source power source 115, and if infrared light is being emitted from the infrared light source 101, it is stopped, and if it is not being emitted, that state is maintained.

When the temperature of the object to be coated 112 reaches the optimum temperature for applying the coating agent, the coating agent is adjusted to the optimum temperature for applying the coating agent using the temperature control vibrator 111 inside the temperature control jacket 110. is discharged from the coating agent nozzle 104. The coating agent discharged onto the object to be coated 112 is adsorbed and held on the spin chuck 106 by the rotational force applied from the motor 108 to the spin chuck 106 supported by the spin chuck bearing 107 via the drive shaft 109. The object to be coated 112 rotates. This object to be coated 1
By applying a predetermined rotational speed to 12 for a predetermined period of time, the coating agent discharged has a desired coating film thickness.

FIG. 2 is a longitudinal sectional view of a second embodiment of the present invention. Second
As shown in the figure, the configurations of the coating processing section and temperature information signal processing system are almost the same as in the first embodiment shown in FIG. The differences are a cup temperature control pipe 201 that is installed inside the coating processing section cup 105, a cooling water supply pipe 202 for supplying cooling water thereto, and a cooling water pipe 202 for collecting the cooling water. The point is that there is a recovery pipe 203. In this example, cooling water whose temperature is adjusted to about 3 to 5 degrees Celsius lower than the optimal temperature for applying the coating material is constantly supplied. In this way, in the second embodiment, since the temperature of not only the coating processing section but also the coating processing section cup 105 is directly controlled, it is not only possible to set the temperature m1lrJ with higher precision, but also to reach the desired temperature. Since the time required for the process can be shortened, there is an advantage that the uniformity of the coating film thickness of the coating agent can be further improved.

〔Effect of the invention〕

As explained above, the present invention quickly adjusts the temperature of the coating material and the coating processing section, and directly controls the temperature of the coating material onto which the coating material is applied using infrared rays. By stabilizing and making the temperature distribution uniform, the processing time can be shortened and the uniformity of the coating film thickness of the coating agent can be further improved.

[Brief explanation of drawings]

FIG. 1 is a longitudinal sectional view showing a first embodiment of the present invention,
FIG. 2 is a longitudinal sectional view showing a second embodiment of the invention. 101... Infrared light source, 102... Coating processing section upper cover 103... Coating processing section lower cover 104... Coating agent nozzle, 105...
...Coating processing section cup, 106... Spin chuck, l07... Spin chuck, bearing,
108...Motor 109...Drive shaft, 110...Temperature control jacket}, 11
1...Temperature control pipe, 112...Object to be coated, 113...Infrared detector, 114...
... Signal processing device, 115 ... Infrared light source power supply, 201 ... Power, temperature control pipe, 202.
... Cooling water supply vibe, 203 ... Cooling water recovery pipe.

Claims (1)

[Claims] (1) Adjusting the temperature of the coating agent and the coating processing section,
A method for applying a coating agent, comprising the step of directly controlling the temperature of the object to be coated by infrared irradiation and applying the coating agent onto the object to be coated (2) Temperature adjustment of the coating agent and the coating processing section (3) means for detecting the temperature of the object with an infrared detector; and means for irradiating the object with infrared rays. 3. The coating agent coating device according to claim 2, further comprising means for changing the amount of infrared rays irradiated by the device that irradiates the object with infrared rays based on temperature information.