JPH0317948Y2 - - Google Patents
Info
- Publication number
- JPH0317948Y2 JPH0317948Y2 JP1985196531U JP19653185U JPH0317948Y2 JP H0317948 Y2 JPH0317948 Y2 JP H0317948Y2 JP 1985196531 U JP1985196531 U JP 1985196531U JP 19653185 U JP19653185 U JP 19653185U JP H0317948 Y2 JPH0317948 Y2 JP H0317948Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode plate
- dust collection
- dust
- dust collecting
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 claims description 79
- 230000001954 sterilising effect Effects 0.000 claims description 29
- 238000004659 sterilization and disinfection Methods 0.000 claims description 20
- 238000010438 heat treatment Methods 0.000 claims description 8
- 230000006698 induction Effects 0.000 claims description 6
- 238000011144 upstream manufacturing Methods 0.000 claims description 5
- 241000894006 Bacteria Species 0.000 description 13
- 230000000694 effects Effects 0.000 description 4
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 3
- 238000004887 air purification Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000002070 germicidal effect Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000005679 Peltier effect Effects 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 244000052616 bacterial pathogen Species 0.000 description 1
- 239000003899 bactericide agent Substances 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
Landscapes
- Electrostatic Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985196531U JPH0317948Y2 (de) | 1985-12-23 | 1985-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985196531U JPH0317948Y2 (de) | 1985-12-23 | 1985-12-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62106641U JPS62106641U (de) | 1987-07-08 |
| JPH0317948Y2 true JPH0317948Y2 (de) | 1991-04-16 |
Family
ID=31155438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985196531U Expired JPH0317948Y2 (de) | 1985-12-23 | 1985-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0317948Y2 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2627575B2 (ja) * | 1990-08-15 | 1997-07-09 | 高砂熱学工業株式会社 | 半導体製造用クリーンルームの海塩粒子汚染防止方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4958691A (de) * | 1972-10-09 | 1974-06-06 | ||
| JPS5438046U (de) * | 1977-07-13 | 1979-03-13 |
-
1985
- 1985-12-23 JP JP1985196531U patent/JPH0317948Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4958691A (de) * | 1972-10-09 | 1974-06-06 | ||
| JPS5438046U (de) * | 1977-07-13 | 1979-03-13 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62106641U (de) | 1987-07-08 |
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