JPH03189909A - Thin film magnetic head - Google Patents

Abstract

PURPOSE:To provide a gap part in the vicinity of the edge of a slider part by embedding a recording and reproducing part in the slider face of the slider part and constituting the magnetic head with a magnetic insulating material holding the gap part of the recording and reproducing part between a lower magnetic layer and an upper magnetic layer. CONSTITUTION:A lower magnetic layer 13 is formed in a recessed part 19 having an oblique part 18 and the bottom part communicated with the oblique part 18. A magnetic insulating material 15 to be a gap 1 is formed on the lower magnetic layer 13, and further a conductive material 4 for coils and an electric insulating material 5 are formed thereon. An upper magnetic layer 14 is formed on the specified area of lower layers and a protective film 16 is attached thereon. The substrate 17 forming the recording and reproducing part 12 in such a manner is worked by the technique such as grinding etching, so as to have the same width as that of a specified slider. Thus, the gap part is accurately formed in the vicinity of the edge of the slider part 10.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a thin film magnetic head, particularly a horizontal thin film magnetic head.

[Conventional technology]

Japanese Patent Application Laid-Open No. 55-1.3251 is one of the magnetic heads conventionally used in magnetic disk storage devices such as electronic computing devices.
There is a thin film magnetic head disclosed in Japanese Patent No. 9.

The structure of this thin film magnetic head is shown in FIG. 5, and FIG. 5 is a sectional view of the recording and reproducing portion thereof.

In the figure, symbol (1) is a gap part provided in the recording/reproducing part, (2) is a slider part in which the recording/reproducing part is provided, (3) is a lower magnetic layer formed on the slider part (2), ( 4) is a coil conductor, (5) is an electrical insulator,
(7-1) is one upper magnetic layer with a tapered gap part (1), (7-2) is the other upper magnetic layer formed through a magnetic insulator (6), and (8) is This is a protective film that protects the recording/playback part.

As explained above, when forming the upper magnetic layer of the conventional thin film magnetic head, the upper magnetic layer (7-
The gap part (1) of 1) is formed to be tapered, a magnetic insulator (6) which becomes the gap part (1) is attached to a part of the taper, and the other upper magnetic layer (7- 2), the structure is such that an accurate gap portion (1) is formed.

[Problem to be solved by the invention]

FIG. 6 is a side view illustrating the thin film magnetic head floating above the medium.

In the figure, when the medium (9) travels in the direction of the arrow, the slider part (2) tilts upward to the right as shown. Therefore, the distance of the gap portion (1°) from the end of the slider portion! As becomes larger, the distance between the gap portion (1) and the medium (9) becomes larger, and as a result, the electromagnetic conversion characteristics deteriorate. As a result, it is desirable that the gap portion (1) be located near the end face of the slider portion.

However, in the conventional thin film magnetic head, the upper magnetic layer (7-1
), (7-2> is 2 with gap part (1) as the border
There is a problem in that it is difficult to set the position of the gap part (1) near the end face of the slider part (2) because of the division. had.

The present invention was made to solve the above-mentioned problems, and an object of the present invention is to obtain a thin-film magnetic head in which a gap portion can be provided near the end face of a slider portion.

[Means to solve the problem]

In the thin film magnetic head according to the present invention, the recording/reproducing section is embedded so that the upper surface of the recording/reproducing section coincides with the slider surface of the slider section, and the recording/reproducing section has a gap formed at an angle. However, it is composed of a magnetic insulator sandwiched between a lower magnetic layer and an upper magnetic layer, which are tilted so that the end side of the slider portion is on the slider surface. .

[For production]

In the thin film magnetic head of the present invention, a recording/reproducing section is embedded in the slider surface of the slider section, and a gap section of the recording/reproducing section is formed between a lower magnetic layer and an upper magnetic layer, which are provided at an angle. Since the structure is made of magnetic insulators placed between them, an accurate gap can be formed in the vicinity of the end face of the slider section.

〔Example〕

The present invention will be explained below based on the drawings showing one embodiment thereof. Note that in the figure, the parts indicated by symbols (1), (4), and (5) are the same as or equivalent to those indicated by the same symbols in a conventional thin film magnetic head.

FIG. 1 is a perspective view showing a slider section according to an embodiment of the present invention, and FIG. 2 is a sectional view showing details of the recording/reproducing section taken along line 1--2 in FIG.

In the figure, symbol (10) is the slider section, (11) is the slider surface of the slider section (10), and (12) is a recording/reproducing section that is embedded in the slider section (10) and whose upper surface is the same as the slider surface (11). The gap portion (1) is constituted by a magnetic insulator (15) provided between a lower magnetic layer (13) and an upper magnetic layer (14) which are respectively inclined. The slopes of the lower magnetic layer (13) and the upper magnetic layer (14) are formed such that the upper end of the lower magnetic layer (13) is located at the end of the slider section (10).

Further, a coil conductor (4) is provided between the parallel portions of the lower and upper magnetic layers (13) and (1, 4) via an electrical insulator (5). Furthermore, (16) is a protective film.

Next, an example of the main intermediate steps for manufacturing the thin film magnetic head having the above structure will be explained with reference to FIGS. 3 and 4. FIG.

As shown in FIGS. 3a and 4a, the substrate (17) is etched by sputter etching using a mask patterned with the part where the recording/reproducing section (12) is to be buried in the substrate (17).
) is etched to form a recess (1
9).

Next, as shown in Fig. 3, the recording/reproducing part (12) is formed in the recess (19), and the detailed views of this forming process are shown in Fig. 4 and subsequent figures. Each country is a cross-sectional view taken along the line ■-■ shown in Figure 3.

First, a lower magnetic layer (13) is formed on the sloped part (18) of the depression (19) having the sloped part (18) and the bottom part connected thereto (FIGS. 4a and 4b).

Next, a magnetic insulator (15) which becomes the gap (1) is formed on the lower magnetic layer (13) (FIG. 4C).

Next, using photolithography technology, film formation technology, etc.
Figure 4d) to form the coil conductor (4) and the electrical insulator (5).

After that, an upper magnetic layer (1
4), and then a protective film (16) is deposited thereon (FIG. 4e).

The substrate (17) on which the recording/reproducing section (12) is formed as described above is polished, etched, etc. so that it has the same width (20) as the predetermined slider width, as shown in FIG. Processed using the same technology.

Next, the protective film (
16) Wrap the surface.

Thereafter, by cutting along the cutting line (21) in FIG. 3, a desired thin film magnetic head as shown in FIG. 1 can be obtained.

In the above embodiment, the recess (19) in which the recording/reproducing section (12) is buried is formed on the substrate (17) by a technique such as etching, but the invention is not limited to this.
It goes without saying that the slider portion having the recess (19) and the width (20) can be processed using film forming techniques such as photolithography and sputtering.

〔Effect of the invention〕

As described above, according to the present invention, the recording/reproducing section is embedded in the slider surface so that the two surfaces coincide with each other, and the gap section of the slider section formed at an angle is It is composed of a magnetic insulator sandwiched between a lower magnetic layer and an upper magnetic layer, which are tilted so that the end side is on the slider surface.
The gap portion of the slider surface can be provided near the end face of the slider portion, and this has the effect of providing a thin film magnetic head in which an accurate gap portion can be formed.

[Brief explanation of drawings]

1 is a perspective view showing a slider portion of an embodiment of a thin film magnetic head according to the present invention, FIG. 2 is a sectional view taken along the line ■-■ in FIG. 1, and FIG. A perspective view of the state in which the recess (19) is formed during the manufacturing process, FIG. 3A is a perspective view of the state when each part is provided in the recess (19) in FIG. 3a to 3. Figure 5 is a cross-sectional view showing the slider part of a conventional thin film magnetic head. Figure 6 is a cross-sectional view showing the slider part of Figure 5. FIG. 3 is an explanatory side view illustrating the gap between the gear pump and the medium when the device floats above the medium. (1)...Gap part, (10)...Slider part, (1
1)...Slider surface, (12)...Recording/playback section, (13
)...Lower magnetic layer, (14)...Upper magnetic layer, (15)
Magnetic insulator, (16)...protective film, (18)...slanted portion, (19)...indentation. In each figure, the same reference numerals indicate the same or corresponding parts.

Claims (1)

[Claims] In a thin-film magnetic head having a slider section, a recording/reproducing section is embedded so that its top surface coincides with the slider surface of the slider section, and the inclined gap section of the recording/reproducing section corresponds to the slider surface of the slider section. 1. A thin-film magnetic head comprising a magnetic insulator sandwiched between a lower magnetic layer and an upper magnetic layer, which are provided in an inclined manner so that the end portion of the head is on the slider surface.