JPS6297168U - - Google Patents
Info
- Publication number
- JPS6297168U JPS6297168U JP18801685U JP18801685U JPS6297168U JP S6297168 U JPS6297168 U JP S6297168U JP 18801685 U JP18801685 U JP 18801685U JP 18801685 U JP18801685 U JP 18801685U JP S6297168 U JPS6297168 U JP S6297168U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- electromagnetic coil
- alternating current
- evaporation apparatus
- beam evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005566 electron beam evaporation Methods 0.000 claims description 3
- 239000003990 capacitor Substances 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１、２図はこの考案の実施例の電子ビーム掃
引回路図、第３図は従来の電子ビーム蒸着装置の
概略図である。
１……交流電源、２……電磁コイル、３……コ
ンデンサ。
1 and 2 are electron beam sweep circuit diagrams of an embodiment of this invention, and FIG. 3 is a schematic diagram of a conventional electron beam evaporation apparatus. 1... AC power supply, 2... Electromagnetic coil, 3... Capacitor.
Claims (1)
よつて発生する磁界で、陰極から放出される電子
ビームを蒸着材の表面の所定区域に均一に掃引し
ながら照射させる電子ビーム蒸着装置において、
前記電磁コイルにコンデンサを直列に接続したこ
とを特徴とする電子ビーム蒸着装置。 In an electron beam evaporation apparatus, an alternating current is passed through an electromagnetic coil, and a magnetic field generated by the alternating current is used to uniformly sweep and irradiate an electron beam emitted from a cathode to a predetermined area on the surface of a deposition material.
An electron beam evaporation apparatus characterized in that a capacitor is connected in series to the electromagnetic coil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18801685U JPH027869Y2 (en) | 1985-12-06 | 1985-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18801685U JPH027869Y2 (en) | 1985-12-06 | 1985-12-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6297168U true JPS6297168U (en) | 1987-06-20 |
| JPH027869Y2 JPH027869Y2 (en) | 1990-02-26 |
Family
ID=31138994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18801685U Expired JPH027869Y2 (en) | 1985-12-06 | 1985-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH027869Y2 (en) |
-
1985
- 1985-12-06 JP JP18801685U patent/JPH027869Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH027869Y2 (en) | 1990-02-26 |