JPH0315972B2 - - Google Patents
Info
- Publication number
- JPH0315972B2 JPH0315972B2 JP9167783A JP9167783A JPH0315972B2 JP H0315972 B2 JPH0315972 B2 JP H0315972B2 JP 9167783 A JP9167783 A JP 9167783A JP 9167783 A JP9167783 A JP 9167783A JP H0315972 B2 JPH0315972 B2 JP H0315972B2
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- inspection
- reflection
- defect
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007547 defect Effects 0.000 claims description 59
- 238000007689 inspection Methods 0.000 claims description 55
- 238000001514 detection method Methods 0.000 claims description 31
- 230000007246 mechanism Effects 0.000 claims description 7
- 238000012360 testing method Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 206010027146 Melanoderma Diseases 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9167783A JPS59217138A (ja) | 1983-05-25 | 1983-05-25 | 表面欠陥検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9167783A JPS59217138A (ja) | 1983-05-25 | 1983-05-25 | 表面欠陥検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59217138A JPS59217138A (ja) | 1984-12-07 |
| JPH0315972B2 true JPH0315972B2 (fr) | 1991-03-04 |
Family
ID=14033117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9167783A Granted JPS59217138A (ja) | 1983-05-25 | 1983-05-25 | 表面欠陥検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59217138A (fr) |
-
1983
- 1983-05-25 JP JP9167783A patent/JPS59217138A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59217138A (ja) | 1984-12-07 |
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