JPH0318778A - Integrated circuit element inspection device - Google Patents

Abstract

PURPOSE:To facilitate the inspection by fetching an input waveform and an output waveform to the inside of a memory with an analog/digital converter, restoring the input waveform, based thereon as a reference, bringing an output signal to analog/digital conversion and comparing it with the data of the inside of the memory. CONSTITUTION:The input waveform and the output waveform of a DUT 2 are inputted to input/output signal memory devices 12, 13 by analog/digital converters 8, 9. As for a signal stored in the device 12, under the control of a controller 17, the input signal of the DUT 2 is restored and applied to an input terminal by a digital/analog converter 14. The output of the DUT 2 is brought to digital conversion by an analog/digital converter 15 under the control of the controller 17, compared with the signal of the part of the same operation as the output of the reference DUT stored in the device 13 by a comparator 16 and the propriety is decided by the controller 17. In such a manner, the evaluation and the inspection can always be executed easily in the same state as unitial setting.

Description

DETAILED DESCRIPTION OF THE INVENTION FIELD OF INDUSTRIAL APPLICATION The present invention relates to an integrated circuit device testing device that improves the efficiency of the testing device development process during integrated circuit device manufacturing.

BACKGROUND OF THE INVENTION FIG. 2 is a conceptual diagram of a conventional integrated circuit device evaluation and inspection device. Integrated circuit element under test (hereinafter referred to as OUT
) 2 is applied with a signal given by a signal source 1, a receiver e, etc., while a DUT peripheral circuit 4 is connected to peripheral components such as a power supply, a capacitor, and a resistor. The output of the DUT is connected to the signal processing device 3, which demodulates the output of the DUT2,
The controller 6t* performs signal processing and passes the result to the monitor 7, and the controller 6 makes a quality determination.The monitor 7 outputs audio, images, etc., and performs a sensory test by a person to determine quality.

Problems to be Solved by the Invention As can be seen from this example, in the conventional evaluation and inspection method, the DU
Signal source 1 of T2 has 20 types of DUTs, for example, for radio, T
There is not just one type of input signal, such as for V, computer, etc. Therefore, as shown by the dotted line in FIG. 2, the κ signal source 1 is
For example, the receiver 6 needs to be a radio receiver or a TV receiver. Similarly, signal processing device 3, monitor 7
The same goes for DUT 2, and depending on the type of DUT 2, it is necessary to switch to, for example, a TV monitor or a speaker. On the other hand, this one box requires sensory testing and is not suitable for production processes. Therefore, regarding the sensory test part, in order to create test specifications that allow automatic judgment, a step is required to clarify the setting criteria for input signals, the judgment criteria for output signals, etc.

Means for Solving the Problem In order to solve this problem, the present invention captures the input waveform and output waveform of the DUT2 into a memory using an analog-to-digital converter, and uses the input waveform and output waveform of the integrated circuit device under test as a reference. By restoring the shape and giving it, the output signal is converted from analog to digital, and compared with the data in the memory to judge whether it is good or bad. Solve this problem. That is, there is no need to prepare an expensive input signal source, and there is no need to consider an output monitor. On the other hand, the process of clarifying test specifications for sensory tests can also be naturally omitted.

The combination of functions eliminates the need for multiple types of signal sources, receivers, and monitors, which are required with conventional evaluation and inspection methods. By using Kakitoko's method, the state at the time of initial evaluation is always restored and maintained, making it possible to maintain and ensure product quality.

Embodiment FIG. 1 is a conceptual diagram of an integrated circuit device testing apparatus according to the present invention. FIG. 2 shows a conceptual diagram of the conventional method, which on the one hand serves as the standard for inspection. Therefore, from now on, the reference device, reference DUT, etc. will be referred to in FIG. 2 for the following explanation. In FIG. 1, the input of the analog-to-digital converter 8 is connected to a plurality of input terminals of a reference DUT, and the analog-to-digital converter 9 is connected to a plurality of output terminals of the reference DUT. Control signals from the controller 5 activate the respective devices by means of the reference device (FIG. 2) and the controller 17 of FIG. 1 according to the invention. The reference device performs the reference operation as usual. On the other hand, the analog-to-digital converter 8.9 digitally converts the input and output signals of the reference DUT under the control of the controller 17, and the data compressor 10.11 compresses the digital signal and input and output signals are stored in the memory device 12. 13 to be memorized. Thereafter, the same procedure is repeated and the reference 1) input and output signal waveforms at the UT are captured in the memory device 12.13. (This reference device is not needed after this.) Under the control of the controller 17, the signal stored in the input signal memory device 12 activates the DUT peripheral circuit 4 and connects the power supply voltages C, R, etc. to the DUT 2. Then, the digital-to-analog converter 14 restores the input signal of the DUT 2 and applies it to the input terminal. On the other hand, the output of the DUT 2 normally outputs a signal similar to that of the reference device according to the input signal. This output is digitally converted by an analog-to-digital converter 15 under the control of a controller 17, and an output signal memory device 1
A comparator 16 compares the signal with a signal of the same operation as the output of a reference DUT stored in the DUT 3, and a controller 17 makes a quality determination. The controller 17 has an input signal memory device 1
By activating the output signal memory device 13 at the same time as activating the DUT 2, it should be possible to synchronize the output timing of the output signal of the DUT 2. However, in reality, peripheral circuits, digital, analog converters, and analog/digital converters There is a delay in operation. On the other hand, synchronization may be necessary in some cases due to operational delays, malfunctions, etc. of the DUT 2, and synchronization processing such as re-inputting input signals is required.

Furthermore, if data variations occur due to variations in the characteristics of the DUT 2, mere comparison of digital signals by the comparator 16 will result in an erroneous determination, and determination based on upper and lower limit values is required. The controller 17 performs these controls.

Effects of the Invention By using the integrated circuit device testing device of the present invention, evaluation and testing can be easily performed in the same state as initially set, and pass/fail judgments regarding sensory tests can also be easily set.

[BRIEF DESCRIPTION OF THE DRAWINGS] FIG. 1 is a conceptual diagram showing an integrated circuit device testing apparatus of the present invention;
FIG. 2 is a conceptual diagram of a conventional example. 1... Signal source that generates various signal waveforms, 2.
... DtJT, 3, which is the integrated circuit element to be measured.
...D[Demodulation of the output signal of TT2. Signal processing device that performs modulation, etc., 4...Power source for DUT2. Peripheral circuits such as capacitors and resistors, 6, 17... Controller for overall control, quality judgment, etc., 6...
Receiver for TV, radio, etc. for obtaining signals that cannot be obtained from signal source 1, 7... images for sensory testing,
Monitor for audio, etc., 8... Analog-to-digital converter for reading signals from the DUT input terminal, 9...D
Analog-to-digital converter for reading the signal of the UT output terminal, 10.11...Analog-to-digital converter8.
a data compressor for compressing the output digital signal of 9; 12.
13...Data compressor 10. 1 Input compressed by 1 respectively. a memory device for storing output signals, 14.
...Digital-to-analog converter for input signal restoration,
16... Analog-to-digital converter for capturing the output signal of DUT 2, 16...... Output digital signal of the analog-to-digital converter 16 and output digital signal of the reference DUT stored in the memory device 13. Comparator to compare.

Claims (1)

[Claims] The signal waveforms of the multiple input terminals and output terminals of the integrated circuit element incorporated in the standard evaluation device are captured into memory using multiple analog-to-digital converters, and the memory contents are read out and processed using multiple digital-to-analog converters. The input signal is restored and applied to the input terminal of the integrated circuit element under test, and the output signal of the integrated circuit element under test is converted into a digital signal by the analog-to-digital converter, and the output signal equivalent to the output signal in the memory is converted into a digital signal. An integrated circuit device testing device characterized by comparing signals to determine pass/fail.