JP2933319B2 - Coating agent coating device - Google Patents
Coating agent coating deviceInfo
- Publication number
- JP2933319B2 JP2933319B2 JP1129131A JP12913189A JP2933319B2 JP 2933319 B2 JP2933319 B2 JP 2933319B2 JP 1129131 A JP1129131 A JP 1129131A JP 12913189 A JP12913189 A JP 12913189A JP 2933319 B2 JP2933319 B2 JP 2933319B2
- Authority
- JP
- Japan
- Prior art keywords
- coating
- temperature
- cup
- coating agent
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は塗布剤の塗布装置に関し、特に被塗布物の温
度を適温にすることのできる塗布剤の塗布装置に関す
る。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an application device for an application agent, and more particularly to an application device for an application agent capable of adjusting the temperature of an object to be applied to an appropriate temperature.
従来、塗布剤の塗布方法及びその装置は、塗布剤の塗
布膜厚を均一化させるため、塗布剤を温度調節し、かつ
塗布処理部全体をカバーで囲い、その中の雰囲気を温度
調節し、スピン塗布を行なっていた。Conventionally, the method and apparatus for applying the coating agent, in order to make the coating film thickness of the coating agent uniform, adjust the temperature of the coating agent, and cover the entire coating processing unit with a cover, and adjust the temperature in the atmosphere therein, Spin coating was performed.
上述した従来の塗布剤の塗布方法及び塗布装置では、
塗布剤及び塗布処理部全体を囲んでいるカバー内の雰囲
気を温度調節しているが、被塗布物の塗布処理を直接行
なうカップ部を直接温度調節する方法となっていないの
で、カップ部の温度は塗布剤の溶媒が蒸発する時の気化
熱により低下し、カップ内部の温度が低下してしまうた
め被塗布物の温度が不安定になり、塗布剤を塗布すると
塗布膜厚が不均一になるという欠点がある。In the above-described conventional application method and application apparatus for the coating agent,
Although the temperature of the coating agent and the atmosphere in the cover surrounding the entire coating section is controlled, the temperature of the cup section is not controlled directly because the cup section that directly performs the coating process on the object is not used. Is reduced by the heat of vaporization when the solvent of the coating agent evaporates, and the temperature inside the cup is lowered because the temperature inside the cup is lowered, and the coating film thickness becomes uneven when the coating agent is applied. There is a disadvantage that.
本発明の塗布剤のスピン塗布装置は、被塗布物を囲ん
で設けられたカップと、前記カップを収納するカバーと
を有し、前記被塗布物へ塗布剤の塗布処理を行うスピン
塗布装置において、前記カップを所定温度に調節する温
度制御手段と、前記被塗布物の温度を検出する検出手段
と、前記検出手段の検出結果に応じて前記塗布処理の動
作を開始させる、或いは動作を待機させる制御装置とを
備えることを特徴としている。The spin coating apparatus for a coating agent of the present invention is a spin coating apparatus that includes a cup provided around an object to be coated and a cover that stores the cup, and performs a coating process of the coating agent on the object to be coated. Temperature control means for adjusting the temperature of the cup to a predetermined temperature, detection means for detecting the temperature of the object to be coated, and operation of the application processing being started or waiting for operation in accordance with the detection result of the detection means And a control device.
次に、本発明に関連する塗布剤の塗布方法を、第１図
の縦断面図を参照して説明する。Next, a method of applying a coating agent according to the present invention will be described with reference to the longitudinal sectional view of FIG.
第１図に示すように、塗布処理部は塗布処理部上部カ
バー101、塗布処理部下部カバー102、塗布処理部カップ
104で主に構成されている。As shown in FIG. 1, the coating processing unit includes a coating processing unit upper cover 101, a coating processing unit lower cover 102, and a coating processing unit cup.
It is mainly composed of 104.
この塗布処理部には外部から温度と湿度と流量を所定
値に調節された空気、もしくは窒素ガスが常に供給され
ている。かつ、塗布処理部カップ104の内部にはりめぐ
らされているカップ温調用パイプ105には、冷却水供給
用パイプ113を通って冷却水が供給され、冷却水回収用
パイプ114から冷却水を回収する。この例の場合、塗布
剤を塗布するのに最適な温度に調節された冷却水が常時
供給されている。Air or nitrogen gas whose temperature, humidity, and flow rate are adjusted to predetermined values are constantly supplied to the coating processing unit from the outside. In addition, cooling water is supplied to a cup temperature adjusting pipe 105 wrapped inside the coating processing section cup 104 through a cooling water supply pipe 113, and the cooling water is recovered from a cooling water recovery pipe 114. . In the case of this example, cooling water adjusted to the optimum temperature for applying the coating agent is constantly supplied.
外部から搬送されてきた被塗布物112はスピンチャッ
ク106上の所定位置に吸着保持される。吸着保持された
被塗布物112上に温調ジャケット110の内部にある温調用
パイプ111で塗布剤を塗布するのに最適な温度に調節さ
れた塗布剤を塗布剤ノズル103から吐出する。被塗布物1
12上に吐出された塗布剤はモーター108からドライブシ
ャフト109を介し、スピンチャック軸受け107で支持され
ているスピンチャック106に加えられた回転力によっ
て、スピンチャック106に吸着保持されている被塗布物1
12が回転する。この被塗布物112に所定の回転数を所定
の時間与えることによって吐出された塗布剤は所望の塗
布膜厚となる。The object 112 transferred from the outside is sucked and held at a predetermined position on the spin chuck 106. A coating agent adjusted to a temperature optimal for applying the coating agent onto the object 112 held and held by the temperature control pipe 111 inside the temperature control jacket 110 is discharged from the coating agent nozzle 103. Workpiece 1
The coating material discharged onto the substrate 12 is attracted and held by the spin chuck 106 by a rotational force applied to the spin chuck 106 supported by the spin chuck bearing 107 from a motor 108 via a drive shaft 109. 1
12 rotates. By applying a predetermined number of rotations to the object to be coated 112 for a predetermined time, the applied coating material has a desired coating film thickness.
このように、この塗布剤の塗布方法は被塗布物の塗布
処理を直接行なうカップの内部に、常時温度調節された
冷却水を流すことによりカップ自体の温度を直接調節す
る。かつ、内部に冷却水を流すことによりカップ全体の
熱容量が大きくなるため、温度の安定性が向上する。As described above, in the method of applying the coating agent, the temperature of the cup itself is directly adjusted by constantly flowing cooling water whose temperature has been adjusted into the inside of the cup for directly performing the coating treatment of the object to be coated. Moreover, since the heat capacity of the entire cup is increased by flowing the cooling water inside, the stability of the temperature is improved.
第２図は本発明の実施例を説明するための縦断面図で
ある。FIG. 2 is a longitudinal sectional view for explaining an embodiment of the present invention.
第２図に示すように塗布処理部の構成は第１図に示し
た塗布方法とほとんど同じである。As shown in FIG. 2, the configuration of the coating processing section is almost the same as the coating method shown in FIG.
外部から搬送されてきた被塗布物112はスピンチャッ
ク106上の所定位置に吸着保持される。その後、赤外線
検出器201にて常時温度を測定する。赤外線検出器201か
ら得られた温度情報信号を信号処理装置202で処理し、
所定温度（この例の場合塗布剤を塗布するのに最適な温
度から±0.2℃以内）よりも高い、又は低いと判定され
れば制御装置203に動作保持信号を送り、被塗布物112の
温度が所定温度になるまで現在の状態が保持される。温
度情報信号が信号処理装置202で所定温度であると判定
されれば制御装置203に動作開始信号を送り、スピンチ
ャック106上に吸着保持された被塗布物112上に塗布剤ノ
ズル103から塗布剤が吐出され、塗布処理が行なわれ
る。The object 112 transferred from the outside is sucked and held at a predetermined position on the spin chuck 106. Thereafter, the temperature is constantly measured by the infrared detector 201. The temperature information signal obtained from the infrared detector 201 is processed by the signal processing device 202,
If it is determined that the temperature is higher or lower than a predetermined temperature (in this case, within ± 0.2 ° C. from the temperature optimum for applying the coating agent), an operation holding signal is sent to the control device 203, and the temperature of the workpiece 112 is determined. The current state is maintained until reaches a predetermined temperature. If the temperature information signal is determined to be the predetermined temperature by the signal processing device 202, an operation start signal is sent to the control device 203, and the coating material is applied from the coating material nozzle 103 onto the workpiece 112 sucked and held on the spin chuck 106. Is discharged, and a coating process is performed.
このように、実施例では赤外線検出器201で常時被塗
布物112の温度を測定しているので、より確実で精度の
高い温度調節が可能となるため、塗布剤の塗布膜厚均一
性をより向上させることができる利点がある。As described above, in the embodiment, since the temperature of the object to be coated 112 is constantly measured by the infrared detector 201, temperature control can be performed more reliably and with higher accuracy. There are advantages that can be improved.
以上説明したように本発明は、塗布剤と塗布処理部全
体を温度調節するとともに、被塗布物の塗布処理を直接
行なうカップ部を直接温度調節することにより被塗布物
自体の温度変化を最少限に抑えることができるため、塗
布剤の塗布膜厚の均一性をより向上させることができる
効果がある。As described above, the present invention minimizes the temperature change of the object to be coated by controlling the temperature of the coating agent and the entire coating processing part, and also directly controlling the temperature of the cup part for directly performing the coating processing of the object to be coated. Therefore, there is an effect that the uniformity of the coating film thickness of the coating agent can be further improved.
第１図は本発明に関連する塗布剤の塗布方法を説明する
ための縦断面図であり、第２図は本発明の実施例を説明
するための縦断面図である。 101……塗布処理部上部カバー、102……塗布処理部下部
カバー、103……塗布剤ノズル、104……塗布処理部カッ
プ、105……カップ温調用パイプ、106……スピンチャッ
ク、107……スピンチャック軸受け、108……モーター、
109……ドライブシャフト、110……温調ジャケット、11
1……温調用パイプ、112……被塗布物、113……冷却水
供給用パイプ、114……冷却水回収用パイプ、201……赤
外線検出器、202……信号処理装置、203……制御装置。FIG. 1 is a longitudinal sectional view for explaining a method of applying a coating agent related to the present invention, and FIG. 2 is a longitudinal sectional view for explaining an embodiment of the present invention. 101 coating upper cover, 102 coating lower cover, 103 coating agent nozzle, 104 coating processing cup, 105 pipe for temperature control of cup, 106 spin chuck, 107 Spin chuck bearing, 108 …… motor,
109 ... Drive shaft, 110 ... Temperature control jacket, 11
1 ... temperature control pipe, 112 ... object to be coated, 113 ... cooling water supply pipe, 114 ... cooling water recovery pipe, 201 ... infrared detector, 202 ... signal processing device, 203 ... control apparatus.
Claims (2)
記カップを収納するカバーとを有し、前記被塗布物へ塗
布剤の塗布処理を行うスピン塗布装置において、前記カ
ップを所定温度に調節する温度制御手段と、前記被塗布
物の温度を検出する検出手段と、前記検出手段の検出結
果に応じて前記塗布処理の動作を開始させる、或いは動
作を待機させる制御装置とを備えることを特徴とする塗
布剤のスピン塗布装置。1. A spin coating apparatus having a cup provided around an object to be coated and a cover for accommodating the cup, wherein the cup is heated to a predetermined temperature. Temperature control means for adjusting the temperature of the object to be coated, and a control device for starting the operation of the coating processing or waiting for the operation in accordance with the detection result of the detection means. A spin coating device for a coating agent, characterized in that:
を吐出するノズルをさらに備え、前記塗布処理の動作が
開始されると前記ノズルから前記塗布剤が吐出され、前
記塗布処理の動作が待機のときは前記ノズルから前記塗
布剤が吐出されないことを特徴とする請求項１記載の塗
布剤のスピン塗布装置。2. The coating apparatus further includes a nozzle for discharging the coating agent to the object to be coated, and when the operation of the coating process is started, the coating agent is discharged from the nozzle, and the operation of the coating process is performed. 2. The spin-coating device according to claim 1, wherein the coating agent is not discharged from the nozzle when is in a standby state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1129131A JP2933319B2 (en) | 1989-05-22 | 1989-05-22 | Coating agent coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1129131A JP2933319B2 (en) | 1989-05-22 | 1989-05-22 | Coating agent coating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02307568A JPH02307568A (en) | 1990-12-20 |
| JP2933319B2 true JP2933319B2 (en) | 1999-08-09 |
Family
ID=15001868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1129131A Expired - Lifetime JP2933319B2 (en) | 1989-05-22 | 1989-05-22 | Coating agent coating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2933319B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4513999B2 (en) * | 2000-01-17 | 2010-07-28 | 株式会社Ｓｏｋｕｄｏ | Substrate coating device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61190130U (en) * | 1985-05-20 | 1986-11-27 | ||
| JPS6453419A (en) * | 1987-08-24 | 1989-03-01 | Mitsubishi Electric Corp | Resist coating device |
-
1989
- 1989-05-22 JP JP1129131A patent/JP2933319B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02307568A (en) | 1990-12-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090528 Year of fee payment: 10 |
|
| EXPY | Cancellation because of completion of term |