JPH0316646U - - Google Patents
Info
- Publication number
- JPH0316646U JPH0316646U JP7783389U JP7783389U JPH0316646U JP H0316646 U JPH0316646 U JP H0316646U JP 7783389 U JP7783389 U JP 7783389U JP 7783389 U JP7783389 U JP 7783389U JP H0316646 U JPH0316646 U JP H0316646U
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- induction coil
- electromagnetic field
- ion source
- capacitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006698 induction Effects 0.000 claims description 6
- 239000003990 capacitor Substances 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims 5
- 230000005672 electromagnetic field Effects 0.000 claims 3
- 238000000605 extraction Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案の実施例に係る高周波イオン源
の構成図、第２図は従来の高周波イオン源の構成
図である。
Ｇ…誘導コイル、Ｂ…高周波電源、Ｅ…高電圧
電源、Ｆ…引き出し電極、Ｃ１，Ｃ２…コンデン
サ。
FIG. 1 is a block diagram of a high frequency ion source according to an embodiment of the present invention, and FIG. 2 is a block diagram of a conventional high frequency ion source. G...Induction coil, B...High frequency power supply, E...High voltage power supply, F...Extracting electrode, C1 , C2 ...Capacitor.
Claims (1)
コイルに高周波電流を流す高周波電源と、前記高
周波電磁界により生成されたプラズマイオンを引
き出すための引き出し電極と、前記誘導コイルに
イオン引き出し用の高電圧を印加する高電圧電源
とを備えた高周波イオン源において、 前記誘導コイルの両端をそれぞれコンデンサを
介して前記高周波電源に接続するとともに、コン
デンサと誘導コイルとの間に前記高電圧電源を接
続したことを特徴とする高周波イオン源。[Claims for Utility Model Registration] An induction coil for generating a high-frequency electromagnetic field, a high-frequency power source for passing a high-frequency current through the induction coil, an extraction electrode for extracting plasma ions generated by the high-frequency electromagnetic field, and an induction coil for generating a high-frequency electromagnetic field. In a high-frequency ion source equipped with a high-voltage power supply that applies a high voltage for ion extraction to a coil, both ends of the induction coil are connected to the high-frequency power supply via a capacitor, and a connection is made between the capacitor and the induction coil. A high-frequency ion source, characterized in that the high-voltage power source is connected to the high-frequency ion source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7783389U JPH0316646U (en) | 1989-06-30 | 1989-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7783389U JPH0316646U (en) | 1989-06-30 | 1989-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0316646U true JPH0316646U (en) | 1991-02-19 |
Family
ID=31620576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7783389U Pending JPH0316646U (en) | 1989-06-30 | 1989-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316646U (en) |
-
1989
- 1989-06-30 JP JP7783389U patent/JPH0316646U/ja active Pending
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