JPH0315295B2 - - Google Patents
Info
- Publication number
- JPH0315295B2 JPH0315295B2 JP56057296A JP5729681A JPH0315295B2 JP H0315295 B2 JPH0315295 B2 JP H0315295B2 JP 56057296 A JP56057296 A JP 56057296A JP 5729681 A JP5729681 A JP 5729681A JP H0315295 B2 JPH0315295 B2 JP H0315295B2
- Authority
- JP
- Japan
- Prior art keywords
- current
- gun
- emission
- field emission
- chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 8
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 230000003750 conditioning effect Effects 0.000 claims 3
- 238000005259 measurement Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 238000009736 wetting Methods 0.000 description 2
- 239000010406 cathode material Substances 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000009291 secondary effect Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56057296A JPS57180864A (en) | 1981-04-17 | 1981-04-17 | Beam controller in field discharge type gun unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56057296A JPS57180864A (en) | 1981-04-17 | 1981-04-17 | Beam controller in field discharge type gun unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57180864A JPS57180864A (en) | 1982-11-08 |
| JPH0315295B2 true JPH0315295B2 (fr) | 1991-02-28 |
Family
ID=13051583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56057296A Granted JPS57180864A (en) | 1981-04-17 | 1981-04-17 | Beam controller in field discharge type gun unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57180864A (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009187684A (ja) * | 2008-02-02 | 2009-08-20 | Stanley Electric Co Ltd | 電界放射型電子源の電子流制御方法 |
-
1981
- 1981-04-17 JP JP56057296A patent/JPS57180864A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57180864A (en) | 1982-11-08 |
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