JPH03154793A - Suction device utilizing compressed air - Google Patents

Abstract

PURPOSE:To change over the transfer of a small sized part and the removal of the dust sticking to the transferred part, etc. with a simple operation, by providing a shutter for opening and closing compressed air discharge port, and adding the function thereto as an air gun. CONSTITUTION:A compressed air passage 7 parted by a push button valve 8 is opened by the through hole 17 formed on the push button valve 8, when a compressed air discharge port 10 is closed by making a shutter 26 abut on an annular projection 25 and the push button valve 8 is pushed down by a finger, the air pressure 16 led from a compressed air leading port is jetted from a pad cylindrical part 14 by passing through an air intake path 15 and blows off the dust sticking to an object to be sucked, etc. Then, the pushdown of the push button valve 8 is released, the shutter 26 abuts on the annular projection 24 to open the compressed air discharge port 10 and the push button valve 8 is pushed down by a finger after bringing the pad cylindrical part 14 into contact with the object 31 to be sucked, then, the compressed air passage 7 is opened by the through hole 17 of this valve 8, jetting the air pressure 16 from the discharge port 10 and sticking the object to be sucked to the pad cylindrical part 14.

Description

[Detailed Description of the Invention] [Summary] Regarding a suction device that uses pressurized air to handle small parts such as electronic components, the purpose of this invention is to provide a suction device with a function of blowing away dust attached to the parts transported by the suction device. , a pad made of a rubber elastic body whose tip of the cylindrical part contacts the suction partner; a pressurized air inlet opening at a desired part of the grippable rod-shaped body; a pressurized air outlet opening at the side surface of the rod-shaped body; a pressure air passage that passes through the body and communicates with the pressure air inlet and the pressure air outlet; a valve that opens and closes the pressure air passage by external operation; one end that communicates with the pressure air passage near the pressure air outlet and the other end that communicates with the pressure air passage; The apparatus is characterized in that it includes an intake passage communicating with a cylindrical part of the pad provided at one end of the rod-like body, and a shutter for opening and closing the pressurized air outlet.

[Industrial application field]

The present invention relates to a suction device used for handling small parts such as wafers and electronic parts using pressurized air, and particularly to a device configuration having an air blow function for blowing away dust adhering to a suction target.

[Prior Art] One of the methods for holding small parts such as ICs and capacitors is to use a suction device that utilizes vacuum (reduced pressure). To create a vacuum (!$i pressure) for adsorption, methods are generally used to use a vacuum device, or to reduce the pressure inside the suction pan/nod using air pressure of several kg/cm. .

FIG. 4 is a side sectional view showing the configuration of a conventional adsorption device that uses pressurized air.

In FIG. 4, a suction device (air bottle set) l that can be held in hand has a micro ejector 2 connected to a main body 3 and a head 4.
It is a rod-shaped sandwiched between.

The main body 3 is provided with a base 6 having a pressure air introduction port 5 connected to a pressure air device, a pressure air passage 7 communicating with the pressure air introduction port 5 is formed, and a push button valve 8 opens and closes the pressure air passage 7 at an intermediate portion thereof.
is inserted. The push button valve 8 equipped with a coil spring 9 is
The intermediate part of the pressure air passage 7 is kept in a closed state when not in operation.

The micro ejector 2 is formed with a pressure air outlet 10 that opens on its side, and the exhaust port 10 communicates with the pressure air passage 7 of the main body 3 through a pressure air passage 11.
An intake passage 12 is communicated with 1.

The head 4 is provided with a rubber elastic pad 13 having a cylindrical portion 14 whose tip contacts the suction partner, and an air intake path 15 communicating with the cylindrical portion 14 and the air intake path 12 of the micro-ejector 2.
is formed.

In this suction device 1, when the push-button valve 8 is pressed down with a finger after bringing the tip of the cylindrical portion 14 into contact with an adsorption target (for example, an IC), the pressure air path 7 that has been separated by the push-button valve 8 is connected to the push-button valve 8. The pressurized air 16 opened through the formed through hole 17 and introduced from the pressurized air inlet 5 is injected from the pressurized air outlet 10, and the pressure inside the pad cylindrical part 14 is reduced by the injection, thereby reducing the pressure inside the pad cylindrical part 14. The adsorption partner will be adsorbed.

Next, when the press of the push button valve 8 is released, the pressure air path 7 is divided by the push button valve 8 and becomes closed, and the atmosphere flows into the pad cylindrical part 14 from the exhaust port 10, and the adsorption that had been adsorbed up to that point is Starts to push the other person away.

[Problem to be solved by the invention]

As described above, conventional suction devices that create a reduced pressure using pressurized air or that use a vacuum device to adsorb an adsorbed object also transport dust attached to the adsorbed object.

Especially in the wafer process, such dust causes inconveniences such as lowering product yield and damaging masks used in subsequent processes.
For example, I needed to prepare an air gun. The suction device is generally a small one called an air bottle set, and when it is used by holding it in the hand, the operator using the air gun has to switch hands between the suction device and the air gun. There was a problem that the transportation work became inefficient.

An object of the present invention is to eliminate the trouble of changing hands and to improve the efficiency of transporting small parts.

[Means to solve the problem]

According to FIG. 1, which shows an embodiment of the present invention, the above object is achieved by introducing pressurized air into a rubber elastic pad 13 whose tip end of a cylindrical part 14 contacts an adsorbed object, and into a desired part of a grippable rod-shaped body. a port 5, a pressurized air outlet 10 opening on the side surface of the rod-shaped body, pressurized air passages 7, 11 passing through the rod-shaped body and communicating with the pressurized air inlet 5 and the pressurized air outlet 10, and connecting the pressurized air passage 7 to the outside. Pulp 8 that opens and closes by operation
and a cylindrical portion 14 of the pad 13, one end of which communicates with the pressure air path 11 near the pressure air outlet 10, and the other end of which is provided at one end of the rod-shaped body.
The problem is solved by an adsorption device 21 characterized in that it includes an intake passage 12,15 communicating with the air outlet 12, and a shutter 26 for opening and closing the pressurized air outlet 10.

[Effect]

According to the above means, the suction device can be used as an air gun by sliding the shutter. Such a suction device can be turned into an air gun by simple operation.
It can be used for both transporting small parts and removing dust attached to the transported parts.

This eliminates the need for an air gun that was required when using a conventional suction device that only had a suction function, and it becomes possible to easily and quickly switch between conveyance work and dust removal work.

〔Example〕

Below, an adsorption device according to an embodiment of the present invention will be explained using the drawings.

Fig. 1 is a sectional view showing the main structure of an adsorption device according to an embodiment of the present invention, Fig. 2 is an explanatory diagram when the device shown in Fig. 1 is used as an air gun, and Fig. 3 is the same as shown in Fig. 1. It is an explanatory view when the device is used as air tweezers.

In FIG. 1, in which the same reference numerals are used for parts common to those in the previous figure, a suction device 21 that can be held like a fountain pen has a rod shape in which a micro ejector 2 is sandwiched between a main body 22 and a head 23.

The main body 22 is provided with a base 6 having a pressure air introduction port 5 connected to a pressure air device, a pressure air passage 7 communicating with the introduction port 5 is formed, and a push button valve 8 for opening and closing the pressure air passage 7 is inserted at an intermediate portion thereof. will be established. The push-button valve 8 equipped with a coil spring 9 closes the intermediate portion of the pressure air passage 7 when not operated.

The micro ejector 2 is formed with a pressure air exhaust port 10 that opens on the side thereof, and the exhaust port 1o communicates with the pressure air path 11 near the pressure air path 11 and the air intake path 12.

The head 23 is provided with a rubber elastic pad 13 having a cylindrical portion 14 whose tip contacts the suction partner, and an air intake path 1 that communicates with the cylindrical portion 14 and the air intake path 12 of the micro ejector 2.
5 is formed.

The cylindrical shutter 26 can be slid in the left-right direction between the annular projection 24 provided on the main body 22 and the annular projection 25 provided on the head 23, and when the shutter 26 comes into contact with the annular projection 24, the exhaust air is removed. The mouth 10 opens, and when the shutter 26 comes into contact with the annular projection 25, the exhaust port 10 closes. As shown in FIGS. 2 and 3, a ball 29 biased by a coil spring 28 is inserted into the recess 27 of the main body 22, and a part of the ball 29 is fitted into the inner cylindrical surface of the shutter 26. It has a pair of recesses 30 that fit together.

Such an adsorption device 21 has a shutter 2 as shown in FIG.
6 is brought into contact with the annular protrusion 25 to close the pressure air outlet 10, and when the push-button valve 8 is pressed down with a finger, the pressure air path 7 that was separated by the push-button valve 8 is closed by the through-hole 17 formed in the push-button valve 8. Opening, pressure air introduction port 5
The more pressurized air 16 passes through the intake passage 15 and is injected from the pad cylindrical portion 14, thereby making it possible to blow away dust adhering to the adsorbed object.

Next, the pressure on the pusher valve 8 was released, and the shutter 26 was brought into contact with the annular protrusion 24 as shown in FIG. Afterwards, when the push button valve 8 is pressed down with a finger, the pressure air passage 7 that was separated by the push button valve 8 is opened by the through hole 17 formed in the push button valve 8, and the pressurized air 16 is injected from the exhaust port IO. As a result, the pressure inside the pad cylindrical portion 14 is reduced, and as a result, the adsorption partner comes to be adsorbed onto the pad cylindrical portion 14 .

Next, when the press of the push button valve 8 is released, the pressure air path 7 is divided by the push button valve 8 and becomes closed, and the atmosphere flows into the pad cylindrical part 14 from the exhaust port 10, and the adsorption that had been adsorbed up to that point is You will start to let go of your opponent 31.

〔Effect of the invention〕

As explained above, the suction device according to the present invention has the function of an air gun in addition to the conventional function of suction, and can transport small parts and remove dust attached to the transported parts using the shutter with the tip of a finger. You can switch between them by simply sliding the button.

Therefore, the inconvenience of switching to an air gun in the conventional suction device is eliminated, and the effect of increasing the efficiency of suction/transfer work of small parts and dust removal work is greatly improved.

[Brief explanation of the drawing]

FIG. 1 is a main configuration diagram of an adsorption device according to an embodiment of the present invention, FIG. 2 is an explanatory diagram when the device shown in FIG. 1 is used as an air gun, and FIG. 3 is an illustration of the device shown in FIG. An explanatory diagram when used as tweezers. Figure 4 is a main configuration diagram of a conventional adsorption device that uses pressurized air. In the figure, 5 is a pressure air inlet, 7.11 is a pressure air path, 8 is a push button valve, 10 is a pressure air outlet, 12 and 15 are intake paths, 13 is a rubber elastic pad, and 14 is a cylindrical part of the pad. , 21 is an adsorption device using pressurized air, and 26 is a shutter 31 as an adsorption partner. 83 Figure 1 Figure 3 Figure 10 Figure 1 Explanatory diagram of how the device is used with an air gun Figure 2 The origin of the princess m of PE Qi and use of T two nights Figure 4

Claims (1)

[Claims] A rubber elastic pad (13) whose tip of the cylindrical part (14) contacts the suction partner (31), and a pressurized air introduction port (5) that opens at a desired part of the grippable rod-shaped body.
a pressurized air outlet (10) opening on the side surface of the rod-shaped body; and a pressurized air inlet (5) and a pressurized air outlet (10) passing through the rod-shaped body.
a pressure air path (7, 11) communicating with the pressure air path (7, 11), a valve (8) for opening and closing the pressure air path (7) by external operation; )
The pad (
The intake passage (12, 15) communicates with the cylindrical part (14) of
); and a shutter (26) for opening and closing the pressurized air outlet (10).