JPH0317948Y2 - - Google Patents
Info
- Publication number
- JPH0317948Y2 JPH0317948Y2 JP1985196531U JP19653185U JPH0317948Y2 JP H0317948 Y2 JPH0317948 Y2 JP H0317948Y2 JP 1985196531 U JP1985196531 U JP 1985196531U JP 19653185 U JP19653185 U JP 19653185U JP H0317948 Y2 JPH0317948 Y2 JP H0317948Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode plate
- dust collection
- dust
- dust collecting
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 claims description 79
- 230000001954 sterilising effect Effects 0.000 claims description 29
- 238000004659 sterilization and disinfection Methods 0.000 claims description 20
- 238000010438 heat treatment Methods 0.000 claims description 8
- 230000006698 induction Effects 0.000 claims description 6
- 238000011144 upstream manufacturing Methods 0.000 claims description 5
- 241000894006 Bacteria Species 0.000 description 13
- 230000000694 effects Effects 0.000 description 4
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 3
- 238000004887 air purification Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000002070 germicidal effect Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000005679 Peltier effect Effects 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 244000052616 bacterial pathogen Species 0.000 description 1
- 239000003899 bactericide agent Substances 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
Landscapes
- Electrostatic Separation (AREA)
Description
【考案の詳細な説明】
［産業上の利用分野］
この考案は集塵殺菌装置に関するもので、更に
詳細には、空気中の塵埃の除去を行う空気清浄と
空気中の人体に有害な細菌や黴の除去を目的とす
る集塵殺菌装置に関するものである。[Detailed description of the invention] [Industrial application field] This invention relates to a dust collection and sterilization device, and more specifically, to air purification that removes dust from the air, and bacteria and bacteria that are harmful to the human body in the air. This invention relates to a dust collection and sterilization device for the purpose of removing mold.
［従来の技術］
一般に、半導体・電子機器・精密機械工業等の
生産ラインに活用されている工業用クリーンルー
ムや医療・薬品・食品工業関係等のバイオロジカ
ルクリーンルーム等においては、空気中の塵埃の
他に黴菌を除去する必要があるため、空気清浄機
と共に、空気調節装置に積層フイルタ等を使用し
て細菌を捕捉している。[Conventional technology] In general, in industrial clean rooms used in production lines for semiconductors, electronic equipment, precision machinery, etc., and biological clean rooms for medical, pharmaceutical, and food industries, etc., in addition to dust in the air, Since it is necessary to remove mold and germs, in addition to air purifiers, laminated filters and the like are used in air conditioning equipment to capture bacteria.
［考案が解決しようとする問題点］
しかしながら、従来の積層フイルタ等において
はフイルタで捕捉された細菌がフイルタ内で繁殖
してしまい、逆にフイルタが細菌発生源となつて
クリーンルーム内を汚染するという不都合があつ
た。この問題を解決するために上記フイルタ内に
殺菌剤を含浸させたものもあるが、細菌を効果的
に死滅させることは困難であつた。また、空気清
浄機中にフイルタを使用すると圧力損失が大きく
なり、空気圧送用のフアンに過度の負荷をかけ、
集塵能率の低下をきたすこととなる。この問題を
解決するためには装置全体を大型化しなければな
らないという問題がある。さらには、空気清浄と
殺菌の双方を同時に行うには、空気清浄器と殺菌
装置を別個に設けなければならず、設備が大掛か
りとなると共に、室内のスペースの有効利用が図
れないという問題もある。この問題を解決する手
段として、空気清浄装置に、紫外線殺菌灯、水銀
放電殺菌灯、ペルチエ効果の利用等の殺菌用の加
熱手段を配設したものが知られている（実公昭54
−38046号公報、特公昭35−5743号公報、特開昭
49−58691号公報参照）。[Problems that the invention aims to solve] However, in conventional laminated filters, the bacteria captured by the filters breed inside the filters, and conversely, the filters become a source of bacteria and contaminate the clean room. There was an inconvenience. In order to solve this problem, some filters have been impregnated with a bactericidal agent, but it has been difficult to effectively kill bacteria. Additionally, if a filter is used in an air purifier, the pressure loss will increase, placing an excessive load on the air pressure fan.
This will result in a decrease in dust collection efficiency. In order to solve this problem, there is a problem in that the entire device must be increased in size. Furthermore, in order to perform both air purification and sterilization at the same time, it is necessary to install an air purifier and a sterilizer separately, which results in large-scale equipment and the problem of not being able to effectively utilize indoor space. . As a means to solve this problem, air purifiers are known that are equipped with heating means for sterilization, such as ultraviolet germicidal lamps, mercury discharge germicidal lamps, and the use of the Peltier effect.
-38046 Publication, Japanese Patent Publication No. 35-5743, Japanese Patent Publication No. Sho
(See Publication No. 49-58691).
しかし、前二者すなわち実公昭54−38046号公
報、特公昭35−5743号公報に記載のものは、集塵
部の側部あるいは放電部と集塵部との間に殺菌手
段を配設する構造であるため、装置全体が大型化
すると共に、構造が複雑になるという問題があ
り、また、後者すなわち特開昭49−58691号公報
に記載のものは集塵極板に加熱手段を一体に配設
するため、装置の小型化は図れるが、構造が複雑
になると共に、高価になるという問題がある。 However, in the first two, that is, those described in Japanese Utility Model Publication No. 54-38046 and Japanese Patent Publication No. 35-5743, a sterilizing means is provided on the side of the dust collection section or between the discharge section and the dust collection section. Because of this structure, there is a problem that the entire device becomes large and complicated, and the latter, that is, the device described in Japanese Patent Application Laid-Open No. 49-58691, has heating means integrated into the dust collecting electrode plate. Although the arrangement allows the device to be made smaller, there are problems in that the structure becomes complex and expensive.
［問題点を解決するための手段］
この考案は上記問題を解決することを企図して
なされたもので、上記技術的課題を解決するため
に、空気清浄手段と殺菌手段とを一体に具備し
て、空気清浄と空気殺菌を同時に行えるようにす
ると共に、装置全体を小型かつ簡略化にして低廉
にしたことを特徴とする集塵殺菌装置を提供しよ
うとするものである。[Means for solving the problem] This invention was made with the intention of solving the above problem, and in order to solve the above technical problem, an air purifying means and a sterilizing means are integrated. Therefore, it is an object of the present invention to provide a dust collecting and sterilizing device which is capable of simultaneously performing air purification and air sterilization, and which is characterized in that the entire device is small and simple and inexpensive.
すなわち、この考案は、空気流路の上流側に配
設されるコロナ放電部とこのコロナ放電部の下流
側に配設される集塵部とを有すると共に、上記集
塵部内に殺菌手段を配設して成り、上記殺菌手段
を、集塵部を構成する熱伝導性の集塵極板及び集
塵対極板と、これら集塵極板と集塵対極板との間
に配設されて磁気誘導加熱作用によりこれら集塵
極板及び集塵対極板を加熱する高周波電流通電コ
イルとで構成して成ることを特徴とする集塵殺菌
装置を提供しようとするものである。 That is, this invention has a corona discharge section disposed on the upstream side of the air flow path and a dust collection section disposed on the downstream side of the corona discharge section, and a sterilization means is disposed within the dust collection section. The sterilization means is arranged between a thermally conductive dust collection electrode plate and a dust collection return electrode plate constituting the dust collection section, and a magnetic The object of the present invention is to provide a dust collection and sterilization device characterized by comprising a high-frequency current-carrying coil that heats the dust collection electrode plate and the dust collection counter electrode plate by induction heating.
［作用］ 上記技術的手段は次のように作用する。[Effect] The above technical means works as follows.
空気流路内に供給された空気はコロナ放電部及
び集塵部を通過する際、空気中の塵埃がコロナ放
電部により帯電されると共に、コロナ放電による
オゾンを受けて細菌の一部が殺菌される。その後
集塵部内において空気中の残りの細菌は殺菌手段
の磁気誘電作用により死滅され、そして、帯電さ
れた塵埃と死滅された細菌は集塵部の集塵対極板
にて共に捕集されて清浄及び除菌された空気のみ
が取出される。 When the air supplied into the air flow path passes through the corona discharge section and the dust collection section, the dust in the air is charged by the corona discharge section, and some of the bacteria are sterilized by receiving ozone from the corona discharge. Ru. Thereafter, the remaining bacteria in the air are killed in the dust collecting section by the magnetic dielectric action of the sterilizing means, and the charged dust and killed bacteria are collected together by the dust collecting counter electrode plate of the dust collecting section and cleaned. and only sterilized air is taken out.
［実施例］
以下にこの考案の実施例を図面に基いて説明す
る。[Example] An example of this invention will be described below based on the drawings.
第１図はこの考案の集塵殺菌装置の第一実施例
を示す概略断面図で、この考案の集塵殺菌装置
は、空気流路１０の上流側に配設されるコロナ放
電部２０と、このコロナ放電部２０の下流側に配
設される集塵部３０と、上記集塵部３０内に配設
される殺菌手段を構成する高周波電流通電コイル
４４とで構成されている。 FIG. 1 is a schematic sectional view showing a first embodiment of the dust collection and sterilization device of this invention, which includes a corona discharge section 20 disposed on the upstream side of the air flow path 10, It is composed of a dust collection section 30 disposed downstream of the corona discharge section 20, and a high frequency current energizing coil 44 constituting a sterilization means disposed within the dust collection section 30.
上記コロナ放電部２０は、複数の先尖状放電針
２２を有する放電極板２４と、この放電極板２４
の各先尖状放電針２２の先端を中心に位置する複
数の透孔２６を穿設した放電対極板２８とで構成
されている。この場合、上記放電極板２４は、例
えば板厚が0.1〜3.0mm好ましくは0.2〜1.0mmのス
テンレス鋼あるいは普通鋼、銅、真鍮、アルミニ
ウム等の強度を有する導電性金属板にて形成さ
れ、また、上記放電対極板２８は、アルミニウム
合金等の金属板又は少なくとも透孔２６を含む表
面に導電性金属を被服した樹脂基板にて形成され
ている。このように形成される放電極板２４は電
源５０の陰極に、また、放電対極板２８は電源５
０の陽極に接続されており、これら放電極板２４
と放電対極板２８との間に電圧が印加されると、
両者間にコロナ放電が生じるようになつている。
なおこの場合、放電極板２４と放電対極板２８と
を逆極性にして陽極放電を行うようにしてもよ
い。かかるコロナ放電は、例えば、家庭用交流電
源（100V）を変圧し、かつ、整流することで得
られる4.5〜5KV，0.01〜1mAの直流電流で行う
ことができる。 The corona discharge section 20 includes a discharge electrode plate 24 having a plurality of pointed discharge needles 22, and a discharge electrode plate 24 having a plurality of pointed discharge needles 22.
and a discharge return electrode plate 28 in which a plurality of through holes 26 are formed centered at the tips of the pointed discharge needles 22. In this case, the discharge electrode plate 24 is formed of a strong conductive metal plate such as stainless steel, common steel, copper, brass, or aluminum, with a thickness of 0.1 to 3.0 mm, preferably 0.2 to 1.0 mm, Further, the discharge return electrode plate 28 is formed of a metal plate such as an aluminum alloy or a resin substrate whose surface including at least the through holes 26 is coated with a conductive metal. The discharge electrode plate 24 formed in this way serves as the cathode of the power source 50, and the discharge return electrode plate 28 serves as the cathode of the power source 50.
0, and these discharge electrode plates 24
When a voltage is applied between and the discharge return electrode plate 28,
A corona discharge is generated between the two.
In this case, the discharge electrode plate 24 and the discharge counter electrode plate 28 may have opposite polarities to perform anodic discharge. Such corona discharge can be performed using, for example, a DC current of 4.5 to 5 KV and 0.01 to 1 mA obtained by transforming and rectifying a household AC power source (100 V).
上記集塵部３０は、交互に対峙される集塵極板
３１と集塵対極板３２とで構成されており、例え
ばアルミニウム等の導電性金属板あるいは紙、樹
脂基板の表面に導電性被膜を施したものなどにて
形成されている。このように形成される集塵極板
３１は電源５０の陽極に接続され、また、集塵対
極板３２は電源５０の陰極に接続されて、上記放
電部２０において陰極により帯電された塵埃が集
塵対極３２にて反発されて集塵極板３１に捕集さ
れるようになつている。なお、上記放電部２０を
陽極放電とした場合には、集塵極板３１と集塵対
極板３２の電極は逆極性になる。 The dust collecting section 30 is composed of a dust collecting electrode plate 31 and a dust collecting counter electrode plate 32 that face each other alternately. It is made of things that have been applied. The dust collection electrode plate 31 formed in this way is connected to the anode of the power source 50, and the dust collection counter electrode plate 32 is connected to the cathode of the power source 50, so that the dust charged by the cathode in the discharge section 20 is collected. The dust is repelled by the counter electrode 32 and collected by the dust collecting electrode plate 31. In addition, when the said discharge part 20 is made into an anode discharge, the electrode of the dust collection electrode plate 31 and the dust collection counter electrode plate 32 will have opposite polarity.
一方、上記高周波電流通電コイル４４は、第２
図に示すように、熱伝導性の良好なアルミニウム
板にて形成される集塵極板３１と集塵対極板３２
との間に配設され、通電された際に、その磁気誘
導加熱作用により集塵極板３１及び集塵対極板３
２を短時間に加熱して殺菌することができるよう
になつている。 On the other hand, the high frequency current energizing coil 44 is connected to the second
As shown in the figure, a dust collection electrode plate 31 and a dust collection counter electrode plate 32 are made of an aluminum plate with good thermal conductivity.
When energized, the magnetic induction heating action causes the dust collecting electrode plate 31 and the dust collecting counter electrode plate 3 to
2 can be heated and sterilized in a short period of time.
上記のように構成されるこの考案の集塵殺菌装
置Ａは、例えば第５図に示すようなクリーンルー
ム６０の空気供給口６１に設置されて、フアン６
２及び温度調節装置６３によりクリーンルーム６
０の空気排出口６４から取出された汚染空気が空
気流路１０内に供給されて空気流路１０を通過す
る際、コロナ放電部２０にて空気に高電圧を印加
して、空気中の塵埃を帯電させると共に、オゾン
を浴びさせ、高周波通電コイル４４の磁気誘導加
熱作用により空気中の細菌を死滅させた後、集塵
部３０の集塵極板３１にて塵埃及び死滅された細
菌を捕集して、清浄化された空気のみをクリーン
ルーム６０内に供給するようになつている。な
お、第１０図中、符号６５は上記空気供給口６１
と空気排出口６４とを接続する循環通路、６８は
循環通路６５から分岐された吸気管路６６中に配
設される中間フイルタ、６９は吸気管路６６の吸
気口側に配設されるプレフイルタ、７０はクリー
ンルーム６０の上部に設けられた排気窓７１に開
閉可能に装着された圧力調整用ダンパである。 The dust collection and sterilization device A of this invention configured as described above is installed in the air supply port 61 of a clean room 60 as shown in FIG. 5, for example, and is equipped with a fan 6.
2 and a temperature control device 63 to create a clean room 6.
When the contaminated air taken out from the air outlet 64 of 0 is supplied into the air flow path 10 and passes through the air flow path 10, a high voltage is applied to the air in the corona discharge section 20 to remove dust in the air. is charged and exposed to ozone, and bacteria in the air are killed by the magnetic induction heating action of the high-frequency energizing coil 44, and then the dust and killed bacteria are captured by the dust collecting electrode plate 31 of the dust collecting section 30. Only the purified air is supplied into the clean room 60. In addition, in FIG. 10, the reference numeral 65 indicates the air supply port 61.
68 is an intermediate filter disposed in an intake pipe line 66 branched from the circulation passage 65, and 69 is a pre-filter disposed on the intake port side of the intake pipe line 66. , 70 is a pressure regulating damper attached to an exhaust window 71 provided in the upper part of the clean room 60 so as to be openable and closable.
第３図はこの考案の第二実施例を示す概略断面
図、第４図はその要部の断面斜視図が示されてい
る。 FIG. 3 is a schematic sectional view showing a second embodiment of this invention, and FIG. 4 is a sectional perspective view of the main parts thereof.
第二実施例は放電極板２４と集塵対極板３２と
を兼用して構成部材の消減と装置の小型化を図つ
た場合である。すなわち、集塵対極板３２の空気
流の上流側に先尖状放電針２２を突設して放電極
兼集塵対極板２３を形成し、各先尖状針２２の先
端をそれぞれ放電対極板２８に穿設された透孔２
６の中心に位置させ、また、放電極兼集塵対極板
２３及び集塵極板３１の空気吸込み側から下流側
に向う対応位置に高周波電流通電コイル４４を配
設して、部材の消減を図つた場合である。 The second embodiment is a case in which the discharge electrode plate 24 and the dust collection counter electrode plate 32 are used both to reduce the number of structural members and to downsize the device. That is, the pointed discharge needles 22 are provided protrudingly on the upstream side of the airflow of the dust collection return electrode plate 32 to form the discharge electrode and dust collection return electrode plate 23, and the tip of each pointed needle 22 is connected to the discharge return electrode plate. Through hole 2 drilled in 28
6, and a high frequency current energizing coil 44 is arranged at a corresponding position toward the downstream side from the air suction side of the discharge electrode/dust collecting counter electrode plate 23 and the dust collecting electrode plate 31 to prevent the consumption of the members. This is a case in point.
［考案の効果］
以上に説明したように、この考案の集塵殺菌装
置によれば、空気流路の上流側に配設されるコロ
ナ放電部とこのコロナ放電部の下流側に配設され
る集塵部とを有すると共に、上記集塵部内に殺菌
手段を配設して成り、上記殺菌手段を、集塵部を
構成する熱伝導性の集塵極板及び集塵対極板と、
これら集塵極板と集塵対極板との間に配設されて
磁気誘導加熱作用によりこれら集塵極板及び集塵
対極板を加熱する高周波電流通電コイルとで構成
るため以下のような効果が得られる。[Effects of the invention] As explained above, according to the dust collecting and sterilizing device of this invention, there is a corona discharge section disposed on the upstream side of the air flow path and a corona discharge section disposed on the downstream side of this corona discharge section. a dust collecting section, and a sterilizing means is disposed within the dust collecting section, and the sterilizing means is combined with a thermally conductive dust collecting electrode plate and a dust collecting counter electrode plate constituting the dust collecting section;
It consists of a high-frequency current-carrying coil that is disposed between these dust collection electrode plates and dust collection return electrode plates and heats these dust collection electrode plates and dust collection return electrode plates by magnetic induction heating action, so it has the following effects. is obtained.
１ コロナ放電による高電圧とオゾン及び殺菌手
段の殺菌作用により、集塵と同時に殺菌を確実
に行うことができる。1. Due to the high voltage generated by corona discharge and the sterilization effect of ozone and sterilization means, sterilization can be reliably performed at the same time as dust collection.
２ 殺菌手段により死滅された細菌を集塵部によ
り確実に捕集することができるので、清浄空気
中に死滅された細菌が混入することがなく、清
浄及び除菌された空気を提供することができ
る。2. Since the bacteria killed by the sterilization means can be reliably collected by the dust collector, the killed bacteria will not be mixed into the clean air, and clean and sterilized air can be provided. can.
３ 従来の積層フイルタのような大きな圧力損失
がないため、フアンの負荷を小さくすることが
でき、しかも、集塵部に磁気誘導加熱作用を有
する殺菌手段を配設するので、装置全体を小型
かつ簡略化することができる。3. Since there is no large pressure loss like in conventional laminated filters, the load on the fan can be reduced, and since a sterilization means with magnetic induction heating is installed in the dust collection section, the entire device can be made smaller and smaller. It can be simplified.
第１図はこの考案の集塵殺菌装置の第一実施例
を示す概略断面図、第２図は第１図の要部断面
図、第３図はこの考案の第二実施例を示す断面
図、第４図は第二実施例における要部断面斜視
図、第５図はこの考案の集塵殺菌装置の使用態様
を示す概略断面図である。
符号説明、１０……空気流路、２０……コロナ
放電部、２２……先尖状放電針、２３……放電極
兼集塵対極板、２４……放電極板、２６……透
孔、２８……放電対極板、３０……集塵部、３１
……集塵極板、３２……集塵対極板、４４……高
周波電流通電コイル（殺菌手段）。
Fig. 1 is a schematic sectional view showing the first embodiment of the dust collection and sterilization device of this invention, Fig. 2 is a sectional view of the main part of Fig. 1, and Fig. 3 is a sectional view showing the second embodiment of this invention. , FIG. 4 is a sectional perspective view of a main part in the second embodiment, and FIG. 5 is a schematic sectional view showing how the dust collecting and sterilizing device of this invention is used. Explanation of symbols, 10...Air flow path, 20...Corona discharge part, 22...Pointed discharge needle, 23...Discharge electrode and dust collection counter electrode plate, 24...Discharge electrode plate, 26...Through hole, 28... Discharge return electrode plate, 30... Dust collection section, 31
... Dust collection electrode plate, 32 ... Dust collection return electrode plate, 44 ... High frequency current energizing coil (sterilization means).
Claims (1)
このコロナ放電部の下流側に配設される集塵部と
を有すると共に、上記集塵部内に殺菌手段を配設
して成り、上記殺菌手段を、集塵部を構成する熱
伝導性の集塵極板及び集塵対極板と、これら集塵
極板と集塵対極板との間に配設されて磁気誘導加
熱作用によりこれら集塵極板及び集塵対極板を加
熱する高周波電流通電コイルとで構成して成るこ
とを特徴とする集塵殺菌装置。 It has a corona discharge section arranged on the upstream side of the air flow path and a dust collection section arranged on the downstream side of the corona discharge section, and a sterilization means is arranged in the dust collection section, and the above-mentioned A sterilizing means is disposed between a thermally conductive dust collecting electrode plate and a dust collecting return electrode plate constituting the dust collecting section, and the dust collecting electrode plate and the dust collecting return electrode plate, and collects them by magnetic induction heating action. A dust collection and sterilization device comprising a high-frequency current-carrying coil that heats a dust electrode plate and a dust collection return electrode plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985196531U JPH0317948Y2 (en) | 1985-12-23 | 1985-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985196531U JPH0317948Y2 (en) | 1985-12-23 | 1985-12-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62106641U JPS62106641U (en) | 1987-07-08 |
| JPH0317948Y2 true JPH0317948Y2 (en) | 1991-04-16 |
Family
ID=31155438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985196531U Expired JPH0317948Y2 (en) | 1985-12-23 | 1985-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0317948Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2627575B2 (en) * | 1990-08-15 | 1997-07-09 | 高砂熱学工業株式会社 | Method for preventing sea salt particle contamination in clean room for semiconductor manufacturing |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4958691A (en) * | 1972-10-09 | 1974-06-06 | ||
| JPS5438046U (en) * | 1977-07-13 | 1979-03-13 |
-
1985
- 1985-12-23 JP JP1985196531U patent/JPH0317948Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4958691A (en) * | 1972-10-09 | 1974-06-06 | ||
| JPS5438046U (en) * | 1977-07-13 | 1979-03-13 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62106641U (en) | 1987-07-08 |
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