JPH03160710A - Manufacture of lc composite component - Google Patents

Manufacture of lc composite component

Info

Publication number
JPH03160710A
JPH03160710A JP30059389A JP30059389A JPH03160710A JP H03160710 A JPH03160710 A JP H03160710A JP 30059389 A JP30059389 A JP 30059389A JP 30059389 A JP30059389 A JP 30059389A JP H03160710 A JPH03160710 A JP H03160710A
Authority
JP
Japan
Prior art keywords
capacitor
substrate
coil
electrode
capacitors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30059389A
Other languages
Japanese (ja)
Inventor
Atsuo Senda
厚生 千田
Osamu Kano
修 加納
Yasuo Fujiki
藤木 保男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP30059389A priority Critical patent/JPH03160710A/en
Priority to US07/613,071 priority patent/US5197170A/en
Publication of JPH03160710A publication Critical patent/JPH03160710A/en
Pending legal-status Critical Current

Links

Landscapes

  • Coils Or Transformers For Communication (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Filters And Equalizers (AREA)

Abstract

PURPOSE:To eliminate complicated works and reduce the number of manufacturing processes; besides, obtain LC composite components at a low cost by performing multiple treatment just before a final process is over in a state that a substrate is equipped with a plurality of coils and capacitors. CONSTITUTION:LC composite components are treated with multiple treatment just before a final process is over in a state that a substrate 1 is equipped with a plurality of coils and capacitors 5-7. In this way, complicated works are eliminated and the number of manufacturing processes is reduced. As the capacitors 5-7 that are composed of basic materials of ceramics 4a-4c are burnt in advance and handled as burnt substrates, handling processes increase in number with the completion of burning and then, the LC composite components are manufactured easily. Besides, the burnt substrates are superior in mechanical strength and any damage, e. g. chips and flaws in the LC composite components are hard to occur on the occasion of handling during the manufacturing process.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、例えばノイズフィルタ等に使用されるチップ
型LC複合部品の製造方法に関する.鎧朱p韮重上遅焉 この種のチップ型LC複合部品の製造方法として、シー
ト積み上げ法とLC貼り合わせ法とがある。シート積み
上げ法は、誘電体の母体から成るコンデンサ部と磁性体
の母体から成るコイル部とを、未焼成の基板の状態で積
層した後、所望の完成品の形状に分割し、次にこれを一
体焼結した後、外部電極を付与して作製する。ところが
、各々の母体の焼結収縮率が大きく異なるため、コンデ
ンサ部とコイル部を一体焼結によって接合すると、コン
デンサ部とコイル部との間に剥がれが生じたり、コンデ
ンサ部及びコイル部にソリや割れが生じる不安があった
.そのため、複雑な製造管理が要求されていた。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method for manufacturing a chip-type LC composite component used, for example, in a noise filter. There are two methods for producing this type of chip-type LC composite component: a sheet stacking method and an LC bonding method. In the sheet stacking method, a capacitor part made of a dielectric matrix and a coil part made of a magnetic matrix are laminated in an unfired substrate state, and then divided into the desired finished product shape. After integrally sintering, external electrodes are added and manufactured. However, since the sintering shrinkage rates of each base material are significantly different, when the capacitor part and the coil part are joined by integral sintering, peeling may occur between the capacitor part and the coil part, or warping or warping may occur in the capacitor part and the coil part. I was worried that it would crack. Therefore, complex manufacturing management was required.

LC貼り合わせ法は、コンデンサ部とコイル部とを、予
め別々に焼結しておき、次にロウ付け又は半田付けによ
って接合した後、モールド成形して作製する。この方法
は、製造工程の数がシート積み上げ法と比較して多くな
り、コストアップになる. そこで、本発明の課題は、製造工程の数が少なく、しか
も安価なLC複合部品を簡単に製造する方法を提供する
ことにある. 課題を解決するための手段 以上の課題を解決するために、本発明に係るLC複合部
品の製造方法は、 (a)セラミックス層とコンデンサ電極層とを交互に積
層して、複数個のコンデンサを備えたコンデンサ部から
成る基板を形成する工程と、(b)前記基板を焼成する
工程と、 (c)前記焼成済み基板の表面に複数個のコイル川渦巻
パターンを形成してコイル部を設ける工程と、 (d)前記コンデンサ部とコイル部とが一体積層構造と
なった基板をカットして所望のLC複合部品に分割する
工程と、 (e)前記LC複合部品のコンデンサ電極層及びコイル
用渦巻パターンを電気的接続手段によって接続する工程
と、 からなることを特徴とする. 作用 以上の構成によって、LC複合部品は複数個のコイル及
びコンデンサを備えた基板の状態で、最終工程間際まで
マルチ処理されるので、煩雑な作業が削除され、製造工
程の数が少なくなる。
In the LC bonding method, the capacitor part and the coil part are sintered separately in advance, then joined by brazing or soldering, and then molded. This method requires more manufacturing steps than the sheet stacking method, which increases costs. SUMMARY OF THE INVENTION An object of the present invention is to provide a method for easily manufacturing LC composite parts that requires fewer manufacturing steps and is inexpensive. Means for Solving the Problems In order to solve the above problems, the method for manufacturing an LC composite component according to the present invention includes: (a) laminating ceramic layers and capacitor electrode layers alternately to form a plurality of capacitors; (b) firing the board; (c) forming a plurality of coiled spiral patterns on the surface of the fired board to provide the coil part; (d) cutting the substrate in which the capacitor part and the coil part have a laminated structure into desired LC composite parts; (e) cutting the capacitor electrode layer and coil spiral of the LC composite part; It is characterized by comprising the steps of: connecting the patterns by electrical connection means; Function: With the above configuration, the LC composite component is multi-processed in the form of a board with a plurality of coils and capacitors up to just before the final process, so complicated operations are eliminated and the number of manufacturing steps is reduced.

また、セラミックスの母体から成るコンデンサ部を予め
焼成して、焼成済み基板として取り扱うので、焼成後小
取り扱い工程が多くなり、LC複合部品の製造が容易に
なる。しかも、焼成済み基板は機械的強度が強く、製造
工程中の取り扱いの際、LC複合部品に欠け、傷が生じ
にくい。
Furthermore, since the capacitor section made of the ceramic matrix is fired in advance and handled as a fired substrate, the number of small handling steps after firing is increased, making it easier to manufacture LC composite parts. Moreover, the fired substrate has high mechanical strength, and the LC composite component is less likely to be chipped or scratched when handled during the manufacturing process.

さらに、既に焼成済みのコンデンサ部の表面にコイル部
を形成するので、コイルの形成にフォトエッチング法を
採用すれば高温にさらされることなくコイルが形成され
、コンデンサ部とコイル部との間に剥がれが生じたり、
コンデンサ部及びコイル部にソリや割れが生じることな
くコイル部とコンデンサ部とが接合される。
Furthermore, since the coil part is formed on the surface of the capacitor part that has already been fired, if a photo-etching method is used to form the coil, the coil can be formed without being exposed to high temperatures, and there will be no peeling between the capacitor part and the coil part. occurs, or
The coil part and the capacitor part are joined without warping or cracking in the capacitor part and the coil part.

叉盟珂 以下、本発明に係るLC複合部品の製造方法の実施例に
つき、添付図面を参照して説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a method for manufacturing an LC composite component according to the present invention will be described with reference to the accompanying drawings.

[第1実施例、第1図〜第10図] 第1実施例は、1個の渦巻コイルと2個の積層コンデン
サとを有するπ形ノイズフィルタの場合を示す。第1図
に示す基板lはπ形ノイズフィルタ6個分の積層コンデ
ンサを備えている。基板1はコンデンサ部2.3が重畳
され、絶縁シート1 5a. 15bがコンデンサ部2
の上側に1枚、コンデンサ部3の下側に1枚積層される
[First Example, FIGS. 1 to 10] The first example shows the case of a π-type noise filter having one spiral coil and two laminated capacitors. A substrate 1 shown in FIG. 1 is provided with multilayer capacitors for six π-type noise filters. A capacitor section 2.3 is superimposed on the substrate 1, and an insulating sheet 1 5a. 15b is the capacitor part 2
One layer is stacked on the upper side and one layer is stacked on the lower side of the capacitor section 3.

コンデンサ部2.3 は、各6個の積層コンデンサから
成り、セラミックスシ一ト4a. 4b. 4cとそれ
らの上面にそれぞれ形成されているコンデンサ電極5,
6.7とから構成される。セラミックスシ一ト4a. 
4b, 4cはBaTiO,等の誘電体粉末を樹脂バイ
ンダで混練し、シート状にしたものである。コンデンサ
電極5,6,7はAg − Pd導電ペースト等を使用
し、印刷等の方法により形成されている。コンデンサ電
極6は共通電極になり、積層されている状態では、コン
デンサ電極5−6間に静電容量C1が形成され、コンデ
ンサ電極6−7間に静電容量Oが形成される.第2図に
示すように、以上のコンデンサ部2.3 は絶縁シート
15a.15bと共に積層された後、所定の温度で焼成
される。このとき、絶縁シ一ト15aの上面に、後工程
で形成されるコイル用渦巻パターンの位置決めのための
マーク8を形成する。
The capacitor sections 2.3 each consist of six laminated capacitors, and include ceramic sheets 4a. 4b. 4c and capacitor electrodes 5 formed on their upper surfaces, respectively.
It consists of 6.7. Ceramic sheet 4a.
4b and 4c are sheets made by kneading dielectric powder such as BaTiO with a resin binder. The capacitor electrodes 5, 6, and 7 are formed using Ag-Pd conductive paste or the like by a method such as printing. The capacitor electrode 6 becomes a common electrode, and in the stacked state, a capacitance C1 is formed between the capacitor electrodes 5 and 6, and a capacitance O is formed between the capacitor electrodes 6 and 7. As shown in FIG. 2, the above capacitor section 2.3 is connected to the insulating sheet 15a. After being laminated together with 15b, it is fired at a predetermined temperature. At this time, marks 8 are formed on the upper surface of the insulating sheet 15a for positioning the coil spiral pattern to be formed in a later process.

次に、第3図に示すように、焼成済み基板1に形成され
ているマーク8を利用して基板1の上面に6個のコイル
用渦巻パターン16aを形成する。
Next, as shown in FIG. 3, six coil spiral patterns 16a are formed on the upper surface of the substrate 1 using the marks 8 formed on the fired substrate 1.

本実施例では、コイル用渦巻パターン16aの形成にフ
ォトエッチング法を採用した。まず、基板1の上面全面
にτi.Ti−Ag.Agの順にスパッタを行ない、三
層構造の導体膜を形或する。このとき、基板1の表面に
低誘電率樹脂、例えばポリイミド樹脂等を導体膜形成前
にコーティングしておいてもよい。これによって、渦巻
パターン16aとコンデンサ電極5との間に発生する浮
遊容量を抑えると共に、基板1の表面平滑性を向上させ
ることができる。さて、この三層構造の導体膜の表面に
感光性のレジスト膜を塗布し、露光、現像、エッチング
、レジスト膜除去の工程を経て、第3図に示す渦巻パタ
ーン16a、矩形の接続電極17a及び引出し電極18
aを形成する。ここで渦巻パターン16aの両終端はそ
れぞれ、接続電極17a、引出し電極18aに接続され
ている。この渦巻パターン16a等が形成された基板1
の上面に、絶縁のため感光性ポリイミド樹脂を全体に塗
布する。この後、露光、現像、エッチングの工程を経て
、第4図に示すように、接続電極17aと引出し電I!
i18aの部分を残して基板1の上面全面を覆うポリイ
ミド拘脂膜20を形成する。
In this embodiment, a photo-etching method was employed to form the coil spiral pattern 16a. First, τi. Ti-Ag. Sputtering is performed in the order of Ag to form a three-layer conductor film. At this time, the surface of the substrate 1 may be coated with a low dielectric constant resin, such as a polyimide resin, before the conductor film is formed. Thereby, stray capacitance generated between the spiral pattern 16a and the capacitor electrode 5 can be suppressed, and the surface smoothness of the substrate 1 can be improved. Now, a photosensitive resist film is applied to the surface of this three-layer conductor film, and through the steps of exposure, development, etching, and resist film removal, a spiral pattern 16a, a rectangular connection electrode 17a, and a rectangular connection electrode 17a are formed as shown in FIG. Extraction electrode 18
form a. Here, both ends of the spiral pattern 16a are connected to a connection electrode 17a and an extraction electrode 18a, respectively. Substrate 1 on which this spiral pattern 16a etc. are formed
Coat the entire top surface with photosensitive polyimide resin for insulation. Thereafter, through the steps of exposure, development, and etching, as shown in FIG. 4, the connection electrode 17a and the lead-out electrode I!
A polyimide resin film 20 is formed to cover the entire upper surface of the substrate 1, leaving a portion i18a.

さらに、この上に前記渦巻パターン16a等を形成した
手順と同様の工程を経て、第5図に示すコイル用渦巻パ
ターン16b、接続電極17b、引出し電極18bを形
成する。渦巻パターン16bは接続電極17b, 17
aを介して渦巻パターン16aに接続され、インダクタ
ンスL1を形成する。さらに、この上に前記感光性ポリ
イミド樹脂膜20を形成した手順と同様の工程を経て、
第6図に示す引出し電極18a.18bを残して絶縁の
ためのポリイミド樹脂膜21を形或する.その後、第6
図に示した一点鎖線に沿ってスライシング、レーザーカ
ット、又は水圧カット等の方法で、基板1を6分割して
所望のLC複合部品の一体積層構造体24を得る(第7
図参照).第7図に示す一体積層構造体24は第6図に
おいて基板1の左側手前の位置Xから切り出したもので
ある. 次に、一体積層構造体24はその表面に印刷、転写、蒸
着、又はめっき等で外部電極(A).(B).(C)が
形成され、第8図に示すπ形ノイズフィルタ25を得る
。外部電極(A).(B)にはコイル用渦巻パターン1
6a. 16bの引出し部18g.18bが接続され、
外部電極(A)一(B)間にインダクタンスL1が形成
されている。さらに、外部電極(A)にはコンデンサ電
極5、外部電極(B)にはコンデンサ電極7が接続され
、外部電極(C)にはコンデンサ電極6が接続されてい
るので第9図に示す電気等価回路を有するπ形ノイズフ
ィルタ25が得られる.なお、要求されるインダクタン
スL1の数値によっては、第5図に示した渦巻パターン
16bの替わりに第10図に示した線パターン19を形
成してもよい。また、外部電極(A)−(B)間のイン
ダクタンスL1の数値、あるいは電流容量をさらに大き
くするため、基板1の下面にもコイル用渦巻パターンを
形成してもよい。また、コイル用渦巻パターンを複数段
積み重ねるものであってもよい。同様に、静電容量C1
.C2の数値を大きくするためセラミックスシ一ト4a
と4bとの間に、あるいはセラミックスシ一ト4bと4
0との間にコンデンサ電極が形成されたセラミックスシ
一トをさらに挿入してもよい。
Further, a coil spiral pattern 16b, a connection electrode 17b, and an extraction electrode 18b shown in FIG. 5 are formed thereon through the same steps as those for forming the spiral pattern 16a and the like. The spiral pattern 16b is connected to the connection electrodes 17b, 17
is connected to the spiral pattern 16a through a, forming an inductance L1. Furthermore, through a process similar to that in which the photosensitive polyimide resin film 20 was formed on this,
Extracting electrode 18a shown in FIG. A polyimide resin film 21 for insulation is formed leaving 18b. Then the 6th
The substrate 1 is divided into six parts by slicing, laser cutting, hydraulic cutting, etc. along the dashed line shown in the figure to obtain the monolayer structure 24 of the desired LC composite component (seventh
(see figure). The one-layer structure 24 shown in FIG. 7 is cut out from position X on the left side of the substrate 1 in FIG. 6. Next, the laminated structure 24 is coated with external electrodes (A) by printing, transfer, vapor deposition, plating, etc. on its surface. (B). (C) is formed to obtain the π-type noise filter 25 shown in FIG. External electrode (A). (B) shows coil spiral pattern 1.
6a. 16b drawer section 18g. 18b is connected,
An inductance L1 is formed between the external electrodes (A) and (B). Furthermore, since the capacitor electrode 5 is connected to the external electrode (A), the capacitor electrode 7 is connected to the external electrode (B), and the capacitor electrode 6 is connected to the external electrode (C), the electrical equivalent shown in FIG. A π-type noise filter 25 having the circuit is obtained. Note that, depending on the value of the required inductance L1, the line pattern 19 shown in FIG. 10 may be formed instead of the spiral pattern 16b shown in FIG. 5. Further, in order to further increase the value of the inductance L1 between the external electrodes (A) and (B) or the current capacity, a coil spiral pattern may be formed on the lower surface of the substrate 1 as well. Further, the coil spiral pattern may be stacked in multiple stages. Similarly, capacitance C1
.. Ceramic sheet 4a to increase the value of C2
and 4b, or between ceramic sheet 4b and 4
A ceramic sheet having a capacitor electrode formed thereon may be further inserted between the capacitor electrode and the capacitor electrode.

[第2実施例、第11図〜第17図] 第2実施例は、1個の渦巻コイルと1個の積層コンデン
サとを有するL形ノイズフィルタの場合を示す。説明の
都合により、ここではノイズフィルタが1個だけのもの
を示すが、量産においては複数個のノイズフィルタを備
えた基板となる.第11図に示す基板30はコンデンサ
部31の上下側に絶縁シート15c,15dが積層され
る.コンデンサ部31は、セラミックスシ一ト4d. 
4eとそれらの上面にそれぞれ形成されているコンデン
サ電極32a. 32bとから構成される.積層されて
いる状態では、コンデンサ電極32a−32b間に静電
容量C1が形成される.第12図に示すように、コンデ
ンサ部31は絶縁シ一ト15c.15dと共に積層され
た後、所定の温度で焼成される. 次に、第13図に示すように、焼成された基板30の上
面にコイル用渦巻パターン16C,接続電極17c及び
引出し電極18cを形成する。さらに、この上に接続電
極17cと引出し電極18cの部分を残して、絶縁のた
めの感光性ポリイミド樹脂膜33を形成する(第14図
参照)。さらに、この上に第15図に示すコイル用渦巻
パターン16d,接続電極17d、引出し電極18dを
形成する。渦巻パターン16dは接続電極17d.17
cを介して渦巻パターン16cに接続され、インダクタ
ンスL1を形成する.さらに、この上に絶縁のための感
光性ポリイミド樹脂膜34を形成する. 次に、その表面上に外部電極(A),(B).(C)が
形成され、第16図に示すL形ノイズフィルタ35を得
る。外部電極(B)にはコンデンサ電極32bが接続さ
れ、外部電極(C)にはコンデンサ電極32aが接続さ
れて外部電極(B)−(C)間に静電容量c1が形成さ
れる。さらに、外部電極(A)には渦巻パターン16c
の引出し電極18cが接続され、外部電極(B)には渦
巻パターン16dの引出し電極18dが接続されて外部
電極(A)−(B)間にインダクタンスL1が形成され
る。従って、第17図に示す電気等価回路を有するL形
ノイズフィルタ35が得られる。
[Second Embodiment, FIGS. 11 to 17] The second embodiment shows the case of an L-shaped noise filter having one spiral coil and one multilayer capacitor. For convenience of explanation, only one noise filter is shown here, but in mass production, the board will be equipped with multiple noise filters. In the substrate 30 shown in FIG. 11, insulating sheets 15c and 15d are laminated on the upper and lower sides of a capacitor section 31. The capacitor section 31 is made of ceramic sheet 4d.
4e and capacitor electrodes 32a. 32b. In the stacked state, a capacitance C1 is formed between the capacitor electrodes 32a and 32b. As shown in FIG. 12, the capacitor section 31 is formed by an insulating sheet 15c. After being laminated together with 15d, it is fired at a predetermined temperature. Next, as shown in FIG. 13, a coil spiral pattern 16C, a connection electrode 17c, and an extraction electrode 18c are formed on the upper surface of the fired substrate 30. Furthermore, a photosensitive polyimide resin film 33 for insulation is formed on this, leaving the connection electrode 17c and the extraction electrode 18c (see FIG. 14). Furthermore, a coil spiral pattern 16d, a connection electrode 17d, and an extraction electrode 18d shown in FIG. 15 are formed on this. The spiral pattern 16d is connected to the connecting electrode 17d. 17
c to the spiral pattern 16c, forming an inductance L1. Furthermore, a photosensitive polyimide resin film 34 for insulation is formed on this. Next, external electrodes (A), (B) . (C) is formed to obtain the L-shaped noise filter 35 shown in FIG. A capacitor electrode 32b is connected to the external electrode (B), a capacitor electrode 32a is connected to the external electrode (C), and a capacitance c1 is formed between the external electrodes (B) and (C). Furthermore, the external electrode (A) has a spiral pattern 16c.
The extraction electrode 18c of the spiral pattern 16d is connected to the external electrode (B), and an inductance L1 is formed between the external electrodes (A) and (B). Therefore, an L-shaped noise filter 35 having the electrical equivalent circuit shown in FIG. 17 is obtained.

[他の実施例コ なお、本発明に係るLC複合部品は前記実施例に限定す
るものではなく、その要旨の範囲内で種々に変形するこ
とができる。
[Other Embodiments] The LC composite component according to the present invention is not limited to the embodiments described above, and can be modified in various ways within the scope of the gist.

実施例では、コンデンサ部の積層にシートを重ねる方法
を採用したが、セラミックス材料及びコンデンサ電極材
料を交互に印刷して積層するものであってもよい。同様
に、実施例ではコイル部の形成にフォトエッチング方法
を採用したが、シートを重ねる方法、あるいは印刷方法
によって形成するものであってもよい。
In the embodiment, a method was adopted in which sheets were stacked to stack the capacitor portion, but the ceramic material and the capacitor electrode material may be alternately printed and stacked. Similarly, in the embodiment, a photo-etching method was used to form the coil portion, but the coil portion may be formed by a sheet stacking method or a printing method.

また、実施例では、LC複合部品のコンデンサ電極層と
コイル用渦巻パターンを外部電極を介して電気的に接続
するものを示したが、スルーホールを介して接続するも
のであってもよい。
Further, in the embodiment, the capacitor electrode layer of the LC composite component and the coil spiral pattern are electrically connected via the external electrode, but the connection may be made via a through hole.

え旦二羞朱 以上の説明で明らかなように、本発明によれば、LC複
合部品が複数個のコイル及びコンデンサを備えた基板の
状態で、最終工程間際までマルチ処理されるので、煩雑
な作業が削除され、シート積み上げ法やLC貼り合わせ
法と比較して、製造工程の数が少なく、かつ安価なLC
複合部品の製造方法が得られる。
As is clear from the above explanation, according to the present invention, the LC composite component is multi-processed in the state of a board equipped with a plurality of coils and capacitors until just before the final process. LC reduces the number of manufacturing steps and is cheaper compared to the sheet stacking method or LC bonding method.
A method for manufacturing composite parts is obtained.

また、セラミックスの母体から成るコンデンサ部を予め
焼成して、焼成済み基板として取り扱うので、焼成後の
取り扱い工程が多くなり、LC複合部品の製造作業が容
易となる。しかも、焼成済み基板は機械的強度が強く、
製造工程中の取り扱いの際、LC複合部品に欠け、傷が
生じにくく、焼成前の取り扱い工程が多いシート積み上
げ法による製造方法と比較して外観不良の発生率が減少
し、歩留りの優れたLC複合部品の製造方法が得られる
Furthermore, since the capacitor section made of the ceramic matrix is fired in advance and handled as a fired substrate, the number of handling steps after firing is increased, and the manufacturing work of the LC composite component is facilitated. Moreover, the fired substrate has strong mechanical strength,
When handled during the manufacturing process, LC composite parts are less prone to chips and scratches, and the incidence of appearance defects is reduced compared to manufacturing methods using sheet stacking, which requires many handling steps before firing, resulting in an excellent yield of LC. A method for manufacturing composite parts is obtained.

さらに、既に焼成済みのコンデンサ部の表面にコイル部
を形成するので、コイルの形成にフォトエッチング法を
採用すれば、精度良くコイルが形成されて狭偏差のコイ
ルが得られ、しかも高温にさらされることなくコイル部
が形成され、シート積み上げ法と比較して、コンデンサ
部とフィル部との間に剥がれが生じたり、コンデンサ部
及びコイル部にンリや割れが生じたりするのを抑えるの
で接着強度アップが図れる.
Furthermore, since the coil part is formed on the surface of the capacitor part which has already been fired, if a photo-etching method is used to form the coil, the coil can be formed with high precision and a narrow deviation can be obtained, and it can be exposed to high temperatures. Compared to the sheet stacking method, this method prevents peeling between the capacitor and fill parts, as well as cracks and cracks in the capacitor and coil parts, increasing adhesive strength. can be achieved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図ないし第10図は本発明の第1実施例であるLC
複合部品を示し、第1図は基板の分解斜視図、第2図は
その外観を示す斜視図、第3図、第4図、第5図、第6
図はコイル部形成工程を示す斜視図、第7図は基板から
カットされた後のLC複合部品の外観を示す斜視図、第
8図は完成後のLC複合部品の外観を示す斜視図、第9
図壮その電気等価回路図、第10図は第1実施例のコイ
ル用渦巻パターンの変形例を示す斜視図である。 第11図ないし第17図は本発明の第2実施例であるL
C複合部品を示し、第11図は基板の分解斜視図、第1
2図はその外観を示す斜視図、第13図、第14図、第
15図はコイル部形成工程を示す斜視図、第16図は完
成後のLC複合部品の外観を示す斜視図、第17図はそ
の電気等価回路図である。 1・・・基板、2.3  ・・・コンデンサ部、4a.
 4b, 4c.4d,4e・・・セラミックス層(セ
ラミックスシ一ト)、5.6.7−・・−1ンデンサ電
極、16a. 16b, 16c. 16d −コイル
用渦巻パターン、25・・・LC複合部品(π形ノイス
フィルタ)、30・・・基板、32a,32b・・・コ
ンデンサ電極、35・・・LC複合部品(L形ノイズフ
ィルタ)。
1 to 10 show an LC according to a first embodiment of the present invention.
Fig. 1 is an exploded perspective view of the board, Fig. 2 is a perspective view showing its external appearance, Fig. 3, Fig. 4, Fig. 5, Fig. 6 shows the composite part.
7 is a perspective view showing the appearance of the LC composite part after being cut from the substrate; FIG. 8 is a perspective view showing the appearance of the LC composite part after completion; 9
FIG. 10 is a perspective view showing a modified example of the coil spiral pattern of the first embodiment. FIG. 11 to FIG. 17 show a second embodiment of the present invention.
C shows a composite part, and FIG. 11 is an exploded perspective view of the board.
Figure 2 is a perspective view showing its appearance, Figures 13, 14, and 15 are perspective views showing the coil part forming process, Figure 16 is a perspective view showing the appearance of the LC composite part after completion, and Figure 17 The figure is its electrical equivalent circuit diagram. DESCRIPTION OF SYMBOLS 1... Board, 2.3... Capacitor part, 4a.
4b, 4c. 4d, 4e... Ceramic layer (ceramic sheet), 5.6.7-...-1 capacitor electrode, 16a. 16b, 16c. 16d - spiral pattern for coil, 25... LC composite component (π-type noise filter), 30... substrate, 32a, 32b... capacitor electrode, 35... LC composite component (L-type noise filter).

Claims (1)

【特許請求の範囲】[Claims] 1.セラミックス層とコンデンサ電極層とを交互に積層
して、複数個のコンデンサを備えたコンデンサ部から成
る基板を形成する工程と、 前記基板を焼成する工程と、 前記焼成済み基板の表面に複数個のコイル用渦巻パター
ンを形成してコイル部を設ける工程と、前記コンデンサ
部とコイル部とが一体積層構造となった基板をカットし
て所望のLC複合部品に分割する工程と、 前記LC複合部品のコンデンサ電極層及びコイル用渦巻
パターンを電気的接続手段によって接続する工程と、 からなることを特徴とするLC複合部品の製造方法。
1. forming a substrate consisting of a capacitor section including a plurality of capacitors by alternately laminating ceramic layers and capacitor electrode layers; firing the substrate; and depositing a plurality of capacitors on the surface of the fired substrate. a step of forming a spiral pattern for a coil to provide a coil portion; a step of cutting a substrate in which the capacitor portion and the coil portion have a laminated structure into desired LC composite parts; A method for manufacturing an LC composite component, comprising the steps of: connecting a capacitor electrode layer and a spiral pattern for a coil by an electrical connection means.
JP30059389A 1989-11-18 1989-11-18 Manufacture of lc composite component Pending JPH03160710A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP30059389A JPH03160710A (en) 1989-11-18 1989-11-18 Manufacture of lc composite component
US07/613,071 US5197170A (en) 1989-11-18 1990-11-15 Method of producing an LC composite part and an LC network part

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30059389A JPH03160710A (en) 1989-11-18 1989-11-18 Manufacture of lc composite component

Publications (1)

Publication Number Publication Date
JPH03160710A true JPH03160710A (en) 1991-07-10

Family

ID=17886714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30059389A Pending JPH03160710A (en) 1989-11-18 1989-11-18 Manufacture of lc composite component

Country Status (1)

Country Link
JP (1) JPH03160710A (en)

Similar Documents

Publication Publication Date Title
US5197170A (en) Method of producing an LC composite part and an LC network part
KR101486979B1 (en) Method for manufacturing monolithic ceramic electronic components
CN113140405B (en) Multilayer ceramic capacitor
WO1999046784A1 (en) Module and method of manufacture
JP2009021512A (en) Multilayer capacitor
JPH0254647B2 (en)
JPS5924535B2 (en) Laminated composite parts
JPS5924534B2 (en) Laminated composite parts
JP3319449B2 (en) Multilayer inductor and manufacturing method thereof
JP2002343649A (en) Laminated ceramic chip component
JP2000340448A (en) Multilayer ceramic capacitors
JPH03178112A (en) Compound chip part
JP2001076952A (en) Laminated ceramic electronic component and manufacture thereof
JP3882718B2 (en) Manufacturing method of thin film laminated electronic component
US20010054472A1 (en) Manufacturing method for a laminated ceramic electronic component
JPH03160710A (en) Manufacture of lc composite component
JP2001307937A (en) Method of manufacturing laminated ceramic electronic part
JP2000315617A (en) Manufacture of laminated ceramic electronic parts
JP2946261B2 (en) Manufacturing method of laminated electronic components
JPS6339958Y2 (en)
JP2600127Y2 (en) Multilayer chip EMI removal filter
JPH0115159Y2 (en)
JPH0563007B2 (en)
JP3493812B2 (en) Manufacturing method of ceramic electronic components
JP4635430B2 (en) Multilayer coil parts