JPH0320724Y2 - - Google Patents

Description

[Detailed explanation of the invention] This standard sample plate is related to a fluorescent X-ray film thickness meter.
This relates to a standard sample plate used for creating a calibration curve for measuring film thickness.

Conventionally, when using a metal foil standard sample to create a calibration curve for film thickness measurement, the metal foil standard sample was handled by placing the metal foil standard sample directly on the material or metal foil standard sample with bare hands or with tweezers. I was creating a line. However, with this conventional configuration, the metal foil standard sample is deformed by heat or external force, and when the metal foil standard samples are overlapped, the metal foil standard sample may become misaligned. It was difficult to create a calibration curve.

The purpose of this invention is to provide an extremely effective means for quickly eliminating the above-mentioned defects, and the object of this invention is to provide an extremely effective means for quickly eliminating the above defects. a holder made of a non-metallic material that is buried in a substantially plate-like shape;
The structure consists of a holding plate into which a metal foil standard sample is sandwiched from both sides so that the metal foil standard sample is located at a position corresponding to the first metal piece, and a frame for fixing the holding body and the holding plate.

Hereinafter, a preferred embodiment of the standard sample plate for a fluorescent X-ray film thickness meter according to this invention will be described with reference to the drawings. FIG. 1 is an assembly diagram of the standard sample plate for a fluorescent X-ray film thickness meter. In the figure, the reference numeral 1 indicates a first holder made of non-metal and formed into a substantially plate shape, and a first metal piece, which is a raw metal, is embedded in one surface of the first holder. . What is denoted by numeral 2 is a second holder having a second metal piece at a position corresponding to the first metal piece on the one surface of the first holder, and what is denoted by numeral 3 is the second holder. The frame body is provided on the one surface of the first holder and has an opening, and has the function of fixing the first holder and the second holder. FIG. 2 is a diagram showing the first holder, in which a is a plan view and b is a longitudinal sectional view. In the figure, what is indicated by the reference numeral 4 is a first metal piece that is a raw metal embedded in one surface of the first holder. FIG. 3 is a diagram showing the second holding body, in which a is a plan view and b is a side view. In the figure, the reference numeral 5 is a second metal foil standard sample of known thickness used for creating a calibration curve, and the reference numeral 6 is a hollowed-out metal foil at a position corresponding to the first metal foil. said second hole having a hole;
A metal plate for gluing and fixing metal pieces.

The second holder has a structure in which the second metal piece is sandwiched between the metal plates from both sides and bonded and fixed. FIG. 4 is a diagram showing the frame, in which a is a plan view and b is a cross-sectional view. The frame body includes the first
It has the function of fixing the holder and the second holder, preventing the second metal piece from shifting, and facilitating the creation of an accurate calibration curve.

Next, to explain the operation, a metal foil standard sample of known thickness (the above-mentioned The second holding body sandwiching the second metal piece) is placed so that the positions of the first and second metal pieces correspond, and the frame body is placed over it, and the first metal piece and the second metal piece The sample plate is fixed so as not to shift in position to form a standard sample plate for a fluorescent X-ray film thickness meter. The second metal piece in the standard sample plate for the fluorescent X-ray film thickness meter is positioned at the primary X-ray irradiation point of the fluorescent X-ray film thickness meter, and the film thickness is measured by the fluorescent X-ray film thickness meter. Create a calibration curve. As a result, when creating a calibration curve for film thickness measurement using a metal foil standard sample, it is possible to prevent the metal foil standard sample from deforming or positioning due to heat or external force, and to create a highly accurate calibration curve for film thickness measurement. Can be created.

As mentioned above, the standard sample plate for fluorescent Since it has a function to prevent positional deviation from the ray irradiation point, it has the excellent effect of creating a highly accurate calibration curve for film thickness measurement.

[Brief explanation of the drawing]

The drawings are drawings showing a standard sample plate for a fluorescent X-ray film thickness meter related to the present invention, FIG. 1 is an assembled perspective view of the present invention, and FIGS. 3A and 3B are a front view and a side view showing the holding plate, and FIGS. 4A and 4B are a front view and a sectional view showing the frame. 1...First holding body, 2...Second holding body, 3
...Frame body, 4...First metal piece, 5...Second metal piece, 6...Metal plate.

Claims (1)

[Scope of utility model registration request] A first holder made of a non-metallic material and configured in a substantially plate shape, a first metal piece embedded in one surface of the first holder, and a hollow hole located at a position corresponding to the first metal piece. a second holding plate made of two metal plates pasted together; a second metal piece sandwiched and fixed at least in the hollow hole between the two metal plates constituting the second holding plate; a frame body having at least an opening in the hollow hole and sandwiching and fixing the second holding body with the first holding body, so that each of the metal pieces can be irradiated with X-rays; Standard sample plate for fluorescent X-ray film thickness meter.