JPH03155551A - Cleaning jig - Google Patents

Abstract

PURPOSE:To easily perform the cleaning of a cleaning component by reciprocating a jig of mask shape on which a brush or a projection is attached on the surface of the cleaning component in the inside of a cleaning device. CONSTITUTION:The cleaning jig on which the brush or the projection is attached is reciprocated on the surface of the cleaning component to periodically and simply clean a contaminated cleaning component and to recover cleanliness. In such a way, the cleaning of the cleaning jig in the inside of the cleaning device for a photomask, etc., used in the manufacturing process of a semiconductor device, etc., can be performed without attaching a specific device by using the jig of mask shape on which the brush or the projection is attached and only hanging it on the cleaning device.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a cleaning apparatus for photomasks and the like used in the manufacturing and processes of semiconductor devices and the like.

[Prior Art] In a conventional photomask cleaning apparatus, the cleaning effect could be restored only by replacing cleaning parts that became contaminated through repeated cleaning with new cleaning parts.

[Problems to be Solved by the Invention] In the conventional technology, it is necessary to frequently replace cleaning parts, which significantly reduces the operating rate of the device, and in the period leading up to the replacement, cleaning parts that are highly contaminated are used for cleaning. The original function of the cleaning device was greatly degraded, such that the cleaning effect of the photomask that had been removed could not be expected.

[Means for Solving the Problems] The present invention has been made to solve the above problems, and is a method for cleaning contaminated cleaning parts regularly and easily to restore cleanliness. A cleaning jig having brushes or protrusions on its surface is reciprocated, and the present invention will be described in detail below based on examples.

[Example] Figures 1, 2, and 3 show examples of the present invention. In FIG. 1(a), 1 is a flat glass surface, and 6 is a portion where nylon brush-like protrusions are present. FIG. 3(C) is an enlarged view of part A in FIG. 3(b), where 5 is a glass plane and 6 is a nylon brush-like protrusion. The cleaning effects of the spherical protrusions shown in FIGS. 1 and 2 with various densities and sizes were investigated, and the results are as follows.

When cleaning was carried out by changing the diameter of the protrusion from 2 mm to 20 mm in 1 mm increments, all of them were effective in cleaning the parts to be cleaned. Also, the density is from 03 pieces/cm' to 2 pieces/cr
When cleaning was performed by changing the number of parts up to n' every 01 pieces/c rn', all of them were effective in cleaning the parts to be cleaned.

Furthermore, the height of the protrusion is Q from 01mm to 1mm, 1mm
When cleaning was performed with different cleaning methods, all of them were effective in cleaning the parts to be cleaned.

Next, the cleaning effects of the nylon brush-like protrusions shown in FIG. 3 on cleaning parts were investigated using various densities and shapes, and the results are as follows. When cleaning was performed by changing the diameter of the protrusion from 0.05 mm to 0.5 mm in 0.05 mm increments, all were effective in cleaning the cleaned parts. Furthermore, when cleaning was performed by changing the height of the protrusions from 0.5 mm to 2 mm in 0.1 mm increments, all cases were effective in cleaning the cleaned parts. Furthermore, the density of protrusions was increased to 25/c
1000 pieces from rn''/25 pieces from crn'/
When cleaning was performed by changing the temperature at crn' intervals, all of them were effective in cleaning the parts to be cleaned.

[Effects of the Invention] As described above, according to the present invention, parts for cleaning inside a cleaning device such as a photomask used in the manufacturing process of semiconductor devices can be cleaned without attaching any special equipment. It has the advantage that it can be done simply by using a mask-like jig with brushes and protrusions and hanging it on the cleaning device.

[Brief explanation of the drawing]

FIG. 1(a) is a front view of the mask-like cleaning jig of the present invention, FIG. 1(b) is a side view of the mask-like cleaning jig of the present invention, and FIG. ) is a front view of the mask-like cleaning jig of the present invention. FIG. 2(b) is a side view of the mask-like cleaning jig of the present invention, FIG. 3(a) is a front view of the mask-like cleaning jig of the present invention, and FIG. ) is a side view of the mask-like cleaning jig of the present invention, and FIG. 3(c) is an enlarged view of part A in the side view (b) of the mask-like cleaning jig of the present invention. 1 ・ ・ 2 ・ ・ 3 ・ ・ 4 ・ ・ 5 ・ 6 ・ ・ Flat glass protrusion Flat glass protrusion Flat glass Nylon brush or higher

Claims (1)

[Claims] The surface of the cleaning component is cleaned by reciprocating the surface of the cleaning component using a mask-like jig with brushes and protrusions attached to the cleaning component inside the cleaning device, such as a photomask used in the manufacturing process of semiconductor devices. A cleaning jig characterized by having a cleaning function.