JPH03184338A - Apparatus for lifting out of pure water and drying - Google Patents

Abstract

PURPOSE:To improve drying quality by providing a function of removing bubbles in pure water to be supplied to a pure water tank, and lifting a substrate while always allowing the water of the tank to overflow. CONSTITUTION:A lifting out of pure water and drying apparatus for lifting a substrate at an extremely low speed from a pure water tank 1 and drying it has a function of removing bubbles in the pure water to be supplied to the tank 1. For example, before the water heated by a pure water heating unit 15 and mixed with bubbles of steam is introduced to the tank 1, the bubbles in the hot water is separated by a bubble removing tank 12. The bubbles are moved to the top of the tank 12, drained from a bubble drain pipe 13, and the hot pure water is supplied to the tank 1 in a state having no bubble in the water. Thus, since the waving of the surface of the water of the tank 1 due to the bubbles in the wafer is eliminated, the substrate can be lifted while always allowing the water of the tank 1 to overflow. Accordingly, particles of the surface layer of the tank 1 can be reduced, and drying quality of the substrate can be improved.

Description

Detailed Description of the Invention [Industrial Application Field] The present invention is used in the drying process after cleaning of semiconductor silicon substrates, photomasks, liquid crystal panel glass substrates, optical lenses, etc. (hereinafter simply referred to as substrates). Related to pure water pulling and drying equipment.

[Conventional technology]

A conventional pure water pulling and drying device will be explained with reference to FIG. Pure water heated by the pure water heating unit 15 is supplied to the pure water tank 1 from the pure water supply vibrator 2, diffused by the dispersion plate 3, and flows in the tank. When the pure water tank 1 is filled with pure water, the pure water overflows from the upper part of the pure water tank 1, the overflowing pure water is received in the overflow tank 4, and is discharged from the drainage vibrator 5. On the other hand, the board 6 is set in the cassette 7,
This is received in basket 8. Robot arm 9
The robot 10 moves it up and down. When pulling up the substrate, first, as shown in Fig. 4, the substrate 6 is completely submerged in the pure water tank L, and then it is pulled up at a very slow speed of 1 to 10 mm per second, and the surface tension of the pure water is used to attach it to the substrate. Eliminate water droplets as much as possible. If the deionized water in the deionized water tank l is overflowed when performing this lifting, the steam bubbles generated when the deionized water is heated in the deionized water heating unit 15 will
Since these bubbles are mixed with warm pure water and supplied to the pure water tank, when these bubbles leave the water surface of the pure water tank 1, they cause ripples on the water surface.If the water surface is rippled, water droplets tend to remain on the substrate 6, causing a striped pattern. remains and the drying quality deteriorates. Therefore, before lifting the substrate, pure water is supplied to cause an overflow, but when lifting the substrate, the supply of pure water is stopped using the valve 11, and the water surface is held still while the substrate is lifted.

[Problem to be solved by the invention]

However, if the supply of pure water is stopped and the water surface is kept still when lifting the substrate, the particles in the liquid will stay in the upper layer, and the particles in the air will also be captured on the water surface and float, resulting in a concentration of particles on the water surface. becomes extremely high.

If the substrate is pulled up in this state, the water surface layer near the substrate will be drawn to the substrate surface as the substrate rises, and the substrate will rise while attaching particles on the water surface layer, resulting in a corresponding drop in drying quality. have Therefore, in order to solve these conventional problems, the present invention is designed to remove bubbles from pure water before supplying it to a pure water tank, or to supply pure water to a pure water tank after supplying it. The purpose of this method is to improve drying quality by removing bubbles from pure water in a water tank so that the substrate can be pulled up while constantly overflowing the pure water in the water tank.

[Means for Solving the Problems] In order to solve the above problems, the deionized water pulling and drying device of the present invention is a deionized water pulling and drying device that pulls up and dries a substrate from a deionized water tank at a very low speed. It is characterized by the ability to remove bubbles from the water.

[Function] By removing the bubbles in the pure water as described above, the substrate can be pulled up while the pure water in the pure water tank is constantly overflowing, which reduces the concentration of particles that remain on the surface layer of the water surface and prevents them from adhering to the substrate. Since the number of particles is reduced, the drying quality of the substrate is improved.

[Example] Examples of the present invention will be described below based on the drawings. In FIG. 1, pure water heated by a pure water heating unit 15 and mixed with steam bubbles is separated from the bubbles in the warm pure water in a bubble removal tank 12 before entering the pure water tank 1. Foam is removed from the foam removal tank 12
The warm pure water is moved to the upper part of the tank and discharged from the bubble discharge vibrator 13, and the warm pure water is supplied to the pure water tank 1 without bubbles in the pure water. This eliminates ripples on the water surface of the pure water tank 1 due to bubbles in the pure water, so the substrate 6 can be pulled up while the pure water in the pure water tank 1 is constantly overflowing. As a result, particles on the water surface layer of the pure water tank 1 can be reduced, and the substrate 6
In this embodiment, bubbles are removed before entering the pure water tank 1, but there is also a method of removing bubbles as shown in FIG.

In this case, bubbles in the pure water supplied from the bottom of the pure water tank 1 enter the bubble removal box 14 located above the outlet of the pure water supply vibrator 2, and are discharged from the pure water tank 1 through the bubble discharge vibrator 13. . Another method is as shown in FIG. 3, in which the bubbles in the pure water supplied to the bubble removal tank 12 are discharged from the upper part of the bubble removal tank 12, and the pure water overflows from the bubble removal tank 12. The water enters the intermediate tank 16 and is supplied to the pure water tank 1 from below the intermediate tank 16. Alternatively, without providing the bubble removal tank 12, pure water is supplied from the intermediate tank 16, the bubbles in the pure water are discharged from the upper part of the intermediate tank 16, and the pure water is supplied from the bottom of the intermediate tank 16 to the pure water tank l. There is a way.

[Effects of the Invention] The pure water lifting and drying device of the present invention equipped with a function of removing bubbles from pure water does not cause ripples on the water surface of the pure water tank due to bubbles in the pure water, so the pure water in the pure water tank is always kept clean. Since the substrate can be pulled up while overflowing, particles on the water surface layer can be reduced and the drying quality of the substrate can be improved.

[Brief explanation of drawings]

1, 2, and 3 are schematic diagrams of a deionized water pulling and drying device having a function of removing bubbles from deionized water according to the present invention. FIG. 4 is a schematic diagram of a conventional pure water pulling and drying device. 1...Pure water tank 2...Pure water supply vibrator 3...Dispersion plate 4...Overflow tank 5 ・ 6 ・ 7 ・ 8 ・ 9 ・ 10 ・ 11 ・ l 2 ・ 13 ・ 14 ・ l 5 ・l 6 ・・Drainage pipe, board, cassette, basket, robot arm, robot, valve, foam removal tank, foam discharge pipe, foam removal box, pure water heating unit, intermediate tank

Claims (1)

[Claims] A deionized water pulling and drying device for drying a substrate by pulling it up at a very low speed from a deionized water tank, characterized in that the deionized water pulling and drying device is equipped with a function of removing bubbles from the pure water supplied to the deionized water tank.